precision engineering

nanotechnology

proceedings - volume 1

euspen

1s t international conference

and general meeting of the european society for

precision engineering and nanotechnology

may 31st - June 4th 1999, bremen, germany

editors

P. McKeown • J. Corbett • M. Bonis • S. Sartori • H. Kunzmann

M. Week • E. Brinksmeier • W. PreuB • O. Riemer

contents

volume 1

precision machines and systems

Development of an Ultra-Precision Grinding Machine with Trigonal Prism TypePentahedral Structure for 400 mm Silicon WaferK. Abe, T. Ishikawa, Y. Koma, K. Arai, M. Kitano 16

Design and Manufacture of a 4-Axis Precision Grinding Machine forGeneration of Free-Form SurfacesY. Chen 20

Very Large Scale Phase Measuring Interferometry of Work Surfaces forDiagnostic Analysis of the Diamond Turning ProcessS.W. Kim, D.S. Kim, I.C. Chang, T.H. Keem, S.B. Yoo 24

An Ultraprecision Machine Tool using Twist-roller Friction Drives andActive control Aerostatic GuidewaysH. Mizumoto, M. Inoue, S. Ari, Y. Kami, M. Yabuya 28

Porous Ceramic Water Hybrid Bearings for Ultra Precision ApplicationsR. Almond, J. Corbett, D. Stephenson 32

Dynamic Behavior-Improvements and Miniaturisation ofPassively Compensated Aerostatic BearingsM. Vermeulen, N. Rosielle, P. Schellekens 36

New Structured Air Bearings with Complex Thin Channels without NozzlesM. Week, H. Ozmeral 40

Design Strategy for Aerostatic SpindlesP. Sarkan, A. Charki, M. Bonis 44

Motion from the Nanoscale WorldV. Klocke 48

Experimental Studies of Pressure Distribution and its Effects onAir Bearing PerformancesZ. Shang, P. Greene, S. Charron, P. Cone, K. Small 52

Ultra-Precision Positioning with Nanometric Resolution Using Leadscrew MechanismS. Fukada 56

Multiple Micro Robots for Desktop Precise ProductionH. Aoyama, A. Hayashi 60

A Three Dimensional Finite Element Formulation of the Energy Equation forFilm Temperature Analysis in Air BearingS. Ohishi 64

A Study on Intermittent Holding Mechanism of Wheel Head inPerpendicular Guideway of Surface GrinderM. Inoue 68

A New 3D Model for Evaluating the Performance of CNC Machine Tool Axis DrivesC. Pislaru, G. Ford, J. Freeman 72

Optical Data Transmission System of the Temperature Information in Rotating Spindle(1s' Report) - Development of the System and Measuring Accuracy -K. Yokoyama, T. Suzuki, S. Endo, H. Hoshina 76

Optical Data Transmission System of the Temperature Information in Rotating Spindle(2nd Report) - Inner-race Temperature of Rolling Bearing and Estimation Accuracyof Axial Thermal Elongation -K. Yokoyama, T. Suzuki, S. Endo, Y. Matsudaira 80

Preliminary Study on the Reduction of Stick-Slip for Precision SlidewaysX.P. Liu 84

Figure Controlled Turning by In-Process MeasurementD. Saito, T. Yazawa, T. Kohno, S. Kohno 88

Development of a Thermal Error Measurement -Real Time Correction System for the Thermal Error in CNC Machine ToolsH.J. Pahk, S.W. Lee 92

A Unique Ultra-Precision Lathe for the Hard and Soft Turning of Precision ComponentsM. Clarke, S. Manley, M. Pierse 96

High Accuracy Feedback Transducer Incorporating a Real Time ErrorCompensation SystemG. Ford, S. Postlethwaite, C. Pislaru 100

Design of a Machining System for kg StandardsS. Ueno, M. Hatakeyama, T. Kimura 104

Testing and Simulation of Fractionary Electromechanical Rotative DrivesC.A. Martin, D. Pimentel 108

Development of a Tweezers Robot equipped with Active Vibrators and Active AbsorbersS. Honda 112

Development of a Precise Positioning Stage Guided along Micro-Pitch RacksK. Takeda, S. Honda 116

Glass Ceramics Assemblies for Astronomy, Lithography and Precision MechanicsS. Risse, C. Damm, T. Peschel 120

Thermal Behavior of Position Measurement Systems:Linear Transducer - Rotary EncoderA. Frank, F. Ruech 124

Design of an Angular Positioner for Precision MachinesL. Montanari, J.G. Duduch, J.C. C. Rubio 128

Development of 4Degree-of-Freedom Ultrahigh Precision Machine Tool and FabricationConcept of Holographic Optical Elements on Non-Axis-Symmetric SurfacesY. Yamagata, S. Moriyasu, S. Morita, H. Ohmori, K. Tanaka, T. Nakagawa, T. Higuchi 132

Measurement of Motion Accuracy and Improvement of Machining Accuracyon Ultra-High Precision NC Machine Tools by Using Cross Grid Encoder TestY. Kakino, Y. lhara, A. Matsubara, K. Tanaka, T. Akiyama, S. Hayama 135

