EasyCluster 2.0 EasyCluster™ 2.0 EasyCluster™ 2.0 Product and Technology Summary Easy, Fast and Reliable Equipment Control Solution

EasyCluster 2.0

EasyClusterEasyCluster™ 2.0™ 2.0 Product and Technology Summary

Easy, Fast and Reliable Equipment Control Solution

EasyCluster 2.0

What is EasyCluster ?

EasyCluster is a framework used to build control systems for various types of equipment - cluster,track and standalone tools - easily, quickly and economically.

EasyCluster is composed of EasyCTC, EasyTMC, EasyPMC and EasyGEM which can be flexibly combined according to target equipment.

EasyCluster can be used for development of new equipment and retrofit of used equipment.

CTCCTC

PMCPMC

PMCPMC

PMCPMC

PMCPMC

TMCTMC

Intra-tool Network

HOST

FAB Network

Machine

I/F

EasyCluster 2.0

Advantages

Easy and cheap to assemble control system hardware : User selectable general H/W and S/W, No 3rd party S/W license

Easy to get skilled engineers : Use of popular S/W tool (C/C++)

Easy to develop applications in a short time : Easily configured engines, abundant application examples, multiple vendor

device drivers

Easy to maintain and re-use : Object-oriented component-based S/W

Easy to distribute/combine hardware : Modular S/W structure

Easy to operate : Well-organized GUI and navigation following Sematech Guidelines

EasyCluster 2.0

S/W Product History

RPCluster

ClusterLink ClusterLink3

ClusterPro

RPCore ControlPro EasyCluster

RPI

Techware Brooks

Kornic

EasyCluster2.0

EquipeSoft

PRI

SEMI/MESCSEMI/MESCCV Java

TI

ControlWorks ControlWorksACT

DOS NT

merged

EasyCluster 2.0

System Requirements - H/W

CTC (User selectable) Pentium III or Higher, min. 128 MB RAM Monitor : SVGA (1,024 768) CD ROM Driver Input Device : Touchscreen, Mouse, Light pen LAN Card

TMC/PMCs (User selectable) Pentium III or higher, min. 64 MB RAM Monitor : SVGA (can be shared with other module controllers) CDROM Driver

Real time embedded controller (Plug in board for real time control) DSP CPU(TMS320C32), 12 ch. A/I, 12 ch. A/O Communication with PMC via DPRAM

EasyCluster 2.0

System Requirements - S/W

Operating System Windows NT4.0 Workstation, Windows 2000, Windows XP Supported Language : English, Japanese, Korean

S/W Development Tools Visual C/C++ 6.0 (Microsoft) Paintbrush or Adobe Photoshop EasyCTC, EasyTMC, EasyPMC, EasyGEM (Kornic)

Windows NT

EasyTMC

CTC Application

Windows NT

EasyTMC

CTC Application

Windows NT

EasyCTC EasyGEM

CTC Application

Windows NT

EasyTMC

TMC Application

Windows NT

EasyPMC

PMC Application

Ethernet

EasyCluster 2.0

Software architecture(CTC - Module Controller Interface)

CTC

Main GUIUser

Module Controller

UserLocal GUI

I/O Manager

Sequence Code forEvent

Full Duplex

I/O Controller

Real

Equipment

Command

Response

Post

Recovery

TCP/IP

• Screen Handling• I/O Handling• Recipe Editor• Scheduler• Datalog Management

• I/O Manager (Server)

• Event Manager

• Alarm Manager

Recipe Analyzer

Alarm Handler

EasyCluster 2.0

Software Architecture(within Module Controller)

Local Graphic User Interface

Sequence Manager

Alarm Handler

RemoteInterfaceModule

Application Code

CTC

Driver

Driver

Driver

Module

Module

Real Equipment

Robot

Cassette

Digital I/OAnalog I/O

User Written #1

User Written #2

I/O Manager

Interlocks

EasyCluster 2.0

Software Architecture

EasyCluster 2.0

FEATURES

• Standard Implementation

• S/W and H/W are both distributed.

