EN_Product_Overview_06_MFC.pdf

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Brkert Fluid Control Systems

Christian-Brkert-Strae 13 -1774653 IngelfngenGermany

Tel. +49 (0) 7940/10 - 0Fax +49 (0) 7940/10 - 91 204

[email protected] 07

SOLENOID

CONTROL

VALVE

S

Mass Flow Controllers for Gases

0601SOLENOID

VALVES

02

PROCESS

VALVES

03

PNEUMATICS

04

SENSORS

05

MICROFLUIDICS

Product Overview

894522/Version04/12

Print04/12

www.wolf-corporate.de


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Brkert | Mass Flow Controllers2 3

In industry, when the term gas is spoken about in all the languages of Europe, al-

most everybody means the same thing. What is less known is that the words originis rooted in the Greek word for chaos. Coincidence? Probably not! Gases are pe-

culiar. They are volatile, sometimes reactive, and always expansive. This means that

gases have very special handling requirements.

Process gases are indispensable in industrial manufacturing. From coating and

hardening surfaces, right through to the fermentation processes used in the phar-

maceutical world. Inert gases are used for example to protect packaged foodstuffs

against the effect of atmospheric oxygen and in metal processing to prevent the

oxidisation of welds. Reactive gases on the other hand are used in industrial appli-

cations to have a specic inuence on selected processes, and also in the research

and development of new products. Whatever the application, it is all down to precise

regulation, constant control and accurate metering of the gas media, ensuring a

consistent and reproducible result, whilst maintaining process security and limitingcosts.

And nobody knows this better than Brkert because we have been successfully

measuring, controlling and regulating uids for more than 60 years. We cover the

entire process loop with an impressive range of product diversity. We have always

been particularly focused on the ow of gaseous substances, and as a result of our

passion, numerous products have been materialised. Brkerts Mass Flow Meters

(MFM) and Mass Flow Controllers (MFC) rank among the most sought after com-

ponents in the business. With a well established position in various processes all

over the world, they set the standard in the measurement and control of mass ow

rates.

Reproducible accuracy and precision, with a coherent price-performance ratio these are the exceptional characteristics of Brkerts thermal MFMs/MFCs. Our

mechatronic devices unite the functionality of several components at once, in an

efcient compact structure with no moving components in the gas ow. Compact-

ness and device intelligence make gas handling so much easier.

Form your own image of the efciency of Brkerts MFMs/MMCs. This brochure

will get you started with its technical descriptions and a detailed product overview.

Introduction

Content

3

4

6

8

9

20

22

24

26

Introduction

Fascination Brkert

Product Overview

Measuring Principle

Mass Flow Controllers Setup and Functioning

Typical Applications

System Solutions

Appendix

Contacts at Brkert


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Fascination Brkert4 5

The brochure contains an over-

view o Brkert miniature valves

and micro pumps, which allow or

precise and sae handling o smallvolumes o liquids.

This brochure provides technical

background inormation as well

as a detailed product overview or

the mass fow controller and meterproduct range.

This brochure presents our sole-

noid control valves including their

respective eatures, unctions and

typical applications.

Brkert oers a remarkable

range o servo-assisted and

direct acting solenoid valves.Read more about them in this

brochure.

Brkert oers unlimited modu-

larity or process control withangle-seat, globe and diaphragm

valves in the widest range o

congurations.

Here you can nd our product

range o pneumatic valves, valveunits and automation systems as

well as inormation on our control

cabinet building.

Here you can nd our sensors,

transmitters and controllers ormeasuring and controlling fow,

temperature, pressure, level,

pH/ORP and conductivity.

Welcome to the Fascinating

World of Fluid Control Systems

Brkert Product Program

Measurement and control: When it comes to working with liquids and gases, we are at your side as a manuacturer o

sophisticated products, as a problem-solver with an eye or the big picture, and as a partner oering you reliable advice.

Since we started in 1946, we have developed into one o the worlds leading suppliers o Fluid Control Systems. At the

same time we have kept our status as a amily-owned business with a oundation o strong basic values to highlight the

way we think and act.

We are one o the ew suppliers on the market to cover the complete control loop. Our current product range

extends rom solenoid valves through process and analytical valves to pneumatic actuators and sensors.