Dynamics and Control of Micropositioning Device using Magnetostrictive ActuatorsJ.C. Campos Rubio, F.G. Santoro, J.G. Duduch, A.J. Porto, A.E. Gee 139

The Influence of Thermal Expansion of the Cutting Tool during UltraprecisionDiamond Turning of Electroless Nickel on the Accuracy of the Workpieceand a Simple Method of CorrectionV.E. Jager, G. Hinzmann, A. Just 143

Low Frequency Shock and Vibration Isolation forPrecision Engineering and NanotechnologyJ. Dankowski 147

Static and Dynamic Characteristics of Thrust Air Bearings with Grooves or OrificesA. Charki, M. Bonis, P. Sarkan, M. Fourka 151

Development of a new Grinding Set-Up for Micro-Cylindrical-Parts FabricationS.H. Yeo, S. Baton 155

An Ultra Precision Machine Tool demonstrating a Novel Vibration Resistant StructureJ. Corbett, D. Stephenson, J. Sweet, W.J. Wills-Moren 159

The Magnetic Bearing for Precision ApplicationsO. Horikawa, I. da Silva 163

Characterization and Compensation of Machine Vibrations with Non-Linear MethodsM. Week, R. Hilbing 167

Experiences with the Master Axis Method for Measuring Spindle Error MotionsE. Marsh, R. Grejda, D. Martin 171

UP Cylinder GenerationP. Langenbeck , K. Wehrle 175

Analysing Axial and Radial Spindle Error MotionP. Langenbeck, M. Birkenmaier, H. Tiziani 177

Achievement of Nanometric Accuracy with Stepper-Driven MachineR. Haberland, W. Klein 178

High Speed Linear EncoderT. Yaku, T. Omi, S. Nihonmori, M. Miyashita 182

mechanical processes

Fabrication of Precision MoldsE. Brinksmeier, W. PreuB 187

Silicon Micromachining and Material Nanotechnology for Sensor ApplicationA. Poggi, L. Dori, G.C. Cardinali, P. Maccagnani, R. Angelucci, S. Nicoletti 191

Process Diagnostics for Precision Grinding Brittle Materials ina Production EnvironmentP.J. Davis, M.A. Piscotty, K.L. Blaedel 195

Study on Micro-Machining Using Optical Radiation PressureH. Shimizu, T. Miyoshi, Y. Takaya, S. Takahashi 199

Micro-Milling of Steel for Mould Manufacturing - Influences of Material, Tools andProcess ParametersD. Spath, V. Hiintrup ___ 203

Distinctive Features of Polymeric Optical Components Precision MachiningS. Lavrynenko 207

Using a Design of Experiment Method to improve KDP Crystals Machining ProcessP. Lahaye, C. Chomont, P. Dumont, J. Duchesne, G. Chabassier 211

Micromechanics of Mechanical ShapingJ. Leopold, M. Meisel, G. Schmidt 214

Mechanical-Chemical Finishing using a Grinding Stone including MicrocapsulesT. Enomoto, Y. Shimazaki, Y. Tani, K. Etoh, H. Higurashi, Y. Yamaguchi, Y. Sakai 218

Development of System and Key-Components for Ductile Mode GrindingH. Eda, L. Chouanine, J. Shimizu, L. Zhou 222

Computer Assisted Modeling and Simulation for Grinding ProcessH. Eda, J. Shimizu, L. Zhou . 226

Atomistic Mechanism of Surface Generation in Micromachining ofMonocrystalline SiliconS. Shimada, H. Tanaka, N. Ikawa 230

Precision Electrocontact Discharge Truing/ Dressing of a Metal-BondedDiamond Wheel utilizing a Rotary ElectrodeJ. Tamaki, K. Kondoh, T. lyama 234

Approach to a Microstructured Mold Made of SteelT. Schaller, J. Mayer, K. Schubert 238

PC-Based Numerically Controlled Polishing Machine for Aspherical Surfaces withDwell Time ControlM. Yang, H. Lee 242

Shrinkage of Grinding Traces by Elastic Recovery of Ground Material inSingle Grain GrindingM. Yoshioka 246

Influence of Crystal Orientation on the Nanometric Cutting ProcessR. Rentsch 250

Development of a High-Performance Laser-Guided Deep-Hole Boring Tool:A New Model for Application and a Robot and a Probe for Extremely Deep HolesA. Katsuki, H. Onikura, T. Sajima, D. Thiele 254

Development of a Precision Measuring Method of Grinding Wheel Peripheral ShapesH.S. Lee, M. Izumi, T. Wakabayashi, S. Inoue . 258

Structure of Micro Groove Cut by Ruling Engine System for LCDM. Sato, T. Tanaka, H. Seki 262

Mirror Surfaces Finishing on Double Sided Lapping Machine with ELIDN. Itoh, H. Ohmori, T. Kasai, Y. Yamamoto, S. Moriyasu, S. Morita 266

Dry Mechanochemical Polishing of Si Wafers by Soft BaCO3 Abrasive andits Machining MechanismN. Yasunaga, S. Tanaka, Y. Yamamoto, M. Ishizuka 270

Precision Contour Grinding with Cylindrical Grinding MachinesC. Patzig, W. Ortmayr 274