• Good for multi-PM cluster tools with complicated TM

• Each module can have local graphic user interface.

System Example 1

CTCCTC

PMCPMC

PMCPMC

PMCPMC

PMCPMC

TMCTMC

Intra-tool Network

Machine

EasyCluster 2.0

FEATURES

• Economical implementation

• CTC/TMC share H/W, PM’s are distributed.

• Good for cluster or batch tools with simple transport requirements.

• Each module can have local graphic user interface.

System Example 2

PMCPMC

PMCPMC

Intra-tool Network

Machine

CTC/TMCCTC/TMC

EasyCluster 2.0

System Example 3

FEATURES

• Very cheap implementation

•All Control S/W on single PC

• Good for simple standalone type systems, proof of concept/pilot tools with minimal cycling

CTC/TMC/PMCCTC/TMC/PMC

Machine

EasyCluster 2.0

Framework for CTC Software System Definition through text configuration files Dynamic Scheduler Recipe Management Graphic User Interface Alarm Handling Datalogging (Event, Alarm, Data) & Plotting Access Control Factory Communication

CTC

EasyCluster 2.0

Object Oriented Style System Definition Support For:

Wafer Transfer Systems AFE: EFEMs,FOUPs, Atmospheric Robots, Aligners Vacuum Platforms : LoadLocks, Coolers, Vacuum Robots

(Multiple configurations) I/O: Serial, Devicenet, TCP/IP

Process Modules Up to 32 Process Modules Cooler

System Definition

EasyCluster 2.0

Supports Dual Arm & Dual Finger RobotFinds Optimal Path for Robot MotionSets Priority for Wafer Exchange (Pick & Place)Supports Active & Passive Wafer HandoffSupports Serial & Parallel Chamber ProcessingHierarchical Recipe Structure (Lot/Cluster/Process)Dual Lot ProcessingResidence ControlSupports up to 32 Process Modules and 3 Transport

Modules

Dynamic Scheduler

EasyCluster 2.0

Recipe Editor Text Based Recipe Editor Setup Look and Feel can be customised Parameter / Single Recipe / Multi Step Recipe Engine Display of several steps at Same Screen Step Operation & File Handling Support ( New / Load / Save(as) / Cancel / Delete )

Recipe Management

EasyCluster 2.0

PM1 Process Recipe 1PM1 Process Recipe 1












LOT RECIPELOT RECIPE CLUSTER RECIPECLUSTER RECIPE PROCESS RECIPEPROCESS RECIPE

Wafer123456789

…

25

Wafer123456789

…

25

PathPM1PathPM1

PathPM1PM2PathPM1PM2

PathPM1PM2PM3

PathPM1PM2PM3

Recipe Hierarchy

EasyCluster 2.0

GUI Interface by GUI Definition Files Completely customizable Object Oriented Symbols Includes Standard Background (DLL) Includes Standard Image Library (DLL) User can edit/add libraries using VC++ Font Property Definition (Text) Palette Property Definition(Text) Text Property Definition (Text) Page Setup (Text)

Graphical User Interface

EasyCluster 2.0

Alarm Handling

Subsystems post alarm when exception occurs (Local/Remote) Alarm manager displays alarm details and recovery actions Operator selects recovery action, Auto-recovery action executed. Alarm is cleared if successful recovery Alarm and recovery status is logged

Alarm ManagerTMC, PMCs

Alarm Post

Display

Alarm Message,Recovery Actions

Action 3

Action 2

Action 1

CallAlarm Clear

CTC

Select

…

Log

EasyCluster 2.0

Includes Data logging Engine ( Lot / Process / History / Alarm ) User can add or delete items to be logged Plotting Engine for current and historical trend Minimum logging interval : 0.5 sec Number of items to be logged : Max. 128 Number of items to be plotted at same screen : Max. 8 Datalogging by CTC and PMC Able to view logs by wafer, PM, Lot or Job

