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USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Fire Safety ComplianceFire Safety ComplianceWhy Are My CO2 Systems Not S2 Compliant?Why Are My CO2 Systems Not S2 Compliant?
ForFor
2010 SESHA NTC2010 SESHA NTC
By By
Matt Wyman, Managing DirectorMatt Wyman, Managing Director
KFPI Inc.KFPI Inc.September 23, 2010September 23, 2010
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
OverviewOverview
1.1. SEMI S2SEMI S2
2.2. Fire Safety RequirementsFire Safety Requirements
1.1. SEMI S2 Chapter 14SEMI S2 Chapter 14
3.3. Non Compliance FindingsNon Compliance Findings
4.4. Cause Cause
5.5. SolutionSolution
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
KFPI ServicesKFPI Services�� Equipment Fire Protection SystemsEquipment Fire Protection Systems
�� Carbon Dioxide (CO2)Carbon Dioxide (CO2)
�� Fine Water Spray (FWS)Fine Water Spray (FWS)
�� Aspirating Smoke Detection (ASD)Aspirating Smoke Detection (ASD)
�� Flame Detection (Multi IR)Flame Detection (Multi IR)
�� ConsultingConsulting�� Risk Engineering Analysis & ConsultingRisk Engineering Analysis & Consulting
�� Equipment Safety ComplianceEquipment Safety Compliance�� Compliance Audits & TestingCompliance Audits & Testing
�� TrainingTraining
�� IR IR ThermographyThermography�� Thermal ScansThermal Scans�� ReportsReports
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
KFPI LeadershipKFPI Leadership
�� SEMISEMI©© Standards Fire Protection Task ForceStandards Fire Protection Task Force�� Chairman (Past & Present)Chairman (Past & Present)
�� NFPA 318 Clean Room Fire Protection Committee NFPA 318 Clean Room Fire Protection Committee �� Chairman (Past)Chairman (Past)
�� Factory Mutual (FM Global) Semiconductor SpecialistFactory Mutual (FM Global) Semiconductor Specialist�� (Past)(Past)
�� Factory Mutual Research Board (FMRC)Factory Mutual Research Board (FMRC)�� Advisory Board Member (Past)Advisory Board Member (Past)
�� Expert Witness on International Fire Loss LitigationsExpert Witness on International Fire Loss Litigations�� Published Numerous Papers in Industry MagazinesPublished Numerous Papers in Industry Magazines
�� Presented Numerous Papers in Industry VenuesPresented Numerous Papers in Industry Venues
�� Global Training SeminarsGlobal Training Seminars�� Fabricators, Insurance, & 3Fabricators, Insurance, & 3rdrd Party ConsultantsParty Consultants
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
SEMI S2 ComplianceSEMI S2 Compliance
�� Environmental, Health, & Safety Guideline for Environmental, Health, & Safety Guideline for Semiconductor Manufacturing EquipmentSemiconductor Manufacturing Equipment
�� Required by Fabricators WorldwideRequired by Fabricators Worldwide
�� Categories Include:Categories Include:
Hazard Warning Labels
Safety Interlock Systems
Emergency Shutdown
Electrical Design
Fire Protection
Heated Chemical Baths
Ergonomics and Human Factors
Hazardous Energy Isolation
Mechanical Design
Seismic Protection
Automated Material Handlers
Environmental Considerations
Exhaust Ventilation
Chemicals
Ionizing Radiation
Non-Ionizing Radiation and Fields
Lasers
Sound Pressure Level
Fire ProtectionFire Protection
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Safety LabelsSafety Labels
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Electrical SafetyElectrical Safety
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Chemical SafetyChemical Safety
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Hazardous EnergyHazardous Energy
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
ErgonomicsErgonomics
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
RadiationRadiation
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
LaserLaser
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Environmental SafetyEnvironmental Safety
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Emergency ShutdownEmergency Shutdown
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Fire ProtectionFire Protection
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Fire CodesFire Codes
