D154-81-880 Instruction Manual - MHz Electronics Scope of this man ual 1-1 ... usually helium, ... Various models in the Spectron 5000 range are available to suit the leak test application

D154-81-880Issue M

Manor Royal, Crawley, West Sussex, RH10 2LW, UKTelephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453http://www.bocedwards.com

Spectron 5000 Leak Detector

Instruction Manual`

We, HOC Edwards,Manor Royal,

Crawley,West Sussex RHI02LW,UK

declare under our sole responsibility that the product(s) Spectron 5000

L

High Vacuum system ~

17 No nitrogen, with MJG18 High sensitivity, with MJG19 Cold trap, with MJG

T

I L Interface option

O PCM and RS232

1 PCM, RS232 and printer

2 PCM, RS232 and PCSP

3 PCM, RS232, printer and PCSP

Mains supply -

0115V60Hz1 200 V SO/60 Hz2 220 V SO/60 Hz

3240V50Hz

L Head seals/reference leaks

O Viton head seals, no internal ref leak1 Viton head seals, with quartz ref leak2 Metal head seals, no internal ref leak

3 Metal head seals, with quartz ref leak

Roughing pump1 E2M18

2E2M28Roughing option

O Normal roughing

1 Clean roughingTest port I

O NW401 Small flip lid chamber

2 Large flip lid chamber

3 Compression fitting4 NW40 side port extension5 NW16

to which this declaration relates is in conformity with the following standard(s)

IEC1010-1 (1992) Safety Requirements for Electrical Equipment for Measurement,Control and Laboratory Use.Electrical Equipment for Measurement, Control and Laboratory Use-EMC Requirements.

EN61326

(Class A Emissions)

