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Electron Beam Evaporation System
Model SC 3500
470 Commerce Way, Livermore, CA 94551• Tel. (925) 373-8201 • Fax: (925) 373-8202www.semicore.com • email: [email protected]
Fully-equipped with Custom Features
40” (1016mm) dia. × 60” (1524mm) high Stainless Steel, Water Cooled Vacuum Chamber:
• Front Opening, Sealed Door• 16” Cryogenic Pump• Water Cooled Baffle• Dry Roughing Pump• Water chilled chamber walls
System Control:
• Integrated Deposition Process Control• PC/PLC “HMI” Architecture
Deposition Equipment & Tooling:
• Two 4-pocket Electron Beam Guns• Co-Evaporation• Automatic/Manual Operation• Two 6kW Electron Beam P/S• Programmable Beam Sweep• ION Source Cleaning & IBAD• Rotating/Tilt Substrate Holder• 16kW IR Heater• 3 Mass Flow Meters• Configurable to meet customer requirements
Utilities (Variable):
• Electrical 208V–480VAC/3phase/60Hz/5 wire
Electron Beam Evaporation System
Model SC 3500Available for Immediate Sale and Demonstration
470 Commerce Way, Livermore, CA 94551• Tel. (925) 373-8201 • Fax: (925) 373-8202www.semicore.com • email: [email protected]
