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8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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17-1 !"#$%&'()* Sentaurus Process
!"#$%&'()*+,-./0123#45"#$%,"#6-.7
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17-1-1 Sentaurus Process%&+'(%,-.[3]
Sentaurus Process V Synopsys Inc.bXef,XYZ TCAD ()Lno([5
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Sentaurus Process ,'(UVN91)*)+,()&:no5-b,./Ag5•
; Sentaurus Process()no*4ScC,-b0D7!N'5•123,N94
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Sentaurus Process a?ED,vD(:DdF(no*45j Unix GH;
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fbreak &nodTUVB9A
fexec wXe8*467.lA
init wX5T0[yC1r,abSxFG1hiA
interface scHvw,t&:CA
mgoals &wMGOALStucCmwEFA
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3.2 Sentaurus Process#I>JKEFCD
Sentaurus Process,abSxf].lwXf] Sentaurus ProcessSBv,ab
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region wX{tyzmwC,yzvwA{A
line wXt-ab,yzA{mwA grid e8mwcC,|=67A
substrate_profile t-|aab}~•@'|+,-bA
polygon cC|aab,!tzSxA
point cC|aabSxC,Yk!A
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profile 62FG-bZ>*FGAA
refinebox cC#$mwEFZ&w MGOALSHe8mw%DA
bound U2vwt&Zsc&O+BA
contact cCabno}c,$'SxhiA
transform cC1(Sx.l,67A
3.3 Sentaurus Process#%&LMEFCD
()
8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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7.lj@
Arrhenius Arrheniusw`|atA,{F|+BDAArrhenius67
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beam 2fwXjOIde,BDEFA
equation !#YkBD,341YkN:,~]A
gas_flow a!#Ykpq
8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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term t-N:C&w,XBG9A
update_substrate cC}~C,@*L4)K(FG;!wt/FGA
reaction {t^l4vw,kghiA
3.5 RS Sentaurus Process#TU;
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Sentaurus Process&w,bc-b0D$@
y1~Sentaurus Process UVW567-by*.cmd~AUVW567-bbV
17-1-1 \Cis$|)* Sentaurus Process UVW567-bY\CS]^,UV
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y2~Sentaurus Processs2p-by*.log~ Sentaurus Processs 2p-bV Sentaurus Processs 68_:C>-%@,A
Sentaurus Processs 2p-bCbc!Sj()c,abSxhiA
y4~TDR t&-b(*_bnd.tdr~
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y6~DF-ISE•@1mw,>t--b(*_msh.cmd)
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Sentaurus Process 0:PQ@vAB"#$%o9:OE()no,W:;5
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8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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x 17.1.1@Sentaurus ProcessUL,FGHIJa
$x 17.1.1 S_5R;STSIt,i%UEF2f,bV,DDeD&'V
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Process5T567-bCs_567EF,M?`PQb:A
3 Sentaurus Processxz5fSTWX([
y1~ Yr5fSTWX([ Inspect[4]
Sentaurus Process Csxz5fST+{a InspectAInspect Vw`WX)?@
1|mYrxz5fSTyY3~,UV([AInspect[jpq)NO,xzwK&
'5OXwKuY3d8X,)MZ4,cC1+{ASentaurus Process ULIs_
567-be Inspect xz5fSTUV([,8TN95wK:•05T567-
b,rW:CV&w SetPlxList1WritePlx67,S}c,•@hi1rHYkp0
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8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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x 17.1.2@5fSTWX([ Inspect+{&'
•;xS_5wK:•0[&'XG}cuY3,mwcC;5f,z9)5
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:ZD:610TA`RST,WX1+{UVN9o Tsuprem-%,678UVN
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Sentaurus Process ()no@#,SxhiST;sr]trFGhiSTVs
_ Tecplot SV ([`WX)?@,AwK:•,SxhiST;FGhiSTs_
struct 67,klI^ytdr)dfise ] ise.mdraw~1rH TDR w9] DF-ISE w9
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8/20/2019 eetop.cn_Sentaurus Process ÖÐÎĽéÉܼ°Ê¹ÓÃ
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Sentaurus Process !#jOkT•@,noyL5kT'#,kTAB'no1
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17-1-3 Sentaurus ProcessYab/c"NO
Sentaurus Process o'c4|}ab)vAB"#$%;@vAB"#$%tA
N'()&:,()Lno1()L:&'4cd5>:•awKUL[jn8z9
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VP;5Sentaurus Process 0Fd,tA()BD,W:;5u`!BDd8IpUA$@0jOkT]mBD;hz5iyMC~kTBD)m*+•@BDC
,@*Fq1@*rs•;•@uC$$e,FG)#$"(Jl(1D,*B•;
,D_:Cu,D=rs8a,*B7!N'd8I!fA
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1 Sentaurus Processd/efgbNO
0 Sentaurus ProcessC5!#jOkT•@(\,no:•&w]mkTBD]
hz5iyMC~kTBD[6]`dFkTjO,|+_`;BvS'#,kTno:
6AST]mkTBD5V&wFd,mh|+)ij|+•;oa_Z,Bij|
+*B5`BvjOkT•@,8a;_:AkTLz#,no:6gXG Hobler
BDd8'FAhz5ikTyMC~BDgV&w4dN/`dFnCkTjO,
|+5kTnogs_dF!CaS6d8|mAhz5ikTyMC~BD:•V
W]mkTBDM/34,_`5$@kxy;
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a9PQZab()&:no,*+}~5Sentaurus Process PQjOkTno
^TI!|a8wx0l,BD5$@•@=/g&BDyBeam dose
control~Rj0x|l&BDyEffective channeling suppression~R@*'?'B
D
[7]
yProfile Reshaping~RMtzAHkTBDyPreAmorphization implants&PAI~;!CaBD77A
•@=/g&BDw`[FGg&jOkTd:,Bv5:PQJKLab&:
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?'BD:•j0G|a}x|0l;abz9wxmn_:C,>L0lAMtz
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Sentaurus Process jOkTno&w,CDBDgx'[email protected]=
/BD~Rrange.shykTp:q|!BD~Reff.channeling.supressyj0kTr
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BD~A
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+A
2 Sentaurus Processd/hijklNO
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Y\xH,jOkTN/y\5]s2m*+pqN9`PQASentaurus Process n
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Sentaurus Process s_ diffuse 67`e8m*+pq•@,no5:Bv@*,+
pq)+7-)+vw;m*Bbvw,Sx$1Dy$@,D8*,@4)Dv
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7A
Sentaurus Process 2f,@*Iv4pqBD1@*FqBD5:w``YGB
v@*,pq8a1rs8aA@*Iv4pqBDWXhz5iF3|m5yXB
vz9wx8X 100 JK,pq()&:A@*Iv4pqBD,bcz{VtTI
@*qD0lu@*rs,FG5>%8G34I+pq()&:C%@,+()C
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eW^|+,|}d8~•]M?ANuQZ•@();*+u5=/)mrs,*
+c~5Sentaurus Process 2fIYRF-vwBDyFlash or laser anneal
model~5[BDYZupq_:C,29B+tn,|+d8Bv5k>:•n
B[FGdFab&:B(_:C,l(|+1+356!A[\5Sentaurus
Process s_!CaNES6MoBD5:ul(t/,!CaS61DA"|m5
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Sentaurus Process |a@*pq_:C,qD8a5swIWXqO-(PW^
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aA
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