�� International Fire Code (IFC)International Fire Code (IFC)�� Combustibles or Flammables >4ft. WideCombustibles or Flammables >4ft. Wide
�� Sprinkler Head Inside or Gaseous Fire SuppressionSprinkler Head Inside or Gaseous Fire Suppression
�� FM DS 7FM DS 7--77 ““Semiconductor Fabrication FacilitiesSemiconductor Fabrication Facilities””�� Equipment Protection Design CriteriaEquipment Protection Design Criteria�� CO2 & FWSCO2 & FWS�� 13kW Fire Detection13kW Fire Detection
�� NFPA 12NFPA 12 ““Carbon DioxideCarbon Dioxide”” (FM4(FM4--11N)11N)�� NFPA 750NFPA 750 ““Fine Water SprayFine Water Spray””�� NFPA 318NFPA 318 ““Protection of Semiconductor Fabrication FacilitiesProtection of Semiconductor Fabrication Facilities””�� SEMI S14SEMI S14 ““Safety Guidelines for Fire Risk Assessment & Safety Guidelines for Fire Risk Assessment &
Mitigation for Semiconductor Manufacturing EquipmentMitigation for Semiconductor Manufacturing Equipment””�� SEMI S2SEMI S2 ““Environmental, Health, & Safety Guideline for Environmental, Health, & Safety Guideline for
Semiconductor Manufacturing EquipmentSemiconductor Manufacturing Equipment””�� Chapter 14 Chapter 14 ““Fire ProtectionFire Protection””
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
S2 ComplianceS2 Compliance
�� Section 14.4.4 Fire Detection, Alarm , & ControlsSection 14.4.4 Fire Detection, Alarm , & Controls
�� 14.4.4.1&2 All detectors, alarms, and 14.4.4.1&2 All detectors, alarms, and controlscontrols be accepted and listed by an be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordaccredited laboratory (example UL or FM) and installed in accordance with ance with the terms of that acceptance and appropriate national or internathe terms of that acceptance and appropriate national or international tional standards (example NFPA 72). standards (example NFPA 72).
�� 14.4.4.3 Capable of interfacing with facility14.4.4.3 Capable of interfacing with facility’’s alarm systems alarm system�� 14.4.4.4 Activate alarms audibly and visually at equipment14.4.4.4 Activate alarms audibly and visually at equipment
�� Note 58 Should be identifiable & distinguishable from other alarNote 58 Should be identifiable & distinguishable from other alarmsms
�� 14.4.4.5 Manual activation should be considered14.4.4.5 Manual activation should be considered�� 14.4.4.6 A supervisory/trouble condition should notify operator,14.4.4.6 A supervisory/trouble condition should notify operator, allow allow
completion of existing processing, but prevent additional procescompletion of existing processing, but prevent additional processing until sing until condition is cleared.condition is cleared.
�� 14.4.4.7&8 Capable of operation at all times with 24hr backup ba14.4.4.7&8 Capable of operation at all times with 24hr backup batteriestteries�� 14.4.4.11 Shut down the equipment upon alarm condition (EMO)14.4.4.11 Shut down the equipment upon alarm condition (EMO)�� 14.4.4.12 Capable of being certified by licensed parties14.4.4.12 Capable of being certified by licensed parties
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
S2 ComplianceS2 Compliance�� Section 14.4.5 Fire SuppressionSection 14.4.5 Fire Suppression
�� 14.4.5.1 14.4.5.1 The fire suppression system, which includes nozzles, actuators, and their associated controls, should be certified by an accredited testing laboratory (e.g., UL or
FM) and suitable for the application and for the environment in which it to be used.
� 14.4.5.2&3 The fire suppression agent and delivery system should be designed and installed in accordance with the appropriate international or national standard (e.g., NFPA 12).
�� 14.4.5.5 Activate alarms audibly and visually at equipment14.4.5.5 Activate alarms audibly and visually at equipment�� Note 64 Should be identifiable & distinguishable from other alarNote 64 Should be identifiable & distinguishable from other alarmsms
�� 14.4.5.10 Allowance can be made to disable system when in mainte14.4.5.10 Allowance can be made to disable system when in maintenance mode if nance mode if supervised.supervised.
