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107 Hisada et al.: FEM Analysis on Mechanical Stress of 2.5D Package Interposers (1/8) 1. Introduction Higher integration of functionality of the semiconductor device is getting more important to fully utilize high per- formance of advanced semiconductor technology. One approach is integration on one chip which is called system- on-chip (SoC). SoC has a challenge of manufacturing yield due to large chip size when a substantial amount of mem- ory is integrated on die. SoC also requires a longer and more complex fab processing to include the specific fea- tures required for memory integration. Another approach of integration is 3D chip stack using through-silicon-vias (TSV). Typical configuration of 3D package is multiple memory chips, a logic chip and an organic substrate stacked from the top. Wiring to the top memory chip comes from substrate via micro joints and TSV of both logic and memory chips.[1, 2] One of the challenges of 3D chip stack is exactly matched TSV layout between logic and memory chips that requires concurrent physical lay- out design of electrode terminals. Recently JEDEC pub- lished a standard of micro bump layout for wide I/O mem- or y to address the above issue.[3, 4] As TSV technology evolves, an intermediate configura- tion between SoC and 3D package has emerged, which is called 2.5D package. 2.5D package utilizes Si interposer with TSV and wiring layers built by re-distribution layer (RDL) technique, and multiple chips are mounted side by side on the interposer.[1, 2, 5–9] There are several advan- tages of 2.5D package against SoC or 3D package as fol- lows: – Ease of use of conventional separate chips from chip design point of view. – Efficiency of active area on each chip because of no keep out area for TSV. – Efficiency of wiring layers on each chip as the global wiring is built on the Si interposer. – Efficiency of heat dissipation using thermal lid as com- pared to 3D stack. Si has been most widely evaluated as an interposer material, but alternative materials such as glass[10–12] or organic are also proposed for interposer. The authors stud- ied feasible package configuration based on currently applicable design rule for conventional multi-chip-module (MCM) FCPBGA and interposer FCPBGA with three dif- ferent interposer materials of Si, glass, and organic assum- ing a logic chip and a memory chip mounted on the inter- poser. We investigated thermo-mechanical behavior of the micro joints at chip-to-interposer and interposer-to-sub- strate, and thermo-mechanical stress at the dielectric layer under the C4 bump pad of the chip by finite element method (FEM) modeling. 2. Design Assessment 2.1 Basic assumptions We set basic assumptions of logic chip, memory chip, [Technical Paper] FEM Analysis on Mechanical Stress of 2.5D Package Interposers Takashi Hisada, Toyohiro Aoki, Junko Asai, and Yasuharu Yamada IBM Tokyo Laboratory, IBM Japan, Ltd., Nanobic 2F, 7-7 Shinkawasaki, Saiwai-ku, Kawasaki-shi, Kanagawa 212-0032, Japan (Received August 14, 2012; accepted November 16, 2012) Abstract As data transmission rate increases, flip chip plastic ball grid array (FCPBGA) utilizing an interposer for multiple chips is gaining prominence because of high performance. The authors assessed interposer configurations with a set of chip and package assumptions and obtained key parameters for mechanical analysis. The authors studied warpage of inter- poser, first principal stress in the dielectric layer under the controlled collapse chip connection (C4) bump pad, and von Mises stress at the solder joint between interposer and organic substrate with Si, glass, and organic interposers. The analysis results indicate that the stress under the C4 bump is very low with Si or glass interposer compared to conven- tional FCPBGA. Also, the results indicate that glass interposer with coefficient of thermal expansion (CTE) of 6 ppm/°C has approximately 30% lower stress than Si interposer at the solder joint between the interposer and the organic substrate. Keywords: Interposer, Flip Chip, PBGA, Low-k Dielectric, FEM

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Hisada et al.: FEM Analysis on Mechanical Stress of 2.5D Package Interposers (1/8)

1. IntroductionHigher integration of functionality of the semiconductor

device is getting more important to fully utilize high per-

formance of advanced semiconductor technology. One

approach is integration on one chip which is called system-

on-chip (SoC). SoC has a challenge of manufacturing yield

due to large chip size when a substantial amount of mem-

ory is integrated on die. SoC also requires a longer and

more complex fab processing to include the specific fea-

tures required for memory integration. Another approach

of integration is 3D chip stack using through-silicon-vias

(TSV). Typical configuration of 3D package is multiple

memory chips, a logic chip and an organic substrate

stacked from the top. Wiring to the top memory chip

comes from substrate via micro joints and TSV of both

logic and memory chips.[1, 2] One of the challenges of 3D

chip stack is exactly matched TSV layout between logic

and memory chips that requires concurrent physical lay-

out design of electrode terminals. Recently JEDEC pub-

lished a standard of micro bump layout for wide I/O mem-

ory to address the above issue.[3, 4]