Dicing of Silicon WafersI. Inasaki 278

Development and Grinding Effect of ELID3 Grinding MethodT. Matsuzawa, H. Ohmori, N. Itoh 282

Ultrasonic Grinding utilizing Travelling Wave VibrationK. Suzuki, T. Makizaki, T. Uematsu 286

Production of a Rainbow Patterned Mold for Injection Molding byRepetetive Micro IndentationH. Fukatsu, Y. Shishido, K. Suzuki, T. Uematsu 290

Grinding Characteristics of Wheels with New Type cBN Grits "ABN800"T. Uematsu. M. Iwai, K. Suzuki 294

Development of Ceramic Micro-Tools for Precision MachiningD. Godlinski, M. Kuntz, G. Grathwohl 298

Effect of Rotation Speed of OD-Blade on Cutoff Surface AccuracyM. Mizuno, T. lyama . 302

An Engineered Tool and Some Results of Fly-Cut ExperimentsT. Tatsumi, J. Takeda, K. Imai, H. Hashimoto 306

The Influence of Cutting Environment in Ultra Precision Cutting for MetalsY. Kanda, M. Suzuki, F. Abe 310

Process- and Simulationmodel for LappingU. Heisel, J. Avroutine, J. Rothmund 314

Precision Grinding of Micro Fresnel Lens Molding Die - Feasibility Study onPrecision Grinding of Tungsten Carbide -H. Suzuki, T. Higuchi, T. Kitajima, S. Okuyama, N. Wajima 318

A Summary of Micro-Milling StudiesB. Damazo, M. Davies, B. Dutterer, M. Kennedy 322

Precision Engineering of Diffractive Surfaces for Advanced OpticsP. Rogers, D. Rimmer 326

Ductile Mode Machining of Single Crystal Silicon using a Single Point Diamond ToolY. Ichida 330

Study of the Monitoring of Ultraprecision Machining of Brittle Materials usingAcoustic EmissionH.A. da Silva, J.G. Duduch, R.G. Jasinevicius 334

The Influence of Rake of Diamond Tool on the Machined Surface ofBrittle Materials with Finite Element AnalysisD. Li, S. Dong, Y. Zhao, M. Zhou 338

Fabrication of Micro Lens Array by Offset Lathing Method using4-Axis Ultrahigh Precision Machine ToolY. Yamagata, S.Y. Morita, S. Moriyasu, H. Ohmori, T. Higuchi 342

Study of Slurry Chemical Influence in Ductile/ Brittle Transition Depth inChemical Mechanical Polishing (CMP) using Acoustic Emission SensorY. Moon, Y. Lee, D.A. Dornfeld 345

Observation of Chip Morphology and Surface Features Observed inDuctile Regime Diamond Turning of GaAs (100) Single CrystalsR.G. Jasinevicius, P.S. Herrmann , J.G. Duduch, A.J.V. Porto, H.A. da Silva, C.R. Pagotto 349

Structural Alteration on Single Crystal Silicon Surface Resultant fromDiamond Turning probed by Raman ScatteringR.G. Jasinevicius, P.S. Pizani, J.G. Duduch, A.J.V. Porto, B.M. Purquerio 353

Micro-Profile Grinding of Stamping Tools by Combination of ELID(Electrolytic In-Process Dressing) and Electric Discharge TruingH. Oguma, T. Deguchi, K. Noguchi, H. Shindo, T. Toeda, K. Arai, H. Ohmori 357

Mirror Surface Grinding by ELID (Electrolytic In-Process Dressing) ofBiocompatible Co-Cr Alloys for Dental ImplantsK. Kyo, H. Ohmori, T. Kasai, T. Karaki-Doy, K. Horio 361

Micro-Drilling of Ceramics by Small Metal-Bond Diamond Grinding Tools usingElectric Micro-Truing and Electrolytic DressingH. Ohmori, C. Zhang, J. Qian, W. Li, Y. Yamagata, A. Makinouchi, T. Masuzawa 364

Micro-Spherical Lens Fabrication by Cup-Type Metal-Bond Grinding Wheels applyingELID (Electrolytic In-Process Dressing)C. Zhang, H. Ohmori, W. Li, S. Moriyasu, Y. Yamagata, A. Makinouchi, T. Higuchi 368

High Efficiency, Stable and Precision Grinding for Cutting Tools Fabrication applyingELID (Electrolytic In-Process Dressing) TechniqueM. Asami, Y. Fukaya, H. Ohmori, M. Anzai, I. Takahashi, A. Makinouchi 372

Development of Nano-Scale Machining System utilizing Mechanism ofa Friction Force MicroscopeK. Ashida, N. Morita, Y. Yoshida 376

ELID Grinding Characteristics of Silicon WaferI. Marinescu, C. Miyakawa, H. Ohmori, J. Shibata 380

Kinematic Analysis of the Planetary Train in Chemical Mechanical PlanarizationH. Hocheng, H.Y. Tsai, K.C. Lai, H. Lin, T. Wu 384

Grinding Tool Design for Fine GrindingF.Y. Chang, K.C. Lai, H.Y. Lin, T.C. Wu 388

The Investigation of Embedding Abrasive Grits onto the Microgrinding Tools byNickel ElectroformingH. Yang, S.W. Kang, R.F. Shyu 392