Data Logging and Plotting

EasyCluster 2.0

Access Control

User Account Management User ID Password User Level

Access Limitation according to User level Activate/Deactivate Buttons

EasyCluster 2.0

SEMI Communication Supported• SECS I(RS232C) / HSMS-SS (Ethernet)

• SECS II

• GEM : All streams and functions (Standard & Custom)

• 300mm FA Supported : OSS(Object Service Standards), RMS(Recipe Management Service), PJM(Process Job Management), CJM(Control Job Management), STS(Substrate Service), CMS(Carrier Management )

FA pre-test Tool• SECSim Pro™ (GW Associates)

FAB Automation

SECSim Pro EasyCluster

HOST CTC

LAN

EasyCluster 2.0

Framework for TMC/PMC S/W Development• Integration with CTC

• IO Configuration

• Function Management

• Interlocks (Setpoint, Value)

TMC/PMC

EasyCluster 2.0

Direct & Automatic Alarm Integration IO Integration Function Integration

CTC Sends

Message

CTC Sends

Message

Local

User Written Code

Local

User Written Code

Message Binding

CTC Send

Event + Data

CTC Send

Event + Data

Translate

Event & Data

Translate

Event & Data

Local Module

Function

Local Module

Function

Module ControllerCTC

Module ControllerCTC

Integration with CTC

EasyCluster 2.0

Text-based I/O channel definition

I/O channels Digital (Real/Virtual) Analog (Real/Virtual), (Linear/Lookup Table) String

I/O Devices Direct I/O Boards (A/I, A/O, D/I, D/O) Serial I/O Board DeviceNet Special Devices with Win32 Drivers

I/O Configuration

EasyCluster 2.0

Function Management

Unit level functions coded in C

- Example : Robot_Fcn(Motion, Stn, Slot)

Distributed Architecture with higher level functions calling lower level functions

- Example : Move_Wfr(Srce, Slot, Dstn, Slot) {

Slot_Vlv(CM, Open)

Robot_Fcn(Pick, CM, 1)

Slot_Vlv(PM1, Open)

Robot_Fcn(Place, PM1, 1)

…. }

Parameters are given to the called function as a message All functions registered in the Function Definition File Individual function management (kill, compile, reload), able to

upgrade portions of the application without shutting down.

EasyCluster 2.0

Interlocks

Setpoint Interlocks

• Before output action, several input values must be checked.

• Example

action( VAT_Valve == Close ) {

condition( Robot_Arm == Retracted ) $alarm = 115;

}

Value Interlock

• If certain input meet a certain condition, several output channel must be set to pre-defined value immediately.

• Example

if ( Pump_Status == Error ) {Forln_Vlv = Close;$alarm = 105;

}

EasyCluster 2.0

Real-time Controller

Available Kornic I/O board for Real Time Control Temperature Control for RTP, Furnace, etc (SISO, MIMO) Precise valve timing Control for ALD End Point Detection for Etching

Embedded Controller Spec. CPU : DSP (TMS320C32, 50MHz) I/F with PMC : DPRAM or RS232C I/O :

• A/I : 14-bit resolution, 12 ch.

• A/O : 12-bit resolution. 12 ch.

• DIO : 24 ch.

EasyCluster 2.0

Remote Monitoring

CTCCTC

PMCPMC

PMCPMC

PMCPMC

PMCPMC

TMCTMC

Intra-tool Network

HOST

HSMS/SECS/GEM

Machine

I/F

System Monitoring• using HSMS/SECS (Fab Network)• or EasyCluster, Faster (Optional Network)• Diagnosis• Paging Service

Office

TCP/IP

EasyCluster 2.0

Application Example (300mm Asher)

System Spec.System Spec.System Spec.System Spec.