�� 14.4.5.11 Capable of operation at all times with 24hr backup bat14.4.5.11 Capable of operation at all times with 24hr backup batteriesteries
�� 14.4.5.12 Capable of interfacing with facility14.4.5.12 Capable of interfacing with facility’’s alarm systems alarm system�� 14.4.5.13 Shut down the equipment upon alarm condition (EMO)14.4.5.13 Shut down the equipment upon alarm condition (EMO)
�� 14.4.5.14 Manual activation should be provided14.4.5.14 Manual activation should be provided
�� 14.4.5.15 Should be discharge tested on represented sample of eq14.4.5.15 Should be discharge tested on represented sample of equipmentuipment�� 14.4.5.16 Control access to the suppression agent source.14.4.5.16 Control access to the suppression agent source.
�� 14.4.5.17 Capable of being certified by licensed parties14.4.5.17 Capable of being certified by licensed parties
�� 15.4.5.19 Piping should be designed, installed, and tested to en15.4.5.19 Piping should be designed, installed, and tested to ensure it is capable of sure it is capable of withstanding discharge pressures.withstanding discharge pressures.
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
CO2 Hazard DesignCO2 Hazard Design
�� Total Flood (TF) DesignTotal Flood (TF) Design�� Fully Enclosed CompartmentsFully Enclosed Compartments�� Criteria = Criteria = 50% CO2 Concentration50% CO2 Concentration
�� Time Limit = Time Limit = 60 Seconds60 Seconds�� Compensate for Compensate for
�� Exhaust VentilationExhaust Ventilation�� UncloseableUncloseable OpeningsOpenings
�� Local Application (LA) DesignLocal Application (LA) Design�� Open CompartmentsOpen Compartments
�� Example = Working SurfaceExample = Working Surface
�� Criteria = Criteria = Minimum Flow RateMinimum Flow Rate
�� Time Limit = Time Limit = Minimum 30 SecondMinimum 30 Second
�� Compensate forCompensate for�� Missing WallsMissing Walls�� Not for ExhaustNot for Exhaust
�� Combination DesignCombination Design�� Both TF & LABoth TF & LA
0
10
20
30
40
50
60
0 15 30 45 60
Minimum
Not Protected
Protected
CO2 Concentration Levels
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
NonNon--Compliance FindingsCompliance Findings
�� All found on existing CO2 SystemsAll found on existing CO2 Systems
�� 33rdrd Party ReviewsParty Reviews
�� Site AuditsSite Audits
�� Design ReviewsDesign Reviews
�� Incident InvestigationsIncident Investigations
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Inadequate DesignsInadequate Designs
�� Total Flood (TF) HazardTotal Flood (TF) Hazard
�� Exhaust CompensationExhaust Compensation
�� Not Included (or Damper)Not Included (or Damper)
�� Exhaust Not DistributedExhaust Not Distributed
�� UncloseableUncloseable Opening LeakageOpening Leakage
�� Wrong Flooding FactorsWrong Flooding Factors
�� Local Application (LA) HazardLocal Application (LA) Hazard
�� Assumed Volume CalculationsAssumed Volume Calculations
�� % Perimeter Closed% Perimeter Closed
�� 6060--sec Discharge Durationsec Discharge Duration
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Assumed Volume (LA)Assumed Volume (LA)
Local
Application
Headcase Headcase
Working Surface
Plenum
Front View
Pumps/Heaters
ProcessTank
Side View
Total
Flood
Total
Flood
None
Actual
Volume
Assumed
Volume
4.0ft.
Minimum
Height
Add
2.0ft.
Open
Sides
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Assumed Volume (LA)Assumed Volume (LA)
4.0ft.Minimum
Height
Assumed
Volume
Actual
Volume
Example:
IPA DRYER
LA Design
Add 2.0ft.
