CourseSyllabus 1

Department of Electrical and Computer Engineering ECED 6240/Credit Hours: 3

Complementary Metal-Oxide-Semiconductor-MicroElectroMechanical Systems (CMOS-MEMS)

Winter 2019 Tue. 10:00-12:00, C365 (lecture) Tuesday afternoons A003A (lab)

Instructor: Yuan Ma Office: C314 Office Phone: 902 494 6129 Office Hours: Fri. 9:30-11:30am; Mon. 4:30-6:00pm Email: Yuan.Ma@Dal.Ca Course Website: mems.ece.dal.ca/eced6240.php Course Description This course includes an introduction to MicroElectroMechanical Systems (MEMS) with a focus on integration of MEMS with CMOS technology. Design principles, techniques and micro-fabrication processes are covered. Electrical and mechanical concepts of MEMS characterization are introduced. Contemporary computer aided design and analysis software is used for the design and implementation of MEMS throughout the term. Course Pre-requisites, Co-requisites and/or other Restrictions ECED 4260 IC Design and Fabrication Course Learning Outcomes Upon completion of this course, students should be able to:

• Understand basic MEMS working principles and micro-fabrication processes; • Use design principles, techniques, and design rules to design basic MEMS structures; • Design testing setups for electrical and mechanical characterization of basic MEMS; • Use a computer simulator package and hardware kit for the layout, evaluation and

implementation of basic sensors and actuators.

Required Text(s) Course Notes: http://mems.ece.dal.ca/eced6240/Coursenotes6240.pdf Recommended Text(s) “CMOS-MEMS” edited by Henry Baltes et. Al; “Foundations of MEMS” by Liu. Course Assessments Components of your grade include assignments, labs, and a project.

CourseSyllabus 2

Assignments (30%): Brightspace submission of three written assignments will be required. Assignments and due dates will be posted on the course website. Labs (30%): There will be two labs in this course. One focuses on the design of MEMS, and the other is for the finite element analysis of MEMS. Each lab may take a few lab sessions to finish. Details regarding the labs will be posted on the course website. Project (40%): Two types of projects can be carried out by each student or a group of two students depending on the scale of the difficulty.

- Design projects: You can use LEdit, or MEMS Pro or other microelectronics design and simulation tools to develop a CMOS – MEMS application. The project should cover the design objectives, design approaches, performance simulation and final CMOS – MEMS fabrication layout.

- Literature review project: Certain research topics in CMOS – MEMS with an in-depth literature search and review into chosen topics in CMOS – MEMS research areas with a detailed report can be a great project. The review must be thorough and high quality.

Project deliverables: Every student must submit a report in word-processor quality with necessary appendix of program files, plots, design diagrams, and layout for fabrication if possible. Deadline: You can start your project as soon as you decide what to do and get the confirmation from the instructor. The project is due on April 2nd, 2019.