0...9

~~~~

~t;-oO~~

following the provisions of

73/023/EEC Low Voltage Directive.89/ 336/ EEC Electromagnetic Compatibility Directive.

~I-JA1r:s-:::.= .-~

Dr. J.D. Watson, Senior Technical Manager, VED

This product has been manufactured under a quality system registered to ISO900l

l"1-4-lol ~~s \-\It..I-

Date and Place

CON TENTS

SEC TION 1 IN TRO DUC TION

Sec tion Ti tle Page

AZIDE WARN ING 1-A1.1 Scope of this man ual 1-11.2 Over view 1-21.3 Gen eral 1-2

Illustrations

Fig ure Ti tle Page

1.1 Iso met ric view of con sole and PCM 1-4

Spec tron 5000 1-i

1-ii Spec tron 5000

AZIDE WARNING

WARNING

Customers must provide suitable on-site decontamination facilities andmust complete the Health and Safety documents if they wish azide

exposed equipment to be returned to Edwards.

Azide compatible Spectron leak detectors are fitted with a special warninglabel. If there is any doubt as to whether an unmarked Spectron has

ingested or has been exposed to SODIUM AZIDE, DO NOT ATTEMPTTO DISMANTLE OR STRIKE THE FITTINGS AND DO NOT CLEAN

PIPEWORK WITH HOT WATER AS EITHER MAY TRIGGER ANEXPLOSION.

Spec tron 5000 1-A

1-B Spec tron 5000

1 IN TRO DUC TION

1.1 Scope of this manual

This manual provides installation and routine maintenance instructions for the EdwardsSpectron 5000 Console leak detector.

This manual contains essential safety information which supplements the safety features of theSpectron 5000 leak detector. Safety procedures are highlighted as WARNING and CAUTIONinstructions. You must obey these instructions. The use of WARNINGS and CAUTIONS isdefined below.

WARNING

Warnings are given when failure to observe the instruction could result in injury or deathto persons.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to theequipment, associated equipment and process.

The safety markings used on the equipment are:

A.C. Protective Supply earth

Supply on 1Coldhazard

Supply off 0

Refer to ElectricalManual hazard

Boiler 200 °C Hotsurface

Spec tron 5000 1-1

1.2 Overview

The Spectron 5000 leak detector is used to sense a specific tracer gas, usually helium, in the gasesit pumps in through its vacuum test port. Spectron 5000 has a conventional flow high vacuumsystem and sensitive mass spectrometer. The trace gas pressure measured can be automaticallyand reliably related to leakage rate at the test port. Simple 2-key or 1-key or 0-key operation with leak rate bargraph, digital displays and ACCEPT/REJECT lamps is readily set up for manualoperators. The connection of Spectron 5000 accessories is also straightforward.

Installation and routine maintenance is simple and safe with the specially designed air transport package and the hinged electronics tray inside the Spectron 5000 leak detector.

The Spectron 5000 has automatic adjustments for its internal mass spectrometer, using Zero,Check/Peak and Calibrate keys on the Spectron 5000 PCM program control module. Customised set-up prior to use may be made through the <<USER menu: the set-up is stored and usableimmediately or later on even after power breaks. The PCM also indicates whether any processsettings are in place: whether the test port is not vented to atmosphere between tests, whetherthe internal calibration alone will determine the leak rate traceablility, whether reject displaystate messages will be shown and whether key or switch presses have been deliberately lockedout.

Fast cycle time, intrinsic protection and flexible interfacing capabilities permit ready integrationof the Spectron 5000 into production line test stations through the standard RS232 or otheroptional interfaces. Real time clock and NOVRAM backup ensure that automatic startup willoccur on time and that key Spectron customised settings remain despite power interruptions.

1.3 General

Various models in the Spectron 5000 range are available to suit the leak test applicationrequirements and to match site services available. The comprehensive manual supplied hereincludes some details NOT relevant to the build of your Spectron 5000 leak detector. Pleaseconsult the 2 build sheets provided at the front of the manual, which were automaticallygenerated from the actual Console supplied, to check out relevant details.

Standard product versions of the Spectron 5000 are listed below:

L18010010 115 V L18110010 200 V Hi Sens - 5000SL18210010 220 V L18310010 240 V

L18010030 115 V L18110030 200 V Metal sealed - 5000XL18210030 220 V L18310030 240 V

L19012010 115V L19112010 200V Su per fast - 5000S- SFL19212010 220V L19312010 240V

L17010010 115V L17110010 200V No ni tro gen - 5000E- NL L17210010 220V L17310010 240V

Available Spectron 5000 build modules are as follows:

1-2 Spec tron 5000

L07XXXXXX SP 5000 No ni tro gen high vac sys tem with no M/GL08XXXXXX SP5000 Cold trap high vac sys tem with no M/GL09XXXXXX SP 5000 Cold trap high vac sys tem with no M/GL16XXXXXX SP 5000 No ni tro gen high vac sys tem with modi fied M/GL17XXXXXX SP 5000 No ni tro gen high vac sys tem with M/GL18XXXXXX SP 5000 High sen si tiv ity high vac sys tem with M/GL19XXXXXX SP 5000 Cold trap high vac sys tem with M/G

LXX01XXXX SP 5000 115V 60 Hz E2M18 rough ing pumpLXX02XXXX SP 5000 115V 60 Hz E2M28 rough ing pumpLXX11XXXX SP 5000 200V 50/60 Hz E2M18 rough ing pumpLXX12XXXX SP 5000 200V 50/60 Hz E2M28 rough ing pumpLXX21XXXX SP 5000 220V 50/60 Hz E2M18 rough ing pumpLXX22XXXX SP 5000 220V 50/60 Hz E2M28 rough ing pumpLXX31XXXX SP 5000 240V 50 Hz E2M18 rough ing pumpLXX32XXXX SP 5000 240V 50 Hz E2M28 rough ing pump

LXXXX0XXX SP 5000 NW40 test portLXXXX1XXX SP 5000 Small flip lid cham ber 20 mm x 76 mm diamLXXXX2XXX SP 5000 Large flip lid cham ber 40 mm x 97 mm diamLXXXX3XXX SP 5000 1.125" com pres sion fit ting test portLXXXX4XXX SP 5000 NW40 side port ex ten sionLXXXX5XXX SP5000 NW16 test port

LXXXXX0XX SP 5000 nor mal rough ing kitLXXXXX1XX SP 5000 clean rough ing kit

LXXXXXX0X SP 5000 VIT head seals no in ter nal ref leakLXXXXXX1X SP 5000 VIT head seals with quartz ref leakLXXXXXX2X SP 5000 Metal head seals no in ter nal ref leakLXXXXXX3X SP 5000 Metal head seals with quartz ref leak

LXXXXXXX0 SP 5000 PCM and RS232 portLXXXXXXX1 SP 5000 PCM and RS232 port and printer portLXXXXXXX2 SP 5000 PCM and RS232 port and PCSPLXXXXXXX3 SP 5000 PCM and RS232 port and printer port and PCSPLXXXXXXX4 SP 5000 RS232 portLXXXXXXX5 SP 5000 RS232 port and printer portLXXXXXXX6 SP 5000 RS232 port and PCSPLXXXXXXX7 SP 5000 RS232 port and printer port and PCSP

Near- standard build can be speci fied by com bin ing choices from the list above to ob tain thecom plete “L” number, for ex am ple, L17210033 is a Spec tron 5000, no ni tro gen, high vac sys tem with M/G, 220 V 50/60 Hz, E2M18 rough ing pump, nor mal rough ing , NW40 testport, metal head seals with quartz ref er ence leak, PCM, RS232, with printer port and PCSP.Ver sions which are azide com pati ble will have spe cial L- numbers, for ex am ple, L17010013be comes L27810053. Ver sions with spe cific in ter faces will also have spe cial L- numbers be yond LXXXXXXX7.

Spec tron 5000 1-3

Figure 1.1 - Isometric view of Spectron 5000 console & PCM.

1-4 Spec tron 5000

Spec tron 5000 1-1

CON TENTS

SEC TION 2 TECH NI CAL DATA


2.1 Op er at ing and stor age con di tions 2-1

2.2 Per form ance 2-1

2.2.1 Sen si tiv ity 2-1

2.2.2 Meas ure ment lim its 2-2

2.2.3 Re sponse time lim its 2-2

2.2.4 Cy cle time lim its 2-2

2.2.5 Startup/close down times 2-2

2.2.6 Maxi mum in ter nal pres sure 2-2

2.2.7 Maxi mum sur face tem pera ture 2-2

2.3 Me chani cal data 2-3

2.4 Elec tri cal data 2-3

2.4.1 Elec tri cal sup ply volt ages and fre quen cies 2-3

2.4.2 Cur rent con sump tion 2-3

2.4.3 Elec tri cal sup ply cord 2-4

2.4.4 PCSP Op tion ca ble 2-4

2.4.5 PCM Rear panel out puts 2-4

2.4.6 Ther mal snap switches 2-4

2.5 Sys tem con figu ra tion 2-5

2.5.1 Test port op tions 2-5

2.5.2 Rough ing pump op tions 2-5

2.5.3 Back ing sys tem 2-6

2.5.4 High vac uum sys tem op tions 2-6

2.5.5 Mass spec trome ter with head seal op tions 2-6

2.5.6 Cali bra tion op tions 2-7

2.5.7 Mas sive/Gross leak and clean rough ing op tions 2-7

2.5.8 Air ad mit valve 2-7

2.5.9 Rough ing valve 2-8

2.5.10 Test valve 2-8

2.5.11 Auto gas bal last 2-8

2.5.12 Visco con nec tion 2-8

2.5.13 Power sup ply op tions 2-8

Spec tron 5000 2-i


2.5.14 Elec tron ics tray 2-9

2.5.15 Con sole cool ing fans 2-9

2.5.16 Con sole switches and lamps 2-9

2.5.17 Con sole in ter faces 2-9

2.5.18 PCM 2-10

2.5.19 Ac ces so ries 2-10

2.6 Con struc tion de tails 2-10

2.6.1 Leg is la tion and stan dards 2-10

2.6.2 Ma te ri als ex posed to in ter nal vac uum con di tions 2-11

2.6.3 Azide com pati bil ity 2-12

2.7 Pump fluid data 2-12

2.8 Dif fu sion pump fluid charge 2-12

2-ii Spec tron 5000

2 TECH NI CAL DATA

2.1 Operating and storage conditions

The Spectron 5000 leak detector is designed for freestanding indoor use only.

Ambient temperature range (operating) +12 °C to +35 °CSafe ambient temperature range (operating) +5 °C to +40 °C(accuracy and times may not remain within specification)Ambient temperature range (storage) -30 °C to +70 °CRelative humidity non-condensing 10 to 90 %Maximum altitude 2000 mInstallation category (over voltage category) IEC1010 IIPollution degree IEC1010 2Enclosure rating IP20

2.2 Performance

2.2.1 Sensitivity

Standard leak detection ranges (mbarl/s units)

Leak Mode No Nitrogen5000E-NL

Hi Sens5000S/X

Rapid Cycle5000S-SF

MASSIVEGROSSFINE

HI SENS

9 x 10-2 to 1 x 10-4

9 x 10-1 to 3 x 10-8

9 x 10-3 to 3 x 10-10

N/A

9 x 102 to 1 x 10-4

9 x 10-1 to 3 x 10-9

9 x 10-3 to 2 x 10-11

9 x 10-4 to 2 x 10-12

9 x 102 to 1 x 10-4

9 x 100 to 3 x 10-8

9 x 10-3 to 2 x 10-11

N/A

The cor re spond ing near stan dard E2M8 or E2M28 builds have slightly al tered sen si tiv ity(within a fac tor of ap proxi mately 2) in MAS SIVE and GROSS ranges, whereas near stan dardno MAS SIVE/GROSS fit ted have MAS SIVE and GROSS ranges re placed by a non- measuringROUGH ING mode. Near stan dard clean rough ing builds have an ad di tional MAS SIVE leakpath equiva lent to the stan dard MAS SIVE mode above 1 mbar. Modi fied gross re stric tor ver -sions are avail able for the no ni tro gen 5000E- NL and are ap proxi mately 10 times less sen si -tive than the con ven tional gross hold 5000E- NL ver sions.

Spec tron 5000 2-1

2.2.2 Measurement limits

Amplifier drift * <0.3% of f.s.d. after warm up.(Measured in accordance with AVS Standards 2.1.)

Noise * <2.5% of f.s.d. after warm up.(Measured in accordance withAVS Standards 2.1.)

PCM bargraph resolution 2.5 % full scale deflection.

* Applies to most sensitive amplifier range of 5000 builds.

2.2.3 Response time limits

Response time < 1 second for FINE< 2 seconds for GROSS

2.2.4 Cycle time limits

Massive reject action > 0.4 seconds

2.2.5 Start-up/close down times

Warm-up time (to READY) 9 minutesCool-down time (to CLOSED DOWN) 11 minutes

2.2.6 Maximum internal pressure

Maximum internal pressure 1500 mbar absolute

Note: Spectron Consoles are not designed for operation above normal atmospheric pressure (in the range 75 to 110 kPa) standard EDWARDS accessories for over pressure leak testing are available for use with the Spectron 5000.

2.2.7 Maximum surface temperature

Maximum surface temperature 60 °C(with ventilation failure at 40°C ambient)

2-2 Spec tron 5000

2.3 Mechanical data

Width 580 mmDepth 770 mm (900 mm for E2M28)Height 1000 mm (from floor to test port)Mass (Con sole un packed) 190 kgMass (Con sole packed) 240 kgWidth (PCM) 330 mmDepth (PCM) 196 mm Height (PCM) 137 mmMass (PCM) 2 kgMaxi mum acous tic noise emis sion <70 dB(A)In let con nec tion NW40 (stan dard) or NW16 (op tion)

97mm di ame ter x 40 mm flip cham ber (op tion)76 mm di ame ter x 20 mm flip cham ber (op tion)or NW40 side ex ten sion (op tion)

Air ad mit Com pres sion fit ting 1.125 inch (op tion)Ex haust con nec tions 14.75 mm noz zle (stan dard)

NW25 (E2M28 op tion)Ven ti la tion in lets Front, rear and side pan elsVen ti la tion out let Base of con soleCon sole ori en ta tion Ver ti cal, floor mount ing on cas tors

2.4 Electrical data

2.4.1 Electrical supply voltages and frequencies

The leak detector is constructed to operate on one of the following single phase a.c. powersupplies (see page i for build details ):

115 V 60 Hz200 V 50/60 Hz220 V 50/60 Hz240 V 50 Hz

Volt age tol er ance ±10%

2.4.2 Current consumption

Run ning cur rent (E2M8 115 V) 15 A Run ning cur rent (E2M18 115 V) 21 ARun ning cur rent (E2M28 115 V) 23 ARun ning cur rent (E2M8 200 V) 9.5 ARun ning cur rent (E2M18 200 V) 13.5 ARun ning cur rent (E2M28 200 V) 14.5 A

Spec tron 5000 2-3

Run ning cur rent (E2M8 220 V) 9.5 A Run ning cur rent (E2M18 220 V) 13.5 A Run ning cur rent (E2M28 220 V) 14 .5 A

Run ning cur rent (E2M8 240 V) 9.5 ARun ning cur rent (E2M18 240 V) 13 ARun ning cur rent (E2M28 240 V) 13 A

2.4.3 Electrical supply cord

This cord is rated to BS6500, containing 3 insulated cores each comprising 50 strands of 0.25 mmdiameter (2.5 mm 2) wire, enclosed in an insulating sheath, approximately 3 m long.

2.4.4 PCSP option cable (not supplied)

The PCSP has a double isolation rating - tested at 5.25 kV - although it is not double insulated.

The PCSP is rated for 24 V 5 A maximum a.c. or d.c. requirements on each of 8 output channels.A suitable multicore cable size to fit the cable strain relief bushings is 10 mm diameter maximum.

2.4.5 PCM rear panel outputs

Recorder output socket

Marked REC 0 - 10 V on rear panel - is a 0 to 10 V d.c. output into a minimum of 100 Ω.(Requires a 3.5 mm mono-jack).

Headphone output socket

Recommended accessory D154-71-370 has the required high impedance >100 Ω (Requires a 3.5 mm mono-jack).

2.4.6 Thermal snap switches

These are fitted on all diffusion pumps and are self resetting and meet IEC 1010 -1 Safety requirements

Current rating 15 A at 120 V a.c. resistiveContact opens 50 °C Contact resets 35 °C

2-4 Spec tron 5000

2.5 System configuration

Spectron 5000 leak detectors have a single machined aluminium alloy pumping manifold fittedwith an Edwards E203D high vacuum diffusion pump and 3 vacuum operated valves (each ratedat over 1 million cycles no failure with 95% confidence), with the mass spectrometer mounted oneither a trapless pumping block or on a liquid nitrogen cold trap attached to the pumpingmanifold. They may be operated by means of front panel switches and ACCEPT/REJECT lampsdisplay test results simply if desired. The Spectron 5000 process control module (PCM) can beused to set up leak testing and/or to provide visual and digital display of leak rate measurementsand state messages. Printer and both computer and plc interfaces are also available.

Cross-references between the system configuration specification and figures appearing later inthe working instruction are listed below.

Speci fi ca tion Fig ure De scrip tionsub sec tions num bers

2.5.1 - 2.5.12 Fig ures 3, 14 Ma jor vac uum build ing blocks2.5.13 Fig ure 16 Power sup ply fuses and pump con tac tors2.5.14 Fig ure 15 Elec tron ics tray2.5.15 Fig ure 14a Front panel fans2.5.16 Fig ure 4 Con sole panel lay out2.5.17 Fig ure 2 Con sole rear panel in ter face con nec tions2.5.18 Fig ure 12 PCM lay out.

2.5.1 Test port options

Standard builds have an NW40 test port or a large flip chamber assembly fitted onto themachined manifold with an NW40 filter.

Build options (or retrofittable non-standard options) include small flip lid chamber, 1.125 inchcompression fitting test port, NW40 side extension test port and NW16 test port.

2.5.2 Roughing pump options

All pump motors are rated at the voltage specified for the build.

Standard builds have a 2-stage E2M18 rotary vane pump with EMF20 internal oil mist filter fittedon the pump exhaust outlet.

Build options are E2M8 or E2M28 rotary vane pumps with EMF10 (internal) or MF30 (external) oilmist filters supplied respectively.

All roughing pumps have a gas ballast connection used for vacuum valve operation.

Spec tron 5000 2-5

2.5.3 Backing system

Backing pump motors are rated at the build voltage (except for 200 V 50/60 Hz).All builds have a 2-stage E2M1.5 interstage type backing pump and EMF3 oil mist filter. Theinterstage connection is piped to the rear panel quick connect visco port This allows simplevalveless visco probe connection or backing pump air bleed for routine/remedial pump oilconditioning/purging. The backing valve is a 115 V 50/60 Hz PV10EKA. The backing system alsoincludes a small backing volume, which has a thermocouple pressure sensor for controlpurposes, and also connections to the internal quartz helium reference leak and to the double“O”-ring seal interspace of the cold trap (if fitted).

2.5.4 High vacuum system options

All standard Spectron 5000 leak detectors are based on a conventional flow design using an air-cooled Edwards E203D diffusion pump with a 50 ml charge of Santovac 5 oil and a 115 V a.c.cartridge heater. The additional high vacuum pumping for the mass spectrometer during FINEmode is either provided by the internal cold trap cryosurface (when filled with liquid nitrogen)or by means of an internal restrictor and an additional air-cooled Edwards EO50 diffusion pump with a 22 ml charge of Santovac 5 oil and a 90 V a.c. cartridge heater. The EO50 pump is backedby the E203D diffusion pump in the no nitrogen leak detector build. The double pumped leakdetector has the smallest minimum detectable leak rate specification of Edwards Spectron 5000Consoles used without liquid nitrogen.

The use of liquid nitrogen lowers the minimum detectable leak rate limit one decade moresensitive in FINE mode than possible with the double pumped leak detector.

The Hi Sens option, which must be used with liquid nitrogen in the cold trap, gives a decademore leak rate sensitivity than in Fine mode.

GROSS HOLD, with or without liquid nitrogen, loses 3 to 4 decades leak rate sensitivitycompared with Hi Sens option.

2.5.5 Mass spectrometer with head seal options

The mass spectrometer has a high performance, compact design stainless steel ion source on anNW40 flange incorporating 180 degree analyser slits, long life dual filament assembly and an ion monitor pressure gauge for filament protection purposes. The ion detector has a doublecollector system for analogue signal processing. The mass spectrometer is tunable for light gasesof masses 2, 3 and 4, corresponding to hydrogen, deuterium hydride and helium tracer gases,and tuning and calibration parameters are stored independently for convenient and rapidswitching of trace gas selection. The mass spectrometer magnet field gap has a nominalmagnetic rating of 2.2 Tesla. The ion source is externally heated by an isolated 37W strip heatermounted on the stainless steel mass spectrometer tee tube, which has NW40 flanges for the highvacuum and detector connections. The detector preamplier is factory pre-set and is containedwithin the backing volume.

The head seal options are 3 off NW40 VIT fluoroelastomer or 3 off metal seals. The heliumpermeation rate into the whole high vacuum system is approximately halved by using metalseals.

2-6 Spec tron 5000

2.5.6 Calibration options

An internal temperature probe is fitted as standard, and is normally strapped to the internalquartz helium reference leak supplied on the standard build. The PV5EK 115 V calibrationvalve, and also an internal pumping route for reference leak stabilisation, are fitted between thehigh vacuum manifold and the backing system. A traceable calibration certificate is supplied onPage iii.

Builds without an internal reference can be supplied, but will be restricted to externalcalibrations with external references and no auto peaking /auto calibration.

Edwards supplies various accessories including suitable external calibration references listed inSection 7.2 Calibration can be linked to a traceable reference.

2.5.7 Massive/Gross Leak & Clean Roughing options

During test port pump down prior to sensitive leak rate measurements, trace gas sampling canbe utilised with advantage. Massive/gross leak paths supplied as standard on Spectron 5000provide routes that allow gas sampling at approximately fixed ratios during the pump downviathe roughing valve. MASSIVE REJECT actions signal very large quantities of detected tracegases and allow substantial reduction of trace gas poisoning of the leak detector roughingpump. GROSS HOLD mode is frequently used when the sensitive measurement modes areunnecessary or are inaccessible due to high test port air or water vapour pressure. The GROSSvalve is a PV5EK 115 V valve.

The Spectron 5000 can be supplied without the massive/gross leak paths fitted, so that there willbe a non-sensing massive/roughing mode.

For improved isolation of the test port from internal contamination sources, the clean roughingoption may be specified. This has a by-pass pumping route (and integral massive leak path) via a PV25EKA 115 V valve mounted on the side of the CNC manifold. The normal ROUGHINGvalve is held shut while the by-pass valve is open for test port pressures exceeding 1 mbar.

Below this pressure, the by-pass valve is closed and the ROUGHING valve is opened forcontinued massive and gross hold sensing (if fitted). The rotary pump has a foreline trap filledwith activated alumina balls to adsorb oil and water vapour in the transitional pressure regime.The FINE mode isolates the entire roughing system as normal.

2.5.8 Air admit valve

This is a special NW10 Edwards manufactured bellows valve with a rated lifetime in excess of 1million cycles before failure. The valve is actuated by the pressure differential acting on a pistonwhen the gas ballast vacuum opposes atmospheric pressure across a rubber diaphragm. InFinish mode, the air admit valve may be held closed, held open or opened for a programmablevent period after a programmable delay time. The PCM display has a No Vent LED to indicatethat No Vent on finish has been programmed.

The air admittance connection within the console has NW10 fittings to a filter/silencer. Forpurge line attachments see Section 3.17.

Spec tron 5000 2-7

2.5.9 Roughing valve

This is a special NW25 Edwards manufactured bellows valve with a rated lifetime in excess of 1 million cycles before failure. The valve is actuated by the pressure differential acting on apiston when the gas ballast vacuum opposes atmospheric pressure across a rubber diaphragm.

Roughing valve operation during a test is dictated by the test port pressure; after a test it isclosed.

2.5.10 Test valve

This is a special NW25 Edwards manufactured bellows valve with a rated lifetime in excess of 1million cycles before failure. The valve is actuated by the pressure differential acting on a pistonwhen the gas ballast vacuum opposes atmospheric pressure across a rubber diaphragm.

The test valve is controlled during a test by the test port and head Pirani gauges and the massspectrometer head pressure. During a test it will be closed during internal calibration, and it willremain closed during gross or massive modes. The test valve will close in the event of systemerrors and for power fail.

2.5.11 Auto gas ballast

A connection to the roughing pump gas ballast port is linked to a 4 valve manifold to provideboth the actuating vacuum for the AIR ADMIT, ROUGHING and TEST valves, and also the gasballast air input during operation of the roughing pump in standby mode. The auto gas ballastperiod has been factory pre-set to the first 15 minutes in standby mode. The advantage of this isthat the roughing pump can be gas ballasted safely and automatically without the need to openthe console covers.

Since the roughing pump is partly gas ballasted during normal cycling of theROUGHING,TEST and AIR ADMIT valves, in the Spectron 5000, the need for frequent autogasballast is reduced. Once daily is the recommended limit.

2.5.12 Visco connection

The visco connection is part of the backing system and is normally left capped. It requires asuitable quick connect coupling for purging the backing pump or for visco probe accessorydescribed in Section 2.5.19.

2.5.13 Power supply options

These are chosen from the single phase a.c. range 115 V 60 Hz, 200 V 50/60 Hz, 220 V 50/60 Hz and 240 V 50 Hz, and supply the rotary pumps through contactors.

The Spectron 5000 build uses a step-down auto transformer for voltages other than 115 V tosupply all internal valves and pump heaters and boards. An isolation transformer for the headheater provides added safety should ion source removal be attempted with the power on.

2-8 Spec tron 5000

2.5.14 Electronics tray

Comprising the following control and power printed circuit assembly boards:

• Multifunction board with 8032 processor, novram, real time clock and 8255 programmable interface chips, RS422 for PCM, RS232 for serial, Centronicsparallel printer port, internal temperature, gauge power and signal conditioning.Contains battery backed RAM powered by a lithium inorganic 3.64 V battery.

• Ion source board for mass spectrometer filament and emission current control.

• Lamp and power distribution board containing piezo electric alarm buzzer.

• Relays and opto inputs required for driving the internal vacuum system.

• Switched mode power supplies (two boards) for logic and ion source power.

• EO50 diffusion pump heater current control board (for double pumped systemsonly).

2.5.15 Console cooling fans

These are mounted on front and rear panels, in the electronics tray, on the E203D diffusionpump, and on the EO50 diffusion pump (if fitted). They have inline connectors and are all 115Vrated.

2.5.16 Console switches and lamps

The Console has 4 front panel switches with integral lamps for the pre-assigned processfunctions of STARTUP, CLOSEDOWN, TEST and FINISH. These switches may be keylocked ifrequired through programming.

There are also 2 further programmable front panel indicator lamps - ACCEPT and REJECT -which are associated with the leak test results against programmable reject levels andconditions.

2.5.17 Console interfaces

The Console is supplied with a 9 way D-type RS232C serial communications port as standard,and a 15 way D-type non-standard RS422 serial port for communicating with and for poweringthe Spectron 5000 process control module (PCM). A Centronics parallel printer port may bespecified for build or ordered as an EHVI authorised service retrofittable option. Anotherinterface option available is the parallel Command and Status port (PCSP) which can be used toremotely operate the Console. The PCSP option has 8 pre-determined output channelsincluding Reject and Auxiliary relays, and 8 pre-determined input channels using 24 V logic.

Spec tron 5000 2-9

2.5.18 PCM

The PCM contains leds for leak rate mode indication, for programmable process key functionsand for 4 special programming conditions: no vent on finish, accessory factor applies totraceability, reject display on PCM selected and at least one PCM key or Console switch iskeylocked. The PCM represents digital leak rate information on a 40 element linear bargraphwith signed exponent display while a 16 alphanumeric character display is used for messages,values and programming menu display. The PCM is mounted on a cradle bracket and has a flapwhich may be fitted with a label guide to the programming menu. PCM messages may beprogrammed to be displayed in any of English, French or German. The PCM rear panel houses a volume control (which may be muted in software) and a headphone socket; in each case thepitch is related to the bargraph displayed. The PCM rear panel has a 0-10 V d.c. recorder outputthat is programmable to represent the bargraph display linearly or with a log-lin representationof the bar-graph and exponent.