As TSV technology evolves, an intermediate configura-

tion between SoC and 3D package has emerged, which is

called 2.5D package. 2.5D package utilizes Si interposer

with TSV and wiring layers built by re-distribution layer

(RDL) technique, and multiple chips are mounted side by

side on the interposer.[1, 2, 5–9] There are several advan-

tages of 2.5D package against SoC or 3D package as fol-

lows:

– Ease of use of conventional separate chips from chip

design point of view.

– Efficiency of active area on each chip because of no

keep out area for TSV.

– Efficiency of wiring layers on each chip as the global

wiring is built on the Si interposer.

– Efficiency of heat dissipation using thermal lid as com-

pared to 3D stack.

Si has been most widely evaluated as an interposer

material, but alternative materials such as glass[10–12] or

organic are also proposed for interposer. The authors stud-

ied feasible package configuration based on currently

applicable design rule for conventional multi-chip-module

(MCM) FCPBGA and interposer FCPBGA with three dif-

ferent interposer materials of Si, glass, and organic assum-

ing a logic chip and a memory chip mounted on the inter-

poser. We investigated thermo-mechanical behavior of the

micro joints at chip-to-interposer and interposer-to-sub-

strate, and thermo-mechanical stress at the dielectric layer

under the C4 bump pad of the chip by finite element

method (FEM) modeling.

2. Design Assessment2.1 Basic assumptions

We set basic assumptions of logic chip, memory chip,

[Technical Paper]

FEM Analysis on Mechanical Stress of 2.5D Package InterposersTakashi Hisada, Toyohiro Aoki, Junko Asai, and Yasuharu Yamada

IBM Tokyo Laboratory, IBM Japan, Ltd., Nanobic 2F, 7-7 Shinkawasaki, Saiwai-ku, Kawasaki-shi, Kanagawa 212-0032, Japan

(Received August 14, 2012; accepted November 16, 2012)

Abstract

As data transmission rate increases, flip chip plastic ball grid array (FCPBGA) utilizing an interposer for multiple chips

is gaining prominence because of high performance. The authors assessed interposer configurations with a set of chip

and package assumptions and obtained key parameters for mechanical analysis. The authors studied warpage of inter-

poser, first principal stress in the dielectric layer under the controlled collapse chip connection (C4) bump pad, and von

Mises stress at the solder joint between interposer and organic substrate with Si, glass, and organic interposers. The

analysis results indicate that the stress under the C4 bump is very low with Si or glass interposer compared to conven-

tional FCPBGA. Also, the results indicate that glass interposer with coefficient of thermal expansion (CTE) of 6 ppm/°C

has approximately 30% lower stress than Si interposer at the solder joint between the interposer and the organic substrate.

Keywords: Interposer, Flip Chip, PBGA, Low-k Dielectric, FEM

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I/O counts and package size as shown in Table 1. We refer

to JEDEC standard MO-305A[4] for micropillar grid array

(MPGA) memory chip, and we set simple numbers of I/O

count for this design assessment. Custom memory with

200 μm pitch is also assumed for organic interposer and

organic substrate as MPGA bump pitch is too tight for

organic carrier. Table 1 summarizes the features we use in

this study.

The images of bump layout for logic chip and MPGA

memory chip are shown in Fig. 1. The MPGA memory

chip uses a centralized layout, and there are four bump

layout blocks in the center.

2.2 Package configurationsFigure 2 shows package configurations in cross- sec-

tional view. Figure 2 (a) is MCM FCPBGA that uses con-

ventional build-up substrate. The memory chip is assumed

to have RDL to convert centralized bump layout to array

layout as the escape from centralized bumps to substrate is

not feasible with currently available design rules of the

build-up substrate. Figure 2 (b) is Si or glass interposer

FCPBGA. A logic chip and a memory chip are mounted on

an interposer, and the interposer is mounted on an organic

substrate. The interposer has a RDL on the top side to

have escape wirings from both chips and direct wirings

from the logic chip to the memory chip. TSV or through

glass vias (TGV) is typically laid out in a square matrix,

and micro solder balls to interconnect the interposer to the

substrate are placed under the TSV or TGV. Figure 2 (c) is

organic interposer FCPBGA. A logic chip and a memory

chip with RDL are mounted on an organic interposer, and

the interposer is mounted on an organic substrate. The

interposer is assumed to be coreless substrate configura-

tion in this study.