EPERIECEThere are things which are not inherently yours. You have to gather them bit by bit. You receive them rom others. And

you constantly have to acquire them anew. That is what makes them so valuable. Experience is one o those things. For

instance, because o our many years o experience with metering and controlling o gases, we can provide our extensive

services to you rom consulting, development, and 3D CAD simulating to testing and ater-sales service. Whether in-

dividual product solutions or a pioneering new system or the entire control process: Beneft rom our experience!

COURAGEThose who only work toward optimising things that a lready exist will eventually reach the limits technically, fnan-

cially, or personally. In order to overcome these limits, courage is needed: the courage to be dierent and trust ones

own ideas; the courage to venture into the unknown, searching or new ways to develop products that have never exi-

sted beore. We have this courage. By pooling and utilising our competencies across all sectors, you beneft rom our

cumulative knowledge in Gas Handling applications whether it is plasma gas control or hydrogen in uel cell techno-

logy.

CLOSEESSThere are things we simply take or granted. Only when they are gone, do we realise how important these things really

were. This applies in particular to closeness. Without closeness, it is very difcult to build relationships and a good un-

derstanding o one another. As an established medium-sized company, we know that. And that is why we are always

there or you. Working with you, we develop the best possible solutions or your projects in the area o Gas Handling.

Our global presence in 35 locations enables us to press ahead with technical innovations or our customers around

the world.

Product Overview

0201SOLENOID

VALVES

03

PNEUMATICS

04

SENSORS

05

MICROFLUIDICS

06

MASS

FLOWC

ONTROLLERS

07

SOLENOID

CONTROLVALVES

Process and Control Valves

0401SOLENOID

VALVES

02

PROCESS

VALVES

03

PNEUMATICS

05

MICROFLUIDICS

06

MASS

FLOWC

ONTROLLERS

07

SOLENOID

CONTROLVALVES


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Product Overview

Type 8626 (MFC) / 8006 (MFM) 8710 (MFC) / 8700 (MFM) 8715 (MFC) / 8705 (MFM) 8711 (MFC) / 8701 (MFM) 8712 (MFC) / 8702 (MFM) 8713 (MFC) / 8703 (MFM)

Full scale ranges(273,15 K, 1013,25 mbar)

20 - 1500 lN

/ min (N2) 0.005 - 10 l

N/ min (N

2) 0,01 - 80 l

N/ min (N

2)

Sensor technology Inline Sensor Capillary Sensor CMOS Sensor

Body material Stainless steel, aluminium Stainless steel Stainless steel, aluminium Stainless steel Stainless steel, aluminium

Pressure / bar 10 10 10

Turn-down ratio 1:50 1:50 1:50

Accuracy 1.5 % o. R. 0.3 % o F. S. 1.5 % o. R. 0.3 % o F. S. 0.8 % o. R. 0.3 % o F. S.

Settling time < 500 ms < 3000 ms < 300 ms

Repeatability 0.1 % o F. S. 0.1 % o F. S. 0.1 % o F. S.

Protection class IP65 IP40 IP40 IP65 IP40

C om mu ni ca ti on S ta nda rd si gn al , R S-2 32 o r R S-4 22 ,Profbus DP, DeviceNet, CANopen,Modbus

Standard signal, RS-232 or RS-422,Profbus DP, DeviceNet, CANopen,Modbus

RS232 or RS-422, Modbus Standard s igna l, RS-232 or RS-422,Profbus DP, DeviceNet, CANopen, Modbus

Standard signal, RS-232 or RS-422,Profbus DP, DeviceNet, CANopen,Modbus

RS-232 or RS-422, Modbus

Special eatures Sensor in contact with medium Sensor not in contact with medium Sensor in contact with medium

Low pressure drop Low pressure drop Low pressure drop

No ow conditioning required at inletor outlet necessary



Neutral gases Aggressive, toxic gases Neutral gases

Real gas calibration Real gas calibration or conversion actor Real gas calibration; conversion actorsor some gases possible

Leak tightness (outside) downto 10 -6 mbar l

He/s

Leak tightness (outside) downto 10 9 mbar l

He/s

Leak tightness (outside) downto 10 6 mbar l

He/s

Less sensitive to humidity andparticles

Less sensitive to humidity and particles


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The Measuring Principle

of Thermal Mass Flow

The physical law is well known heat always ows towards lower temperatures. So i a body has

a higher temperature than its environment, it will give o its heat energy to the neighbouring mass.

So our thermal/calorimetric measurement technique utilises this principle, i. e. heat conduction and

transportation in gases.