3D Micromachining of Single Crystal SiliconH.W. Hoffmeister, A. Wenda ___ 396

The Effect of Polishing Pad Geometry on CMP Planarisation CapabilitiesB. Mullany, G. Byrne, M. Power 400

Effect of Workpiece Material Properties on Micro-Cutting ProcessM. Zhou, B.K. Ngoi, S.H. Yeo 404

Ultraprecision Ductile Cutting of Glass by Applying Ultrasonic Elliptical Vibration CuttingE. Shamoto, C.X. Ma, T. Moriwaki 408

Precision Grinding Process Development for Brittle MaterialsM.A. Piscotty, P.J. Davis, K.L. Blaedel 412

A Comparison of the Cooling Effects of the Compressed Cold Air and Coolant forthe Cylindrical GrindingH. Choi, S. Lee 416

Manufacturing of Microstructured Surfaces using UltraprecisionTurning, Milling and ShapingM. Week, S. Fischer 420

Single Grain Scratch Tests on GaAs for the Determination of RelevantEngaging Parameters for a Ductile Material RemovalE. Uhlmann, H. Engel, R. Hammer, C. Paesler 424

Single Point Diamond Turning of Polycrystalline SiliconC.R. Pagotto, J.G. Duduch, R.G. Jasinevicius, A.J.V. Porto, A.E. Gee 426

Sub-Newton Cutting Force Measurement for Micro Machining ProcessesB.K.A. Ngoi, Y.H. Mu 430

Development and Application of CVD-Diamond Micro Tools for Milling and GrindingJ. Gabler, L. Schafer, A. Wenda, H.W. Hoffmeister 434

Deposition and Diamond Machining of Substoichiometric Nitride CoatingsE. Brinksmeier, R. Malz, W. PreuB, P. Mayr, J. Kohlscheen, H.R. Stock 438

Vibration Assisted Diamond Cutting of Non-Ferrous MetalsE. Brinksmeier, J. Schmutz 442

Single Point Diamond Turning of SteelE. Brinksmeier, W. PreuB, R. Glabe 446

Machinability and Microtopography of OFHC Copper and Electroless NickelE. Brinksmeier, O. Riemer 450

Planarisation Length Measurement of Chemical-Mechanical Polishing ProcessesE. Perrin, H. Jaouen, T. Mathia „ 454

Kerf Sidewall Phenomena in Slicing Processes of Thin Film HeadsH.H. Gatzen, G.M. Jones, J. Zeadan 458

Investigation of the Topography and the Optical Behaviour of MicrostructuredFresnel Lenses consisting of Molds and Injection MoldsL. Schneider, H. Kunzmann, M. Schulz, K. Thiele, I. Weingartner, K. Hasche, J. Hannemann 462

A Machining Parameter Study to select Best Conditions for SPDT ofLarge Single-Crystal Silicon OpticsM. Zimmermann, P.J. Davis, D.A. Krulewich, J.W. Carr, J.K. Haack, M.C. McClellan 466

The Use of the ELID Method to assist in the Ductile Machining of Ferroelectric CeramicsP.A. Beltrao, A.E. Gee, J. Corbett, R. Whatmore 470

A Novel Type of Beam Integrator with Rectangular FocusW. PreuB 474

Acoustic Emission Analysis - an indicator in High-Speed Grinding andUltraprecision Grinding of Advanced MaterialsS. Gowri, B.K. Ngoi 477

micro-electro-mechanical systems (mems)

MILLIPEDE - An Ultrahigh Density, High Data-Rate AFM Data Storage SystemU. Durig, P. Vettiger, J. Brugger, M. Despont, U. Drechsler, W. Haberle,M. Lutwyche, H. Rothuizen, R. Stutz, R. Widmer, G. Binnig 482

Microrobot: An Arterial ProbeS.E. Moskowitz 486

Investigations on Capillary Action Microcasting of MetalsK. Mbhwald, C. Morsbach, F.W. Bach, H.H. Gatzen 490

Manufacturing of Micro Parts by Micro Molding TechniquesV. Piorter, T. Benzler, T. Hanemann, R. Ruprecht, H. Wollmer, J. Hausselt 494

TiNi Shape Memory Alloy Thin Films for Micromanipulation and MicroactuationS.T. Davies, K. Tsuchiya 498

Micromachined Atomic Emission Flame Spectrometer and Flame lonization DetectorS. Zimmermann, B. Riepenhausen, J. Miiller 502

Flexible Design Concept and Fabrication Technology for MicrosystemsR. Bahnisch, W. GroB, A. Menschig 506

A Microrobot Actuated by Piezoelectric and Electromagnetic ActuatorsA. Torii, H. Kato, A. Ueda 510

Higher Frequency Surface Acoustic Wave Linear MotorM.K. Kurosawa, T. Higuchi, M. Takasaki 514

Highly-Parallel Laser LithographyU. Brauch, C. Colletto, B. Hofflinger, T. Hoffmann, A. Menschig, H. Opower, S. Scharl,C. Schomburg, R. Springer 518

Periodic Surface-Relief Structures on Large Areas for Optical ApplicationsB. Blasi, V. Boerner, W. Doll, J. Dreibholz, A. Gombert, A. Heinzel, V. Kiibler,P. Lobmann, P. Manns, K. Rose, D. Sporn, V. Wittwer 522