• 300mm Asher• Two batch Processing chambers• Dual-arm, Dual-pan Robot• Two FOUP Openers• Dual-arm ATM Robot• Cooling and Pre-heating Buffer Stations

• 300mm Asher• Two batch Processing chambers• Dual-arm, Dual-pan Robot• Two FOUP Openers• Dual-arm ATM Robot• Cooling and Pre-heating Buffer Stations

EasyCluster 2.0

Application Example (200mm Track)


• 200mm Track • 5 Process Modules• Two Robots• Four Cassette Stages• One Buffer Station

• 200mm Track • 5 Process Modules• Two Robots• Four Cassette Stages• One Buffer Station

EasyCluster 2.0

Application Example (200mm Track)


• 200mm Track • 16 Process Modules• Four Robots• Four Cassette Stages• Three Buffer Station

• 200mm Track • 16 Process Modules• Four Robots• Four Cassette Stages• Three Buffer Station

EasyCluster 2.0

Application Example (200mm ALD)


• 200mm ALD Cluster Tool• 2 Batch Process Modules• Brooks MX-700 Platform

• 200mm ALD Cluster Tool• 2 Batch Process Modules• Brooks MX-700 Platform

EasyCluster 2.0

Application Example (300mm CVD)


• 300mm UHVCVD Cluster Tool• 3 Process Modules• Brooks GX-6000 Platform

• 300mm UHVCVD Cluster Tool• 3 Process Modules• Brooks GX-6000 Platform

EasyCluster 2.0



• 200mm HDPCVD Cluster Tool• 2 Process Modules• Brooks IX Series Platform

• 200mm HDPCVD Cluster Tool• 2 Process Modules• Brooks IX Series Platform

EasyCluster 2.0



• 300mm PECVD Cluster Tool• 4 Process Modules• 3 FOUP Loadports• 6-sided Vacuum Platform

• 300mm PECVD Cluster Tool• 4 Process Modules• 3 FOUP Loadports• 6-sided Vacuum Platform

EasyCluster 2.0

Application Example (200mm Sputter)


• 200mm Sputtering Cluster Tool• 6 Process Modules - 5 Sputter Modules - 1 Etching Module• Brooks MX-800 Platform

• 200mm Sputtering Cluster Tool• 6 Process Modules - 5 Sputter Modules - 1 Etching Module• Brooks MX-800 Platform

EasyCluster 2.0

Customers

CustomerEquipment

Q’ty Installed Place Remark200mm 300mm

XXXXXXXX Asher 12 Samsung, TSMC

XXXXXXXX Track 30 Dongbu

XXXXXXX PECVD PECVD 6 Samsung

XXXXXXXX ALD 3 Hynix, ETRI

XXXXXXXX ALD 1 Hynix

XXXXXXXX Asher 1

XXXXXXXX Asher 1

XXXXXXXX UHVCVD 2 PSC Japan

XXXXXXXX ALD, Mask Etcher 1 DNP

XXXXXXXX Sputter 1 Taiwan

XXXXXXXX HDPCVD 1 ROHM Japan

XXXXXXXX Laser Cleaning 1

XXXXXXXX Etcher, CVD 3 KEC

EasyCluster 2.0

EasyCluster Products

EasyCTC EasyTMC EasyPMC EasyGEM

Development License All development environments, manual, templates

Runtime License Lock keys configured to the equipment

Controller H/W CTC/TMC/PMCs configured to Equipment

Training 4 weeks 2 weeks

Engineering ServiceDepends on the requirements and the complexity of the

machine

EasyCluster 2.0

EasyCluster Users’ Requirements

Most Important

Other S/W Experience

MS Visual C API Level

C Programming Experience & Skill

Full Understanding of Equipment Details

Documents

EasyCluster 2.0 EasyCluster™ 2.0 EasyCluster™ 2.0 Product and Technology Summary Easy, Fast and Reliable Equipment Control Solution