The thermal ow sensors or determining the mass ow rate o gases essentially consist o a heating

element and temperature sensors, which can be installed both in and outside the gas ow channel.

The heating element heats the gas owing through, and the temperature sensors detect the dissipated

heat volume.

The respective dissipated heat energy is a unction o the current mass ow. The mass ow liter-

ally defnes the weight o the owing medium, more specifcally this is the weight o the gas that

ows through the device in a specifc time unit. This is usually given in kg/h, g/s or mol/s. In contrast

to the mass ow, the volume ow defnes the volume o the gas (measured in m3/h, l/min or ml/s)

that ows through the device in a specifc time unit. I you measure the gas volume, you must know

additional values such as temperature and pressure so that you can make comparisons. So there

are good reasons or measuring the mass ow and not its volume ow because gases are com-

pressible. Depending on its pressure and temperature, both the density and thereore its v olume will

change. In many applications mass ow measurements thereore are more relevant than volume

ow measurements.

MFMs/MFCs are ideal or application areas where high precision and reproducibility are required

such as in burner technology, coating systems and uel cell applications. In addition it is possible to

use MFMs/MFCs where the use o volume ow units are standard. Why? Because i we know the

standard density, we can calculate the standard volume ow directly rom the mass ow value. The

rate o the volume ow then reers to the standardised condition or comparability reasons (in acc.

with DIN 1343, see Appendix on page 24).

The MFMs/MFCs presented in the ollowing pages can be calibrated or both mass ow and volume

ow (see Calibration on page 16).

The 8626, 8710, 8711, 8712, 8713 and 8715 type Mass Flow Controllers are compact devices that

control the mass ow o gases. They control a preset ow rate reerence value regardless o dis-

turbance variables such as pressure uctuations or temporary occurring ow resistances, e. g. as a

result o flter dirt. MFCs consist o the ollowing components: ow sensor, electronics (with signal

processing, regulation and valve control unctions) and a solenoid control valve as an actuator. The

reerence value setting is made electrically via analogue signal or feldbus. The actual value mea-

sured by the sensor is compared in the controller with the reerence value. The controller gives a

pulse-width modulated voltage signal to the actuator as a correcting variable and varies it accord-

ing to the registered control deviation. The actual value is also transmitted externally via an analogue

signal or feldbus. It is thereore provided to the user or controlling and analysing. With its easy in-

stallation, the compact structure o the Mass Flow Controller ensures the convenient operation o

a complete (closed) control loop. Additional work and costs, e. g. wiring and harmonising individual

components, incorporating pipe lengths (inlet/outlet pipe or ow conditioning), are ruled out.

Mass Flow Controllers Setup

and Functioning

Fig. 1: Basic principle closed control loop

Flow sensor

Control valvesignal

Set pointsetting

Pipe inlet Pipe outlet

Solenoid controlvalve

Actual valuex

Control electronicsx

out

Actual value feedback

xd

= w-x

wy


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Brkert | Mass Flow Controllers10

Inline Sensor

Types 8626/8006

The Inline sensor works in the CTA operating mode (Constant Temperature Anemometer), whereby

an electrical heating resistance (RS) and a measurement resistance (R

T) are regulated at a constant

temperature dierence. Both resistances are directly placed in the ow channel; three more resist-

ances are outside. Together they are all connected into a measurement bridge. The frst resistance

in the gas ow (RT) measures the uid temperature. The second, low ohmic resistance (R

S) is con-

stantly heated just enough so that a fxed preset overtemperature is maintained or the uid tem-

perature (measured with RT). The heat current required or this is used as the measurement or the

gas owing through the channel. Appropriate ow conditioning in the MFC ensures that the mass

ow can be very precisely derived. Because o the arrangement o the RS

and RT

resistances directly

in the ow channel, the devices have exceptional characteristics, with response times o just a ew

hundred milliseconds with set point or actual value changes. The sensor arrangement ensures low

contamination susceptibility.