2.5.19 Accessories

The Spectron 5000 accessories listed in Section 8 are for leak testing, for external calibration andfor connections to Spectron 5000 interfaces.

2.6 Construction details

2.6.1 Legislation and Standards

Designed to meet the provisions of the following laws:

• 73/23/EEC Low Voltage Directive

• 89/336/EEC Electromagnetic Compatibility Directive

The following applicable standards were used as design guidelines:

• IEC1010-1 Safety requirements for electrical equipment formeasurement, control, and laboratory use.

• EN50081-1 Electromagnetic Compatibility, Generic Emission Standard. Generic Standard Class: Domestic, Commercial & Light Industry.

• EN50082-2 Electromagnetic Compatibility, Generic Immunity Standard. Generic Standard Class: Industrial.

• MIL STD 810E Environmental Test Methods & Engineering GuidelinesMethod 514 July 1989.

• CSA C22.2 Canadian Safety.No. 1010.1-92

2-10 Spec tron 5000

Note: Recommendations of the AVS Sub-committee for the calibration of leak detectors have been incorporated (J.Vac.Sci.Technol.A10(1), Jan/Feb 1992. The procedures for determination

of noise and drift values for the mass spectrometer in the Spectron 5000 leak detector follows AVS Standard 2.1 .Rev - 1973 (J.Vac Sci. Technol 10/4, July/Aug 1973).

2.6.2 Materials exposed to internal vacuum conditions

ROUGHING

Aluminium (vacuum fittings)Stainless steel (flexible pipelines & filters)Fluoroelastomer (seals)Platinum/10%rhodium (Pirani PRM gauge filament)Nickel (PRM Gauge)PTFE (Pirani gauge feed through)Nitrile (seals)Alumina (clean roughing option)Ultragrade 19 rotary pump oil

GAS BALLAST

Rubber (diaphragm valves)Copper (ferrules within vacuum valve actuation system)Nylon (vacuum valve lines)Ultragrade 15 & 19 rotary pump oil

BACKING

Aluminium (vacuum fittings) Stainless steel (flexible pipelines)Nitrile (calibration valve seal)Fluoroelastomer (seals)Ultragrade 15 rotary pump oil

Spec tron 5000 2-11

HIGH VACUUM

Aluminium (vacuum manifold)Stainless steel (flexible pipelines)Nitrile (gross & calibration valve seals)Santovac 5 diffusion pump oilZinc plating (within diffusion pump body)Stainless steel (ion source components)Ceramics (ion source insulation)Glass (ion source and detector feedthroughs)Nickel (filament pins)NiloK (filament pins)Thorium-oxide coated iridium (primary filament 1)Tungsten (secondary filament 2)Gold plated tungsten (Pirani PRL gauge filament)PTFE (PRL Gauge)* Phosphor bronze (PRL Gauge)Fluoroelastomer (seals)Indium metal seals (metal seals option)

2.6.3 Azide compatibility

The standard instruments are not recommended for use with Azide applications because of therisks of forming unstable heavy metal azides under normal operation conditions.

Edwards can supply versions of the Spectron 5000 with heavy metal components most at riskreplaced with stainless steel (items marked with an asterisk in Section 2.6.2). These will be codedas L2XXXXXXX and the gross valve and calibration valves (if supplied) will be stainless steel oraluminium bodied in this model.

Please contact Edwards in the event of any potential azide application.

2.7 Pump fluid data

Fluid Pour Point Flash Point Auto- ignition °C °C °C

San to vac 5 + 5 288 590

Ul tra grade 15 - 18 220 355

Ul tra grade 19 - 16 230 355

2.8 Diffusion pump fluid charge

E203D 50 mL San to vac 5 EO50 22 mL San to vac 5

2-12 Spec tron 5000

CON TENTS

SEC TION 3 IN STAL LA TION


3.1 Un pack ing and in spec tion 3-13.2 Gen eral 3-23.3 Re mov ing work top 3-33.4 Mass spec trome ter sup port strap 3-33.5 Ro tary pumps 3-33.5.1 Fit ting the MF30 oil mist fil ter 3-33.5.2 Fit ting the EMF20 oil mist fil ter to the E2M18 ro tary pump 3-43.6 Re place the work top 3-43.7 Fit the side and front pan els 3-43.8 Fit the PCM 3-43.8.1 PCM con nec tions 3-53.9 Visco probe con nec tions 3-53.10 RS232 con nec tions 3-53.11 Par al lel printer port op tion 3-63.12 PCSP op tion con nec tions 3-63.13 Ex haust lines 3-63.14 Elec tri cal sup ply con nec tions 3-73.14.1 Elec tri cal safety 3-73.14.2 Elec tri cal sup ply 3-73.14.3 Elec tri cal sup ply lead 3-73.15 Ven ti la tion 3-73.16 Liq uid ni tro gen 3-83.17 Air ad mit port purge lines 3-93.18 Large test vol umes 3-9

Illustrations

Fig ure Ti tle Page

3.1 Rear panel con nec tions with in ter face op tions 3-5

Spec tron 5000 3-i

3-ii Spec tron 5000

3 IN STAL LA TION

3.1 Unpacking and inspection

CAUTION

Do not tip the Spectron onto its sides as the diffusion pumps contain oil which will spilland cause contamination of the equipment. TIP(N)TELL indicators will show transit

damage.

It is recommended that two persons are available for unpacking the Spectron 5000 from itstransit packing.

Ensure that the pallet has adequate space in front as the Spectron 5000 is designed to be wheeled off the pallet down an integral ramp supplied at the top of the packing case.

Remove all strapping and discard. Open carton top and remove the wooden ramp. Remove theoperators manual.

Remove the top foam packing piece and then remove the outer cardboard sleeve.Remove the side panels by releasing the retaining strap, then remove the spares carton byreleasing the retaining strap.

Position the ramp over the front lip of the pallet. Unbolt the plywood platform at the front of thepallet and remove. Unbolt the two side panels from the pallet and position the plywood facesunder the castors by tilting the Console slightly backwards. Wheel the Spectron off pallet anddown the ramp.

Check the leak detector, panels and contents of spares boxes for damage. If the instrument isdamaged, notify your supplier and the carrier in writing within three days; state the ItemNumber of the instrument together with your order number and your supplier's invoicenumber. Retain all packing materials for inspection (or possible future re-use). Do not use theleak detector if the TIP(N)TELL indicators on the Spectron are blue.

Check that your package contains the following items:

If any of the above items are missing, please notify your supplier in writing within three days.

Spec tron 5000 3-1

Qty Description Check

121111

Spectron 5000 leak detectorSide panelsFront panelProcess control module (option)Spares carton (including toolsMF30 Filter (E2M28 option only)

3.2 General

WARNING

Do not connect the electrical supply until the installation procedures have beencompleted. Installation should only be carried out by qualified personnel.

WARNING

Disconnect the cables from the RS232 and the PCSP connectors and disable the auto-startup before removing console panels for maintenance or repair with the electrical

supply switched on.

CAUTION

The rotary pumps must be filled with the appropriate oil before the leak detector isoperated.

CAUTION

Do not operate the equipment without following all instructions for installation or it maynot function as expected.

CAUTION

Do not operate the equipment without reading and noting all safety points, otherwise the protection offered by the equipment may be impaired. In particular note that theNORMAL use of the Spectron 5000 as a leak detector is with all panels in place.

Note: Confirm that the status messageon the PCM reads “CLOSED DOWN” andnot “CLOSED DOWN ASU” before removing the console panels.

Note: Do not alter or substitute parts without reference to EHVI authorised servicedepartments: No parts other than those supplied by EDWARDS should befitted to Spectron 5000 Consoles.

Note: The Spectron is not designed to be directly lifted. Should it be necessary tolift the Console from the floor, it is recommended that the Console is clampedonto its original pallet which is suitable for use with fork lift trucks, beforelifting.

3-2 Spec tron 5000

3.3 Removing work top

Remove the work mat (if fitted). Two retaining bolts which require a quarter turn with a flat bladedscrewdriver to release the work top, are located at the left and right hand side of the work topsurface . After release of both bolts, raise the work top slightly and remove the earth strap from itsspade terminal located at the left hand side rear, before lifting the work top completely clear.

3.4 Mass spectrometer support strap

A screwdriver and a 10 mm AF spanner are the only tools required to remove the support strapwhich is painted RED.

The mass spectrometer support strap is hooked under the magnet mounting bracket and securedto a supporting bracket for the cold trap or EO50 pump block, whichever is fitted. Undo the twoM6 nuts from the bracket then remove the two M6 screws which secure the support strap to themounting bracket and lift away.

CAUTION

Do not loosen the magnet as this will destroy the factory calibration and invalidate the buildsheet information.

3.5. Rotary pumps

CAUTION

The rotary pumps must be filled with the appropriate oil before the leak detector isoperated.

Fill the rotary pumps with the oil provided, Ultragrade 15 for the E2M1.5 pump and Ultragade 19for the E2M18 or E2M28 pumps. See Section 7.3. Good housekeeping rules apply to the use of oils.Avoid eye and skin contact and prolonged breathing of fumes of rotary pump exhausts without oilmist filters fitted.

3.5.1 Fitting the MF30 oil mist filter (E2M28 versions only)

1. Loosen the lower rear panel of the console by removing all M6 bolts attaching lowerrear panel to the console frame.

2. Remove attachment plates from MF30 and bolt them into the rear of the console.3. Reposition the lower rear panel on the console, replace all the M6 bolts and tighten.4. Couple the NW25 flange at free end of the roughing hose, to the elbow already

fitted to the MF30 filter using the NW25 “O”-ring and clamp provided in the MF30filter pack.

5. Bolt the MF30 filter between its attachment plates.

Spec tron 5000 3-3

6. At tach the re main ing NW25 el bow to the MF30 out let with the NW25 “O”-ringand clamp pro vided, to en sure that the ex haust line can not be in ad ver tentlyblocked if the con sole is pushed against a wall.

3.5.2 Fitting the EMF20 oil mist filter to the E2M18 rotary pump

1. Un pack the EMF20 oil mist fil ter.

2. Un screw the plas tic clamp at tach ing the plas tic hose to the E2M18 pump.

3. Fol low the in struc tions en closed with the EMF20 oil mist fil ter and mount thefil ter on the E2M18 pump, clamp ing the plas tic hose to the top of the fil ter.

4. Make sure the plas tic pipe is not kinked or re stricted in any way, then tightenthe clamps.

3.6 Replace the work top

Place the work top in position and, raising it slightly, replace the earth strap located at the top on the spade connection. Use a flat bladed screwdriver to fasten the two retaining bolts. Replacethe work mat (if fitted).

3.7 Fit the side and front panels

Position the front panel over the circuit breaker and connect the earth strap located at the topright hand side to the spade terminal on the panel, then fasten the panel with the single quickrelease fastener at the top of the panel.

Place one side panel in position and connect the earth strap to the spade terminal on the topright hand side of the panel, then fasten the panel with the single quick release fastener at thetop of the panel.

Repeat for the second side panel.

3.8 Fit the PCM

Remove the PCM from its packing. The PCM is ready mounted on its cradle. Position the cradleat the centre back of the work top and secure in position with the black knob. Any one of thethree holes in the cradle may be used.

3-4 Spec tron 5000

3.8.1 PCM connections

Using a flat bladed screwdriver, undo the two quick release fasteners on the hinged top panel atthe rear of the Spectron Console. Plug the lead from the PCM into the 15 way female D Typeconnector, labelled PCM, provided under this cover at the rear of the Console. See Figure 3.1.

CAUTION

Take care to replace the hinged top panel without trapping the PCM lead.

3.9 Visco probe connections

A connection port is provided at the rear of the Console top to accept a Visco Probe Option(D154-58-000) or a gas ballast plug (D154-71-614). See Figure 3.1. It is used with the hinged toppanel in the open position.

3.10 RS232 connections

A 9 way female D type connector is provided at the rear of the Console for the RS232 interfaceconnection. See Figure 3.1.

It is recommended that with the RS232 connection made, control is solely exercised through theRS232 and not by key presses from the PCM or Console by making use of the KEYLOCK facility,see Section 4.10.2. Alternatively PCM keylocking can be initiated via a single command from theRS232 - !KL - see Section 4.17.8.

The RS232 signals from the Spectron should be interpreted in order to determine when to cutassociated remote power supplies in the event of any power supply interruption.

Spec tron 5000 3-5

Figure 3.1 - Rear panel connections with interface options.

KEY

1. PCSP Output cable strain relief bushing2. PCSP Input cable strain releif busing

3.11 Parallel printer port option

A female Centronics connector is provided at the rear of the Console for the printer interfaceconnection. See Figure 3.1. See Section 7 for suitable accessories for IBM-PC parallel printers.

3.12 PCSP option connections (Maximum of 24 V 5 A d.c. or a.c.)

The PCSP option is fitted at the rear of the Console, behind a removable cover plate locatedunderneath the rear hinged top panel (see Figure 3.1). Cable strain relief bushings are providedfor routing the PCSP cable connection through both sides of the rear panel fan skirt.

The Spectron 5000 PCSP (parallel command and status port) has 8 outputs and 8 input logicchannels with predetermined functions.

It is recommended that with the PCSP connections made, control is solely exercised through the PCSP and not key presses from the PCM or Console. Section 4.10.2 KEYLOCK menu describeshow to achieve this. All keys, except the Display key, should be keylocked during PCSP control.

The PCSP signals from the Spectron should be interpreted in order to determine when to cutassociated remote power supplies in the event of any power supply interruption.

3.13 Exhaust lines

Oil mist filters are attached to the rotary pump outlets. Exhaust lines should be connected at theconsole rear panel and allowed to vent freely, preferably out of the building.

3-6 Spec tron 5000

Channel PCSP Outputs PCSP Inputs

12345678

OK/PROMPTACCEPTREJECTFINE TESTREADYAUXILLIARYGROSSMASSIVE

FINISHTESTCLOSE DOWNPROCEEDSTANDBYCALIBRATEPEAKZERO

3.14 Electrical supply connections

3.14.1 Electrical safety

WARNING

Ensure that the electrical installation of the Spectron conforms with your local andnational safety requirements. It must be connected to a suitably fused and protected

supply and a suitable earth point.

This equipment is designed to be used with a separable electrical supply and not permanentlyconnected to the electrical supply.

CAUTION

A circuit breaker is provided on the front panel of the Console to permit the removal ofthe electrical supply from the equipment. This should normally be used with the PCM

display showing CLOSED DOWN otherwise the Console reliability will be compromised.

3.14.2 Electrical supply

There is no selection of A.C. Voltage rating on the Console. The Console is supplied set to theA.C. operating voltage and frequency specified by the customer when placing an order. Thisshould be confirmed by comparing the local electrical supply with operating voltage detailedon the label attached to the rear panel of the Console.

3.14.3 Electrical supply lead

This should be wired to a suitably rated electrical supply connector (separable plug) accordingto the standard convention:

Brown = LiveBlue = Neu tralGreen/Yel low = Earth (Ground)

3.15 Ventilation

This provides cooling for the bodies of the mechanical pump motors and of the diffusionpump(s), the internal quartz reference leak, the backing volume (which houses the sensitivepre-ampliflier), the power transformers and the switched mode power supplies within theelectronics tray.

Spec tron 5000 3-7

The Console uses ambient air flow set up by the integral fans drawing air in through grilles on all sides of the Console, and forcing air through the holes in the base of the Console, through a firetray and out between the castors that support the whole Console. The flow creates a slight overpressure within the Console panels which is disturbed if the panels are removed.

It is strongly recommended that the instrument is left on its castors and operated with 100 mmclearance around the sides and base. The equipment is not designed for installation in a cabinet.

All leak testing should be done with panels properly replaced and all ventilation grillesunblocked to ensure stable operation.

3.16 Liquid nitrogen

Only applicable to versions fitted with a cold trap which will be used in Fine and Hi Sensmodes.

WARNING

Do not touch any part of the liquid nitrogen reservoir or connecting pipelines. Do notallow liquid nitrogen vapour to touch your skin. The surfaces and vapour are at very lowtemperatures and can cause tissue damage. Wear protective gloves and goggles and obey

all local and national safety procedures when handling liquid nitrogen.

WARNING

Do not fill the cold trap with the work top removed as this impairs the safety protectionprovided

The equipment is provided with a filling funnel which should be placed in the mouth of the cold trap between the PCM in its cradle and the cold trap lid (in an upright position) prior to filling.The anti-static work top mat contains a cold resisting compound but may freeze if the cold trap is overfilled. Do not attempt to flatten the frozen workmat but allow it to thaw, otherwise it maycrack.

The capacity of the cold trap is 2.5 litres of fluid, which should be sufficient to last 16 hours innormal ambient conditions.

3-8 Spec tron 5000

3.17 Air admit port purge lines

The Spectron 5000 air admit valve has a spring loaded NW10 valve pad with a holding springforce equivalent to approximately 5 psi gauge pressure. The port has an inlet filter and soundabsorber within an NW10 fitting. Normal venting is to the atmospheric air within the console(typically 5 °C ambient). In some applications the helium or moisture content of the ambient airis too high for the required level of leak testing and a helium free, dry, clean and dust free gassupply purge line may be connected within the Spectron to the air admit port NW10 flange.

CAUTION

It is recommended that purge lines are connected to the air admit port with externalprovision of a pressure relief valve set at 3 psi gauge pressure to avoid inadvertent

venting of the equipment during leak testing.

3.18 Large test volumes

Spectron 5000 leak detectors can detect and measure helium for test port pressures close toatmospheric during rapid pump-down to the low pressures typical of vacuum pump ultimates.When large volumes are to be leak tested, auxiliary pumps may be used to speed the pump-down or to remove the majority of process vapours and dirt from the test piece. Auxiliarypumps used during leak testing will limit the lowest size of leaks that will be detected. Leaktesting at prolonged high test port pressures will result in hunting of the roughing valve (seeSection 4.8.14) unless a suitable restrictor is fitted between the leak detector test port and theitem under test. This restrictor will influence the response time for leak detection and may limitthe upper size of leaks that may be detected.

Spec tron 5000 3-9

3-10 Spec tron 5000

CON TENTS

SEC TION 4 OP ERA TION


4.1 Gen eral de scrip tion 4-14.1.1 Leak de tec tor con sole 4-14.1.2 Vac uum sche matic 4-14.1.3 Proc ess con trol mod ule 4-74.1.4 Mod els fit ted with a cold trap 4-74.2 Op era tion from leak de tec tor con sole 4-84.2.1 Close down 4-104.2.2 Front panel cir cuit breaker 4-104.3 Op era tion from PCM 4-104.3.1 Standby 4-104.3.2 Close down 4-104.3.3 High sen si tiv ity op tion 4-114.3.4 Gross Hold Op tion 4-114.3.5 Gas bal last ing 4-114.4 Dis play se lec tion keys 4-124.4.1 Dis play 4-124.4.2 State 4-124.4.3 Time 4-134.4.4 Leak Rate 4-134.4.5 Pres sure 4-134.5 Ad vi sory lamps 4-144.5.1 No Vent 4-144.5.2 Ac ces sory 4-144.5.3 Re ject Dis play 4-144.5.4 Key Lock 4-144.6 Range se lec tion keys 4-154.6.1 Auto 4-154.6.2 Up 4-154.6.3 Down 4-154.7 Func tion keys 4-164.7.1 Zero- normal 4-164.7.2 Zero- ramp 4-164.7.3 Check/Peak - nor mal 4-164.7.4 Check/Peak - off set 4-164.7.5 Check/Peak - ramp 4-174.7.6 Check/Peak - He Check 4-174.7.7 Cali brate - in ter nal 4-174.7.8 Cali bra tion - ex ter nal 4-184.7.9 Gross hold 4-194.7.10 Hi Sens 4-19

Spec tron 5000 4-i


4.8 Fault find ing 4-204.8.1 Start up 4-204.8.2 Pump ing down 4-204.8.3 Fin ish (never Ready) 4-214.8.4 Fin ish (can not re move test port fix tur ing) 4-214.8.5 Fin ish (never into a test mode) 4-214.8.6 Fila ment trip 4-224.8.7 Test takes longer time to en ter nor mal test mode 4-224.8.8 Test is a re ject when ever a par ticu lar test mode is en tered 4-224.8.9 No re sponse to he lium 4-234.8.10 Slow re sponse to he lium 4-234.8.11 Bar graph is not a solid bar 4-234.8.12 Dis play over ride af ter cali bra tion 4-244.8.13 No re sponse to PCM keys with he lium check on 4-244.8.14 Hunt ing of rough ing valve (for large vol umes) 4-244.9 User menu 4-274.9.1 <<RE SULTS 4-284.9.2 <<OUT PUT 4-284.9.3 <<UNITS 4-324.9.4 <<OP ERA TION 4-334.9.5 <<FAC TORS 4-344.9.6 <<RE JECT 4-374.9.7 <<AUTO TEST 4-404.9.8 <<FILA MENT 4-46

MAS TER PASS WORD SHEET 4- 53A4.10 In stall menu 4-534.10.1 <<OP TIONS 4-544.10.2 <<SYS TEM 4-544.10.3 <<PA RAME TERS 4-564.10.4 <<VER SION 4-594.10.5 <<TELE COM 4-614.11 Fault and er ror mes sages 4-674.11.1 Menu er rors 4-674.12 Op era tional er rors 4-704.12.1 Cali bra tion 4-704.12.2 Not cali brated 4-714.12.3 No peak found 4-714.12.4 No cal fit ted 4-714.12.5 Ext cal only 4-714.12.6 Back ing er ror 4-714.12.7 Gross sys tem er ror 4-714.12.8 Sys tem er ror 4-71

4-ii Spec tron 5000


4.13 Hard ware er rors 4-724.13.1 Emis sion er ror 1 4-724.13.2 Emis sion er ror 2 4-724.13.3 Dif fu sion pump er rors 4-724.13.4 Gauge er rors 4-724.13.5 Valves 4-734.13.6 Ref temp er ror 4-734.13.7 No head 4-734.13.8 Volt er ror 4-734.13.9 HD Fault 4-734.13.10 Amp zero er ror 4-734.13.11 Volt age er ror 4-734.14 Mem ory er rors 4-74 4.14.1 NOVRAM or RAM fault 4-744.15 PCM er rors 4-754.15.1 PCM er ror mes sages 4-754.15.2 LINK er rors 4-754.16 Op era tion from PCSP 4-764.16.1 PCSP out puts 4-764.16.2 PCSP in puts 4-764.16.3 Sig nal tim ing and hand shak ing 4-774.17 Op era tion from RS232 se rial port 4-784.17.1 Pro gram ming baud rates 4-784.17.2 En ter ing tele com mode 4-794.17.3 Check ing/chang ing baud rates 4-794.17.4 Lock ing out the PCM key board 4-794.17.5 Query- command 4-804.17.6 Que ries 4-814.17.7 Spec tron 5000 State la bels 4-884.17.8 Com mands 4-914.17.9 Er ror mes sages 4-954.17.10 Prob lems with se rial com mu ni ca tions 4-974.18 Ex am ples of Spec tron 5000 cus tomi sa tion 4-994.18.1 Pro duc tion vac test 4-994.18.2 Visco test ing 4- 1004.18.3 High sen si tiv ity R&D tesing at mass 3 4- 1014.18.4 Near stan dard set ups 4- 102

Spec tron 5000 4-iii


4.19 Leak test ing meth ods 4- 1034.19.1 In tro duc tion 4- 1034.19.2 Air/he lium equiva lent leaks 4- 1034.19.3 Vac uum test ing 4- 1054.19.4 Over pres sure test ing 4- 1064.19.5 Leak block ages 4- 1084.19.6 Leak de tect ing with probes 4- 1094.19.7 Leak de tect ing vac uum sys tems 4- 1104.19.8 Test ing the tight ness of her meti cally sealed com po nents 4- 113

Illustrations

Fig ure Ti tle Page

4.1 Spec tron 5000E ba sic vac uum sche matic 4-3/4-44.2 Spec tron 5000X with clean rough ing ba sic vac uum sche matic 4-5/4-64.3 Con sole panel lay out 4-25/4-264.4 PCM lay out 4-25/4-264.5 User menu Part 1 4-47/4-484.6 User menu Part 2 4-49/4-504.7 User menu Part 3 4-51/4-524.8 In stall menu Part 1 4-63/4-644.9 In stall menu Part 2 4-65/4-664.10 Leak de tec tion of vac uum sys tems 4- 1114.11 Con duc tance of round pipes for air at 20 °C 4- 1114.12 Leak size ver sus meas ured leak rate (prefilled) 4- 1144.13 Leak size ver sus meas ured leak rate (prefilled) 4- 115

4-iv Spec tron 5000

4 OP ERA TION

4.1 General description

WARNING

Do not operate the Spectron 5000 in flammable or explosive atmospheres or to pumpflammable or explosive gases or gas mixtures.

CAUTION

Do not place liquids on the work surface to avoid damage to the equipment in the eventof spillage.

4.1.1 Leak detector console

The leak detector console contains all the power supplies and vacuum pumping andmeasurement equipment.

4.1.2 Vacuum schematic

Figures 4.1 and 4.2 illustrate the basic vacuum schematic for the Spectron 5000E and Spectron5000X console leak detectors. These schematics have many common parts, reflecting themodular build of the Spectron 5000, and these have the same identification numbers shown inthe keys for Figures 4.1 and 4.2.

The basic component parts are described in the technical specification for the Spectron 5000,Section 2.5. The function of the various restrictors (6, 7, 15, 18, 20, 22 and 23) is to limit pressuresand/or flows within the leak detector during normal operation. They are shown as an aid forservice training and are not shown in the working instructions D15481880.

The vacuum system of the console leak detector has a test port (1), vacuum pumps (2,3 and 4)and a mass spectrometer (5) to measure the leak detection trace gases.

A leak calibration option (14, 15 and 16), massive (6), gross (7) and clean roughing options (19, 20and 21) may be interconnected by automatic valves (8, 9 and 10) which are vacuum operated byan interstage gas ballast system (11).

Internal software ensures proper operation of the mass spectrometer (5), the consoleACCEPT/REJECT lamps(Figure 4.3), and the display of messages and results on the PCM.

In normal operation the test port is evacuated from atmosphere by the roughing pump (2) viathe roughing valve (9). When a clean roughing option is fitted some of the gas may be routedthrough a foreline trap at the lower pressures to avoid back migration of rotary pump oil fromthe roughing pump. The test port pressure is used to determine the changeover to high vacuumpumping (4) and measurement by the mass spectrometer (5).

Spec tron 5000 4-1

Where a massive/gross leak option is fitted, the test valve (10) when closed, is bypassed bythrottled flows of gas from the roughing line (9), which allows measurement of large and smallleaks early in the test cycle.

Clean roughing and massive/gross leak options are compatible . If clean roughing is fitted then asecond massive leak path (20) allows large leaks to be detected early in the test cycle, even if thenormal massive/gross leak option is not fitted.

The high vacuum system (4) is designed to provide stable low pressure operation of the massspectrometer system (5). In the Spectron 5000E, Figure 4.1, the mass spectrometer is directlypumped by the EO50 diffusion pump (24) on its coupling manifold, the E-block (23). The E-block contains an internal restriction to provide sampling of the high vacuum provided by themain diffusion pump (4) while maintaining sufficiently low mass spectrometer pressure for nonitrogen operation in fine mode. In the Spectron 5000X, Figure 4.2, the mass spectrometer ismaintained at low working pressure by the cold trap (17), which should be filled with liquidnitrogen for all fine and high sens mode use.