Basic Actuator Geometries for the Laser Adjustment ProcessM. Geiger, A. Huber, B. Muller 526

High Precision Embossing of Metallic Parts with MicrostructureA. Schubert, T. Burkhardt, J. Kadner, R. Neugebauer 530

Fabrication of 3D-Micro- and Nano-Structures by Replica Moulding and ImprintingK. Zimmer, K. Otte, A. Braun, S. Rudschuck, H. Friedrich, H. Schulz, H-C. Scheer,T. Hoffmann, CM. Sotomayor Torres, R. Mehnert, F. Bigl 534

Technology Challenges in Ultraprecision Grinding of Flexural ResonatorH.H. Gatzen, M. Beck, J. Zeadan 538

Travelling Wave Ultrasonic Motor Using the B_ Flexural Mode of a Circular MembraneP.J. Rayner, R.W. Whatmore 542

volume 2

non-mechanical processes

Review on Laser-Micro-StructuringH. Tonshoff, F. von Alvensleben, T. Temme, G. Willmann 16

Laser-Assisted Micromachining of Large-Area 3D Metallic MicropartsA. Stephen, T. Lilienkamp, S. Metev, G. Sepold 20

A Review on Micro-Electro Discharge Machining of Metal and SiliconD. Reynaerts, H. Van Brussel, W. Meeusen, X. Song 24

Manufacture and Application of Diffractive Elements forLaser-Beamshaping and DiagnosticsH. Tiziani, M. Pahlke, M. Rocktaschel 32

Structure and Mechanical Properties of Nanocrystalline Diamond FilmsH.G. Busmann, A. Pageler, D. Gruen 36

High Precision Machining of Ceramic Micro Spinnerets with Excimer Laser RadiationK. Dickmann, C. Lammers, J. Hildenhagen 40

Fabrication of Infrared Hologram Optical Element by Reactive Ion EtchingK. Kawata, R. Toyoda, Y. Kawauchi 44

Advanced Micro Machining with Excimer LasersH. Tonshoff, F. von Alvensleben, A. Ostendorf, C. Kulik 48

STM Probe Tip formed by Ion Bombardment of Rough W-SurfacesY. Yoshida 52

Micro Turning of Graphite with KrF Excimer LaserS. Kubota, Y. Uno, S. Yokomizo 56

ECR-Oxygen Plasma Machining of CVD Diamond FilmsS. Kiyohara, T. Abe, K. Ayano, K. Mori 60

A Numerical Simulation of Ultrathin Liquid Film Lubricated Head-Disk Systems inMagnetic Hard Disk FilesY. Chen, H. Tan 64

Micromachining of NiTi Foils using a Q-switched Nd:YAG-LaserM. Leester- Schadel, A. Wogersien, S. Paschko, S. Dauer, S. Buttgenbach 68

A Study of the Internal Profiles of Micro-Electrodischarge Machined HolesH. Almond, D.M. Allen, P. Logan 72

An Investigation on the Curvature Effect in the Excimer Laser Machining ProcessS.Y. Wang _ 76

Electrochemical Micromachining of Mass Produced Fluid Film BearingsF. Wardle 80

Kinetic & Reactive Behaviours of Molecules in Physico-Chemical Removingand Depositing ProcessesA. Kakuta, N. Moronuki, Y. Furukawa 84

Simulation of Dry Silicon Etching in Absence of Ion Bombardment -an Example for Cooperation between Process Development and Equipment DesignT. Otto, M. Hofmann, H. Wolf, R. Streiter, A. Schubert, T. Gessner 88

Structuring of Ceramics and Hard Metals by Short Laser PulsesR. Weichenhain, A. Horn, E.W. Kreutz, R. Poprawe 92

Micromachining with 157nm Laser RadiationM. Fiebig, M. Kauf, J. Fair, M. Scaggs, H. Endert, M. Rahe, D. Basting 96

Potentials of Laser Beam Tools for Ultra Precision Machining an OverviewJ. Koch, M. Wolf, G. Sepold 100

technical advances in new products

An Optimized Multi-Axis Ultra-Precision Machine Design Incorporating AdvancedModular Systems, Components and Construction TechniquesP. Hurst 105

High Precision Cylindricity - Cylindrical Form Measurement TechniqueI.J. McDonnell, P. Scott 110

The Single Point Diamond Machining of Optical Microstructures andFree Form SurfacesP. D. Brehm, C. Stroshine 114

Versatile 3-D Probing System Measuring Micro- and Macroscopic ObjectsG. Goch, R. Ziegenbein 117

Design and Characterisation of an Ultra-Precision XY StageY. Xu, P. Atherton, T. Hicks, M. McConnell, P. Rhead 121

nanotechnology - fabrication and metrology

Ultra-Precise Scanning Technique for Measurement of Topographies inthe Nanometric RangeI. Weingartner, M. Schulz 126

Moving Au Colloidal Particles with the Tip of an Atomic Force Microscope forthe Assembly of Prototype Nanometer-Scale DevicesE. Hartmann, T. Junno, S.-B. Carisson, T. Ling, L. Montelius, L. Samuelson 130