Setup and Functioning 11

CMOS Sensor

Types 8711/8701, 8712/8702, 8713/8703

In contrast to the INLINE sensor, with which the mass ow in the main channel is measured, the

CMOS sensor determines the values directly in a secondary channel. In detail: A laminar ow

element brought into the main channel ensures the necessary pressure drop. This causes a small

part o the total ow rate to be diverted into a parallel secondary channel. A silicon chip with a mem-

brane is ftted to the wall o the ow channel or sensing the ow rate. This membrane includes (in

CMOSens technology) a heating resistance and two symmetrical temperature sensors upstream

and downstream. I the heating resistance is now held at a constant temperature, the dierential

voltage o the temperature sensors applies as the measurement or mass ow rate o the gas ow-

ing over the chip in the ow channel. The low thermal mass o the temperature sensors and their

direct contact with the ow have specifc advantages including extremely quick response to ow

rate changes. The MFC can control set point or actual value changes within 100 ms and it maintains

its high sensitivity, even with the smallest ow rates.

Fig. 3: F unctional schematic of CMOS sensorFig. 2: Functional schematic of Inline sensor


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Capillary Sensor

Types 8710/8700, 8715/8705

As with the CMOS sensor, a laminar ow element also causes a pressure drop in the main channel

with the capillary sensor. A part o the total ow rate ows through a parallel running secondary

channel. The decisive dierences: the capillary sensor has no direct contact with the medium. The

stainless steel capillary is surrounded by two temperature-dependent resistances, which orm the

hal-bridge o a Wheatstone bridge circuit. I gas now ows through the capillary, its gas ow carries

heat in the ow direction rom R1

to R2. The R

1resistance value alls; while the value o R

2increases.

I the bridge circuit is ed with constant current, its outlet voltage changes proportionately to the re-

sistance dierence. The measuring range then shows a linear dependency between the outlet volt-

age and mass ow rate o the gas owing through. This linear dependency even enables the use o

gases that the sensor is not calibrated or. The ow rate value is adjusted accordingly to the current

medium using a conversion actor. The resulting simplifed calibration and the correct material selec-

tion or the gas ensures the capillary sensors suitability or the use with aggressive gases.

The measurement dynamic depends on the wall properties o the stainless steel capillary. It acts

to a certain degree as a thermal barrier. The capillary sensor achieves response times o just a ew

seconds. This is sufcient or many applications with aggressive or toxic gases.

Setup and Functioning 13

Solenoid Control Valve

Solenoid control valves are electromagnetic control valves. They open to specifc stroke positions

depending on the control signal. Two orces counter one another in the valve: one a spring, and the

other generated by a magnetic feld. In the power o state the pretensioned spring presses the

plunger directly on to the valve seat, and the valve stays closed. I power is supplied to the coil a

magnetic feld is produced, which lits the plunger against the spring orce. The valve opens and the

medium (gas) ows. The level o the coil current directly inuences the magnetic orce, the plunger

stroke, the valves opening degree, and thereore the amount o gas that ows through the valve.

This simple, direct-acting construction keeps the control valves small, compact and cost-optimised.

These are the properties that make solenoid control valves especially ideal or closed process control

loops, where their precisely reproducible control positions and short response times make them

particularly impressive.

The orifces o the valves are calculated rom these parameters: required nominal ow rate (Qnom

),

the pressure conditions o the application, temperature and density o the operating gas (see: Con-

fguration on page 18). MFCs with solenoid control valves in the orifce range o 0.05 mm to 12 mm

have a wide ull scale range.

Fig. 5: Functional principle of direct-acting solenoid control valvesFig.4: Functional schematic of the bypass measuring principle

Closed state Controlled inclined position Opened state

Characteristic of

an electromagnetic

control valve

Control signal

Flowrate


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Faszination Brkert 15Brkert | Mass Flow Controllers14

Digital Control Electronics

The electronic microprocessor system processes the set point and actual ow rate values. In addi-

tion it also controls the actuator (solenoid control valve). The control electronics have the task o

digitalising the analogue sensor signal. Using a calibration curve stored in the device, it converts the

sensor signal into a value that corresponds to the actual ow rate value. The controller processes

the control deviation xd

between set point value w and actual value x in accordance with a PI action,

rom which it calculates the correcting variable y, with which the actuator is controlled. The control

parameters are set beorehand with the actory calibration. Because o the specifc properties o

each and every control process, the controller works with process-dependent amplifcation actors,

which are automatically determined with an auto-optimisation routine (Autotune). Control dynamics,

flter level and damping o the returned actual value signal the MassFlowCommunicator commu-

nication sotware helps to adjust these settings later on. Depending on the device model, the set

point value and actual value signals can be predefned and ed back either by analogue or digital

technics: analogue via standard signal interace or digital via RS-232/RS-422 or feldbus interace

(Profbus, DeviceNet, CANopen and Modbus). The digital RS-232 or RS-422 interace is required

or communication with the MassFlowCommunicator sotware (device-dependent). The microproc-

essor controlled electronics provide signifcant benefts: they reduce drit and oset occurrences

o the components and enable sotware-based control o the most important processes (ash-pro-

grammed and update-enabled). The relevant data or this (calibration curves, correcting unctions,

control unctions, etc.) can be stored in the memory.