The backing system (3) provides the pumping necessary to support both the high vacuumsystem (4) and the Visco connection (12). The backing system pipework depends on the highvacuum variant and also the pressence of quartz leak assemblies (14, 15 and 16) and has a manivolume (26) within the mass spectrometer assembly (5), which houses the pre-amplifier andbacking gauge printed circuit assemblies.

When pressures are sufficiently low within the mass spectrometer and at the vacuum inlet port,the normal test cycle will close the roughing valve and the leak and bypass options, then opentest valve to reach fine mode operation.

This routes the vacuum inlet gases via the high vacuum system to provide sensitive leakdetection. For high sensitivity operation on Spectron 5000X with liquid nitrogen in the cold trap, the accumulator valve assembly (18) restricts the flow into the main diffusion pump (4) so thatmore gas passes through the cold trap towards the mass spectrometer (5).

Accurate measurement is simplified by the calibration option, if fitted, without the necessity ofproviding external reference leaks.

Convenient calibration of auxiliary pumping systems working with the Spectron 5000 isenabled by external calibration software for both gross hold and fine mode leak testing.

4-2 Spec tron 5000

Spec tron 5000 4-3/4-4

Figure 4.1 - Spectron 5000E basic vacuum schematic

Spec tron 5000 4-5/4-6

Figure 4.2 - Spectron 5000X with clean roughing basic vacuum schematic

4.1.3 Process Control Module

In normal operation the Process Control Module (PCM) acts as the interface between theoperator and the Spectron 5000 Leak Detector. The PCM also displays the leak test state of thesystem and the leak rate range is automatically controlled by the software. Audio and recorderoutputs are also linked to the bar graph reading.

The PCM also provides an interface for programming the leak detector. It has a flip cover toprevent accidental access which also provides space for the PCM User Menu label packed withthis manual. Normal use of the PCM as a display should be with the flip cover in the closedposition.

See Figure 4.4 for the layout of the PCM.

The Display key enables the operator to select between state, time, leak rate and pressure, byrepeatedly pressing the key. The default is state and on power up would displayCLOSED DOWN, leak rate would show mbarl/s, time and pressure would display the lastselected option. See Section 4.4 for the available selections.

The bargraph (refer to Item 3 on Figure 4.4) has the rightmost element lit when autoranging isset. Normally the bargraph will show as a solid bar from the leftmost element, but if not thisindicates a negative leak rate indication.

It will be noticed that the leak rate exponent display (refer to Item 5 on Figure 4.4) will not bevisible during FINISH or READY or during any fault condition affecting leak rate readings.

The exponent display will equal the value of the digital leak rate reading exponent during a leak test. One of the leak rate mode indicator LED's (refer to Item 4 on Figure 4.4) will also be litduring a leak test.

The bargraph is visible in all states of the console with the mass spectrometer on, includingFINISH and READY states, to allow simple visual checks to be made prior to leak testing.

4.1.4 Models fitted with a cold trap

WARNING

Do not touch any part of the liquid nitrogen reservoir or connecting pipelines. Do notallow liquid nitrogen or liquid nitrogen vapour to touch your skin. The surfaces and

vapour are at very low temperatures and can cause tissue damage.

It is recommended that the cold trap is filled twice daily for continual operation.

On reaching standby during the start up sequence, the cold trap should be filled before turningon the mass spectrometer by pressing the FINISH switch.

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4.2 Operation from leak detector console

The leak detector can be operated locally from the console control panel (see Figure 4.3), withthe PCM acting as a display monitor and as a means of initially customising the leak detector tothe application.

1. Check that all pan els are se cure.

2. Check that the PCM is con nected to the leak de tec tor.

3. Check that the Leak De tec tor is con nected to the mains power sup ply and that the sup ply is on.

4. Switch on the front panel cir cuit breaker of the leak de tec tor con sole

5. Check that the PCM dis play reads CLOSED DOWN and that the con sole CLOSE DOWN and FIN ISH lamps are on.

6. Press the START UP switch on the con sole.

7. Check that the START UP lamp on the con sole is on

8. Check that the PCM dis play reads START UP.

The sys tem is roughed out un til the back ing pres sure re duces to a level low enough to switch on the high vac uum pumps. Check that the PCM dis play changes to PUMP ING DOWN

On reach ing STANDBY, the cold trap should be filled, ob serv ing all thenec es sary safety re quire ments, bef ore turn ing on the mass spec trome ter bypress ing the FIN ISH switch.

If cold trap is fit ted, fill it with liq uid ni tro gen bef ore start ing the test, en sur ingthat all the nec es sary safety re quire ments are ob served.Eye pro tec tion and gloves etc.

9. Af ter a de lay (typi cally nine min utes) the leak de tec tor will auto mati cally carryout ion source fila ment warm up pro ce dures and if OK, the Con sole FIN ISH lamp will be on. The PCM dis play will change to READY FIL 1.

The air ad mit tance valve opens to en sure that the test port is atat mos pheric pres sure (un less no vent on fin ish has been pre- programmed).

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10. Clamp the test piece to the test port or place it in the test cham ber.

CAUTION

Do not attempt to initiate a vacuum pump down without correctly closing the test portfixturing, otherwise excessive volumes of oil mist will be generated by the roughing pump.

11. Close the flip lid of the test cham ber to ini ti ate the test se quence or if the test port is used, press the Con sole TEST switch.

12. Check that the FIN ISH lamp is off and the TEST lamp is on. Check the PCM dis play. The PCM dis play reads MAS SIVE, the Mas sive lamp is on and the bargraph dis plays a leak rate.

13. When the pres sure drops to the pre- set changeover level be tweenmas sive and gross, the leak de tec tor auto mati cally en ters the gross mode

14. Check the PCM dis play. The dis play reads Gross, the Mas sive lamp is off and the Gross lamp is on and the bar graph dis plays a leak rate.

15. When the pres sure drops to the pre- set changeover level be tween gross and fine, the leak de tec tor auto mati cally en ters the fine mode.

16. Check the PCM dis play. The dis play reads FINE, the Gross lamp isoff and the Fine lamp is on. The bar graph dis plays the rele vant leak rate.

17. Press the FIN ISH switch. Check that the FIN ISH lamp is on.

18. If the leak de tec tor has been pro grammed for re ject dis play, the AC CEPT or RE JECT lamp on the Con sole will light and the PCM dis play will also in di cate AC CEPT or RE JECT.

19. If no vent on re ject has been pre- programmed, the no vent lamp will light if re ject oc curs.In this case press the FIN ISH switch to vent the sys tem.

20. Check the PCM dis play. Pro vided the re ject dis play hold has not been pre- programmedthe dis play reads FIN ISH un til the test port pres sure reaches 100 mbar when READY Is dis played and the test port com pletes vent ing to at mos pheric pres sure.

21. The test piece can be re moved when the sys tem is at at mos pheric pres sure.

22. The leak de tec tor can be used for the next test (Stage 10 on wards).

CAUTION

Do not attempt to remove or vent a test fixture during a test as a gross system error may resultpreventing further testing.

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4.2.1 Close down

Press the Con sole CLOSE DOWN switch to close down the ma chine. Wait un til the PCM dis -plays CLOSED DOWN bef ore re mov ing power. Do not re move power if the auto startup fa -cil ity is re quired.

The cold trap need not be refilled if the Spectron will not be used within the next 16 hours.

4.2.2 Front panel circuit breaker

The normal method of removing power is the front panel circuit breaker, when the PCM display reads CLOSED DOWN. The separable plug may then be removed.

4.3 Operation from PCM

The operation from the PCM is similar to the console operation with the addition of theHi Sens and Gross Hold leak modes, the gas ballasting feature in standby and the close downfrom the PCM. Press Display key until the PCM displays CLOSED DOWN.

4.3.1 Standby

With the PCM in the closed down state, press the Standby key.

1. Check that the PCM dis play reads START UP.

2. The sys tem is roughed out un til the back ing pres sure re duces to a level low enough to switch on the high vac uum pumps. Check that the PCM dis play changes to PUMP ING DOWN

3. The cold trap should be filled, ob serv ing all the nec es sary safety re quire ments, bef orestart ing the mass spec trome ter by press ing the FIN ISH key.

4. Af ter press ing the FIN ISH key the leak de tec tor will auto mati cally carry out self testpro ce dures and if OK the PCM dis play will change to READY TO TEST.

5. The air ad mit tance valve opens to en sure that the test port is at at mos pheric pres sure un less pre- programmed as no vent on fin ish.

4.3.2 Close down

When the leak detector is in the standby state, pressing Auto key and then the Standby keywithin 3 seconds will cause the leak detector to commence closing down. Wait until PCMdisplays CLOSED DOWN before removing power. Do not remove power if auto startup isrequired.

The cold trap need not be refilled if the Spectron will not be used within the next 16 hours.

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4.3.3 High sensitivity option

The high sensitivity option is only available on some build variants. The high sensitivity modemust either be pre-programmed to follow on automatically after the fine mode, or the operatormust have access to the programming keys. When the console reaches the FINE state (seeSection 4.2) press the Hi Sens key. Providing the pressure is below the Fine/Hi Sens change-over pressure, both the Hi Sens lamps will be on, the display reads HI SENSITIVITY and the bargraph displays the pressure. Pressing the Hi Sens key will return the system to the FINE state, orpressing the Finish key will return the system to the READY state.

4.3.4 Gross Hold Option

The Massive/Gross Option must be fitted.

CAUTION

It is recommended that GROSS HOLD is set on prior to leak testing larger components orsystems with vacuum ultimates > 10 -2 mbar at the test port, unless the gross/fine

changeover pressure has been correctly set up, in order to avoid un-necessary modeswitches.

Gross Hold is often selected when the Leak Detector is to be connected into the roughing line ofa vacuum system in order to provide extra protection for the mass Spectrometer from pressuresurges or contamination.

Gross Hold must be selected if the Spectron 5000 build variant is used without liquid nitrogen in the cold trap. This is advantageous for fast cycle applications with less stringent leak rate testlevels.

Pressing the Gross Hold switch at any time, except during startup, pumping down or Hi Sens,will select Gross Hold operation. Pressing again will cancel the selection.

4.3.5 Gas ballasting

Gas ballasting will improve the protection of the roughing pump against the effects of watervapour or excess helium. As the rotary pump is handling more gas than normal duringcontinuous gas ballasting, it is important to ensure that the Spectron exhaust line are ductedaway from the working area. The incorporation of vacuum valves actuated from the gas ballastport will help condition the roughing pump in normal use, thereby reducing the need for suchregular gas ballasting.

However, if the leak detector is not required for immediate use, and it has been out of service forsome time, it is recommended that the following procedures are followed before commencingtesting.

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1. With the PCM dis play ing READY, press the Standby key.

This switches the mass spec trome ter off and opens the gas bal last valve on the rough ing pump for a pre- set pe ri od (15 min utes).

2. Check that the PCM dis play reads GAS BAL LAST ING. On com ple tion the PCM dis play changes to STANDBY.

3. At any time in the gas bal last ing cy cle or af ter reach ing the standby state, press ing the Fin ish key will ter mi nate the cy cle and the leak de tec tor will en ter the READY state.

4.4 Display selection keys

Pressing any one of the PCM display selection keys overwrites the display. The default selectionis state. Each key may be repeatedly pressed to scroll through its associated displays:

4.4.1 Display

This key, when pressed repeatedly, scrolls across the messages described below. Pressing theDisplay key also causes the other display selection keys to revert to the default of the statemessage and the leak rate reading even from within the PCM programming menus described inSection 10.

4.4.2 State

Displays a state message in the pre-programmed language and can be repeatedly pressed to read the test results as follows:

1. State mes sage 2. Ac cepts = # - Num ber of ac cepts3. Re jects = # - Num ber of re jects4. Tests = # - Num ber of tests5. Aborts = # - Num ber of aborts6. % Re jects = # - Per cent age of re jects7. % Ac cept = # - Per cent age of ac cepts8. Tune volts = 190

The sta tis tics use Test = Ac cept + Re jects on the ba sis of com pletely valid LEAK RATE com -pari sons with RE JECT LEV ELS which are ac tioned. Aborts arise when ever timed tests areFIN ISHED bef ore the ap pro pri ate times have elapsed or be cause the test was in ter rupted by afault con di tion pre vent ing proper meas ure ment. The coun ters auto mati cally re set af ter the9999 th + 1 test.

Tune volts is a con veni eny meas ure of ion source con ti nui ty val ues near ing 250 V in di cate theneed for ion source and tee tube main te nance.

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4.4.3 Time

Displays filament hours, run hours, date and time as follows:

1. Fil hours #2. Run hours #3. Day/Time - HH:MM4. Date - DD MMM YYYY

4.4.4 Leak rate

Displays the leak rate in the selected leak rate units or spectrometer off and the parameter status. If the parameters are all correct the display will read PARAMETERS OK. If not, an error message will be displayed. The third line associated with this key is the zero level of the Fine test modeunless in GROSS mode when it is the zero level of the GROSS test mode. The units indicatordepends on the programmed selection (see Section 4.9.3 << UNITS).

a) Leak rate/SPEC TROME TER off 4.40 - 10 mbarl/sb) Pa rame ters OK/ FAIL - Re ject levc) Zero level 6.20 - 10

4.4.5 Pressure

Sequentially displays the backing pressure, the test port pressure, mass spectrometer pressuremeasured by Pirani, the leak detector internal temperature and mass spectrometer pressuremeasured by spectrometer. (see Section 4.9.3 << PRESS UNITS).

a) Back ing Pres sure read ing 2.1 - 2 mbb) T- Port Pres sure read ing 0.0 - 3 mbc) Head- Pr Pres sure read ing 0.0 - 4 mbd) In ter nal tem pera ture 29 °Ce) Head- MS Pres sure read ing 4.0 - 7 mb

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4.5 Advisory LEDs

These are located under the PCM flip cover.

4.5.1 No Vent

On when manifold will not be returned to atmospheric pressure via the air-admit valve whenFinish is pressed. Two programmed options cause this to happen: either no vent on finish isselected, or no vent on reject was selected and a reject has occured. In the latter case, press Finisha second time to allow the manifold to be vented to atmospheric pressure.

4.5.2 Accessory

On when leak detector has been programmed to use external calibration allowing for alteredsensitivity of the leak detector when used with auxiliary pumps or visco probes accessories. Thisserves as a caution that leak rate calibration traceability is affected. With the lamp on, the leakrate indication is determined from the relevant accessory factor (either the external or the viscofactor). Traceability requires no internal calibrations after the traceable external calibration,unless this is redone.

4.5.3 Reject Display

On if leak detector is programmed to show ACCEPT/REJECT/ABORT on the PCM.

4.5.4 Key Lock

On if any PCM key or console switch has been programmed to be locked or if RS232 has solecontrol of the Spectron 5000.

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4.6 Range selection keys

The Spectron 5000 has the capability for the selection of automatic display ranging, to keep thelinear bargraph within the limits 1 to 10 where possible, or fixed normal ranges for specific leaklevel comparison. In either case the PCM can display the full leak rate digitally as well as on thebargraph and exponent displays.

The exponent gives the decade of leak measurement scale, which can either be preselectedusing the Up / Down keys in FINISH, or which can be allowed to autoscale by preselecting theAuto key. For some users the magnitude indicated by the exponent is the major considerationfor acceptance/rejection of a leak test item.

For ease of use the Auto, Up and Down keys do not need programming but may be useddirectly. The Auto key may be keylocked if required.

4.6.1 Auto

This selects leak rate exponent automatic ranging, the led will be on. To cancel auto rangingpress the Up or Down keys to recall the previous manual range selection.

4.6.2 Up

When in fixed range, Auto lamp off, pressing the Up key will increase the maximum detectableleak rate by a factor of 10, (that is the exponent increases by 1) until the test mode dependent setupper range limits are met. When in auto range, Auto lamp on, pressing the Up key will recallthe previous manual range selection.

4.6.3 Down

When in fixed leak rate exponent range, Auto lamp off, operation of the Down key will decreasethe maximum detectable leak rate by a factor of 10, (that is the exponent decreases by 1) until thetest mode dependent set lower range limits are met. When in auto range, Auto lamp on,pressing the Down key will recall the previous manual range selection.

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4.7 Function keys

4.7.1 Zero - normal

The Zero key zeros the leak rate indication in FINISH, READY, or any other test mode.

A different zero level is used in gross mode from that used in MASSIVE/FINE/HI SENS mode.The Spectron could be zeroed in both modes for the highest accuracy. Thefinish/massive/fine/Hi Sens zero can also be set for automatic operation after every test, tocontrol changing internal backgrounds in rapid cycling applications.The normal setting requires a single press of Zero to complete the re-zeroing in a given mode.

4.7.2 Zero - ramp

Zero-ramping is sometimes used for leak location with audio. Offsetting the background leakrate indication can provide the operator with a selectable pitched reference tone which willchange when a leak is detected.

A ZERO? PCM display prompts pressing Up, Down or Auto. To alter the zero level, or selectanother zero press to complete the zero.

If Up is pressed the PCM displays ZERO RAMP UP and the PCM leak rate bargraph indicationwill increase. [The zero bargraph will decrease].

If Down is pressed the PCM displays ZERO RAMP DOWN and the PCM leak rate bargraphindication will decrease. [The zero bargraph will increase].

The ZERO? display will return on the next Zero keypress and RAMPING UP or DOWN ishalted. Another Zero press will complete the zero.

4.7.3 Check/Peak -normal

The Leak Detector must be PEAKED to a helium source before being used to detect heliumleaks. With the operation pre-programmed for normal peaking, press Check/Peak, the Peak ledwill be on and the state message AUTO PEAKING will be displayed. When completed the leakdetector will return to the test mode.

4.7.4 Check/Peak - offset

Peak offset provides a PEAK ? state display which prompts for an Up, Down or Peak key press.UP or DOWN are halted and the PEAK ? state display returns on the next press of Peak. PressingUp causes the display PEAK OFFSET HIGH and tunes the mass spectrometer 10% higher thanits current setting. Alternatively, pressing Down causes to display PEAK OFFSET LOW andtunes the mass spectrometer 10% lower than its current setting. These offsets should besufficient to detune the mass spectrometer off the proper tuning and should result in a dramaticfall of leak rate reading if true trace gas response previously existed. When Peak is pressed withPEAK ? state display, the whole peak operation is completed. If Auto is pressed during PEAK ?state display, the Console will perform an automatic peak operation.

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4.7.5 Check/Peak - ramp

Use of the peak ramp up or down requires specialist understanding of mass spectrometry and isnot recommended for normal use. Peak ramp provides a PEAK ? state display which promptsfor an Up, Down or Peak key press. UP or DOWN are halted and the PEAK ? state display returns on the next press of Peak. Pressing Up causes the display PEAK RAMP UP until the next Peakkey press. During this ramp up the tuning voltage is increasing up to its maximum possible.Alternatively pressing Down causes the display PEAK RAMP DOWN until the next Peak keypress. During this ramp down the tuning voltage is decreasing towards zero. When Peak ispressed with PEAK ? State display, the whole peak operation is cancelled. If Auto is pressedduring PEAK ? state display, the Console will perform an automatic peak operation.

4.7.6 Check/Peak - He check

Proper use of the check/peak-He check function will reduce the need for frequent internalrecalibration. With the peak operation pre-programmed for check, pressing Check/Peak willlight the Check LED and enables the operator to check that helium is being detected by the mass spectrometer. If the helium response appears poor press Auto and the leak detector will revertto auto peaking in order to regain its tuning and should then show its normal response tohelium. If not, a recalibration is required.

During He-check the leak detector will not respond to other key presses. Press He-check oncemore in order to cancel the selection and force the leak detector to close its calibration valve.

4.7.7 Calibrate - internal

The leak detector must be switched on for at least 30 minutes and the filaments switched on forat least 10 minutes to permit an accurate calibration. Auto-peaking should be carried out beforeinternal calibration.

The Spectron 5000 has an inbuilt facility for automatic peak and internal calibration 25 minutesafter the display of READY following AUTO STARTUP. It is triggered by programming theSpectron 5000 for automatic startup (see Section 4.9.7 <<AUTOSTARTUP <<ASU OFF/ON1).Any use of the Spectron 5000 before the automatic procedures occur will cancel the triggering ofthe automatic peak and internal calibration.

Press Calibrate . The led will be on and the state message CALIBRATING will be displayed. With Hi Sens option fitted an intermediate message CALIBRATING NORM/CALIBRATINGFAST/CALIBRATING SLOW will be seen and takes approximately 60 seconds. Otherwise afterapproximately 20 seconds the state message will display CALIBRATED FIL1 or CALIBRATEDFIL2 depending on the current filament selection, and then revert to the previous PCM display.

If the Console is in FINISH, automatic selection of the internal calibration will occur, if theCalibrate key is pressed, irrespective of the external calibration setting being selected.

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4.7.8 Calibration - external

Note: If an internal leak is fitted, auto-peaking and internal calibration must becarried out before attempting an external calibration. The S5000 must thenbe programmed for external calibration by selecting Operation in the<<USER menu then Calibrate in the <<OPERATION menu and finallyExternal In the <<CALIBRATE menu. If an internal leak is not fitted,auto-peaking must be carried out before attempting an external calibration.

The Spectron 5000 permits (semi-) automatic external calibration in both GROSS HOLD and FINEtest modes.

If an internal leak is not fitted, external calibration will automatically be selected

1. The leak de tec tor must be switched on for at least 30 min utes and the fila ments switched on for at least 10 min utes to per mit an ac cu rate cali bra tion.

2. Auto- peaking and in ter nal cali bra tion must be suc cess fully car ried out bef ore ex ter nal cali bra tion (see Sec tions 4.7.3 to 4.7.7 ).

3 A ref er ence leak must be at tached to the test port. Fine mode must be se lected for cali bra tion with an ex ter nal leak. Press Test and wait for the leak de tec tor to reach Fineor Gross Hold test mode. Press Cali brate. EXT REF #.##-# will be dis played on thePCM, where #.##-# is the ex ter nal ref er ence leak value last en tered. To change thisvalue press Clear and en ter the new value us ing the pro gram ming keys then press En ter.

The PCM then dis plays LEAK TEMP (C) ##, where ## is the pre vi ously en tered ex ter nal ref er ence tem pera ture in de grees Cel sius.

Note: °C = 5/9 x (Fahrenheit - 32°)

To change this value, press Clear and en ter the new value us ing the pro gram ming keys,then press En ter.

The mes sage ZERO WHEN READY will be dis played on the PCM. To can cel cali bra tionpress the Cali brate key at this point (no other can cel la tion of cali bra tion is avail able).Close the ref er ence leak valve, when the leak rate has reached a sta ble zero level (thismay have a posi tive or nega tive value), press Zero, ZE RO ING will be dis played on thePCM fol lowed by CAL WHEN READY. Open the ref er ence leak valve and when theread ing has sta bi lised close to nomi nal value, press Cali brate. The led will be on andCALI BRAT ING will be dis played on the PCM, the cali brat ing rou tine should be com pleted in ap proxi mately 20 sec onds (60 sec onds for Hi Sens op tion).

4. The ex ter nal tem pera ture is used to com pen sate for the tem pera ture de pend ence of an Ed wards quartz he lium leak. To avoid this cor rec tion en ter the known ref er ence value atthe prompt and en ter 21 °C at the ex ter nal tem pera ture prompt. (The tem pera ture com pen sa tion as sumes the quartz leak co ef fi cient of 3.5% per °C above 21 °C).

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5. When cali brat ing is com pleted the dis play CALI BRATED 1 or CALI BRATED 2 will bedis played and the leak de tec tor will re vert to the test mode in use prior to cali bra tion.

In the event of in cor rect ex ter nal cali bra tion pa rame ters be ing de duced by the leak de tec tor, such as those as so ci ated with for get ting to open the ex ter nal cali bra tion leak valve, the leak de tec tor will re vert to the test mode and cali bra tion pa rame ters in use prior to cali bra tion.

6. The dis played leak rate is com puted from the prod uct of in ter nal cali bra tion fac tors(Fine cal, Gross cal, Mas sive Cal, Hi Sens Cal, Fast Cal) and, if re quired, ad di tional mul ti pli ers to ac count for ac ces so ries or sys tem de sign ex ter nal to the Spec tron 5000.(Ac ces sory fac tors for ex ter nal and for Visco are avail able plus leak rate fac tor for con ver sions to g/year and other pro gram ma ble fac tors for leak rate units).