2.3 Design ground rules and key package parame-ters

Table 2 shows the design ground rules of each package

configuration used to assess the package key parameters

which are the size of interposer and organic substrate, and

layer count of build-up substrate and RDL. We set 0.375

mm clearance between logic and memory chips for Si/

Table 1 Features of chip and package.

Chip size (logic) 15 mm × 15 mm

Chip size (memory) 10 mm × 7 mm

Chip thickness (logic and memory) 786 μm

Bump matrix (logic) 94 × 94

Bump matrix (MPGA memory)Bump matrix (custom memory)

(6 × 50) × 430 × 40

Signal I/O count (logic) 1,600

Signal I/O count (memory) 800

Direct wiring between logic and memory

800

Bump pitch (logic) 150 μm

Bump pitch (MPGA memory)Bump pitch (custom memory)

40 μm × 50 μm200 μm

Package size 42.5 mm × 42.5 mm

Package BGA pitch 1.0 mm

Package BGA ball count 1,600

Thickness of base organic substrate1) 970 μm

Thickness of MCM FCPBGA’s substrate2) 1,267 μm

1) (b) and (c) in Figure 22) (a) in Figure 2

(a) Logic chip (b) Memory chip

Fig. 1 Bump layout images (not to scale).

(a) MCM FCPBGA

(b) Si or glass interposer FCPBGA

(c) Organic interposer FCPBGA

Fig. 2 Package configurations.

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Hisada et al.: FEM Analysis on Mechanical Stress of 2.5D Package Interposers (3/8)

glass interposers and 3.0 mm clearance for organic inter-

poser and MCM FCPBGA.

The Si/glass interposer size can be determined by the

width of direct wirings between the logic chip and the

memory chip (S1 in Fig. 3), the width of wirings from logic

to TSV/TGV (S2 in Fig. 3), and the logic chip size. There

are four bump layout blocks on the memory chip (Figure

1). Wirings to the memory’s backside bump blocks come

from top and bottom side I/O terminals of the logic chip

(200 I/Os from top and bottom respectively). Also addi-

tional 200 I/Os have to be wired out to TSV or TGV around

the direct wirings between the logic and the memory on

the top side or the bottom side. Both S1 and S2 come up to

approximately 1.6 mm with 4/4 μm line and space ground

rule in RDL. The minimum dimension to place these wir-

ings and the chips is approximately 22 mm. Assuming to

use an industry standard solder ball pitch for 1600 micro

joints for the interconnection from the interposer to the

substrate, 0.65 mm pitch gives the smallest interposer size

as 27 mm × 27 mm with a 40 × 40 solder ball matrix. The

similar assessment derives 33 mm × 33 mm with 0.8 mm

ball pitch for the organic interposer.

Figure 4 shows a typical signal escape of C4 joints.

Escaped trace count on one layer can be calculated by the

below equation.

 EscapedTraceCount = − −P D LL2

(1)

Total number of build-up layers is defined by required

build-up layer count for signal escape on the top side in

case of conventional FCPBGA. Total number of build-up

layers for coreless is sums of signal escape layers, a power

plane layer, a ground plane layer, and BGA pad layer. In

case of RDL, minimum layer count (a wiring layer and a

TSV/TGV layer) is assumed in this assessment.

Table 3 summarizes the key package parameters we

obtained from the design assessment, and they are used

for the FEM modeling. 4-2-4 stack-up of the substrate layer

indicates four build-up layers are stacked on two-conduc-

tive-layer-core at top side and bottom side respectively. 6+1

Fig. 3 Layout of logic chip and memory chip.

Fig. 4 Typical escape design of C4 joints.

Table 2 Design ground rule assumptions.

Build-up layer (FCPBGA, organic interposer)

Thickness of one build-up layer 45 μm including Cu

Thickness of organic interposer 285 μm

Line / space 15 / 15 μm

Via land diameter 85 μm

Si interposer

Interposer thickness 200 μm

TSV diameter 60 μm

Line / space in RDL 4 / 4 μm

Glass interposer

Interposer thickness 200 μm

TGV diameter 80 μm

Line / space in RDL 4 / 4 μmTable 3 Key package parameters.