To Each Side
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
CO2 NozzlesCO2 Nozzles�� LA NozzlesLA Nozzles
�� All have All have ““conecone”” to absorb to absorb discharge pressuredischarge pressure
�� Reflected discharge from orifice Reflected discharge from orifice
�� Less exit velocity (same flow rate)Less exit velocity (same flow rate)
�� Nozzle absorbs most 600psi Nozzle absorbs most 600psi discharge pressuredischarge pressure
�� TF NozzlesTF Nozzles
�� ““VV”” Nozzle is Nozzle is ““VentVent”” nozzle (TF)nozzle (TF)
�� Straight discharge from orificeStraight discharge from orifice
�� Full effects of ~600psi discharge Full effects of ~600psi discharge pressure on tool (especially baths)pressure on tool (especially baths)
�� Much higher velocityMuch higher velocity
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
�� TF Nozzles Used in LA HazardsTF Nozzles Used in LA Hazards
�� AnsulAnsul & & HatsutaHatsuta�� FM Approved LA Nozzles for Wet FM Approved LA Nozzles for Wet
BenchBench
�� Stainless Steel (SS) & Stainless Steel (SS) & HalarHalar CoatedCoated
�� Kidde & Others (Kidde & Others (FenwalFenwal, , FikeFike))�� No FM Approval for Wet BenchNo FM Approval for Wet Bench
�� No SS or No SS or HalarHalar Coated ModelsCoated Models
�� Painted Steel/Brass/Chrome Not Painted Steel/Brass/Chrome Not Compatible with Wet ProcessingCompatible with Wet Processing
�� LA Nozzles Installed Heights LA Nozzles Installed Heights Above Coverage ChartAbove Coverage Chart�� All LA Nozzles Have Coverage ChartAll LA Nozzles Have Coverage Chart
Nozzle IssuesNozzle Issues
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Hydraulic CalculationsHydraulic Calculations
�� UL/FM Approved Calc SoftwareUL/FM Approved Calc Software�� Based Upon Liquid Discharge TimeBased Upon Liquid Discharge Time
�� Increase Capacity Increase Capacity ≠≠ Increase ConcentrationIncrease Concentration�� More Agent More Agent ≠≠ Adequate DesignAdequate Design�� Extends Discharge DurationExtends Discharge Duration
�� Inadequate Hydraulic CalculationsInadequate Hydraulic Calculations�� Supply Supply ≠≠ DemandDemand�� Discharge Duration > DemandDischarge Duration > Demand�� Manufacturer SpecificManufacturer Specific�� CO2 Distribution CO2 Distribution ≠≠ InstallationInstallation
�� See ExampleSee Example0
10
20
30
40
50
60
0 15 30 45 60
Minimum
Not Protected
Protect ed
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Hydraulic Hydraulic CalcsCalcs
�� Sample Hydraulic Calc Report (Pipe & Tubing)Sample Hydraulic Calc Report (Pipe & Tubing)
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Hydraulic CalculationsHydraulic Calculations
11
13.2 lbs.13.2 lbs.
Hazard 3Hazard 3
TFTF
2 cylinders2 cylinders2244# Nozzles# Nozzles
200 lbs.200 lbs.84.2 lbs84.2 lbs64.8 lbs64.8 lbsCO2 DemandCO2 Demand
CO2CO2
SupplySupply
Hazard 2Hazard 2
TFTF
Hazard 1Hazard 1
LALA
WET WET
BENCHBENCH
H1 = 20.5lbs/42.6sec x 30sec H1 = 20.5lbs/42.6sec x 30sec = 14.44 x 4 nozzles= 14.44 x 4 nozzles
= = 57.8 lbs57.8 lbsH2 = 51.0lbs/42.7sec x 30secH2 = 51.0lbs/42.7sec x 30sec
= 35.8 x 2 nozzles= 35.8 x 2 nozzles
= = 71.6 lbs71.6 lbsH3 H3 = 16lbs/42.6sec x 30sec = = 16lbs/42.6sec x 30sec =
11.2 lbs x 1 nozzle11.2 lbs x 1 nozzle= = 11.2 lbs11.2 lbs
�� This hydraulic This hydraulic calc is inadequatecalc is inadequate�� End of Report is Nozzle SummaryEnd of Report is Nozzle Summary
�� Must Verify Supply = DemandMust Verify Supply = Demand
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
CO2 DistributionCO2 Distribution
� High Pressure CO2 Cylinders� Stored Pressure = 750psi� Nozzle Pressure = ~350psi – 650psi
� Must have internal pressure rating of 3,000 psi� Must have internal burst pressure rating of 5,000 psi� SS Piping is Allowed by Fire Code (NFPA 12 – Section 4.7)
� Pipe ≤ ¾ in. = Schedule 40� Pipe ≥ 1 in. = Schedule 80 with Extra Heavy Fittings
� Recommend SS Tubing (316) with SS Compression Fittings� Minimum Wall Thickness� Cleanliness & Contamination
� Questions?� How Do You Verify Integrity?� CO2 Discharge?