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Brkert | Mass Flow Controllers16 Setup and Functioning 17

Calibration

The sensors measuring signal range is unambiguously assigned to the ow rate control or measur-

ing range with the calibration. Extremely precise ow reerences are used to set the ow rate values

and record the respective sensor signals. I the ow curve is registered, the electrical inputs and out-

puts can be calibrated, i. e. the ow range can be assigned to the signal range. Mass Flow Meters and

Controllers are generally calibrated or a specifc gas. Another gas can only be reliably controlled or

measured when a second calibration curve has been stored. Exceptions to this are gases with similar

properties, such as nitrogen and oxygen. A conversion actor across the entire ow range is sufcient.

With devices with capillary sensors, access to conversion actors is sufcient with most gases because

o the very low accuracy losses. Essentially every kind o gas mixture can be measured i its composi-

tion remains constant. MFMs/MFCs are oten calibrated or the ollowing gases: air, nitrogen, oxygen,

argon, helium, hydrogen, methane, natural gas, propane, ammonia, carbon dioxide, carbon monoxide,

sulphur dioxide or other various gas mixtures. I the highest precision is required, calibration with the

operating gas (real gas calibration) is recommended in most cases. Aggressive gases cannot be real

gas-calibrated. The ow reerences used in calibration test stands are based on DKD (Deutscher

Kalibrierdienst/Deutschland German Calibration Service, part o the PTB) and NIST (National In-

stitute o Standards/USA). The PTB is a signatory o a global recognition agreement or calibration

standards (MRA Mutual Recognition Agreement).

Fig. 6: A calibration certicate is created for each MFM/MFC after calibration. Two calibration certicates are pro-vided for MFMs/MFCs supplied for the use of two gasesor for devices with a wider measuring span.

Parametering

Setting the control dynamics

Selecting the standard signals or set point and

actual value

Setting a set point profle

With multiple calibrations: Selection o an operating gas

Assignment o unctions to binary inputs:

Gas changeover

Autotune

Resetting totalizers or limit value switches

Saety set point

Control operation (set point controls

the valve directly)

Valve opening, e. g. or purging processes

And more

Assignment o unctions to binary outputs:

Error signalling

Control output, e. g. or shut-o valve

Limit value eedback (fow rate, totalizer)

And more

Diagnostics and service

Control loop analysis

Graphic illustration o the set point, the actual value

and control value or the v alve, over the respective period

LED display or operating state

Recalibration routine

Firmware update

Autotune unction: automatic valve control

range adjustment to the process conditions

Standard signal calibration

And more

Additional functions

The MassFlowCommunicator communication sotware allows numerous additional unctions to be pro-

grammed. To acilitate this the MFM/MFC is connected with a computer via an adapter. The ollowing

unctions/options are available.


10/14


Is the gas going to be controlled or just measured?

MFCs contain a solenoid control valve that sets the desired gas ow rate. MFMs however, only pro-

vide the current gas ow rate in the orm o an actual value signal.

What medium is to be controlled, dosed or measured?

MFMs/MFCs can be calibrated or a gas or gas mixture. I it is a gas mixture, an exact composition

in percentages is important or confguring and calibrating the device. MFMs/MFCs with Inline or

CMOS sensors need to be calibrated using the operating gas (real gas calibration) or both gases

and gas mixtures. MFMs/MFCs with capillary sensors have a linear correlation between ow rate

and measurement signal, allowing calibration with a neutral gas. The determined ow rate is correct-

ed during operation using the conversion actor o the respective operating gas or gas mixture. The

material compatibility o the MFMs/MFCs components must be ensured. The relative humidity can

be almost 100 %. A liquid state must, however, always be prevented. Particulate matter should be

excluded with pre-fltering.

What process data is available?