MCM FCPBGA

Substrate layer stack-up 4-2-4

Si/glass interposer FCPBGA

Layer count in RDL 2

TSV pitch 0.65 mm

Interposer size 27 mm × 27 mm

Substrate layer stack-up 1-2-1

Organic interposer FCPBGA

Layer stack-up 6+1

Solder joint pitch (interposer to substrate)

0.8 mm

Interposer size 33 mm × 33 mm

Substrate layer stack-up 1-2-1

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stack-up of the organic interposer indicates six build-up

layers are stacked without core. ‘+1’ denotes one additional

conductive layer is formed as pad transfer layer, which is

the typical structure of coreless substrate.

3. FEM Modeling and AnalysisWe analyzed two phases in the process flow - (1) After

flip chip reflow, before underfill resin apply, (2) After

mount of the assembled interposer with chips and under-

fill resin on the organic substrate. Both were modeled in

half of the assembled form. The reference temperature is

set at 180°C.

Table 4 shows the material properties we used in the

models. We assume four build-up layers without glass fiber

and 3 build-up layers with glass fiber for organic interposer

in this analysis. The material properties of RDL, build-up

layer, build-up layer with glass fiber and core are derived

according to the law of mixture. In case of build-up layer,

average volumes of build-up material, Cu and solder resist

are defined based on typical design assumption, and then

elastic modulus, Poisson’s ratio and CTE are calculated

using material properties of each component material

according to the law of mixture.

3.1 After flip chip reflowWe assume two chips are mounted on a singulated inter-

poser. The models do not contain underfill resin to simu-

late the state after cooling of flip chip reflow. We analyzed

warpage of the assembled interposer using macro model

and first principal stress in the dielectric layer under the

bump pad in the logic chip using multi scale modeling

technique. MCM FCPBGA was also modeled for compari-

son to the interposer FCPBGAs. Table 5 shows the model

matrix we analyzed. Although the TSV/TGV pitch is set as

0.65 mm from the design assessment, we added different

via densities which are equivalent to have full matrix of 0.5

mm pitch or 0.8 mm pitch in 27 mm × 27 mm interposer for

this analysis.

3.1.1 Warpage of the interposerFigure 5 shows the contour of Z-direction displacement

for model-j. Clearance between the logic chip and the

memory chip is 0.375 mm for Si/glass interposers, and the

clearance is 3.0 mm for MCM FCPBGA and organic inter-

poser. The point of zero degree of freedom (ZDOF) is

fixed along the Z-axis at the center of package as shown in

Fig. 5. Note that the distance between corner point A and

B is 27 mm for Si/glass interposers, 33 mm for organic

interposer or 42.5 mm for MCM FCPBGA.

The location of the highest Z-direction displacement for

model-j is corner point B as shown in Fig. 5. Figure 6 and 7

Table 4 Material properties.

MaterialElastic

modulus (GPa)

Poisson’s ratio

CTE (ppm/°C)

Si 165 0.22 3.2

Glass-A 77 0.22 3.8

Glass-B 74 0.22 6.0

RDL3) 28 0.24 17

Build-up layer4) 17 0.34 27

Build-up layer with glass fiber4) 20 0.29 24

Core5) 25 0.33 15

Solder 27 0.35 253) Composite property with Cu4) Composite property with Cu and solder resist5) Composite property with Cu and glass fiber

Table 5 Model matrix.

Model type

ConfigurationEquivalent via pitch

a MCM FCPBGA —

b Si interposer 0.5 mm

c Si interposer 0.65 mm

d Si interposer 0.8 mm

e Glass-A interposer 0.5 mm

f Glass-A interposer 0.65 mm

g Glass-A interposer 0.8 mm

h Glass-B interposer 0.5 mm

i Glass-B interposer 0.65 mm

j Glass-B interposer 0.8 mm

k Organic interposer —

Fig. 5 Contour of Z-direction displacement of an interposer and chips (model-j).

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Hisada et al.: FEM Analysis on Mechanical Stress of 2.5D Package Interposers (5/8)

show Z-direction displacement at top left corner point A

and top right corner point B respectively. Highest Z-direc-

tion displacement of each Si or glass interposer appears at

top right corner. The shape of warpage of Si/glass inter-

posers is concave. This is due to the mismatch of CTE

between interposer and RDL. There is larger area where

chip is not mounted on the right area compared to the left

area as small memory chip is mounted on the right area.