In ter nal cali bra tion in flu ences the Fine Cal, Hi Sens Cal and Fast Cal only. Ex ter nalcali bra tion in flu ences Gross Cal and the ex ter nal fac tors only, but it is not avail able ifthe in ter nal cali bra tion (de fault) is re tained for op era tion, of if the leak de tec tor is in FIN ISH or READY when the cali bra tion is re quested.

7. It is rec om mended that ze ro ing is per formed af ter an ex ter nal cali bra tion to en sure that,in the event of a large fac tor change, the zero for sub se quent tests in the leak mode used

for the ex ter nal cali bra tion will be ac cu rate.

4.7.9 Gross hold

Press the Gross H key in the READY state until the Gross H led is on - this limits the normal testport pumping sequence by preventing the test valve from opening during the following tests.Leak testing is allowed during pump down if the massive/gross option is fitted.

4.7.10 Hi Sens

Pressing the Hi Sens key when the leak detector is in the FINE state will, if the Head-MS pressureis lower than the FINE/HI SENS change-over pressure, light the Hi Sens led and select Hi Sensmode of operation, if available. The response time in Hi Sens will be noticeably slow(approximately 10 seconds).

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4.8 Fault finding

This short guide to recovery from unexpected system performance, such as prolonged displayof normal state messages, is related to vacuum system troubleshooting. The fault or errormessages shown on the PCM as a result of automatic self diagnosis are described in Section 4.11.

4.8.1 Start up

Manual air admit valve has been left open after an ion source/filament replacement duringmaintenance, causing the high vacuum system pressure to remain above 0.25 mbar for a longperiod after START UP is initiated. Check this diagnosis by pressing the PCM Pressure key untilHead Pir or the backing pressure can be monitored.

CLOSE DOWN the console, then remove power and the worktop. Close the manual air admitvalve finger tight. Replace the worktop and restore the power. START UP the console. Confirmthat PUMPING DOWN occurs within a couple of minutes, or alternatively, monitor the systempressure again.

If the console still fails to proceed to PUMPING DOWN, then either another massive leak existsor the mechanical pumps or their associated valves do not operate correctly if at all. Call for aSERVICE diagnosis.

4.8.2 Pumping down

The high vacuum pump(s) in the console cannot reduce the high vacuum pressure sufficiently(below 8 x 10 -4 mbar) for Spectron automatic filament power ramping to be initiated, althoughthe backing pressure is adequate for the high vacuum pump operation, within the normalstartup period plus an extra 5 minutes after any system vent for routine maintenance.

Usually this would indicate a gross leak after ion source replacement or cold trap removal, orperhaps from rough handling during transport. It can also be caused by temporarily shorteddiffusion pump heaters or lack of liquid nitrogen in the cold trap (if fitted) whenever humidoperating conditions prevail; the PRL10K Head Piani gauge head VAC setting, failure of EO50heater control signal, Santovac 5 oil losses from the diffusion pump(s) or cooling conditions may all need investigation.

Ensure the liquid nitrogen cold trap is filled if fitted, and that the ambient temperature andcooling conditions are met. If the console is still in PUMPING DOWN, then CLOSE DOWN theconsole then START UP again. If the console still fails to proceed to READY then CLOSE DOWN the console and call for a SERVICE diagnosis.

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4.8.3 Finish (never Ready)

FINISH is the state that is reached after a test but before the test port has been vented toatmosphere, either via the Spectron vent valve or by external means, as measured by the TestPort Pirani gauge head. The FINISH state indicates that the leak detector is not pumping the testport, and as the mass spectrometer is therefore not monitoring any incoming trace gases thePCM exponent display is blanked out.

Check the PCM No vent LED is not lit. If it is then Spectron 5000 has been programmed toprevent the test port being vented through the Spectron vent valve at the termination of a leaktest (desirable in many system leak search applications). The system will not vent if a reject hasoccured if a programmed option NO VENT on REJECT has been set.

If the problem persists please follow Section 4.8.4 before calling for SERVICE.

4.8.4 Finish (cannot remove test port fixturing!)

First check that the PCM No Vent LED is off. If on, then please check with the supervisor whether the test fixturing should be removed before either trying to release it or reprogramming theSpectron vent valve. If the reject lamp is on (and the PCM display shows Reject, if reject displayshave been programmed), press Finish once. The system will turn off the No Vent lamp and ventthe test port to atmosphere if No vent on reject was selected, provided vent action was pre-programmed to 1 Vent on finish.

FINISH may persist if the vent delay and time durations, and cycle time, actually prevent proper test port venting with larger volumes attached to the test port. Programming the Vent valve isdescribed in section 4.9 under <<USER sub-menu choice 7 AUTOTEST 1 AUTOVENT. Checkthe timescales and if necessary increase the vent time and cycle time to achieve READY.Programming the No vent if reject option is described in Section 4.9 under Programming<<USER sub menu choice 6 Reject 1 Action.

If the problem persists please follow Section 4.8.5 before calling for SERVICE.

4.8.5 Finish (never into a test mode)

The mass spectrometer is actually off following automatic remedial action caused by highpressure readings detected within the Spectron, perhaps caused by test port fixture vacuumfailure during a leak test or by an empty liquid nitrogen cold trap.

Press the Standby key then immediately press the Test key to bring the Spectron console back touse as a leak detector, having refilled an empty liquid nitrogen cold trap.

If problems persist, examine procedures for handling the console test port fixtures to ensure that the Spectron is not systematically abused by exposure to regular atmospheric “dumps”, and callfor SERVICE.

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4.8.6 Filament trip

The FILAMENT TRIP state is “transitory”, in response to physical conditions that would lead tomore permanent loss of the leak detector measurement capability unless automaticallycontrolled by the Spectron. Frequent filament trips are usually associated with changeover intoFINE or Hi Sens leak test mode with large volume test port fixturing, or with the lack of liquidnitrogen in the cold trap, and should be minimized.

Wherever only moderate sensitivity leak testing is necessary, use GROSS HOLD mode ifpossible, and most especially for rapid cycle applications for which there will be only a veryshort exposure to the roughing pump. GROSS HOLD has the virtue of faster cycle time andhigher uptime at only a very modest drop in sensitivity and measurement response time.

Applications which must have FINE (or HI SENS) mode leak testing have either the gas loadentering the test port at the Spectron GROSS/FINE (or FINE/HI SENS) changeover pressure(s)reduced by throttling (externally) at the expense of system response time, or the SpectronGROSS/FINE (or FINE/HI SENS) changeover parameter value (setpoint) lowered at the expenseof pumping cycle time.

4.8.7 TEST takes longer time to enter normal test mode

Check PCM Gross Hold and Hi Sens key LEDs are set appropriately for the test to ensure thenormal test mode is accessible!

Check the test port fixture for massive (no O-rings) or gross (swarf, fibres) defects that may havebeen introduced since the last successful leak test. The leak detector itself can often be used forthis!

Maintenance of clogged inlet filters (most especially vapour absorbers in clean roughing kit)and the roughing pump oil level and condition may be needed: for the latter check the oil visiblein the pump sight-glass. Rapid cycle applications with high vapour pumping loads may needmore roughing pump autogas ballasting or oil changes than for normal use.

Helium trace gas also has the effect of causing Test Port Pirani gauge readings to be higher thanfor normal air when in excess at the start of a test cycle, so that MASSIVE/GROSS changeovertimes can be prolonged unless the massive reject action is on and a suitable massive reject levelset to avoid this condition. Massive reject also has the benefit of very significantly improvinguptime of the leak detector in rapid cycle applications, and its use is to be recommended for allSpectron users.

4.8.8 TEST is a REJECT whenever a particular test mode is entered

A reject action for the particular test mode is on, with little or no reject delay time set and a r atherlow value of reject level.

Ensure that reasonable values of reject level are selected for each mode that will be, or could beconceivably, active for the application. This should normally be well above the limits given inthe specification, because unless considerable care is taken to avoid extraneous trace gasbackgrounds the first active sensitive reject will cause a false reject.

4-22 Spec tron 5000

4.8.9 No response to helium

Check that the leak detector is in a test mode: the PCM exponent display should be visible, andone of the leak mode LEDs should be on. Program the <<USER submenu 4 Operation 2 Peak sothat the Check/Peak key is a Check key. This will conveniently allow the operator to check thatthere is some Spectron response to the internal leak in FINISH or READY modes. Press theDisplay key on the PCM so that the bar graph reverts to the default of leak rate reading, as it mayhave been left on the zero level which will only alter after a Zero operation is performed. Use thePCM autoranging facility to ensure range is appropriate to level of helium entering the massspectrometer, whether it arrives internally or via the test port. Ensure that helium is the selectedmass for tuning, and if there is still no apparent response press Check key then the Auto key toinitiate an automatic peaking operation.

4.8.10 Slow response to helium

When using an external helium supply, check the supply regulator settings and cylinder, andalso ensure the delivery lines have been fully flushed with the trace gas.

Fine leak valves may also require some time before full penetration of the valve leak path beforethe Spectron test port will receive helium.

The Spectron HI SENS leak mode has an internal pumping speed which is 10 times slower thanfor normal FINE mode, and results in a 10 times slower response time, ie typically of the order of10 seconds.

When leak testing large systems, remember that the system volume also influences the response time.

When leak testing long narrow pipework, remember that leaks located at long distancesthrough the pipework (from the Spectron test port) will have slower response times.

Please check all these before calling for a SERVICE diagnosis.

4.8.11 Bargraph is not solid bar

When the leak rate indication is negative, that is below the current zero setting, the displaymoves a single element across the bargraph as an advisory indicator.

Negative indicated leak rates usually mean that the previous zero had been performed beforethe leak rate readings had stabilised. There will be some slight variation of leak indication evenwhen the leak detector has been properly zeroed, but this variation should not be greater than asingle element of the bargraph.

Spec tron 5000 4-23

4.8.12 Display override after calibration

It is not recommended that the programming keys are used, except for data entry whenprompted, during a calibration of the Spectron 5000. The Spectron will correctly perform itscalibration even if program menus are entered during a calibration, but the display followingthe completion of the calibration will return to normal display condition, that is exit from themenu.

Press the Display key, until the PCM displays the normal state message and leak rateinformation, to clear any unexpected display override messages.

4.8.13 No response to PCM keys with helium check on

The Spectron 5000 software prevents users altering the leak test mode during helium check inorder to avoid erroneous reject actions.

Pressing the Check key to finish helium check should restore normal response to the PCM keys.

4.8.14 Hunting of roughing valve (for large volumes)

The Spectron 5000 vacuum operated valves rely on the vacuum generated at the vacuum valveactuator block (Item 21 Figure 5.4). During pump-down of very large volumes, when theroughing pump gas ballast pressure rises above a critical value the roughing valve willautomatically close, which will allow the gas ballast pressure to be lowered sufficiently to re-open the roughing valve automatically. For volumes which will never pump down below thecritical pressure of several hundred mbar, repeated cycling - hunting between the closed andopen positions - of the roughing valve will occur. To avoid this, an external restrictor should befitted on the test port between the leak detector and the test item, to allow the vacuum valveactuator block to function below the critical pressure. This restrictor may take the form of amanual throttle valve or a suitably sized orifice.

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KEY to Figure 4.3

1 Console START UP / CLOSE DOWN switches and lamps

2 ACCEPT / REJECT lamps

3 LEAK TEST / FINISH switches and lamps

KEY to Figure 4.4

1 Display selection keys

2 Alpha numeric display

3 Bargraph display

4 Leak mode indicators

5 Exponent display

6 PCM flip cover

7 Function keys

8 Advisory lamps

9 Numeric/Programming keys

Spec tron 5000 4-25/4-26

Figure 4.3 - Console panel layout

Figure 4.4 - PCM layout

4.9 USER MENU

Operator accessible menus

Lower the PCM flip cover to access the programming keys.

Menu maps are displayed on Figures 4.5, 4.6 and 4.7. These will assist in following theinstructions while becoming familiar with the menu structure. A shorter form of the menu mapis provided by the stick on label which may be attached to the inside of the PCM flip cover.

The <<USER menu default comprises a total of nine entries, of which eight may be accessed,without passwords, by the operator. The actual number of visible entries is controlled by thepassword holder programming <<USER SELECT in <<SYSTEM in the <<INSTALL menu.(See Section 4.10.2) INSTALL is always visible. The operator may NOT access the <<INSTALLmenu without PASSWORD 1. To exit from any menu press the Adjust key, the display returns to the previous menu. A single press of the Display key automatically exits any menu and returnsto the normal PCM display.

The symbol << denotes a menu.

Numeric entries: the symbol # denotes a value that is displayed or may be adjusted. Wheremore than one # is displayed, it means that each digit shown is entered separately.Occasionally a stored value requires an exponent change from - to +. This is performed bypressing the + key when during entry of the digits, for example, 2.00 - #, when - is selected pressthe + key, read 2.00 + #, press the numeric keys for the final digits then press Enter.

From the normal PCM display, press the Adjust key, the display reads <<USER

Press the Scroll key. For each operation of the Scroll key, the display moves down the list andshows the menu item selected. The complete list of entries in the programmable <<USERmenu is as follows:

1 Re sults Al lows in spec tion and rest of to tals used in sta tis tics of leak test ing. 2 Out put Se lec tion of Audio, print out, re corder and lan guage op tions.3 Units Se lec tion of leak rate and pres sure units dis played.4 Op era tion Pro gram ming of zero, peak and cali brate keys.5 Fac tors Al ter val ues for leak rate sen si tiv ity cal cu la tions, and some

pres sure setpoints.6 Re ject Pro gram mimg ac tions against speci fied leak rate re ject

pa rame ters, also in clud ing No vent on re ject.7 Auto test Timed vent,fin ish, abort, startup, re cal, auto Hi Sens, zero, fast hold.8 Fila ment Al lows se lec tion of fila ment 1 or fila ment 2.9 In stall Pro tected menus for set ting up ad vanced fa cili ties, pa rame ters,

tele coms, build and serv ice mode.

Each menu item is independent of the other items and may be addressed in any order. (For convenience, the + key can be used to move up the list.)

Spec tron 5000 4-27

The operation of each entry will be described in turn; in practice the operator will only addressthose items requiring adjustment.

4.9.1 <<RESULTS

The results menu displays the test results and includes a reset facility. Press the Scroll key until1 Results is displayed on the PCM. Press Enter, the display now reads <<RESULTS , press theScroll key to display the menu items in turn:

1 To tals2 Re set

Selection from the menu can be by pressing the Scroll key, or by selecting the identity number ofthe item and pressing Enter.

Totals

Press the Scroll key, or number 1 key, to select Totals, then press Enter, the display now reads Accepts ####, press Enter , the display now reads Rejects ####, press Enter , the display nowreads Tests ####, press Enter , the display now reads Aborts ####, press Enter , the displayreturns to <<Results .

Reset

Used to clear the statistical registers. Press the Scroll key, or number 2 key, to select Reset, thenpress Enter, all the totals will be reset to zero. To exit from menu press the Adjust, key, thedisplay returns to <<USER.

4.9.2 <<OUTPUT

The output menu addresses the output facilities of the Leak Detector and controls the languageof the PCM display. Press the Scroll key until 2 Output is displayed on the PCM. Press Enter, thedisplay reads <<OUTPUT, press the Scroll key to display the menu items in turn:

1 Audio OFF/ON2 Print out3 Re corder o/p4 Lan guage

<<AUDIO OFF/ON #

This allows software suppression of PCM loudspeaker output. There is also a volume controlknob on the rear of the PCM. Press the Scroll key until Audio OFF/ON is displayed on the PCM.Press Enter, the display now reads <<AUDIO OFF/ON #, press the Scroll key to display themenu items in turn:

0 Off 1 On

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Press the Scroll key, or number key, to select the required output, then press Enter the displayreturns to <<OUTPUT .

Note: When the audio is switched off, the log linear recorder output is also switched off.

<<PRINTOUT

The print output, via the parallel printer port (if fitted), can be set up using this menu. Press theScroll key until Printout is displayed on the PCM. Press Enter, the display now reads<<PRINTOUT , press the Scroll key to display the menu items in turn:

1 Set Print out2 Log ging int3 Cal print out

<<SET PRINTOUT #

This will allow either no printout, a two line printout or a four line printout after each test OR the printout of leak rate readings at specified elapsed times. Press the Scroll key until Set Printout isdisplayed on the PCM. Press Enter, the display now reads<<SET PRINTOUT # , press the Scrollkey to display the menu items in turn:

1 No print out2 Short print3 Long print4 Log ging

Press the Scroll key, or number key, to select the required output. Press Enter , the displayreturns to <<PRINTOUT .

The printout contains short form codes for console status as follows:

RT is READY to TEST, MA is MASSIVE mode, GR is GROSS mode, GH is GROSS HOLD, FI isFINE mode, HS is Hi Sens mode and OT is other modes.

Example of short printout:

1.26E-5 MB L/S ABORT02-07-92 18:22:16 MA

This shows the maximum valid leak rate measured during the test, the leak rate units selectedand an action message (ABORT when a leak test against leak rate rejection level criteria is invalid because of test time, abort time, manual finish or other interruptions that could disrupt themeasurement; ACCEPT when all leak test criteria including active rejection levels and timingsare met; REJECT when the leak test measurement is valid but the leakage is above an activerejection level).

Spec tron 5000 4-29

On the next line it gives the Spectron clock UK date and 24-hour time in hours:minutes:seconds, and one of the short form codes for console status immediately prior to FINISHing the leak test(whether this is manually or automatically or remotely initiated).

Example of long printout:

1.91E-8 MB L/S ACCEPT02-07-92 18:19:57 FI

T=52 A=47 R=5 X=16%R=10 REJECT = 3.00E-6

The first two lines have identical format to the short printout, and are followed by a blank lineand then statistics and valid test criteria.

The example has a total T=52 tests comprising A=47 accepts, R=5 rejects, X=16 aborts and anoverall valid rejection rate of %R=5 or 5% rejects based on 5 rejects in T=52 valid tests. Abortsare not included in the test statistics because they usually indicate incorrect set-up of the testtime criteria, or necessary automatic or manual operator intervention due to leak test portfixture problems. The criteria printed for a valid ACCEPT or REJECT will be the reject level in the last active test mode. For abort, the reject value will be suppressed and replaced by a TIMEmessage. TIME (the less than symbol) indicates abort prior to completing the necessary activedelay and test times, and the TIME (the greater than symbol) indicates that the test had not selfterminated within a programmed active abort time period.

Logging interval

The time in minutes between printed records of leak rates. Press the Scroll key, or number key toselect Logging Interval then press Enter, the display now displays Interval # (0-255). The figures in brackets are the selection limits, type in the required number, then press Enter, the displayreturns to <<PRINTOUT .

Example of logging printout

0.30E-10 MB L/S 02-07-92 19:02:11 HE RT STATE = 0

The fastest logging interval available has a repeat of about 16 seconds.

The example has leak rate displayed, the units of leak rate, the UK date and 24-hour time inhours:minutes:seconds, the tracer mass selected, the coded state of the console and the PCMstate label number (see Section 4.17.7 for these; in this example the message for STATE=0 isACCEPT).

Cal printout

If logging has been selected, then a record of calibration data can be added to printout if thisoption is set on, but not otherwise.

4-30 Spec tron 5000

This prints out the stored calibration data once and then resets to CAL PRINTOUT OFF. Pressthe Scroll key until Cal printout is displayed on the PCM. Press Enter, the display nowreads<<CAL PRINTOUT 0, press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required option, then press Enter , the displayreturns to <<PRINTOUT. Press Adjust to return to <<OUTPUT menu.

Example of calibration printout

CALIBRATIONSER 02C00055-02CONF 2330111111302-07-92 18:22:38 RTEXT FACTORSINTLEAK 2.50E-8 EXTLEAK 3.10E-8INTTEMP 31 EXTETEMP 21EMISSION 3MASS HETUNE V 187ACCESS 1.36E+0 FINE 1.26E+0 HISENS 1.24E-1FAST 2.19E+0 GROSS 1.40E+2 MASS 5.00E+5VISCO 5.00E+2

The calibration printout information contains CALIBRATION header; then the console serialand configuration numbers; the clock (UK) date and 24-hour time hours:mins:secs and codedstate of the console at the time the printout was requested; the last calibrated factors (INT isinternal calibration, EXT is external factor and VISCO is for ext visco factor); the internal andexternal reference leak stored values; the measured internal temperature and the storedexternal temperature in degrees C; the factory pre-set filament emission level; the selected mass (H2 is hydrogen, HD is deuterium hydride and HE is helium4); the mass spectrometer tunevoltage setting in volts; calibration scale factors for external accessory, FINE mode, and Hi Sensmode relative to fine mode, fast pumping and gross mode and massive mode factors relative tofine mode; and visco factor relative to fine mode scale factor.

Some of the calibration information will change from calibration to calibration, while others areunaffected or may not be used for your particular Spectron 5000. (Hi Sens and Fast factor areonly relevant to Hi Sens build variants). Where calibration is unimportant provided the consoleis close to normal operating conditions, the factory set values are usually sufficient combinedwith checks on indicated leak response to external reference leaks when in the relevant leak testmode.

The key internal calibration factor of a Spectron 5000 is the Fine factor, which is about unity forcold trap versions and an order of magnitude larger for no nitrogen versions. All other factors,including external and visco calibration factors, are multipliers for FINE mode.

Spec tron 5000 4-31

<<RECORDER O/P #

The recorder output socket on the PCM can be switched between a linear or log linear mode for recording leak rates on a recorder or computer interface. The PCM recorder output in linearmode represents the mantissa (for example 7.60) as a voltage based on steps of approximately39 mV. As 255 steps span 0 - 10 V d.c., this representation corresponds to <0.4% full scaledeflection resolution in leak rate for the fixed exponent.

The log-linear representation has 4 binary bits for each decade, starting on -11 range ofexponents and rising to +3 rangre of exponents. The mantissa is represented by the 4 binarybits, that is 0 -15 steps of approximately 39 mV each, so that adjacent exponent settings areseparated by nearly 0.6 V.

It is recommended that the log-lin output is used as a convenient meens of sensing theexponent range in use, rather than for accurate records of the leak rate, for which the linearrecorder output is preferred. Please note that the sign of the mantissa is always ignored in therepresentation, whether linear or log-linear is selected.

Press the Scroll key until Recorder output is displayed on the PCM. Press Enter, the display nowreads <<RECORDER O/P #, press the Scroll key to display the menu items in turn:

1 Lin ear2 Log/lin ear

Press the Scroll key, or number key, to select the required output, then press Enter , the displayreturns to <<OUTPUT .

Note: When the audio is switched off, the log linear recorder output is also switched off.

<<LANGUAGE #

All the messages on the PCM can be displayed in any one of three languages. Press the Scrollkey until Language is displayed on the PCM. Press Enter, the display now reads<<LANGUAGE #, press the Scroll key to display the menu items in turn:

1 Eng lish2 French3 Ger man

Press the Scroll key, or number key, to select the required output, then press Enter , the displayreturns to <<OUTPUT. Press Adjust, display returns to <<USER.

4.9.3 << UNITS

The units menu enables the user to select the leak rate and pressure units that will be displayedon the PCM. Internally the Console software uses mbar l/s and mbar units. Press the Scroll keyuntil 3 UNITS is displayed on the PCM. Press Enter, the display reads << UNITS , press theScroll key to display the menu items in turn:

4-32 Spec tron 5000

1 Leak rate2 Pres sure

<<LEAK UNITS #

One of five common leak rate units or grams per year (g/year) or parts per million (ppm) ormicro-moles per second (displayed as µ mol/s) may be displayed. The conversion factor for mbar l/s to g/year has to be calculated and then programmed by the user into <<FACTORS menuitem 4 Leak factors (default 1.00). Press the Scroll key until 1 Leak rate is displayed on the PCM.Press Enter, the display now reads <<LEAK UNITS #, press the Scroll key to display the menuitems in turn:

1 atm cc/s2 mbar l/s3 Pa l/s4 Pa m3/s5 torr l/s6 g/year7 ppm8 mi cro mole/s