Nanometer Scale Transfer StandardsJ. Garnaes, N. Kofod, J. Jbrgensen, A. Kiihle, P. Besmens, O. Ohlson,J. B. Rasmussen, P. E. Lindelof, G. Wilkening, L. Koenders, W. Mirande,K. Hasche, J. Haycocks, J. Nunn, M. Stedman 134

Integrated Miniature Scanning Probe Microscope using MEMS TechnologyM. Hoummady, J.M. Friedt, B.J. Kim, C. Bonjour 138

Metrology in the Nanometric Range - A Comparison of Different TechniquesJ. Leopold, T. Miyoshi _^_______ 142

Development of an Air Refractometer and Evaluation of its PerformanceW.C. Chang, S.H. Lu, T.Y. Lin, L.C. Chang 145

A Method of Analyzing a Lateral Shearing Interferogram to measureWhole Surface under TestS. Okuda, T. Nomura, K. Kamiya, H. Miyashiro, K. Yoshikawa, H. Tashiro 149

Real-Time Control for Two Dimensional Nanometer Precision PositioningH.C. Yeh, S.S. Pan, G.S. Peng, K. Y. Tsuei 153

Fibre-Optic Supervision for the Micro-Assembly ProcessB. Brocher, G. Dussler, T. Pfeifer 157

Laser-lnterferometricaliy assisted 3D-Nanometrology onthe Atomic Force Microscope type VERITEKTH. Biichner, G. Jager, E. Manske 161

Interferometric Calibration of Optical ParallelsV. Greco, F. Marchesini, G. Molesini 165

10

Scanning Near-Field Optical Microscopy in the Near-InfraredSpectral Range using Ion Beam Treated Silicon ProbesH.U. Danzebrink, T. Dziomba, C. Lehrer, L. Frey, T. Sulzbach, O. Ohlsson 168

A New Ultra-High Precision Alignment MethodN.K. Lee, J. Xhie , C.Y. Wong, P.K. Ko _ _ 172

A Flat Type Touch Probe Sensor Using PZT Thin Film VibratorsM.K. Kurosawa, T. Higuchi, T. Kanda, T. Morita 176

Design of a Digital Controller for a Submicrometric Positioning SystemR.C. Tavares, W. Weingartner, C. Barczak 180

Ultraprecision Fabrication of Aspherical Reference Mirrors for InterferometryS. Moriyasu, J. Kato, S. Morita, Y. Yamagata, H. Ohmori,I. Yamaguchi, A. Makinouchi, T. Nakagawa 184

3D Fractal Dimension Measurement of Smooth Engineering SurfacesC.G. Li, S. Dong, D. Li 188

Study on Three Dimension Measuring Technology of Cutting Edges basing onthe Micro-Mechanical Probe TheoryT. Sun, J. Tan, J. H. Li, D. Li, C.G. Li, S. Dong 192

A New Error Separation Technique used in Nanometer AccuracyRoundness MeasurementJ. Tan, R. Pan __ 196

Development of a Micro Force Sensor for Detecting Mechanical Property Changes ofMicro Protein Films Induces by Ligand BindingY. Yamagata, V. Morozov, K. Inoue, N. Ozaki, A. Makinouchi, T. Higuchi 200

Patterned xy Grids and a Multistep Height Sample for Calibration of Profilometers andScanning Probe MicroscopesG.B. Picotto, P. Hudek, P. Hrkut, I. Kostic, L. Matay, M. Pisani 203

The Calibration of Stylus Instruments down to Nanometric Range by usingSinusoidal Calibration StandardsH. Trumpold, M. Hutley, E. Heldt 207

Comparative Study of Universal Hardness and Micro-VickersHardness Measuring MethodK. Herrmann, F. Pohlenz, W. Wurzner, L. He 211

3D Profiler with Interferometric Position-Measuring SystemH. Biichner, J. Hannemann, K. Hasche, G. Jager, K. Herrmann, R. Seemann, K. Thiele 215

Development of Reference Standards for the Coating ThicknessT. Ahbe, K. Hasche, K. Herrmann, K. Hoffmann, R. Seemann 219

Investigation of a Ring Laser Angle Measuring Instrument forDynamic Angle MeasurementA. Just, R. Probst ^ ^ _ _ _ 223

Concept of an Interferometric Length Comparator with Measurement Uncertaintiesin the Nanometer RangeJ. Flugge, H. Dangschat, A. Spies, J. Tschirnich, H. Pieles 227

An Ultra-Precision Comparator using Interferometry for Distance Measurement andTwo SPMs as Detecting SensorsC. Harms, L. Koenders, G. Wilkening, H. Wolff, A. Schlachetzki 231

Influences on Coordinate Measurement Uncertainty for an Electron-Beam basedMask Comparator operating in VacuumW. HaBler-Grohne, H. Bosse 235

Profilometry Using A Diode Laser Interferometer With Two WavelengthsJ. Lobau, A. Abou-Zeid 239

11

Tunable 633nm Diode Lasers and Application for Phase Stepping InterferometryF. Imkenberg, A. Nicolaus, A. Abou-Zeid 243

Piezo Based Nanopositioning System with Large Movement Range inThree Degrees of FreedomV. Herald, S. Eckner 247