For an optimum MFM/MFC confguration some application data has to be available. Firstly the

maximum ow rate (Qnom

); according to the mediums normal density N. This can be determined

with the known gas mixture composition. Next we require the medium temperature (T1) and the

pressure values with the ow rate (Qnom

) measured immediately beore and ater the MFMs/MFCs

(p1, p

2). The MFM/MFC k

Vvalue is calculated with all this data (please see a data sheet o solenoid

control valves). For the MFCs control properties it is important that the calculated MFM/MFC kV

value is greater than the kV

value o the overall system. With a too high kV

value, the resolution and

thereore control qualities o the valve are impaired. I the setting is too low the MFC cannot achieve

the required ow rate. The MFC authority (valve authority; please see appendix) should not be less

than 0.3 0.5. By dividing the maximum ow rate (Qnom

) by the span, the minimum ow rate (Qmin

)

can be calculated. For a guaranteed close tight unction in all operating states, the maximum inlet

pressure (p1max

) is required.

How do I communicate the set point and process value?

The control electronics are set up digitally. The interaces can be confgured as either analogue or

digital. There is a choice o industry standard analogue signals, digital communication RS-232 or

RS-422 or feldbus (Profbus, DeviceNet, CANopen, Modbus).

Conguration


11/14


Typical Applications

Flame Control

Fig. 7: MFCs and MFMs are used to provide combustion gas and oxygen in precise ratios.

The ollowing illustrations demonstrate possible areas o application or MFMs/MFCs.

Plasma control

Fig. 8: MFCs precisely dose gas and gas mixtures into a vacuum chamber and therefore enable

products to be processed in a plasma atmosphere.

Solenoid valve

Solenoid

valve

Vacuumpump

Purging gas (nitrogen)

Pressure

controller

Solenoid valve

Solenoid valve

Check valve

Mixer nozzle

Oxidant gas

(air or oxygen)

Combustion gas

(methane, propane

or acetylene)

p

p

Argon

Oxygen

Nitrogen

Atmosphere Control

Chamber

Gas 1

.......

Filter

Pressureregulator Float

Manual valve

Solenoidvalve

Gas 4

Fig. 9: The MFCs provide dened atmospheres to guarantee reproducible processes. The atmosphere

volume can range from a specic point on a weld seam to the chamber volume of a hardening furnace.

Vacuum chamber

MFC

MFC

MFC

MFC

MFC

MFC

MFC


12/14

Faszination Brkert 23Brkert | Mass Flow Controllers22

Gas handling applications vary, the technology is complex and the oering range is diverse. So obvi-

ously it is always easier i you have a partner at your side that has a long standing reputation that goes

ar beyond the development o high tech and innovative products. For more than 10 years, Brkert

has been established as a global leader in the provision o system solutions.

The advantages o Brkert system engineering capabilities are convincing. With one single order

number you can have a complete package to satisy all your specifc requirements. You are there-

ore ree o procurement and installation work and consequently the respective costs. For example

Brkert system solutions could consolidate a complicated series o valves, pipework and their re-

spective connections, into a simplifed and smart solution. The entire system is checked to ensure

it is sealed tight and has ewer sealing points, which provides saety and security! In gas control

applications numerous components interact with one another: These include solenoid valves, MFCs,

sensors, switches, block-integrated check valves, integrated and replaceable flter elements and

manual valves. These are all components that demand space. But a modular, compact installation is

guaranteed i the entire system and technology come rom one single source. With Brkerts modular

system engineering you have all the necessary, uture proo options, because Brkerts modular

systems make later upgrades incredibly easy. Whether it is modifcations to existing installations or

or example, to provide additional valve positions today, which you may need some time in the uture.

Brkert provides system solutions to uncomplicate your world, through our experience, expertise and

holistic competence.

23

System Solutions

Solenoid valve

Customised

base block

with xing holesOptional manual valve

Pressure

switch

Integrated

check valves

Optional PI controller

with solenoid control valve

Manometer for

pressure display

Optional pressure

transmitter

Manual pressure

regulator

Integrated, replaceable

inlet lter

Fig. 10: System example


13/14


Temperature C F

-10 14

0 32

10 5020 68

30 86

40 104

50 122

60 140

70 158

80 176

90 194

100 212

Pressure bar mbar Pa Torr psi

1 bar = 1 10 105 750.1 14.505

1 mbar = 10-3 1 10 750.1*10-3 14.50*10-3

1 Pa = 1 N/m = 10-5 10-2 1 750.1*10-5 14.50*10-5

1 Torr = 1 mmHg = 1.33*10-3 1.33 133 1 19*10-3

1 psi = 1 lb/in = 68.9*10-3 68.95 68.96*102 51.71 1

Flow rate

(mass)