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
CO2 Distribution IssuesCO2 Distribution Issues� Compression Fittings Not
Installed Correctly
� Compression Fittings Installed on Pipe vs. Tube� ¾” Fitting on ½” Pipe
� Calculated with Pipe installed with Tubing� ½” Pipe ID > ½” Tube ID
� ½” Pipe ID ≠ 5/8” Tube ID
� Friction Coefficient Not Equal
� 1.0”+ Pipe Installed with Schedule 40 Fittings
� Improper Tubing Thickness
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Exhaust DampersExhaust Dampers
� Exhaust Damper Not Allowed
� NFPA 318 Section 5.3.5
� SEMI S2 Exhaust/Chemical Safety
� Solvent Fumes (LEL)
� Corrosive Fumes
� FM DS 7-7 Section 2.5.15.1.2
� Exhaust Ventilation Reduces Smoke Damage
� Exhaust Volume >> Compartment Volume
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Flame (Optical) DetectorsFlame (Optical) Detectors
�� Semiconductor IndustrySemiconductor Industry�� 4 Flame Detectors FM Approved for Use on Wet 4 Flame Detectors FM Approved for Use on Wet
BenchesBenches�� Sierra DCR1 (UV/IR)Sierra DCR1 (UV/IR)
�� DetDet--TronicsTronics PMPM--5MPX (IR)5MPX (IR)
�� Fire Sentry FS7 (IR)Fire Sentry FS7 (IR)
�� HatsutaHatsuta SXSX--7000 (IR)7000 (IR)
�� Field Of View (FOV)Field Of View (FOV)�� Coverage Affected by Physical ObstructionsCoverage Affected by Physical Obstructions
�� Coverage Affected by Detector RangeCoverage Affected by Detector Range
120º FOV
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Flame Detector IssuesFlame Detector Issues
�� Compliance Issues:Compliance Issues:
�� FOV ObstructedFOV Obstructed
�� Spacing > 13kWSpacing > 13kW
�� 88”” PP FirePP Fire
�� 44”” IPA FireIPA Fire
�� Chemical CompatibilityChemical Compatibility
�� UV UV ≠≠ HFHF
�� Quartz WindowQuartz Window
�� Match Detector with FuelMatch Detector with Fuel
ObstructedView
DetectionArea
Detector
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Lockout ValvesLockout Valves�� Lockout Valves Lockout Valves (NFPA 12 2005)(NFPA 12 2005)
�� Required Required exceptexcept where personnel canwhere personnel can’’t enter space (4.3.3.6)t enter space (4.3.3.6)
�� Where CO2 can migrate to expose personnel (4.3.3.6.1)Where CO2 can migrate to expose personnel (4.3.3.6.1)
�� System should System should ““LockoutLockout”” during maintenance or testing during maintenance or testing
(4.3.3.6.3)(4.3.3.6.3)
�� ““LockoutLockout”” Valve must be supervisedValve must be supervised
�� Lockout Valve Typically Not RequiredLockout Valve Typically Not Required
�� If a Lockout Valve is Installed thenIf a Lockout Valve is Installed then……..