Microstructured Polymeric Cantilevers for Use in Scanning Probe MicroscopyH. Stiirmer, J.M. Kbhler, T.M. Jovin 251

High Precision Pitch Calibration of Gratings using Laser DiffractometryF. Meli, R. Thalmann, P. Blattner 252

Imaging with a Single Nanoparticle-Functionalized Scanning Tunneling Microscope TipP. Radojkovic, M. Schwartzkopff, E. Hartmann 256

Design of a Measuring System intensitive to Thermal GrowthM. Versteyhe, P. Van Herck, D. Reynaerts, H. Van Brussel 260

Long Range, Nanometer Resolution Microoptical SensorO. Parriaux, Y. Jourlin, J. Jay, Y. Alayli, F. Lozes, J. Noullet 264

Application of Polymer Concrete and Metrological Frame in Optical Microscope -a Case StudyF. Ribeiro, B. Purquerio, B. Di Giacomo 270

Trapped Living Cells in Transparent Three-Dimensional Micro-StructuresK. Otte, K. Zimmer, U. Zeitschel, A. Reichenbach, F. Bigl, V. Gottschalch, V. Bigl 274

Characterization of Fine Surfaces using an Atomic Force Microscope mountedon a Coordinate Measuring MachineN. Kofod, H. Hansen, L. De Chiffre 278

3-D Surface Topography Characterization of Ultraprecision Machined PartsB.K. Ngoi, S. Gowri, G. Udupa 282

Linnik's Microinterferometer with a Computer Analysis of Interference Fringes forCalibration of Roughness StandardsB. Smereczynska, L. Salbut 286

The Piezoelectric Droplet Generator - A Versatile Tool for Dispensing Applications andCalibration of Particle Sizing InstrumentsH. Ulmke, T. Wriedt, H. Lohner, K. Bauckhage 290

Displacement Measurements by a Combined Optical and X-Ray Interferometer (COXI)C.I. Eom, N.B. Yim 294

dimensional metrology

Novel Multi-Wave Standards for the Calibration of Form-Measuring InstrumentsO. Jusko, F. Liidicke 299

High-Accuracy & High-Response Touch Trigger Probe for Coordinate Measuring MachineK. Hidaka, N. Ishikawa, K. Nishimura 303

Next Generation Interferometry for Optical Figure MetrologyC. Evans 307

Interferometry for the GAIA Astrometric MissionM. Bisi, L. Bonino, M. Cecconi, S. Cesare, F. Bertinetto,G. Mana, D. Carollo, M. Gai, M.G. Lattanzi, E. Canuto, F. Donati 308

Dynamic Testing of a Scanning Probe CMMP.H. Pereira, R. Hocken . 312

Automatic Calibration of Measuring Tapes with a Friction Driver and an Image ProcessorC.J. Chen, S.H. Lu, H.C. Huang, R.H. Hsu 316

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New Coordinate Measuring Machine Featuring a Parallel MechanismT. Oiwa __ 320

Confocal Imaging: New Possibility for the Inspection of MicrosystemsG. Dussler, B. Brbcher, T. Pfeifer . 324

Non-Contact Measurement of Tooth Profile Error of Minute Module Gears -Application of Optical Cutting MethodH. Matsuoka, S. Kasei 328

Development of Highly Accurate Calibration Instrument for Ring Gauge usingan Optical EncoderY. Saruki, Y. Ohtuka, T. Horikawa, M. Yasuda 332

UNITEST: A New Device for the Static and Dynamic Testing ofUnconventional Machine StructuresK.E. Meitz 335

Flexible Arm as a Coordinate Measuring Device in Dimensional MetrologyI. Kovac, A. Frank 339

Measurement Method of Positioning Accuracy for SCARA RobotK. Maruyama, H. Tsuji, H. Kamiya 343

Development of Stereo Vision Probe for Precise Coordinate Measurement -Detection of Edge Position from Blurred Images by Inverse AnalysisM. Hayase, S. Nakayama, T. Hatsuzawa, K. Maruyama 347

Dimensional Measurement for Plastic Products using Triangulation MethodK. Mashimo , T. Nakamura, K. Maruyama, T. Hatsuzawa 351

An Automatic Volumetric Error Calibrator for 3D Volumetric Error inCNC Machine Tools using Ball BarH.J. Pahk, Y.S. Kim 355

Characterisation of Diffuse Scattering Surfaces by use ofPolychromatic Speckle ElongationA. Ciossek, G. Goch, P. Lehmann, S. Patzelt 359

Measurement of the Positioning Error of a Three Coordinate Measuring Machine usinga Reversal Technique with Hole BarB. Giacomo, R.B. Zirondi 363

Traceability of CMM through Partial Grid CalibrationB. Di Giacomo, R.M. Orrego, D.P. Sato 367

Perfect Evaluation of Difference Data resulting from Shearing Experiments withLarge Shears for Reference - Free Measurements and Error Separation TechniquesC. Elster, I. Weingartner 371

Digital Measurement of Two Dimensional Displacement by Inductive MethodY. Hojjat, M. Lotfi 375

Modified Laser Goniometer for Precision Angular Calibration ofTest Beds in Dynamic ModeM. Bournaschev, Y. Filatov, D. Loukianov, P. Pavlov 379