The chip mounted area reduces Z-direction displacement

because of the sandwiched structure of low CTE Si/high

CTE RDL/low CTE interposer, but the area where chip is

not mounted has higher Z-direction displacement. This is

why the peak of Z-direction displacement appears at the

top right corner with Si/glass interposers. In case of MCM

FCPBGA, Z-direction displacement is negative, and the

warpage is convex. The organic interposer has more com-

plicated warpage behavior. Z-direction displacement at

point A is negative with high value, but displacement at

point B is positive with high value. This is possibly a result

of low elastic modulus of organic interposer.

There is no significant change by equivalent via pitches.

The change of via area among the three conditions is less

than 1% on the whole interposer area in the assumptions. It

is reasonable to have very small effect by equivalent via

pitch in this analysis.

Z-direction displacements obtained here are all above

100 μm. This would cause defects such as non-wet solder-

ing and bridged soldering at mount of the assembled inter-

poser especially when the pitch of micro solder joint

becomes less than 0.5 mm. Design optimization to reduce

interposer size, material selection and process technique

to flatten assembled interposer are important to establish

stable mount process of interposer mounting.

3.1.2 Stress in low-k dielectric layer under the C4 bump padFigure 8 shows a micro model of a flip chip joint and

dielectric layers under the C4 bump pad. The dielectric

layers consist of SiO2 layer and low-k dielectric layer. First

principal stress in the low-k dielectric layer was calculated

using multiscale modeling technique by giving strain con-

ditions taken from a macro model to a micro model.

Figure 9 shows a contour of first principal stress in the

low-k dielectric layer under the bump point C, which is

indicated in Fig. 5. Contour of model-a (MCM FCPBGA)

has the highest first principal stress (tensile stress) in the

farthest area from ZDOF under the bump. The stresses of

model-c (Si interposer) and model-i (glass interposer) are

much lower than model-a as shown in Fig. 10. Stresses of

Si interposer are the lowest. Stresses of glass-A interposer

Fig. 6 Z-direction displacement at point A after flip chip reflow.

Fig. 7 Z-direction displacement at point B after flip chip reflow.

Fig. 8 Micro model of a C4 joint and dielectric layers.

Fig. 9 Contour of first principal stress in the low-k dielectric layer under bump point C.

(a) Model-a (b) Model-c (c) Model-i

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are approximately double of Si interposer, and the stress of

glass-B interposer is approximately double of glass-A inter-

poser. CTE of the interposers can be considered as domi-

nant factor based on this result. Stress of the MCM FCP-

BGA is much higher than that of Si or glass interposer. In

case of organic interposer, the stress is approximately 1.9

times higher than MCM FCPBGA. This result indicates

that stress and damage in the low-k dielectric layer under

the C4 bump pad needs to be carefully evaluated in the

product design with organic interposer. Stiffener could be

an option for the flip chip assembly with an organic inter-

poser, but a study with a stiffener was not performed here.

3.2 After interposer mount reflowWe evaluated stress of solder joint between an inter-

poser and an organic substrate with model-b to model-j (Si

and glass interposers only). The original model was modi-

fied by removing solder bumps and adding underfill with a

composite material property of underfill resin and solder

bump. The reference temperature is set at 180°C.

Figure 11 is a contour of Z-direction displacement of the

assembled form for model-c. Figure 12 shows the Z-direc-

tion displacement at the corner point B. Si interposers

have higher displacement than glass interposers after

interposer mount although Si interposers have lower dis-

placement after chip mount as shown in Fig. 7.

We analyzed von Mises stress of solder joint between an

interposer and an organic substrate at the corner solder

ball point D as shown in Fig. 13. Unlike the previous

results of first principal stress in the low-k dielectric layer

under the C4 bump, Si interposer has the highest von

Mises stress, and glass B interposer has the lowest stress.

This is due to the mismatch of CTE between interposer

and organic substrate. After chip mount on the Si/glass

interposers, Z-direction displacement is positive at the cor-

ner point B. But the displacement turns to be negative for

all cases because of higher CTE of thick organic substrate.

Data trend in Fig. 13 implies two major factors, elastic

modulus and CTE, to reduce von Mises stress at solder

joint. Si and glass-A interposers have similar CTE, but Si

interposer has approximately two times higher elastic

modulus compared to glass-A interposer. Approximately

Fig. 10 First principal stress in the low-k dielectric layer under bump point C.