�� Pressure Switch installed between Supply and Lockout Valves Pressure Switch installed between Supply and Lockout Valves
(4.5.4.11)(4.5.4.11)
�� A Pressure Relief Valve is Required (4.7.2.4)A Pressure Relief Valve is Required (4.7.2.4)
�� Operate 2400Operate 2400--3000psi3000psi
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
�� Disable/ByDisable/By--Pass Switch Pass Switch (Required but Not Installed)(Required but Not Installed)
�� Electrically operated systems should have service disconnect swiElectrically operated systems should have service disconnect switch tch (NFPA 12 (NFPA 12 –– Section 4.3.3.7)Section 4.3.3.7)
�� Switch must be supervised (by panel)Switch must be supervised (by panel)
�� Electrical Lockout of DischargeElectrical Lockout of Discharge
�� Tool Maintenance or System Testing/InspectionTool Maintenance or System Testing/Inspection
Key Switch – “Lockout”Key Switch – “Normal”
Disable SwitchDisable Switch
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Personnel Device IssuesPersonnel Device Issues
�� Horn/StrobeHorn/Strobe�� Not ADA/NFPA Mounting HeightsNot ADA/NFPA Mounting Heights
�� 8080--9696”” AFFAFF
�� Adequate Notification for Personnel?Adequate Notification for Personnel?�� All 4 Sides of Tool?All 4 Sides of Tool?�� Bay/Chase or Bay/Chase or Fab/SubfabFab/Subfab
�� Manual ReleaseManual Release�� Not ADA/NFPA Mounting HeightsNot ADA/NFPA Mounting Heights
�� 4848--5252”” AFFAFF�� Mounted Above Fire HazardMounted Above Fire Hazard
�� Adequate Travel Distance?Adequate Travel Distance?�� Bay/Chase or Bay/Chase or Fab/SubfabFab/Subfab
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Wiring Installation IssuesWiring Installation Issues
�� All Fire Alarm Inputs & Outputs are SupervisedAll Fire Alarm Inputs & Outputs are Supervised
�� EOL Resistors @ Panel (Not EOL)EOL Resistors @ Panel (Not EOL)
�� FaultFault Relays Not SupervisedRelays Not Supervised
�� Flame DetectorsFlame Detectors
�� Aspirating Smoke DetectorsAspirating Smoke Detectors
�� Cables Not ProtectedCables Not Protected
�� NEC / NFPANEC / NFPA
�� Wire Gauge Too SmallWire Gauge Too Small
�� NEC / NFPANEC / NFPA
EOL
Resistor
Panel
Input
EOL
Resistor
Alarm
Fault
Detector
Panel
Input
Device
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Laser Smoke DetectorLaser Smoke Detector
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Inadequate Battery Inadequate Battery CalcsCalcs
�� Result is < 24hr. Standby & 5min AlarmResult is < 24hr. Standby & 5min Alarm
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Chemical Compatibility IssuesChemical Compatibility Issues�� CO2 Components Must Be Chemically CompatibleCO2 Components Must Be Chemically Compatible
�� Nozzles & DetectorsNozzles & Detectors
�� Combustible Plastic BenchesCombustible Plastic Benches
�� CorrosivesCorrosives
�� Single Wafer Processing ToolsSingle Wafer Processing Tools
�� Solvents & CorrosivesSolvents & Corrosives
�� Nozzles, Tubing, & FittingsNozzles, Tubing, & Fittings
�� Must be Coated & SealedMust be Coated & Sealed
�� DetectorsDetectors
�� Must be Compatible with CorrosivesMust be Compatible with Corrosives
�� HF & Quartz are Not CompatibleHF & Quartz are Not Compatible
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Safety Label IssuesSafety Label Issues
�� No CO2 Safety LabelsNo CO2 Safety Labels
�� LabelsLabels must meet ANSI Z535must meet ANSI Z535
�� Orange Orange ““WarningWarning”” ColorColor
�� ““WarningWarning”” Triangle SymbolTriangle Symbol
�� Aspiration SymbolAspiration Symbol
�� Outside Protected SpaceOutside Protected Space
�� At Manual ActivationAt Manual Activation
�� SEMI S1 CompliantSEMI S1 Compliant
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Kidde Issues Kidde Issues
�� Kidde Kidde ““VV”” ((VVent or ent or VVelocity) Nozzle is TF Nozzleelocity) Nozzle is TF Nozzle
�� Kidde Only Manufactured Kidde Only Manufactured ““VV”” Nozzle in Nozzle in BrassBrass�� June 2005June 2005 Kidde Released Stainless Steel Kidde Released Stainless Steel ““VV”” NozzleNozzle
FM Approval
Guide
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
Imitation (Copy) Imitation (Copy) ““VV”” NozzlesNozzles
�� Result was Result was ImitationImitation Kidde Kidde ““VV”” Nozzles Supplied to Nozzles Supplied to Industry prior to 2005.Industry prior to 2005.