Press the Scroll key, or number key, to select the required leak unit, then press Enter , the display returns to <<UNITS.

<<PRESS UNITS #

One of five common pressure units may be selected for display. (Microns of mercury ≡ milliTorr will be displayed by the PCM as um). Press the Scroll key until 2 Pressure is displayed onthe PCM. Press Enter, the display now reads <<PRESS UNITS #, press the Scroll key to displaythe menu items in turn:

Menu Dis play 1 mbar mb2 Pas cal Pa3 torr t4 kpas cal kP5 mi cron µm

Press the Scroll key, or number key, to select the required pressure unit, then press Enter , thedisplay returns to <<UNITS. Press Adjust to return to <<USER.

4.9.4 << OPERATION

The operation menu allows the user to re-program the Zero, Peak/Check and Calibrate keys tospecific types of function. Press the Scroll key until 4 Operation is displayed on the PCM. PressEnter, the display reads << OPERATION, press the Scroll key to display the menu items in turn:

1 Zero2 Peak 3 Cali brate

Spec tron 5000 4-33

<<ZERO #

This allows either automatic zeroing, when Zero is pressed, or the facility to smoothly ramp thezero level when the zero UP or DOWN keys are pressed. Press the Scroll key until 1 Zero isdisplayed on the PCM. Press Enter, the display now reads <<ZERO #, press the Scroll key todisplay the menu items in turn:

1 Nor mal2 Ramp

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<OPERATION.

<<PEAK #

This allows programming of the Check/Peak key for either automatic peak searching, 10% stepoffset or ramp the peak voltage, or He check function. Press the Scroll key until 2 Peak isdisplayed on the PCM. Press Enter, the display now reads <<PEAK #, press the Scroll key todisplay the menu items in turn:

1 Nor mal2 Off set3 Ramp 4 He check

Press the Scroll key, or number key, to select the required function, then press Enter , the display returns to <<OPERATION .

<<CALIBRATE #

This allows the user to select different reference leak positions, either internal or external to theConsole, for calibration. If an external leak is selected, the appropriate factor will beautomatically adjusted to match the indicated leak rate to the entered leak value. Press the Scrollkey until 3 Calibrate is displayed on the PCM. Press Enter, the display now reads <<CALIBRATE #, press the Scroll key to display the menu items in turn:

1 Ex ter nal 2 In ter nal

Press the Scroll key, or number key, to select the required calibration configuration, then pressEnter , the display returns to <<OPERATION. Press Adjust to return to <<USER.

4.9.5 << FACTORS

The << FACTORS menu enables the operator to enter, or check, the values for all the displayedfactors. Press the Scroll key until 5 Factors is displayed on the PCM. Press Enter , the displayreads << FACTORS , press the Scroll key to display the menu items in turn:

4-34 Spec tron 5000

1 Ext Ref Leak Value in mbar l/s2 Conc He lium %trace gas in test gas sup ply3 Air/He Equiv. Leak rates of air or he lium gas4 Leak fac tor Value of con ver sion from mbar l/s into g/yr or ppm/s5 Gross/Fine (mbar) Set point for fine mode en try6 Aux OFF (mbar) Set point for (PCSP) aux il iary re lay7 Mass Se lected trace gas used (He4, He3/HD,H2).8 Ex ter nal Ex ter nal ac ces sory (OFF/ON and Fac tor)9 Visco Visco probe sen si tiv ity fOFF/ON and Fac tor)

Ext Ref Leak

Where an internal reference is not fitted, or applicable, this item stores the actual value ofexternal reference leak mbar l/s air equivalent. Press the Scroll key until 1 Ext Ref Leak isdisplayed on the PCM. Press Enter , the display now reads Ext Leak 2.50-8. Press Clear to alterreading, if required. (Must fall within the limits 1.00+3 & 1.00-12). Press Enter , the displayreturns to <<FACTORS.

Concentration

The percentage of 'helium' used in the test must be entered to maintain the calibration of leakrate indication for test purposes. Press the Scroll key until 2 Conc Helium is displayed on thePCM. Press Enter , the display now reads Conc He 100. Press Clear to alter reading, if required.(Must fall between the limits 1 & 100). Press Enter , the display returns to<<FACTORS.

Air/He Equiv

This is used to switch between calculated air leakage rates and those of measured heliumleakage. Edwards conventionally references its rates to that of air, but this factor may beremoved by selecting Helium. Alternatively retain the default of AIR/HE Equiv 1 and use leakfactor for conversion. Press the Scroll key, or number key, to select 3 Air/He Equiv then pressEnter , the display now reads <<AIR/He #, press the Scroll key to display the menu items inturn:

1 Air2 He lium

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<FACTORS .

Leak factor

When g/year or ppm leak rate units are required, leak factor stores the conversion from mbar l/s.Press the Scroll key until 4 Leak factor is displayed on the PCM. Press Enter , the display nowreads leak factor 1.00+0, press Clear key to change this figure if required. (Must fall between thelimits 1.00+6 & 1.00-6). Press Enter ,the display returns to <<FACTORS.

Spec tron 5000 4-35

Gross/Fine

This is the critical change-over pressure in mbars. Press the Scroll key until 5 Gross/Fine isdisplayed on the PCM. Press Enter , the display now reads Gr/Fine 2.50-2. Press Clear to alter ifrequired. (Must fall between the limits 5.00-2 &1.00-4). Press Adjust to return to <<FACTORS.

Aux off

This is a setpoint pressure at which the PCSP Option/auxiliary relay is switched off. Press theScroll key until 6 Aux OFF is displayed on the PCM. Press Enter , the display now reads AuxOFF 1.00-2. Press Clear to alter if required. (Must fall between the limits 1.00-1 & 1.00-4). PressAdjust to return to <<FACTORS .

Mass

The normal trace gas used is helium, but the Spectron 5000 can readily accommodate helium 3or deutrium hydride or hydrogen tracer by selection in this menu. The default tuning voltagesfor the Spectron 5000 are mass 4 equivalent to 190 V, mass 3 equivalent to 260 V and mass 2equivalent to 380 V. Separate calibration parameter storage within the Spectron permits readyuse of pre-stored calibration data for each gas.

This menu permits the correct calibration data for different gasses to be selected. Press the Scrollkey until 7 Mass is displayed on the PCM. Press Enter , the display now reads <<MASS #, pressthe Scroll key to display the menu items in turn:

1 He lium2 HD/He33 Hy dro gen

Press the Scroll key, or number key, to select the required option, then press Enter , the displayreturns to <<MASS. Press Adjust to return to <<FACTORS.

External

This is used for sensitivity calculations in order to maintain the calibration of the leak rateindication when the Console is used with auxiliary pumping and also for external calibrationadjustments. Press the Scroll key until 8 External is displayed on the PCM. Press Enter , thedisplay now reads <<EXTERNAL. Press the Scroll key to display the menu items in turn:

1 Off/On2 Fac tor

Press the Scroll key, or number key, to se lect 1 Off/On then press En ter , the dis play nowreads <<EX TERN OFF/ON #. Press the Scroll key to dis play the items in turn:

0 OFF1 ON

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Press the Scroll key, or number key, to se lect the re quired state then press En ter , the dis play re turns to <<EX TER NAL . If <<EX TER NAL OFF/ON 1 is se lected, then the Ac ces sory lamp will be on to show ad di tional cali bra tion trace abil ity fac tors ap ply.

Press the Scroll key, or number key, to se lect 2 Fac tor then press En ter , the dis play nowreads Ex tern 1.00 + 0. The lim its for the Ex ter nal fac tor are 0.5 (Lo limit ) and 1 x 106 (Hi limit).Press Clear to al ter the value if nec es sary. Press En ter to re turn to <<EX TER NAL. Press Ad just to re turn to <<FAC TORS

Visco

This is used for sensitivity calculations in order to maintain the calibration of the leak rateindication when the Console is used with a Visco Probe accessory. Press the Scroll key until 9Visco is displayed on the PCM. Press Enter , the display now reads <<VISCO. Press the Scrollkey to display the menu items in turn:

1 Off/On2 Fac tor

Press the Scroll key, or number key, to se lect 1 Off/On then press En ter , the dis play nowreads <<VISCO OFF/ON #.

0 OFF1 ON

Press the Scroll key, or number key, to select the required state then press Enter , the displayreturns to <<VISCO . If <<VISCO OFF/ON 1 is selected, then the Accessory lamp will be on toshow additional calibration traceability factors apply.

Press the Scroll key, or number key, to select Factor then press Enter , the display now readsVisco 5.00 +2 (for L17XX build) or 5.00 +3 (for all other builds). The limits for the Visco factor are0.5 (Lo limit) and 1 x 106 (Hi limit). Press the Scroll key to display the items in turn:Press Clear toalter the value if necessary. Press Enter to return to <<VISCO. Press Adjust to return to<<FACTORS and press Adjust again to return to <<USER.

4.9.6 << REJECT

Actioned reject levels are applied after a minimum of 0.5 seconds from entry into correspondingleak test mode unless explicitly delayed. Delay times are measured in 1/10 th seconds, andminimum values of 5, equivalent to 0.5 seconds, are implemented for all leak test modes as theresponse time of the leak detector is not faster than this timescale.

The << REJECT menu enables the operator to program the system reject features for each leakmode. Press the Scroll key until 6 REJECT is displayed on the PCM. Press Enter , the displayreads << REJECT, press the Scroll key to display the menu items in turn:

Spec tron 5000 4-37

1 Ac tion Dis play la bels and re ject re lay han dling,fin ish if re ject and vent if re ject

2 Mas sive Mas sive mode set up, level and de lay.3 Gross Gross mode set up, level and de lay.4 Fine Fine mode set up, level and de lay.5 Hi Sens Hi Sens mode set up, level and de lay.

Reject delay times may be set between 0.5 and 65553.5 seconds. Reject delays cannot be set off.Default values are all 0.5 seconds.

<<ACTION

Press the Scroll key until 1 Action is displayed on the PCM. Press Enter , the display now reads<<ACTION, press the Scroll key to display the menu items in turn:

1 Re ject dis play2 Rej disp held3 Fin ish if Rej4 Vent if Rej

<<REJ DISPLAY #

This allows the PCM to display Accept, Reject, or Abort messages on the state label instead of theleak rate mode label. Press the Scroll key, or number key, to select 1 Reject Display then pressEnter , the display now reads <<REJ DISPLAY #, press the Scroll key to display the menu itemsin turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<ACTION.

<<REJ DISP HELD #

This allows the reject label and relays to be held on the first valid occurrence of a reject levelbeing exceeded. This is useful for operation remote from the PCM display. Reject held OFF willonly permit REJECT labels while measured leak rate exceeds set point. Press the Scroll key, ornumber key, to select 2 Rej disp held then press Enter , the display now reads <<REJ DISP HELD# press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<ACTION .

4-38 Spec tron 5000

<<FIN IF REJ #

This allows the system to automatically terminate a test if the reject level is exceeded in theappropriate leak test mode. Press the Scroll key, or number key, to select 3 Fin if Rej, then pressEnter, the display now reads <<FIN IF REJ #, press the Scroll key to display the menu items inturn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<ACTION. Press Adjust to return to <<REJECT.

<<VENT IF REJ#

This allows the system to automatically permit the vent if a reject is detected, or to require theoperator to press the Finish key, or console FINISH switch to permit venting. Press the Scroll key or number key to select 4 Vent if Rej then press Enter. The display now reads <<VENT IF REJ #. Press the Scroll key to display the menu items in turn:

1 VENT IF RREJ2 NO VENT

Press the Scroll key, or number key, to se lect the re quired state, then press En ter , the dis play re turns to <<AC TION. Press Ad just to re turn to <<RE JECT.

Note 1: <<VENT IF REJ # will only operate if <<FIN ON REJ # or <<AUTO FINISH has also been selected.

Note 2: The <<VENT IF REJ # function must not be used if a flip lid test port is fitted. The normal test keys are disabled when the flip lid is fitted and, as a result, with the flip lid still held down it is not possible to start the cycle again to reach fine test.

<<MAS SIVE

This menu allows the massive mode reject to be selected or de-selected, the rejection level anddelay time to be specified before testing becomes valid. Press the Scroll key until 2 Massive isdisplayed on the PCM. Press Enter, the display now reads <<MASSIVE , press the Scroll key todisplay the menu items in turn:

1 Ac tion Off/On2 Level3 De lay

<<MASS ACTION #

Press the Scroll key, or number key, to select 1 Action off/on, then press Enter , the display nowreads<<MASS ACTION #, press the Scroll key to display the menu items in turn:

Spec tron 5000 4-39

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to <<MASSIVE.

Level

This should be in the currently selected leak rate units (default units are mbarl/s). Press the Scrollkey, or number 2 key, to select 2 Level then press Enter , the display now reads Rej level 1.00-2.Press Clear to alter if required. (Must fall between the limits 1.00+3 & 1.00-4). Press Adjust toreturn to <<MASSIVE.

Delay

Press the Scroll key, or number 3 key, to select 3 Delay then press Enter , the display now readsRej delay 65535. Press Clear to alter if required. (Must fall between the limits 0.5 & 65535). PressAdjust to return to <<MASSIVE. Press Adjust to return to <<REJECT.

Gross, Fine and Hi Sens

The selection in Gross, Fine and Hi Sens is identical to the previously described selection inMassive, except that the rejection levels are typically smaller dependent on the increasingsensitivity of these modes. Default settings are listed in the Install Menu Part 2, see Figure 4.9.

Press Adjust to return to <<USER.

4.9.7 <<AUTO TEST

The <<AUTO TEST menu enables the operator to program the procedures for the automaticoperation of the system. Press the Scroll key until 7 AUTO TEST is displayed on the PCM. PressEnter , the display reads << AUTO TEST, press the Scroll key to display the menu items in turn:

1 Autov ent Vent ac tion, time and de lay.2 Auto fin ish Fin ish on fi nal test time.3 Auto abort Abort on fail ure to en ter speci fied modes in time.4 Auto startup Real time start up.5 Re- calibrate Se lect auto mat ic re cali bra tion pe ri od.6 Hi Sens auto Pro gram fi nal test state as hisens (op tion)7 Autoz ero fin Se lect auto mat ic ze ro ing at the com ple tion of every test.8 Fast Hold Se lects fixed ac cu mu la tor valve po si tion (op tion).

<<Autovent

Press the Scroll key until Autovent is displayed on the PCM. Press Enter , the display now reads<<Autovent , press the Scroll key to display the menu items in turn:

4-40 Spec tron 5000

1 Ac tion OFF/ON2 Autov ent time Time the vent valve is opened in FIN ISH/READY mode.3 Vent de lay Time de lay be tween en try to FIN ISH/READY mode and

open ing of the vent valve.

<<VENT ACTION #

Press the Scroll key, or number key, to select 1 Action OFF/ON then press Enter , the display nowreads <<VENT ACTION # press the Scroll key to display the menu items in turn:

1 Vent on fin ish Sys tem vents nor mally to at mos pheric pres sure given suf fi cient autov ent time and <<RE JECT/<<AC TION/<<VENT IF REJ # has been se lected.

2 No vent If this is se lected, the sys tem will not per mit the test port to be vented to at mos phere via the vent- valve.

Press the Scroll key, or number key, to select the required state, then press Enter , the displayreturns to<<AUTO VENT #.

Auto time #

Press the Scroll key, or number key, to select 2 Autovent time, then press Enter , the display nowreads Auto time #(0-65535). If a zero value is entered, and Vent on finish is selected, the vent-valve will not close after it has opened in FINISH/READY mode. Press Clear to alter if required.Press Enter the display returns to <<AUTO VENT #.

Vent delay #

Press the Scroll key, or number key, to select 3 Vent delay, then press Enter , the display nowreads Vent delay #(0-65535). If a zero value is entered, and Vent on finish is selected, the systemwill vent 0.5 seconds after entering FINISH/READY, provided <<REJECT/<<ACTION 4Vent if Rej 1/ VENT IF REJ has been selected. . Press Clear to alter if required. Press the displayreturns to <<AUTO VENT #. Press Adjust to return to <<AUTO TEST.

<<AUTO FINISH

The Auto Finish menu enables the testing timescale to be limited. The final test mode elapsedtime may be set between 0.1 and 6553.5 seconds. A choice of zero will deselect the associated test. Press the Scroll key, or number key, to select 2 Auto finish then press Enter , the display nowreads <<AUTO FINISH press the Scroll key to display the menu items in turn:

1 OFF/ON2 Set test time

<<FINISH OFF/ON #

Press the Scroll key, or number key, to select 1 OFF/ON then press Enter , the display now reads<<FINISH OFF/ON # press the Scroll key to display the menu items in turn:

Spec tron 5000 4-41

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to<<AUTO FINISH.

Test time #

Press the Scroll key, or number key, to select 2 Set test time, then press Enter, the display nowreads Test time #(0-65535). A zero value will be ignored. Press Clear to alter if required. PressEnter the display returns to <<AUTO FINISH #.Press Enter, the display returns to <<AUTOTEST.

<<AUTO ABORT

The Auto Abort menu is used to force FINISH after a given total time from start of test. It may beused to prevent hunting of the roughing valve for high pressure testing (see Section 4.8.14).Auto Abort times between 0.1 and 6553.5 seconds may be selected. An Abort time of 0 deselectsthe associated test. The timer starts from entry into a leak mode from the READY state. Press theScroll key until 3 Auto abort is displayed on the PCM. Press Enter, the display now reads<<AUTO ABORT, press the Scroll key to display the menu items in turn:

1 OFF/ON2 Set abort time

<<ABORT OFF/ON #

The <<ABORT OFF/ON # message is always linked to the <<FINISH OFF/ON # message bythe Spectron 5000 software. To avoid continual aborts of tests, the Abort time # should be either0 or a realistic value. Press the Scroll key, or number key, to select 1 OFF/ON then press Enter, thedisplay now reads <<AUTO ABORT # , press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<AUTO ABORT.

Abort time #

Press the Scroll key, or number key, to select 2 Set abort time then press Enter, the display nowreads Abort time # (0-65535). A zero value will be ignored. Press Clear to alter if required. PressEnter, the display returns to <<AUTO ABORT. Press Adjust to return to <<AUTO TEST.

4-42 Spec tron 5000

<<AUTO STARTUP

WARNING

Auto start up facilities may cause the Console to start its automatic sequence at a pre-determined time. Always check PCM state message before removing covers for

maintenance. EHVI recommends that power is not applied if covers are off.

A WARNING BUZZER WILL SOUND IF THE CONSOLE IS ABOUT TO SELF START VIATHIS OPTION.

Press the Scroll key until 4 Auto startup is displayed on the PCM. Press Enter, the display nowreads <<AUTO STARTUP, press the Scroll key to display the menu items in turn:

1 ASU OFF/ON2 Set start time

<<ASU ON/OFF #

Press the Scroll key, or number key, to select 1 ASU OFF/ON, then press Enter, the display nowreads <<ASU OFF/ON #. Press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<AUTO STARTUP.

<<START DAY #

Press the Scroll key, or number key, to select 2 Set start time then press Enter, the display nowreads <<START DAY #, press the Scroll key to display the menu items in turn:

0 Sun day1 Mon day2 Tues day3 Wednes day4 Thurs day5 Fri day6 Sat ur day7 Five days8 Six days9 Every day

Spec tron 5000 4-43

Press the Scroll key, or number key, to select the required state, then press Enter, the displaynow shows Start Hour #. Press Clear to set the required time then press Enter. The display nowshows Start Mins #. Press Clear to set the required time then press Enter. The display returns to<<AUTO STARTUP. Press Adjust to return to <<AUTO TEST.

Note: The set start time procedure MUST be completed to be activated, any interrupt will cancel the changes being made and the procedure must be restarted from the beginning.

<<RECALIBRATE

The Spectron 5000 can be set to automatically perform, or prompt for, recalibration at set elapsed times. The recalibration sequence will be started at the first FINISH after the set elapsed time.Press the Scroll Key until 5 Recalibrate is displayed on the PCM. Press Enter, The display nowreads <<RECALIBRATE, press the Scroll key to display the menu items in turn:

1 Re cal OFF/ON2 Auto/Prompt3 Set re cal time

<<RECAL ON/OFF #

Press the Scroll key, or number key, to select 1 Recal OFF/ON, then press Enter, the display nowreads <<RECAL OFF/ON #. Press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <RECALIBRATE.

<<AUTO/PROMPT #

Automatic recalibration will use the internal reference leak and interrupt testing. Promptedrecalibrations allow either internal or external recalibrations. Press the Scroll key, or numberkey, to select 2 Auto/Prompt then press Enter, the display now reads <<AUTO/PROMPT #.Press the Scroll key to display the menu items in turn:

1 Auto2 Prompt

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <RECALIBRATE.

4-44 Spec tron 5000

Recal (hours) #

Press the Scroll key, or number key, to select 3 Set recal time then press Enter, the display nowreads Recal (Hrs) # (0-255). A zero value will be = 15 minutes. Press Clear to alter if required.PressEnter, the display returns to <<RECALIBRATE. Press Adjust To return to <<AUTOTEST.

<<HI SENS AUTO #

For users who require the final test mode to be the high sensitivity mode, the Spectron 5000 canbe preprogrammed to reach this if the Mass Spectrometer pressure is low enough. Press theScroll key until 6 Hi Sens auto is displayed on the PCM. Press Enter, the display now reads <<HI SENS AUTO #, press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to Hi Sens auto. Press Adjust To return to <<AUTO TEST.

<<AUTO ZERO FINISH #

For use with rapid cycling and to reduce the need for operator intervention in leak testingadjustments using the PCM Zero key. The zero level altered, if this option is used, is that of thefinal test mode, for example the gross zero if Gross hold was set during the conclusion of thetest. Press the Scroll key, or number key, to select7 Auto zero fin , then press Enter, The displaynow reads <<AUTO ZERO FIN #. Press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<AUTO TEST.

<<FAST HOLD #

For specialist use, the accumulator valve (option) may be programmed to be held fully open.Press the Scroll key, or number key, to select 8 Fast hold, then press Enter, the display now reads<<FAST HOLD #. Press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<AUTO TEST. Press Adjust to return to <<USER.

Spec tron 5000 4-45

4.9.8 << FILAMENT #

The << FILAMENT menu enables the operator to select the mass spectrometer filament.Normal operation should use Filament 1; in the event of a filament failure, filament 2 can beused to continue testing while arranging for maintenance to replace both filaments as soon aspossible. Press the Scroll key until 8 FILAMENT is displayed on the PCM. Press Enter, the display reads <<FILAMENT #, press the Scroll key to display the menu items in turn:

1 Fila ment 12 Fila ment 2

Press the Scroll key, or number key, to select the required filament then press Enter, the displayreturns to <<FILAMENT #. Press Adjust To return to FILAMENT. Press Adjust To return to<<USER. Press Display to return to normal PCM display control.

4-46 Spec tron 5000

Spec tron 5000 447/4-48

Figure 4.5 - User menu Part 1.

Spec tron 5000 4-49/4-50


Spec tron 5000 4-51/4-52


SPECTRON 5000

MASTER PASSWORD SHEET

To prevent unauthorised entry into the INSTALL MODE it is necessary to enter a password. There are three passwords numbered 1, 2 and 3. Password 1 will normally be requestedbefore entering INSTALL MODE.

The passwords are not set when leaving the factory, enabling the user to access the<<INSTALL Menu, then <<SYSTEM Menu and by entering the Master Password, setpasswords 1, 2 and 3.

The Master password for this SPECTRON 5000 Leak Detector is :

9027

If passwords 1, 2 or 3 are either not known or forgotten, the user may access the menus byusing the Master password to override passwords 1, 2 and 3.

The Parameters password for this SPECTRON 5000 Leak Detector is:

8732

The Telecoms password for this SPECTRON 5000 Leak Detector is:

2526

For security reasons, this page should be removed and kept in a secure location.

Spec tron 5000 4-53A

4.10 INSTALL MENU

The <<INSTALL menu enables the password holders to set up the Spectron for specific userrequirements and to program the menus and keys to limit operator access to required functionsonly.

Access to the <<INSTALL menu is protected by password entry. PASSWORD 1 enables theauthorised operator to read the contents of the <<INSTALL menu and to access the Versioninformation only. Passwords 1, 2 and 3 are initially unnecessary until set as described below.

Menu maps are displayed on Figures 4.8 and 4.9. These will assist in following the instructions.

PASSWORD 1 plus PASSWORD 2 enables the authorised operator to access the contents of the<<OPTIONS menu which holds the contents of the complete <<USER menu.

PASSWORD 1 plus PASSWORD 3 enables the authorised operator to access the contents of thecomplete <<SYSTEM menu.

PASSWORD 1 plus PASSWORD 3 plus the MASTER PASSWORD enables the authorisedoperator to change PASSWORDS 1, 2 AND 3

PASSWORD 1 plus the PARAM PASSWORD enables the authorised operator to access thecontents of the complete <<PARAMETERS menu. This permits the operator to change thecalibration and/or the set points of the Spectron if required.

PASSWORD 1 plus the TELECOM PASSWORD enables the authorised operator to access thecontents of the <<TELECOM menu. This permits the operator to program the Spectron for usewith a modem.

The operator is not permitted to access the SETUP and SERVICE menus which are for EHVIfactory and authorised service use only.

Press the Scroll key to select INSTALL in the <<USER menu, then press Enter, the display nowreads PASSWORD 1 ####. Type in the password and press Enter, the display now reads<<INSTALL. Press the Scroll key. For each operation of the Scroll key, the display shows themenu item selected. The following list contains all the entries in the <<INSTALL menu:

1 Op tions The com plete <<USER menu2 Sys tem Set date, pass words, key lock and user menu3 Pa rame ters Cali bra tion, setpoints, re jects and ac ces sory fac tors4 Ver sion Dis play fixed iden ti fi ca tion num bers and track ing5 Tele com PCM lock out, RS232 bau drate and for mat6 Setup Re served for fac tory build7 Serv ice Re served for EHVI use.

Spec tron 5000 4-53

4.10.1 <<OPTIONS

The <<OPTIONS menu contains all the possible choices which can be selected for display inthe <<USER menu and enables the password holder to access all these entries. Press the Scrollkey to select Options in the <<INSTALL menu, then press Enter, the display now readsPASSWORD 2 ####. Type in the password and press enter, the display now reads<<OPTIONS , press the Scroll key to display the menu items in turn:

1 Re sults2 Out put3 Units4 Op era tion5 Fac tors6 Re ject7 Au totest8 Fila ment

The contents of this menu have been fully described in the basic operators instructions.(See Section 4.9)

4.10.2 <<SYSTEM

The <<SYSTEM menu enables the password holder to set the date, change the passwords, lockor unlock function keys and enable or disable entries in the <<USER menu. Press the Scroll keyto select System in the <<INSTALL menu, then press Enter, the display now reads PASSWORD 3 ####. Type in the password and press Enter, the display now reads<<SYSTEM, press the Scroll key to display the menu items in turn:

1 Set date2 Pass words3 Key lock4 User se lect

SET DATE

Press the Scroll key until 1 Set date is displayed on the PCM.Press Enter, the display now reads Year ####.Press Clear to adjust reading, if required.Press Enter, the display now reads Month ##. Press Clear to adjust reading, if required.Press Enter, the display now reads Day ##.Press Clear to adjust reading, if required.Press Enter, the display now reads Hour ##.Press Clear to adjust reading, if required.Press Enter, the display now reads Minute #.#Press Clear to adjust reading, if required.Press Enter, the display now returns to <<SYSTEM.

4-54 Spec tron 5000

Passwords

Press the Scroll key until 2 Passwords is displayed on the PCM. This feature permits the masterpassword holder to change passwords 1, 2 and 3 when required. Press Enter, the display nowreads MASTER PASSWORD. Type in the password and press Enter, the display now reads PASSWORD 1 XXXX (0-9999), type in new password, if required, press enter, the display nowreads PASSWORD 2 XXXX (0-9999). Type in the new password, if required, press Enter, thedisplay now reads PASSWORD 3 XXXX (0-9999). Type in the new password, if required, pressEnter, the display returns to PASSWORD 1 XXXX . Press the Adjust key to return to<<SYSTEM.

<<KEYLOCK

This feature permits the authorised operator to restrict the use of some of the PCM and consolekeys by software locking them. Press the Scroll key until 3 Keylock is displayed on the PCM.Press Enter, the display now reads <<KEYLOCK, press the Scroll Key to display the menu itemsin turn:

1 Cali brate2 Peak/Check3 Auto4 Zero5 Gross Hold6 Dis play7 Hi Sens8 Test/Fin ish9 Startup/Close

<<CAL LOCK #

Press the Scroll key, or number 1 key, to select 1 Calibrate, then press Enter, the display nowreads <<CAL LOCK #, press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<KEYLOCK.

Peak/Check, Auto, Zero, Gross Hold, Display & Hi Sens keys on the PCM and the Test/Finishand Startup/Closedown keys on the console

The procedure for locking/unlocking the remainder of the keys in the menu is identical to theprocedure for <<CAL LOCK #.

Press Adjust to return to <<SYSTEM.

Spec tron 5000 4-55

<<USER SELECT

The default setting for the User select menu is that all entries are present. Customers wishing toprevent free access to some or all of the possible software options should use the User selectmenu to remove them individually as described in the following paragraphs.

Press the Scroll key until 4 User Select is displayed on the PCM. (This feature permits theauthorised operator to define the visible free access contents of the <<USER menu.) PressEnter, the display now reads <<USER SELECT, press the Scroll key to display the menu itemsin turn:

1 Re sults2 Out put3 Units4 Op era tion5 Fac tors6 Re ject7 Au totest8 Fila ment

<<RESULTS #

Press the Scroll key, or number 1 key, to select Results then press Enter, the display now reads<<RESULTS #, press the Scroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<USER SELECT.

The procedure is identical for the remainder of the entries in the <<USER SELECT menu.Output, Units, Operation, Factors, Reject, Autotest and Filament.

Press Adjust to return to <<SYSTEM. Press Adjust to return to <<INSTALL.

4.10.3 <<PARAMETERS

This allows access to values and limits for software checking and is restricted to EdwardsAuthorise personnel only. Customers are allowed access to the values, but NOT the limits, ofsome of the parameters in the <<FACTORS menu. Press the Scroll key to select 3 Parameters inthe <<INSTALL menu, then press Enter, the display now reads PARAM PASSWORD.

Type in the password and press Enter, the display now reads <<PARAMETERS, press theScroll key to display the menu items in turn:

4-56 Spec tron 5000

1 Cali bra tion Used in leak rate cali bra tions2 Set Points Used for auto mat ic test ing3 Re jects Used for set ting re ject lev els4 Ac ces sory Used for ex ter nal cali bra tion and Visco mode fac tors.

<<CALIBRATION #

Press the Scroll key until 1 Calibration is displayed on the PCM. Press Enter, the display nowreads <<CALIBRATION #, press the Scroll key to display the menu items in turn:

1 Fine Cal2 Mas sive Cal3 Gross Cal4 Hi Sens Cal5 Fast cal6 Lo sens amp7 Int Ref Leak8 Ext Ref Leak9 Leak fac tor

Fine Cal

Press the Scroll key, or number 1key, to se lect 1 Fine Cal.Press En ter, the dis play now reads Fine Cal 1.00+0.Press the Clear key to ad just if re quired. Press En ter, the dis play now reads Hi lim 2.00+0.Press the Clear key to ad just if re quired. Press En ter, the dis play now reads Low lim 7.00-1.Press the Clear key to ad just if re quired. Press En ter, the dis play now re turns to <<CALI BRA TION.

The procedure is identical for the remainder of the entries in the <<CALIBRATE menu.Massive Cal, Gross Cal, Hi Sens Cal, Fast cal, Lo sens amp, Int Ref Leak, Ext Ref Leak and Leak factor.

<<SET POINTS #

Press the Scroll key until 2 Set Points is displayed on the PCM. Press Enter, the display now reads<<SET POINTS #, press the Scroll key to display the menu items in turn:

Spec tron 5000 4-57

1 Fil ON Pir2 Fil OFF MS3 Rough/Fine4 Mass/Gross5 Gross/Fine6 Fine/Hi Sens7 Mode re set8 Aux OFF

Fil ON Pir

Press the Scroll key, or number 1 key, to select 1 Fil ON Pir.Press Enter, the display now reads Pir ON 2.00-3.Press the Clear key to adjust if required. Press Enter, the display now reads Hi lim 3.00-3.Press the Clear key to adjust if required.Press Enter, the display now reads Low lim 1.00-3.Press the Clear key to adjust if required. Press Enter, the display now returns to <<SET POINTS #.

The procedure for adjusting the remainder of the Set points in the <<PARAMETERS menu.Fil OFF MS, Rough/Fine, Mass/Gross, Gross/Fine, Fine/Hi Sens, Mode reset and Aux OFF.

Press Adjust to return to <<PARAMETERS. Press Adjust to return to <<INSTALL.

<<REJECTS #

Press the Scroll key until 3 Rejects is displayed on the PCM. Press Enter, the display now reads<<REJECTS #, press the Scroll key to display the menu items in turn:

1 Mas sive2 Gross3 Fine4 Hi Sens

Massive

Press the Scroll key, or number 1 key, to select 1 Massive.Press Enter, the display now reads Mass Rej 1.00-2.Press the Clear key to adjust if required. Press Enter, the display now reads Hi lim 100+3.Press the Clear key to adjust if required.Press Enter, the display now reads Low lim 1.00-4.Press the Clear key to adjust if required. Press Enter, the display now returns to <<REJECTS #.

4-58 Spec tron 5000

The procedures are identical for adjusting the remainder of the Set points in the <<REJECTS menu: Gross, Fine and Hi Sens.

<<ACCESSSSORY #

Press the Scroll key or number key to select 4 Accessory then press Enter, the display now reads<<ACCESSORY #. Press the Scroll key to display the menu items in turn:

1 Ex ter nal2 Visco

Press the Scroll key, or number 1 key, to se lect 1 Ex ter nal.Press En ter, the dis play now reads 1.00+0.Press the Clear key to ad just if re quired. Press En ter, the dis play now reads Hi lim 2.00-+6.Press the Clear key to ad just if re quired.Press En ter, the dis play now reads Low lim 5.00-1.Press the Clear key to ad just if re quired. Press En ter, the dis play now re turns to <<AC CES SORY #.

Press the Scroll key, or number 1 key, to se lect 2 Visco.Press En ter, the dis play now reads 5.00+2 (5000E) orPress En ter, the dis play now reads 5.00+3 (oth ers)Press the Clear key to ad just if re quired. Press En ter, the dis play now reads Hi lim 1.00+6.Press the Clear key to ad just if re quired.Press En ter, the dis play now reads Low lim 5.00-1.Press the Clear key to ad just if re quired. Press En ter, the dis play now re turns to <<AC CES SORY #.

Press Adjust to return to <<INSTALL.

4.10.4 <<VERSION

This allows the user to inspect the order and serial numbers of the build and the softwareversions of the console and PCM. Press the Scroll key to select 4 Version in the <<INSTALLmenu, then press Enter, the display now reads <<VERSION, press the Scroll key to display themenu items in turn:

1 Or der number L ########2 Se rial number SER ########-##3 Con sole Vers CONS D154819#04 PCM Ver sion PCM D154819#55 Track ing Num ber TRACK ###########

Spec tron 5000 4-59

Order number

This is generated automatically as a cross check of the production build against the Spectronorder number. It is dependent on the build options confirmed via the EHVI SETUP menuduring final testing.

Press the Scroll key until 1 Order number is displayed on the PCM. Press Enter, the display now reads L ########.Press Enter, the display now reads <<VERSION

Serial number

This is the Spectron 5000 build month/year code and production job ticket number.

Press the Scroll key until 2 Serial number is displayed on the PCM.Press Enter, the display now reads SER ########-##.Press Enter, the display now reads <<VERSION

Console Version

This reveals the software version number in the Console.

Press the Scroll key until 3 Console Version is displayed on the PCM.Press Enter, the display now reads CONS D154819#0.Press Enter, the display now reads <<VERSION

PCM Version

This reveals the software version number in the PCM.

Press the Scroll key until 4 PCM Version is displayed on the PCM.Press Enter, the display now reads PCM D154819#5.Press Enter, the display now reads <<VERSION

Tracking number

The tracking number stored in NOVRAM is for EHVI service purposes, and should normally bezero.

Press the Scroll key until 5 Tracking Number displayed on the PCM. Press Enter, the display now reads Tracking Number ###########.Press Enter, the display now reads <<VERSIONPress Adjust to return to <<INSTALL.

4-60 Spec tron 5000

4.10.5 <<TELECOM

This allows the RS232 port to be set up for modem or other interfaces to an IBM PC. Press theScroll key to select 5 Telecom in the <<INSTALL menu, then press Enter, the display now readsTELECOM PASSWORD. Type in the password and press Enter, the display now reads<<TELECOM, press the Scroll key to display the menu items in turn:

1 Tele com OFF/ON2 Tele com Setup

Telecom OFF/ON

WARNING

EHVI recommend that telecom users should disable the console switches and the PCMkeys using KEYLOCK in order to avoid control conflicts.

CAUTION

In the event of loss of serial communications with this option set on, the console and PCM keys will be locked out. The only reset of this mode is via a complete power down of the

console, which should only be attempted from CLOSED DOWN state to avoid damaging the equipment.

This disables the PCM and only allows the Spectron 5000 to be controlled via the RS232 port.The PCM is still active for messages to the state display. Press the Scroll key, or number 1 key, toselect 1 Telecom OFF/ON then press Enter, the display now reads <<TELE OFF/ON #, press theScroll key to display the menu items in turn:

0 OFF1 ON

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<TELECOM. If ON was entered, the PCM no longer responds to key presses.

Telecom setup

This menu should normally be setup with the Telecom OFF/ON set OFF when using the PCM.

Press the Scroll key, or number 2 key, to select 2 Telecom setup then press Enter, the display nowreads <<TX BAUD RATE #.

Spec tron 5000 4-61

<<TX BAUD RATE #

Transmitted baud rate setting. Press the Scroll key to display the menu items in turn:

1 752 1103 3004 6005 12006 24007 48008 9600

Press the Scroll key, or number key, to se lect the re quired state, then press En ter, the dis playnow reads <<RX BAUD RATE #.

<<RX BAUD RATE #

Received baud rate setting, the menu items are identical to the transmit settings above. Press the Scroll key, or number key, to select the required state, then press Enter, the display now reads<<PARITY #.

<<PARITY #

RS232 parity setting for both transmit and receive.

0 Not set1 odd2 even

Press the Scroll key, or number key, to se lect the re quired state, then press En ter, the dis playnow reads <<STOP BITS #:

<<STOP BITS #

RS232 number of stop bits for both transmit and receive.

1 1 bit2 2 bits

Press the Scroll key, or number key, to select the required state, then press Enter, the displayreturns to <<TELECOM and the telecommunications setup has been completed. Press Adjust,the display now returns to <<INSTALL. Press Adjust, the display now returns to <<USER.Press Display, the display now returns to normal PCM display.

4-62 Spec tron 5000

Spec tron 5000 4-63/4-64

Figure 4.8 - Install menu Part 1

Spec tron 5000 4-65/4-66

Figure 4.9 - Install menu Part 2.

4.11 Fault and Error messages

Messages showing as 'ERR- ' or ' -ERR' may be displayed on the PCM when a programmingor hardware fault is self diagnosed by the Spectron 5000 software. Other messages may bedisplayed if, during operation, abnormal working conditions of the vacuum system areencountered.

PCM messages ending in ? require another keypress to initiate a function, for example, ZERO?or PEAK ? are not fault or error messages.

The Spectron will automatically enter an appropriate mode of operation in response toabnormal conditions, but in order to aid Spectron operators in their response to fault and errormessages, these are grouped into five categories:

1 MENU2 OP ERA TION3 HARD WARE4 MEM ORY5 PCM

Once cleared, the PCM mes sage visi ble by press ing the leak rate key should now showPA RAME TERS OK.

4.11.1 Menu errors

All the “ERR” messages in 4.11 indicate that the machine parameters are outside the preset hi(upper) and lo (lower) limits. The relevant section should be viewed to check the selectedsettings and correct the value, if necessary. Ranges are generally specified in the relevant menusheets.

CAUTION

EHVI do not recommend alteration of hi or lo limits.

The following parameters may be accessed by users entering menus and will display an ERRmessage if the values fall outside the the range of the high and low limits. These errors maytherefore be cancelled by re-entering the parameter values within the correct range.

Spec tron 5000 4-67

Factors

All the following error messages are associated with Factors in the <<USER OPTIONS menu:

USER Fac tors menu ERR- message

1 Ext Ref Leak ERR- Ext Ref Leak4 Leak fac tor ERR- Leak fac tor5 Gross/Fine ERR- Gross/Fine6 Aux OFF ERR- Aux OFF Pr8 Ex ter nal 2 fac tor ERR- Ex ter nal9 Visco 2 fac tor ERR- Visco

Reject

All the following error messages are associated with Reject in the <<USER OPTIONS MENU:

USER Re ject menu ERR- message

2 Mas sive (level) ERR- Mass Rej Lev3 Gross (level) ERR- Gross RejLev4 Fine (level) ERR- Fine Rej Lev5 Hi Sens (level) ERR- HiSensRejLev

These same pa rame ters are also ac ces si ble for cor rec tion in the <<IN STALL 3 <<PA RAME TERS 3 Re jects menu:

1 Mas sive ERR- Mass Rej Lev2 Gross ERR- Gross RejLev3 Fine ERR- Fine Rej Lev4 Hi Sens ERR- HiSensRejLev

Calibration

All the following error messages are associated with Item 1 Calibration in the<<INSTALL/<<PARAMETERS MENU:

Cali bra tion menu ERR- message

6 Lo Sens Amp ERR- Lo Sens Amp7 Int Ref Leak ERR- Int Ref Leak8 Ext Ref Leak ERR- Ext Ref Leak9 Leak fac tor ERR- LeakFact

4-68 Spec tron 5000

Setpoints

All the following error messages are associated with Item 2 Set Points in the<<INSTALL/<<PARAMETERS MENU:

Set Points Menu ERR- message

1 Fil ON Pir ERR- Fil ON Pir2 Fil OFF MS ERR- Fil OFF MS3 Rough/Fine ERR- Rough/Fine4 Mass/Gross ERR- Mass/Gross6 Fine/Hi Sens ERR- Fine/HiSens7 Mode Re set ERR- Mode Re set8 Aux OFF ERR- Aux OFF Pr

Spec tron 5000 4-69

4.12 Operational errors

If a parameter error should occur during normal operation, an error message will appear on thePCM display. If the PCM is being used in programming mode, the error messages will only bedisplayed when addressing the relevant menu. These messages will assist the operator orservice Engineer to locate and identify faults.

The following paragraphs list the error messages that may be displayed with the probable causeand action to be taken.

'AMP. SATURATED'

Electronics error - too much helium in MS Head. Press Finish and remove source of helium.Then press TEST.

'SPECTROMETER OFF'

After a high pressure trip the MS may remain OFF in finish.To switch MS back on, press Standbythen Finish.

'M.S. PRESS. HIGH'

Vacuum poor - add liquid nitrogen to cold trap (if fitted) - system will automatically recover ifthe vacuum improves - Otherwise SERVICE CALL.

4.12.1 Calibration

The following parameters are associated with different trace gas selections, rather than eithertrace gas independant or helium only parameters.

The Spectron automatically changes Calibration Factors and also Accessory (External andVisco) factors during (external) calibration. Mistakes in following the instructions for externalcalibration, unusual operating conditions or malfunctions of console operation may cause theseerrors to be displayed. They can normally be cancelled by correctly following the calibrationinstructions given on the PCM, or by entering the <<PARAMETER Menu and manuallyresetting the factor corresponding to the ERR message within its correct range. When Spectronmalfunction is suspected please CALL SERVICE.

All the following error messages are associated with Calibration in the<<INSTALL/<<PARAMETERS MENU:

4-70 Spec tron 5000

Cali bra tion Menu He lium Se lected HD/H3 se lected Hy dro gen se lectedItem ERR- message ERR- message ERR- message

1 Fine Cal ERR- Fine Cal He ERR- Fine Cal He ERR- Fine Cal H22 Mas sive Cal ERR- Mass Cal He ERR- Mass Cal He ERR- Mass Cal H23 Gross Cal ERR- GrossCal He ERR- GrossCal He ERR- GrossCal H24 Hi Sens cal ERR- HS Cal He ERR- HS Cal He ERR- HS Cal H25 Fast Cal ERR- Fast Cal He ERR- Fast Cal He ERR- Fast Cal H2

4.12.2 'NOT CALIBRATED'

Machine requires calibration - Keyholder should press calibrate on the PCM, after allowing theleak detector 30 minutes to stabilize and after AUTOPEAKING.

4.12.3 'NO PEAK FOUND'

After a memory corruption, the machine is not correctly set up for testing - Press Peak in Finishmode to reset the peaking algorithm. The Spectron 5000 should rarely, if ever,show this faultmessage in normal use.

Add liquid nitrogen to cold trap (if fitted) - if problem persists then CALL SERVICE for MSHead maintenance.

4.12.4 'NO CAL FITTED'

CAUTIONARY MESSAGE - cannot do internal calibration.

4.12.5 'EXT CAL ONLY'

Only possible with external reference leak fitted.

4.12.6 'BACKING ERROR'

Backing pressure too high for pump. Gas Ballast the backing system.If message persists requires SERVICE CALL.

4.12.7 'GROSS SYSTEM ERR'

With correct use of the Spectron 5000 this should never occur. Complete vacuum failure usuallyoccurs if the test port is mistakenly vented by removal of the test port fixtures during a test.Machine will normally restart to ready state, if not press closedown then startup. Causes thetracking counter to be incremented by one (tracking is readable in the <<INSTALL/Versionmenu). If message persists requires SERVICE CALL.

4.12.8 'SYSTEM ERROR

Machine Vacuum problems. Requires SERVICE CALL.

Spec tron 5000 4-71

4.13 Hardware errors

Note: Providing that regular servicing schedules are correctly carried out, most of the following messages should never be displayed.

4.13.1 'EMISSION ERR. 1 '

Filament 1 needs changing to filament 2. This can be done on the PCM via software but shouldbe followed by peak and calibration. See relevant paragraphs in Section 4.7.

4.13.2 'EMISSION ERR. 2 '

MS Filaments require replacement and the machine must be closed down. See MaintenanceSection 5.10 for instructions on how to change the filaments.

4.13.3 Diffusion pump errors

'DIFF P.OVER HEAT''DIFF PUMP ER ROR'

Cooling fan failure or diff pump oil level too low - requires SERVICE CALL.

E050 FAIL

Has detected heater fail or thermal snap operation or thermal pulse - requires SERVICE CALL.

4.13.4 Gauge errors

Gauge outputs too far from normal - may require SERVICE CALL.

If system is very cold and/or not running, try to startup the machine so that it brings the gaugesout of error readings. If messages do not clear then call SERVICE.

'BACK GAUGE ERR''T.P. GAUGE ERR''M.S. GAUGE ERR''GAUGE ERR'

4-72 Spec tron 5000

4.13.5 Valves

Valves that are stuck or sticking in operation or prevented from seating -require SERVICE CALL.

'GROSS VALVE ERR ''TEST VALVE ERR ''ROUGH VALVE ERR ''CAL. VALVE ERR ''BACK. VALVE ERR ''GAS A.VALVE ERR ''VENT VALVE ERR '

4.13.6 'REF TEMP ERR'

Lead or probe failure - requires SERVICE CALL.

4.13.7 'NO HEAD'

No head lead connection - requires SERVICE CALL.

4.13.8 'VOLT ERR'

Pirani Gauges out of adjustment - requires SERVICE CALL.

4.13.9 'HD FAULT'

ION Source fault - requires SERVICE CALL.

4.13.10 'AMP ZERO ERROR '

Preamplifier malfunction - requires SERVICE CALL.

4.13.11 'VOLTAGE ERROR'

Mass Spectrometer Head fault - requires SERVICE CALL.

Spec tron 5000 4-73

4.14 Memory errors

4.14.1 'NOVRAM or RAM FAULT'

Probable corruption of RAM - Switch Power off then on. Press Clear then press Startup.If NOVRAM persists a SERVICE CALL will be necessary.

4-74 Spec tron 5000

4.15 PCM errors

4.15.1 PCM ERROR MESSAGES

The following messages will be displayed on the PCM if there are incorrect communicationsbetween it and the console:

——] [—— No data re ceived at all- check that PCM plug con nec tion is se cure.

SW WATCH DOG HALT PCM about to re set af ter ——] [——Tran sient mes sage which should self clear.

IN VA LID STATE Se quence state la bel out of range - should never oc cur.CALL SERV ICE.

WRONG VALUE SENT Line dis play mes sage out of rangePress the dis play key to see if dis play clears.If not dis con nect then re con nect PCM, if fault per sists switch off Con sole and re power sys tem, if fault still per sists then CALL SERV ICE.

4.15.2 'LINK ERRORS'

All of the following LINK ERROR messages require a SERVICE CALL but are unlikely tohappen.

LINK ER ROR 0 In va lid pres sure dis play dataLINK ER ROR 1 Pa rame ter status out of rangeLINK ER ROR 2 In va lid leak rate dis play dataLINK ER ROR 3 Dis play clocks chan nel out of rangeLINK ER ROR 4 Dis play re sults chan nel out of range

Spec tron 5000 4-75

4.16 Operation from PCSP

The parallel command and status port (PCSP) provides a suitable interface between theSpectron 5000 and a programmable logic controller (PLC) or other similar control equipment

4.16.1 The PCSP outputs (relays) operate when the function is true.

Chan nel 1 OK/promptChan nel 2 Ac ceptChan nel 3 Re jectChan nel 4 FineChan nel 5 ReadyChan nel 6 Aux il iaryChan nel 7 GrossChan nel 8 Mas sive

OK is set when in Ready, Massive, Gross (Hold), Fine and Hi Sens, but off in Zero, Check, Peakor Cal modes. The prompt operates when doing an external calibration, and overrides thenormal OK status, in response to the calibrate input with the Spectron zero pre-set for externalcalibration.

4.16.2 The PCSP input channels are:

Chan nel 1 Fin ishChan nel 2 TestChan nel 3 Close downChan nel 4 Pro ceedChan nel 5 StandbyChan nel 6 Cali brateChan nel 7 PeakChan nel 8 Zero

All inputs replicate PCM key presses with the exception of Closedown, which is a console panelswitch press, and Proceed which is a general go-ahead signal input for prompted data entryconfirmations (for example to enter the currently stored external reference leak and externaltemperature values without the need for operator intervention on the PCM, during externalcalibrate).

4-76 Spec tron 5000

4.16.3 Signal timing and handshaking

The preferred mode of PCSP operation is to have pre-programmed the Spectron 5000 forautomatic leak test operation, using the PCSP as status monitor and arranging the PLC as overall process supervisor and the main test controller. This is because the Spectron finite state codeand large number of sequence code instructions can cause response delays of up to one secondto individual PCSP input commands.

Once in READY, there is sufficient automation in the Spectron 5000 to have completely pre-programmed the test sequence in response to a single test input via the PCSP, only usingFinish as a precaution against malfunctions.

The PCSP opto-isolated inputs should be driven by the PLC, or similar, with a softwarehandshake, that is, removal of input once appropriate responses are registered on the PCSPoutput channels (for example, once the MASSIVE output is observed a request to test shouldbe removed). Control software within the Spectron 5000 is level triggered to aid noise immunityon the PCSP inputs.

Spec tron 5000 4-77

4.17 Operation from RS232 serial port

The Spectron 5000 is fitted with an RS232 serial communications port to allow interfacing withother equipment. The port may be used, for example, to connect to Edwards 'over-the-phone'service facility, or to provide an interface to a Supervisory Control and Data Acquisition(SCADA) program running on a personal computer (PC).

The serial mode of operation in the Spectron 5000 is called 'Query-command'. All informationnormally displayed on the PCM can be read over the serial link, and all operations normallyactioned using the PCM can be controlled remotely.

Hardware Connections

EHVI recommend the use of either the RS232 to IBM PC serial lead D15481750 or the RS232 tomodem lead D15481749, as appropriate. The Spectron 5000 9-way D-type female socket pinouts are:

Pin number Func tion

1 Pro tec tive Ground 2 Trans mit ted data TX 3 Re ceived data RX 7 Sig nal Ground GND

All connecting leads used should be 'direct' for connection to a modem (DCE) or 'crossed-over'for connection to computer equipment (DTE).

4.17.1 Programming baudrates, parity and stopbits and PCM keyboard 'lockout'

The 5 Telecom option in the adjust mode <<INSTALL menu is used to reprogram the Spectronbaudrates, parity and stopbits if required, using the Telecom setup option 2.

The <<TELECOM option is protected by the Telecom Password listed on Page Number 53A.

Default settings:

TX bau drate 300 bps (pro gram ma ble 75,110,300,600,1200,2400,4800,9600)RX bau drate 300 bps (pro gram ma ble 75,110,300,600,1200,2400,4800,9600)Par ity None (pro gram ma ble None, Odd, Even)Stop bits 1 (pro gram ma ble 1,2)Char ac ter length 8 bits (fixed)Start bits 1 (fixed)

The <<TELECOM option can also be used to disable the PCM keyboard, using the TeleOFF/ON option 1. Do NOT use this feature from the PCM itself, as 'lockout' will occur. The PCM keyboard will stop working so it becomes impossible to reprogram normal operation using thePCM! If 'lockout' does occur, without the serial link in operation, it will be necessary to cut thepower to the console and restart from the front panel switches.

4-78 Spec tron 5000

4.17.2 Entering telecom mode using the PCM

Press Adjust key until the display reads <<USER Press 9, then Enter so the display reads <<INSTALLPress 5, then Enter so the display reads TELECOM PASSWORD Press the digits for the password, then Enter so the display reads <<TELECOM Press Scroll to read first menu option 1 Telecom OFF/ON Press Scroll again to read second menu option 2 Telecom setup Press Scroll again to go back to top of menu <<TELECOM