Fig. 11 Contour of Z-direction displacement of an organic substrate, an interposer and chips (model-c).

Fig. 12 Z-direction displacement at point B after interposer mount reflow.

Fig. 13 Von Mises stress in volume average at the corner solder ball point D.

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50% reduction of elastic modulus results in about 20%

reduction of von Mises stress by analyses of Si and glass-A

interposer models. Glass-A and glass-B interposers have

similar elastic modulus, but glass-B interposer has approxi-

mately one and half times higher CTE compared to glass-A

interposer. Approximately 50% increase of CTE results in

about 18% reduction of von Mises stress by analyses of

glass-A and glass-B models.

Although we have not evaluated warpage of assembled

interposers with chips and underfill, we presume assem-

bled Si interposers have smaller warpage than glass inter-

posers. This presumption implies that Si interposers have

higher process yield and wider process margin at inter-

poser mount process. On the other hand, solder joint’s reli-

ability of Si interposers would be lower than that of glass

interposers because Si interposers have higher von Mises

stress than glass interposers. Manufacturability and reli-

ability of solder joints needs to be experimentally evalu-

ated with variable interposer materials, variable interposer

sizes, and variable chip size combinations in order to opti-

mize product design.

4. SummaryWe investigated feasible interposer designs with a set of

assumptions for Si, glass and organic interposers. Then we

performed FEM mechanical analysis at two phases in the

assembly process flow (1) after flip chip reflow, before

underfill apply and (2) after mount of assembled inter-

poser on a base organic substrate.

After flip chip reflow, the highest Z-direction displace-

ment of Si or glass interposer appears at the corner where

the smaller chip (memory) is mounted nearby. This behav-

ior is a result of CTE mismatch between interposer mate-

rial and RDL. Organic interposer shows different warpage

behavior from Si/glass interposer because of its material

property.

First principal stress occurs in the low-k dielectric layer

under the corner bump of the logic chip was investigated

using multiscale modeling. The first principal stresses

with Si/glass interposer are approximately 10% to 40% of

the stress with MCM FCPBGA. On the other hand, the

stress with organic interposer is approximately 1.9 times

higher than the stress with MCM FCPBGA.

Von Mises stress was analyzed at the corner solder joint

between Si or glass interposer and the base organic sub-

strate. The analysis results indicate that Si interposer has

the highest von Mises stress. We presume assembled Si

interposer has the smallest warpage. There would be a

trade off between manufacturability and reliability of the

solder joints.

It is necessary to understand how key factors, i.e. stress

in the low-k dielectric layer under C4 pad, manufacturabil-

ity of interposer mount process, and reliability of solder

joint, changes with variables such as interposer material,

interposer size, and chip size for optimization of product

design.

AcknowledgementThe authors would like to thank Richard S. Graf for his

advises.

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Takashi Hisada received the B.S. degree in physics from Osaka University, Osaka, Japan, in 1992. He joined IBM Japan after graduation and has been involved in packaging development for logic and RF devices. He is currently the manager of package and test engineering

department. He is a member of JIEP and Smart Processing Society for Materials, Environment & Energy.

Toyohiro Aoki received the B.S. and M.S. degrees in material physics from Osaka Uni-versity, Osaka, Japan, in 1998 and 2000 respectively. He joined IBM Japan after graduation and has been involved in various projects for packaging development including chip pack-

age interaction. He is currently a member of IBM research – Tokyo, and works on 3D packaging.

Junko Asai received the B.S. degree in metallic engineering from the Nagoya Uni-versity, Nagoya, Japan in 1986. She joined IBM in 1986, and designed many boards used in various electrical devices. She developed the methodology of design by applying the knowledge from

design work. From 2002, she has been designed various pack-ages from QFN to FC-PBGA, and developed the design guide for laminates with new package technology such as PoP. She is devel-oping the method of assessment and optimization as well as design.

Yasuharu Yamada received the B.S. degree in electronics and information tech-nology from Ritsumeikan University. He joined IBM Japan in 1984 and is cur-rently the engineer for thermo-mechanical simulation of semiconductor packaging. His background includes mechanical sys-

tem, Printed Circuit Board and cooling device design for com-puter equipment. He is a member of package thermal characteris-tics task force in Japan Electronics and Information Technology Industry Association.