kg/h g/h g/min

1 kg/h = 1 10 16.67

1 g/h = 10-3 1 16.67*10-3

1 g/min = 0.06 60 1

Flow rate

(volume)

m/h dm/h dm/min cm/h cm/min cu t/h cu t/min

1 m/h = 1 10 16.67 106 16.67*103 35.32 58.87*10-2

1 dm/h (l/h) = 10-3 1 16.67*10-3 10 16.67 35.32*10-3 58.87*10-5

1 dm/min (l/min) = 0.06 60 1 60*103 103 2.119 35.32*10-3

1 cm/h (ml/h) = 10-6 10-3 16.67*10-6 1 16.67*10-3 35.32*10-6 58.87*10-8

1 cm/min (ml/min) = 60*10-6 0.06 10-3 60 1 21.19*10-4 35.32*10-6

1 cu t/h (ch) = 28.32*10-3 28.32 0.472 28.32*103 472 1 16.67*10-3

1 cu t/min (cm) = 1.69 1.69*103 28.32 1.69*106 28.32*103 60 1

25

Appendix

Full scale range/Nominal fow Qnom

The ull scale range is the range o possible ull scale values.

The lowest value is the lowest possible ull scale value/

nominal ow rate; the highest value is the highest possible

ull scale value/nominal ow rate. The fgures reer to de-

fned reerence conditions (e. g., standard litre per minute

or standard cubic centimetre per minute).

Operating medium/Calibration medium

The operating medium is generally used or calibration; in

exceptional cases a reerence gas (e. g., nitrogen) is used.

Span

Given as a ratio, e. g. 1:50. Ratio o the smallest controllable

ow rate value to the nominal ow rate.

Settling time

Time that the MFC requires to achieve 95 % o the dier-

ence between the old and the new ow rate value ater a

set point change; given in ms (milliseconds).

Response time

Time the MFM needs to achieve 95 % o the new value

ater a sudden ow rate change rom Q1

to Q2.

QMFM

(t95

) = Q1

+ 0.95 (Q2

- Q1)

Accuracy

Given in x % o reading y % o ull scale. The frst value

is a relative percentage; the second is a basic percentage.

Repeatability

Given in x % o ull scale. Repeatability is a mass or

variation o actual values that result with repeated setting o

a certain set point.

kV

actor (fow rate coecient)

The kV

value is also called ow rate actor or ow rate co-

efcient. It is a unit or the achievable ow rate o a uid or a

gas through a valve and is used or selecting and dimension-

ing valves. The value is given in m/h. It corresponds with

the water ow rate through a valve (in m/h) at a pressure

dierence o 1 bar and a water temperature o 5 - 30 C.

cV

actor (fow rate coecient)

Similar to the kV

actors, based, however, on the imperial

measurement system. Given in US gallons per minute, at a

pressure drop o 1 psi and 60 F temperature.

cV

= kV*1.17

Normal conditions (DIN 1343)

Normal conditions are defned at

pN

= 1.013 bar absolute

tN

= 0 C (273 K)

Standard conditions

Standard conditions are defned at

pS

= 1.013 bar absolute

tS

= 20 C (293 K)

Density

Density () provides the correlation between mass ow (m )

and volume ow (V ). The pressure and temperature con-

ditions, the density is reerred to, must be considered here

(see above)

= m /V

Valve authority ()

= (p)V0

/ (p)0

(p)V0

= MFC pressure loss at ully opened valve

(p)0

= System pressure


14/14

Contacts at Brkert 27Brkert | Mass Flow Controllers26

Brkert Close to You

Credits:andconcept:ChristianBrkertGmbH&Co.K

G|Realization:WOLF,Berlin|Photography:MnchLichtbildnerei,Stuttgart;Stu

dioFlamisch,D

sseldorf

|

3D-Drawings:3DSalesTechnologiesGmbH.A

llpeoplesho

wnareemployeesatBrkert.T

hankyouforyoursupport

(andspirit).

Europe Europe, continued

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For up-to-date addresses please visit us atwww.burkert.com.

Pacic, continued

Documents

EN_Product_Overview_06_MFC.pdf