�� These same These same ImitationImitation Nozzles Are Still Being Used Nozzles Are Still Being Used TodayToday
No Threads
USA VERSION
No Strainer
Installed
Backwards
TAIWAN VERSIONREAL KIDDE
�� Result is S2 NonResult is S2 Non--ComplianceCompliance�� Nozzle CO2 System ToolNozzle CO2 System Tool
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
CauseCause�� Why Has This Happened?Why Has This Happened?�� Fire Protection has NOT Been Reviewed as Part of SEMI S2 Fire Protection has NOT Been Reviewed as Part of SEMI S2
Report.Report.�� Fire Protection has NOT Been Reviewed by Site Safety Fire Protection has NOT Been Reviewed by Site Safety
Personnel (Product Safety).Personnel (Product Safety).�� Majority of Equipment CO2 Systems are NOT Reviewed by Fire Majority of Equipment CO2 Systems are NOT Reviewed by Fire
Department or Insurance.Department or Insurance.�� 99% EHS Professionals Come from EHS, IH, 99% EHS Professionals Come from EHS, IH, ErgonmicsErgonmics, etc. , etc.
BackgroundBackground�� No Fire Protection Engineering or Fire Safety Background No Fire Protection Engineering or Fire Safety Background
�� Fire Protection is a Professional Engineering DisciplineFire Protection is a Professional Engineering Discipline�� Must have 3Must have 3rdrd Party Approval & Certification for ComplianceParty Approval & Certification for Compliance
�� CO2 & FWS Specialized Fire Suppression ApplicationCO2 & FWS Specialized Fire Suppression Application�� Not Used by Majority of Fire ContractorsNot Used by Majority of Fire Contractors
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Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
SolutionSolution
�� What is the Solution?What is the Solution?�� Verify SEMI S2 Reports Include Fire ProtectionVerify SEMI S2 Reports Include Fire Protection�� Verify SEMI S2 Reports are Completed by Qualified PersonnelVerify SEMI S2 Reports are Completed by Qualified Personnel�� Require Copies of Fire Design Package DocumentationRequire Copies of Fire Design Package Documentation
�� OEM, 3OEM, 3rdrd Party, Fire ContractorParty, Fire Contractor
�� Have Safety Personnel to Review Design & Reports Have Safety Personnel to Review Design & Reports �� Property Insurance CarrierProperty Insurance Carrier�� Equipment Safety Personnel for Fire Safety ComplianceEquipment Safety Personnel for Fire Safety Compliance
�� Verify Insurance Agent Qualified to Review CO2/FWS SystemsVerify Insurance Agent Qualified to Review CO2/FWS Systems�� Provide Training Corporate Level or at Site LevelProvide Training Corporate Level or at Site Level
USATAIWANJAPANCHINA
Copyright © 2010 KFPI Inc., All Rights Reserved SESHA 2010
QuestionsQuestions
�� Fire Protection Is Not Needed OftenFire Protection Is Not Needed Often……………………....
But When It IsBut When It Is……………………It Has To Work!It Has To Work!
�� It Also Must Be ReliableIt Also Must Be Reliable………………....
To Prevent Damage & Downtime!To Prevent Damage & Downtime!
Matt Wyman, Managing DirectorMatt Wyman, Managing DirectorAdvanced Technologies DivisionAdvanced Technologies DivisionSemiconductor, TFTSemiconductor, TFT--LCD, & PVLCD, & PV
KFPI INC.KFPI INC.KoetterKoetter Fire Protection International Inc.Fire Protection International Inc.
USA USA –– TAIWAN TAIWAN –– JAPAN JAPAN -- CHINACHINA(1) 972.333.4965 (1) 972.333.4965 –– [email protected]@kfpiinc.com
www.kfpiinc.comwww.kfpiinc.com