Algorithms for Free Forms Dimensional MetrologyM. Deni, M. Morara 383

Development and Characterization of New Probes for Dimensional Metrology onMicrosystem ComponentsT. Kleine-Besten, S. Loheide, U. Brand, S. Butefisch, S. Biittgenbach 387

Methods and Artefacts to calibrate Large CMMsL. Arriba, E. Trapet, M. Bartscher, M. Franke, A, Balsamo, G. Costelli, S. Torre, F. San Martin 391

Diode Laser Refractometer For Dimensional MetrologyA. Abou-Zeid, H. Bethge, J. Fliigge, P. Baume 395

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The Characterisation of Small Water Droplets for assessing Surface CleaningD.G. Chetwynd, V. Anghel 399

The Repeatability of Contact-Gauge Probes against Engineering SurfacesI. Najjar, D.G. Chetwynd 403

Shearing Measurements with Two Independent Shear DirectionsT. Siebert, B. Schmitz 407

Self-Compensated Laser Heterodyne InterferometerB.K. Ngoi, C.S. Chin 411

Theoretical Considerations for a New Tolerance System to characterizeTechnical Surfaces in the Micro- and Nanometer ScaleE. Westkamper, M. Kraus 415

Interferential Linear Encoder with 270 mm Measuring Length for NanometrologyJ. Thiel, E. Spanner 419

Interferometric Measurements of Aspherical Surfaces using Automatically AlignedNulltests and Multiple WavelengthsT. Pfeifer, H. Mischo 423

Error Sources, Measurement Uncertainties and Calibration Techniques inHigh-Precision MetrologyF. Bitte, H. Mischo, T. Pfeifer 427

Calibration of Granite Squareness StandardsR. Thalmann 431

Computer Aided Verification of CMMsG.B. Rossi, F. Crenna 435

Quality Assurance for University Research Laboratories oriented to Measurement for P.E.G.B. Rossi, F. Crenna, F. Pampagnin 439

Advanced Interferometry for Precision EngineeringP. de Groot 443

Characterization of the Long-Term Reproducibility of 2D CoordinatePhotomask Calibration at the PTBW. HaBler-Grohne, H. Bosse . 446

assessment of surface and sub-surface properties

Subsurface Damage Assessment with Atomic Force MicroscopyJ. Carr, E. Fearon, L.J. Summers, I.D. Hutcheon 451

Nanoindentation as a Probe of Near Surface Mechanical PropertiesK. Jarausch, J.E. Houston, P.E. Russell 455

X Ray Diffraction Microstructure Analysis of Ultra Precision Machined MaterialR. Fillit, P. Revel, H. Khanfir, M. Bonis, O. Jautzy 459

Correlation between Laseroptical Surface Analysis andThermometric Fatigue Limit DetectionS. Patzelt, G. Goch, W. Buck, H. Harig 463

Influence of Heat Treatment State on Material Changes close to the Surface ofMicromachined Steel SAE 1045A. Wick, V. Schulze, D. Lbhe 467

Nano Scale Delamination of Carbon Nitride Coating underMicro Scratching Process with an AFMN. Umehara,M. Kawauchi, H. Koide 471

Thermal Effects on Microstructure of Precision Aluminum Machined SurfaceT. Kaneeda, S. Yokomizo, K. Morimoto 475

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Contactless Topography and Microhardness Measurements usingScanning Near-Field Acoustic Microscopy (SNAM)G. Goch, P. Lehmann 479

Surface Integrity during High-Precision Cutting of Hardened SteelsA. Mamalis, M. Horvath, J. Kundrak, I. Meszaros, D. Paulmier 483

Measurements of the Surface Contamination after LappingA. Barylski 487

Photothermal Inspection of Ceramics - Verfication of Mechanically orThermally Induced Material Changes in Near-Surface ZonesB. Schmitz, H.G. Walther 491

Scanning Force Microscopy Studies on the Influence of Oxygen Concentration onthe Surface Features of Implanted and Annealed Silicon WafersS. Frank, M. KeBler, W. Lerch, U. Kreiser, B. Schmitz 495

Describing the Directional Properties of Roughness on Machined SurfacesT.R. Thomas, N. Amini, B.G. Rosen 499

Modelling and Engineering of Honed MicrotopographyB.G. Rosen, R. Ohlsson, M. Plass T. R. Thomas 503

High Accuracy High Speed Gaussian Filter in Surface MetrologyY. Yuan, J.F. Song, T. Vorburger 507

Subsurface Damage Reduction of Ground Silicon WafersH. Tbnshoff, S. Lehnicke 511

A Scanning Acoustik Microscopy for estimating the Depth of Deformed LayerY.W. Park, H.Q. Lee 515

Comparative Study of the Mechanical Properties of Ti:Tin and AI:AI_O3 Multilayers:Effect of the NanostructureS. Labdi, M. Ben-Daia, P. Aubert, C. Le Paven, C. Sant 519

Deposition of Mo/Si Multilayer Coatings for EUV Spectral Region usingPlasma Ion Beam Assisted EvaporationT. Feigl, N. Kaiser, M. Pommies, S. Yulin 523