4.17.3 Checking/changing baudrates, parity and stopbits

To read and/or change the serial communications settings, press Enter when the display shows2 Telecom setup.

The first value displayed is the transmit baudrate setting. The display reads <<Tx BAUD RATE#, where # is a number 1..8, corresponding to the current baudrate setting. Press Scrollrepeatedly to see possible settings of baudrates. When the desired transmit baudrate isdisplayed, press Enter to select it and go on to the next setting.

The next value displayed is the receive baudrate setting. The display reads <<Rx BAUD RATE#, where # is a number 1..8, corresponding to the current baudrate setting. Press Scrollrepeatedly to see possible settings of baudrates. When the desired receive baudrate is displayed, press Enter to select it and go on to the next setting.

The next value displayed is the parity setting. The display reads <<PARITY #, where # is anumber 0..2, corresponding to the current parity setting. Press Scroll repeatedly to see possiblesettings of parity. When the desired parity is displayed, press Enter to select it and go on to thenext setting.

The next value displayed is the stop bits setting. The display reads << STOP BITS #, where # isa number 1..2, corresponding to the current stop bits setting. Press Scroll repeatedly to seepossible settings of stop bits. When the desired number of stop bits is displayed, press Enter toselect it.

The system now resets the serial port to the (possibly) revised settings and the display goes backto <<TELECOM, ready for the next action.

Press Display to exit if you have finished with the TELECOM settings.

4.17.4 Locking out the PCM keyboard

To read or change the PCM keyboard lockout, press Enter when the display shows 1 telecomOFF/ON.

The display reads << Telecom OFF/ON#, where # is a number 0..1, corresponding to thecurrent telecom lockout setting OFF or ON. Press Scroll repeatedly to see possible settings of themenu. When the desired setting is displayed, press Enter to select it.

Spec tron 5000 4-79

The system now resets the PCM keyboard lockout to the (possibly) revised setting and thedisplay goes back to <<TELECOM, ready for the next action. If the keyboard lock has been set,the PCM keyboard will no longer respond to any key presses(no bleep sounds) and the keylocklamp on the PCM will be lit.

4.17.5 Query-command

The Spectron includes a special mode of operation which allows a remote terminal device orsupervisory computer to control and interrogate the system directly, bypassing the PCMoperator interface.

This feature, which is called Query-Command, permits development of control programsresiding in a microcomputer, for example. All information normally displayed on the PCM canbe read over the serial link, and all operations normally actioned using the PCM can becontrolled remotely.

QUERIES return values from the Spectron without interfering with any other function of theSpectron.

COMMANDS act directly on the Spectron and return an error message indicating whether theoperation was successful or not.

Sending a command or query to the Spectron.

Each command or query is sent to the Spectron via the RS232 serial link, as a text message - asequence of ASCII coded characters. The first character of the text message is a '!' for a command,or a '?' for a query. The next two characters are the mnemonic representation of the particularquery or command, followed by other data if required. The last character must be a carriagereturn CR (ASCII char 13).

The input buffer for Query-command may be reset at any time by sending a '/' character (ASCIIchar 47). The system then ignores any previously sent characters. This should be used to resetQuery-command at the beginning of a control program, rather than by sending CR, whichresets by copying the current contents of the input buffer to query or command for execution.

Spectron replies to queries or commands

When a query or command is received by the Spectron, a reply is always returned on the seriallink. The replies sent by the Spectron are text messages - sequences of ASCII coded charactersterminated by two control characters CR, LF (ASCII chars 13, 10). It is recommended that repliesare treated as text strings, rather than numbers, when read by the communicating device.

All the replies are 'printable' text strings, apart from ?PC, which returns the current contents ofthe PCM communications buffer. This may contain byte values in the range 0 to 255, so the replyto ?PC should be read in as individual bytes. This is because CR or LF may be valid data bytesrather than the text terminators.

Each query or command must comply with its correct syntax, otherwise an error will be flagged.If a query or command is syntactically correct then the error number is set to 0.

4-80 Spec tron 5000

The reply to a query is normally the ASCII text string representing the number or result of the itemqueried. The reply to a faulty query will be a message of the form 'ERR n', where n is the errornumber.

The reply to a command will always be a message of the form 'ERR n', if there is no error, the replywill be 'ERR 0'.

4.17.6 Queries

In the lists that follows, the expression a..b means a number in the range a to b inclusive; theexpression a,b means a or b.

For example:

DEFI NI TION: ?CA 1..15,1..8COR RECT: ?CA 1,5IN COR RECT: ?CA 16,3

List of queries

QUERY MNEMONIC SYNTAX REPLIES

ByteValue ?BV 3 ?BV 0..30 0..255ChAnnel ?CA 1,2 ?CA 1..15,1..8 0,1CountBit ?CB 11,9 ?CB 1..15,1..15 0,1COunter ?CO 14 ?CO 1..15 0..65535GAuge ?GA 4 ?GA (0..2,4,6..7 gauge readingLeakRate ?LR ?LR leakrate readingPArameter ?PA 98 ?PA 0..113 0.00E-15..9.99E+15 SYstem ?SY 5 ?SY 0..10 system dataUniT ?UT 7 ?UT 1..15 0..255VErsion ?VE 1 ?VE 0..5 16-bytes version dataVOlts ?VO 6 ?VO 0..7 -4096...4096WordValue ?WV 12 ?WV 0..15 0..65535

ALl ?AL ?AL

Description of individual queries

?BV x Re turns the cur rent set ting of sys tem byte x, as a number in range0..255. 'x' cor re sponds to the fol low ing items:

Spec tron 5000 4-81

x Item Valid range

0 pressure units 0 mbar1 pa2 torr3 kPa4 micron

1 leakrate units 0 atm cc/s1 mbar l/s2 pa l/s3 pa m3/s

4 torr l/s5 g/year6 ppm7 µmol/s

2 helium concentration 0..100 percent

3 heorair flag 0 = helium, 1 = air

4 log printing 0 = disable, 1 = enable

5 printinterval (minutes) 0 = continuous, 1..255 minutes

6 printtype for lr testing 0 = off, 1 = short, 2 = long

7 mass 0 = he, 1 = hdh3, 2 = h2

8 recalibrate time (hours) 0..255 hours

9 TX baudrate for serial 0 = 75 baud1 = 110 2 = 3003 = 600 4 = 12005 = 24006 = 48007 = 9600

4-82 Spec tron 5000

10 RX baudrate for serial 0 = 75 baud1 = 110 2 = 3003 = 600 4 = 12005 = 24006 = 48007 = 9600

11 parity 0 = none1 = odd 2 = even

12 stopbits 0 = one1 = two

13 language 0 = English1 = French2 = German

14 PCM keyboard lockout 0 = enable keyboard1 = disable keyboard

15 external calibration type 0 = normal (external modified)1 = scalefactor(sensitivity modified)

16 recorder output 0 = linear (mantissa for current decade) 1 = log(log exponent/linear mantissa)

17 audio output 0 = no audio for leakrate1 = audio output for leakrate

18 autostartup - minutes 0..59

19 autostartup - hours 0..23

Spec tron 5000 4-83

20 autostartup - day 0 Sunday 1 Monday2 Tuesday3 Wednesday4 Thursday5 Friday6 Saturday7 Five days8 Six days9 Every day

21 temperature of external leak 5...40 °C

22 visco mode 0 OFF1 ON

23 user menu Results 0 Do not include in <USER menu1 Include in <USER menu

24 user menu Output 0 Do not include in <USER menu1 Include in <USER menu

25 user menu Units 0 Do not include in <USER menu1 Include in <USER menu

26 user menu Operation 0 Do not include in <USER menu1 Include in <USER menu

27 user menu Factors 0 Do not include in <USER menu1 Include in <USER menu

28 user menu Reject 0 Do not include in <USER menu1 Include in <USER menu

29 user menu Autotest 0 Do not include in <USER menu1 Include in <USER menu

30 user menu Filament 0 Do not include in <USER menu1 Include in <USER menu

?CA x,y returns the state of 8-bit digital relay unit or optoinput or flag unit, for Unit x Channel y. Returns a 0 for OFF (open) and a 1 for ON (closed).

?CB x,y returns the state of digital countbit for 16-bit Counter x for Countbit y.Returns a 0 for OFF and a 1 for ON.

4-84 Spec tron 5000

?CO x returns the stored value in 16-bit Counter x, a number in the range 0..65535.

?GA x returns the current reading for analogue gauge x, as a number in the formd.ddEse, where d.dd is a three mantissa, s is the sign + or -, and e is theexponent in the range 0..15. If the gauge is in error, then an error messagein the range 200..210 is displayed (eg ERR 207).

x Gauge function

0 Backing pressure (thermocouple)1 Test port (Pirani PRM)2 Vacuum MS head (Pirani PRL)4 Internal reference leak temperature (sensor)6 Vacuum MS head - total pressure (Mass spectrometer MS)7 Leakrate - partial pressure (MS)

?LR Returns the current leakrate reading, if the mass spectrometer is operational, else returns an error message in the range 220..232 (eg ERR 225). Format sd.ddEse.

?PA x Returns the current setting of system parameter x, where the value returned is in the form d.ddEse as for ?GA.

?SY x Returns the current setting of system function x, the information returnedis listed below:

Value x Func tion Data re turned

0 state la bel number 0..951 tune volts 0..1020 ÷ÿ (He4) ÷ÿ 2 (H2,He3/HD)2 cur rent stage number 1..99 3 last stage number 1..994 fila ment hours 0..655355 run hours 0..655356 sys tem lamps 0..65535, bits cor re spond to lamps 1..16

Lamp Bit Func tion1 0 High sens range 2 1 Fine range 3 2 Gross range4 3 Mas sive range

5 4 Check6 5 No vent on fin ish7 6 Ac ces sory mode (ext/visco)

Spec tron 5000 4-85


8 7 re ject dis play

Lamp Bit Func tion9 8 key lock (in di vid ual keys) 10 9 standby11 10 zero12 11 auto

13 12 gross hold 14 13 peak15 14 cali brate16 15 hisens hold

7 pa rame ter er ror state 0..37 or 255 no er ror er ror 37 cor re sponds to rough ing/fine

(same physi cal pa rame ter as gross/fine)

8 cur rent query com mand er ror state 1..11 or 0 no er ror

9 date dd- mm- yy dd is day 01..31mm is month 01..12 yy is year 91..99

10 time hh- mm- ss hh is hour 00..23mm is minute 00..59 ss is sec ond 00..59

?UT x returns the stored value in 8-bit unit x, a number in the range 0..255.

?VE x returns the version x as a 16 character string


0 Or der number L dddddddd ) where d = 0..91 Se rial number SER ddlddddd- dd ) l = A..Z2 Con sole ver sion CONS D154819X0 or (9X1)3 PCM ver sion PCM D154819X5 4 Con figu ra tion number CON FIG dddddddddddddd5 Track ing number TRACK 0

?VO x returns the millivolts reading for analogue channel x, as a number in the range -4095 to +4095. A reading of 4096 indicates the ATD voltage is over/under range.

4-86 Spec tron 5000

x Chan nel func tion

0 Back ing pres sure (ther mo cou ple)1 Test port (Pi rani PRM)2 Vac uum MS head (Pi rani PRL)3 Dif fer en tial in put (un used)4 In ter nal ref er ence leak tem pera ture (sen sor)5 Fila ment power moni tor6 Vac uum MS head - to tal pres sure (Mass spec trome ter MS)7 Leak rate - par tial pres sure (MS)

?WV x Returns the current setting of system word x, as a number in range 0..65535. 'x' corresponds to the following items:

x Item Valid range

0 Total pressure sensitivity 1..10001 Massive reject delay 0 = off, 1..65535 1/10th secs2 Gross reject delay 0 = off, 1..65535 1/10th secs3 Fine reject delay 0 = off, 1..65535 1/10th secs4 High sensitivity rej delay 0 = off, 1..65535 1/10th secs5 Total test time auto abort 0 = off, 1..65535 1/10th secs6 Mass/gross time auto abort 0 = off, 1..65535 1/10th secs7 Gross/fine time auto abort 0 = off, 1..65535 1/10th secs 8 Fine/highsens time autoabort 0 = off, 1..65535 1/10th secs9 Rough/fine time auto abort 0 = off, 1..65535 1/10th secs10 Final test time autofinish 0 = off, 1..65535 1/10th secs11 Auto vent open time 0 = off, 1..65535 1/10th secs12 Auto vent delay time 0 = off, 1..65535 1/10th secs13 Password 1 0 = off, 1..999914 Password 2 0 = off, 1..999915 Password 3 0 = off, 1..9999

?AL This gives a complete list of all the information available using individualqueries, except for ?PC. The information is transmitted one item per line,each line separated by CR LF (eg there are 31 lines for the byte values, 16 lines for the word values, etc).

The block is terminated by four characters:

'$' CR LF EOF (ASCII chars 36, 13, 10, 26/CTRL-Z).

Spec tron 5000 4-87

Order of information:

BV 0..30 (byte values)WV 0..15 (word values)PA 0..110 (parameter values)VE 0..5 (versions)GA 0..2,4,6..7 (valid gauge readings)VO 0..7 (all channel voltage readings)SY 0..10 (system values)UT 1..15 (all unit settings)CO 1..15 (all counter settings)LR (current leakrate)$ (terminator)CTRL-Z (end-of-file)

Refer to documentation above for individual queries for details of particular values.

For further information please contact Edwards High Vacuum International, Eastbourne, U.K.

4.17.7 Spectron 5000 state labels

Some of the state label numbers are referenced by logging printout (see section 4.9.2) and inresponse to the ?SY 0 query command (see section 4.17.6). The following table lists all the PCMstate label numbers and messages for the three selectable languages: English, French andGerman.

0 'A CCEPT ','A CCEPTE ','A NG ENO MMEN '1 'R EJECT ','R EJETE ','RUEC KWEISUNG'2 'TEST VALVE ERR ','DEF VANNE TEST ','TES TVENT.FEH LER'3 'START UP ','START UP ','A NLAUFEN'4 'PUM PING DOWN ','PO MPAGE ','A BPU MPEN'5 'STANDBY ','STANDBY ','STANDBY'6 'FI NISH ','FIN ','TE STENDE'7 'MA SSIVE ','MODE MAS SIVE ','MA SSIV' 8 'GROSS ','MODE GROSS ','GROB'9 'FINE ','MODE FINE ','FEIN'10 'HIGH SENS. ','MODE HAUTE SENS ','H OCHEM PFINDLICH '11 'READY ','PRET ','BEREIT'12 'GROSS HELD ','MAI NTIEN GROSS ','GROB HAL TEN'13 'CAL IBRA TING ','ET ALO NNAGE COURS', ','KALIBRI ERUNG '14 'CAL IBRA TING NORM', 'ET ALO NNAGE NORM.', ','KALIBRI ERUNG A1'15 'CAL IBRA TING FAST ','ET ALO NNAGE V.MAX', ','KALIBRI ERUNG A2'16 'CAL IBRA TING SLOW', 'ET ALO NNAGE V.LAM', ','KALIBRI ERUNG A0'17 'FIL. TRIPPED OUT ','FIL.HORS CIR CUIT ','HEIZFADEN AUS '

4-88 Spec tron 5000

18 'NOT CALI BRATED ','NON ETA LONNE ','NICHT KA LIBRI ERT'19 'NO PEAK FOUND ','PAS PIC TROUVE ','KE INEN PEAK GEF. '20 'PEAK RAMP UP ','R ECHE RCHE PIC + ','PEAK HOCHFAHREN '21 'PEAK RAMP DOWN ','R ECHE RCHE PIC - ','PEAK RUN TER FAHR'22 'REF TEMP ERR ','ERR TEMP REF ','REF.TEMP. FEH LER '23 'P ARAM ETER ER ROR ','E RREUR PARA ME TRE ','P ARAM ETER FEH LER'24 'PEAK OFF SET HIGH ','D ECAL.RECH.PIC + ','PEAK HOCH STEP'25 'PEAK OFF SET LOW ','D ECAL.RECH.PIC - ','PEAK RUN TER STEP'26 'PEAK ? ','PIC ? ','PEAK ?'27 'AUTO -PEAKING ','PIC AUTO MA TIQUE ','AUTOM. PEAKEN '28 'PEAKED ','PIC RE GLE ','PEAKEN ENDE'29 'HIGH SENS FIL 2 ','FIL 2 HAUTE SENS ','H OCHEM PFIN.HZF 2'30 'CAL IBRATED FIL 1 ','FIL 1 ETA LONNE ','K ALIBR IERT.HZF 1'31 'CAL IBRATED FIL 2 ','FIL 2 ETA LONNE ','K ALIBR IERT.HZF 2'32 'ZERO ? ','ZERO ? ','NULL ?'33 'GROSS FIL 2 ','FIL 2 GROSS ','GROB HZF 2'34 'GROSS HELD FIL 2 ','FIL 2 MAIN GROSS ','GROB HALT . HZF 2'35 'FINE FIL 2 ''FIL2 FINE ','FEIN HZF 2'36 'STANDBY T.P.U.V. ','A TTENTE T.P.U.V. ','STANDBY T.P.U.V.'37 'EMI SSION ERR. 1 ','ERR D EMIS SION 1 ','EMI SSIO NFE HLER 1' 38 'EMI SSION ERR. 2 ','ERR D EMIS SION 2 ','EMI SSIO NFE HLER 2'39 'MA SSIVE FIL 2 ','FIL 2 MAS SIVE', 'MA SSIV HZF 2'40 'READY FIL 2 ','FIL 2 PRET', 'BEREIT HZF 2'41 'FI NISH FIL 2', 'FIL 2 FIN', 'TE STENDE HZF 2'42 'GROSS VALVE ERR ','DEF VANNE GROSS ','GRO BVENT.FEH LER'43 'TEST VALVE ERR ','DEF VANNE TEST ','TES TVENT. FEH LER'44 'ROUGH VALVE ERR ','DEF VANNE ROUGH ','ROUG HVENT.FEH LER'45 'CAL. VALVE ERR ','DEF VANNE ETAL. ','KALI.VENT.FEH LER'46 'BACK. VALVE ERR ','DEF VANNE PRIM. ','BACK . VENT . FEH LER'47 'GAS A.VALVE ERR ','DEF VANNE GAZ A ','BEL . VENT . FEH LER'48 'BAC KING ER ROR ','ERR POM PAGE PRIM ','BAC KING FEH LER'49 'GROSS SYS TEM ERR ','ERR SYS TEM ','V AKUU MFE HLER '50 'M.S. PRESS. HIGH ','MS -PRESS ELEVEE ','MS -DRUCK ZU HOCH'51 'DIFF P.OVER HEAT ','SU RCHAUFFE DIFF ','DIF.P.UE BER HITZT'52 'DIFF PUMP ER ROR ','ERR POMPE DIFF ','DIF.P. FEH LER'53 'AMP. SATU RATED ','SAT UR ATION AM PLI ','VERST.GE SAET TIGT'54 'BACK GAUGE ERR ','ERR JAUGE PRIM ','BACK. MESSR.FEH.'55 'T.P. GAUGE ERR ','ERR JAUGE E.TEST ','T.P. MESSR.FEH.'56 'M.S. GAUGE ERR ','ERR JAUGE MS ','M.S. MESSR.FEH.'57 'GAUGE ERR ','ERR JAUGE ','MESSR. FEH LER'58 'ROUG HING ','PO MPAGE PRI MAIRE ','A BPU MPEN '

Spec tron 5000 4-89

59 'READY FIL 1', 'FIL AMENT 1 PRET ','BEREIT FIL 1'60 'READY FIL 1', 'FIL AMENT 1 PRET ', 'BEREIT FIL 1'61 'READY FIL 2 ', 'FIL AMENT 2 PRET ', 'BEREIT FIL 2'62 'READY FIL 2 ', 'FIL AMENT 2 PRET ', 'BEREIT FIL 2'63 'W ATER ON TRAP ','EAU DANS PIEGE ','WA SSER IM SYS TEM '64 'A CCE SSORY MODE ','MODE AC CES SOIRE ','Z UB EH OE RM ODUS'65 'CALL SU PER VI SOR ','A PPE LS UPE RVISEUR ','SER VICE RUFEN'66 'CLO SING DOWN ','A CTION FER ME TURE ','A BFAHREN'67 'CLOSED DOWN ','A RRET ','AUSSCHAL TBEREIT'68 'VENT VALVE ERR ','DEF VANNE EN.AIR', 'BEL.VENT. FEH LER'69 'Z ER OING SLOW ','ZERO V.LAM.', 'NU LLUNG A0'70 'Z ER OING NOR MAL ','ZERO NORM.', 'NU LLUNG A1'71 'Z ER OING FAST ','ZERO V.MAX.', 'NU LLUNG A2'72 'H ELIUM CHECK ','VER IFIER HE LIUM ','H ELIUM KON TROLLE '73 'FIL AMENT WARM UP ','CHAU FFAGE FIL ','HEIZFADEN EIN'74 'ZERO RAMP UP ','ZERO + ','NULL HOCHFAHREN '75 'ZERO RAMP DOWN ','ZERO - ','NULL RUN TER FAHR '76 'Z EROED ','Z EROED ','G ENULLT'77 'ZERO? ','ZERO? ','NULL?'78 'PEAK? ','PIC ? ','PEAK?'79 'ZERO WHEN READY ','ZERO QUAND PRET ','NULL WENN BEREIT'80 'CAL. WHEN READY ','ETAL QUAND PRET ','KAL. WENN BEREIT'81 'Z ER OING ','R ECHE RCHE ZERO ','NU LLUNG'82 'ABORT ','ABA NDON ','A BBRUCH'83 'R ECAL IBRATE NOW ','RE ET ALO NNAGE ','K ALIBR IERE JETZT'84 'CLO SING DOWN ASU ','FIN COURS ASU ','A BFAHREN ASU'85 'CLOSED DOWN ASU ','FIN PRO GRAM ASU ','A BSCHAL TBER. ASU'86 'ROUG HING S ','PO MPAGE PRIM S ','A BPU MPEN S '87 'STBY GAS BAL LAST ','LEST AIR AT TENTE ','STBY GAS BAL LAST'88 'NO CAL FIT TED ','PAS REF.INT. ','KEIN INT.REF.-LK '89 'EXT CAL ONLY ','ETAL EXT SEUL ','NUR EXT. KA LIBR. '90 'T OTAL TIME ABORT ','ABAND TEMP TO TAL ','ZEIT AB GE LAUFEN '91 'AUTO ABORT ','ABA NDON AUTO MAT ',' UTOM. AB BRUCH '92 'TEST TIME FIN ISH ','FIN TEMPS TEST ','TESTZEIT ENDE '93 'RE -DO EXT CAL ','RE ET ALO NNAGE EXT ','WIEDERH.EXT.KAL '94 'AUTO -START UP ','D EMA RRAGE AUTO ','AUTOMATIK -START '95 'EO50 HEATER FAIL ','ERR CHAUFFE EO50 ','EO50 HEIZER FEHL'96 'B YPASS VALVE ERR ','DEF VANNE BY PASS ','B YPASS VENT FEH.'97 'I NV ALID STATE ','ETAT NON VAL IDE ','U NGUE LT IGER MOD. '

4-90 Spec tron 5000

4.17.8 Commands

In the lists that follows, the expression a..b means a number in the range a to b inclusive; theexpression a,b means a or b. Where value appears, the valid range of numbers variesaccording to the individual item addressed - in this case, the valid range is defined in Part 3.5.2.

List of commands

COM MAND MNE MONIC SYN TAX

By te Value !BV 3=1 !BV 0..30=valueKEy !KE 3 !KE 0..30Key Lock !KL !KL Key Off !KO !KOMes sage Lock !ML =Hello !ML =up to 16 char ac tersMes sageOff !MO !MOPA rame ter !PA 98=1.22E-4 !PA 0..113=valueRe Set !RS 1 !RS 0..2

Description of individual commands

!BV x=y Changes the current setting of system byte x, to value y, provided y is inthe correct range listed below. 'x' corresponds to the following items:

x Item Valid range for y

0 pressure units 0 mbar1 pa2 torr3 kPascal4 micron

1 leakrate units 0 atm cc/s1 mbar l/s2 pa l/s3 pa m3/s4 torr l/s5 g/year6 ppm7 umol/s

Spec tron 5000 4-91

2 helium concentration 0..100 percent3 heorair flag 0 = helium, 1 = air4 log printing 0 = disable, 1 = enable5 printinterval (minutes) 0 = continuous, 1..255 minutes6 printtype for lr testing 0 = off, 1 = short, 2 = long7 mass 0 = he, 1 = hdh3, 2 = h28 recalibrate time (hours) 0..255 hours

9 TX baudrate for serial 0 = 75 baud1 = 110 2 = 300 3 = 6004 = 12005 = 2400 6 = 48007 = 9600

10 RX baudrate for serial 0 = 75 baud1 = 110 2 = 300 3 = 6004 = 12005 = 2400 6 = 48007 = 9600

11 parity 0 = none1 = odd 2 = even

12 stopbits 0 = one 1 = two

13 language 0 = English1 = French2 = German

14 PCM keyboard lockout 0 = enable keyboard1 = disable keyboard

15 external calibration type 0 = normal (external modified)1 = scalefactor (sensitivity modified)

4-92 Spec tron 5000

16 recorder output 0 = linear (mantissa for current decade)1 = log(log exponent/linear mantissa)

17 audio output 0 = no audio for leakrate1 = audio output for leakrate

18 autostartup - minutes 0..59

19 autostartup - hours 0..23

20 autostartup - day 0 Sunday 1 Monday2 Tuesday3 Wednesday4 Thursday5 Friday6 Saturday7 Five days8 Six days9 Every day

21 temperature of external leak 5...40 °C

22 visco mode 0 OFF1 ON

23 user menu Results 0 Do not include in <<USER menu1 Include in <<USER menu

24 user menu Output 0 Do not include in <<USER menu1 Include in <<USER menu

25 user menu Units 0 Do not include in <<USER menu1 Include in <<USER menu

26 user menu Operation 0 Do not include in <<USER menu1 Include in <<USER menu

27 user menu Factors 0 Do not include in <<USER menu1 Include in <<USER menu

28 user menu Reject 0 Do not include in <<USER menu 1 Include in <<USER menu

Spec tron 5000 4-93

29 user menu Autotest 0 Do not include in <<USER menu1 Include in <<USER menu

30 user menu Filament 0 Do not include in <<USER menu1 Include in <<USER menu

!KE x This option sets a key press x for the Spectron, as if the equivalent PCMkey x had been pressed.

x Key function

0 '0' 1 '1' 2 '2' 3 '3' 4 '4' 5 '5' 6 '6' 7 '7' 8 '8' 9 '9' 10 '+' 11 ENTER 12 CLEAR 13 SCROLL 14 ADJUST 15 CALIBRATE16 PEAK 17 GROSS H 18 UP 19 AUTO 20 ZERO 21 DOWN 22 STANDBY 23 FINISH 24 TEST 25 LEAKRATE 26 PRESSURE 27 STATE 28 TIME 29 DISPLAY 30 CHECK

4-94 Spec tron 5000

!KL This locks out the PCM keyboard so no keys function at all (no bleep) and the Keylock lamp comes on.

!KO This resets the PCM keylock so the PCM keyboard operates normally (bleeps) and the Keylock lamp is off, provided no individual keylocksare operational.

!ML =up to 16 characters

This sets the current PCM message to up to 16 characters message, whichmay be any ASCII printable characters. The Spectron system message willno longer be displayed.

!MO This resets the Spectron to display the normal system message on the PCM, the special Command message set by !ML will no longer be displayed. The system always powers up with !MO set, ie normal systemmessage.

!PA x=m.mmEse

Sets system parameter x to the value in the form d.ddEse as for ?GA. Note that if the parameter value is set greater than its upper limit, or lessthan its lower limit, then a parameter error will be generated. It is therefore a good idea to check the upper and lower limits before reprogramming a parameter value.

!RS x Carries out a reset of item x.

x Function

0 Resets results (passes, rejects, aborts, tests) to 0.1 Resets filament hours to 0.2 Resets run hours to 0.

4.17.9 Error messages

Each query or command sets the error number to indicate success or the reason for failure. Theerror number is returned by any Command and as the reply to query ?SY 8. If a query is in error(for example a gauge is overrange) then instead of the normal reply, a message of the form ERR nis sent, where n is the error number.

Spec tron 5000 4-95

Error number Meaning

0 No error

1..12 Query-command errors

1 query or command name not recognised2 parameter number not found - needed as part of query or command 3 number(s) not in valid range - too large 4 no '?' at start of query 5 no '!' at start of command 6 number not in valid range for gauges - 3 or 5 7 number(s) not in valid range - too small 8 number incorrect format - not m.mmEse 9 no '=' in !ML - needed to mark start of message 10 invalid action - attempted to write to protected channel, countbit,

unit or counter without first setting Unlock. 11 invalid action - attempted to write to protected channel or countbit.12 only !KE command operational.

13..199 Reserved errors

200..210 Gauge (pressure/temperature/leakrate) errors

200 MS range changing 201 MS emission error 202 MS auto zero 203 MS filament warmup 204 No head fitted 205 MS head off 206 Voltage range error 207 Head fault 208 Bad data 209 Module fault 210 MS heater error

211-219 Reserved errors

220..232 mass spectrometer (leakrate) errors

220 MS range change 221 MS emission error 222 MS auto zero 223 MS filament warmup 224 System error 225 Spectrometer off 226 Voltage range error 227 Emission fault

4-96 Spec tron 5000

228 System error 229 System error 230 Faulty MS heater 231 Amp zero error 232 Bad data

233..255 Reserved errors

4.17.10 Problems with serial communications

If serial communications do not appear to be working, check the following items carefully. Mostproblems with serial communications occur because of incorrect connections and setting up ofthe communications protocol.

Checking the connecting leads

One of the most common causes of non-functioning serial communications is an incorrectlyconnected lead.

Check pinouts at both ends of the lead, refer to Section 4.17 for details of required connections.

Ensure the lead is correct for its function - ie 'crossed-over' for computer equipment,'straight-through' for modems.

Make sure the signal ground is properly connected to provide a return path for the signal.

The maximum length of cable for RS232 communications is approximately 10 metres.Linedrivers should be used when leads longer than 10 metres are to be used.

Checking the baudrates, parity and stopbits

For equipment to communicate correctly, the baudrate, parity, stopbits and character lengthmust be set the same at both ends.

If in doubt about the Spectron settings, check and reset the system as detailed in Section 4.17.3.

Check and reset the settings for the equipment at the other end.

Hardware control signals

The Spectron does not use hardware control signals (eg CTS/RTS and DSR/DTR).

If the equipment at the other end requires hardware control signals to operate correctly, provide these using 'loopback', eg connect equipment RTS to CTS, DTR to DSR.

Spec tron 5000 4-97

Operation after a RAM MEMORY FAULT or NOV MEMORY FAULT

If the messages RAM MEMORY FAULT or NOV MEMORY FAULT are displayed on powerupof the Spectron, Query-command will NOT normally operate. Press the PCM Clear key to getrid of these messages 'manually'. Query-command will start to operate once these messages arecleared.

'Lockout'

If <<TELECOM menu item <<TELE OFF/ON is set to ON using the PCM key switches, thiswill cause 'lockout' to occur. The PCM keyboard goes 'dead' and the user cannot reset the systemback to normal operation using the PCM.

If this happens, there are two ways to recover:

If the serial link is operational, send the command !KO and this will free the PCM keyboard.

If there is no serial link operational, switch off the Spectron electrical supply, then switch onagain immediately. The system always powers up with the PCM keyboard lock off.

CAUTION

If the system was not in Closedown when power went off, press Startup immediately soas to avoid possible damage to the vacuum system.

For further information contact EHVI Eastbourne.

4-98 Spec tron 5000

4.18 Examples of Spectron 5000 test customisation

The following examples are intended to show which menu parameters require to be addressedin order to set up the Spectron 5000 for specific test applications. Once entered, the testing canproceed without any further “programming”.

4.18.1 Production vac test

Re quire ment: 10 hour shift, no liq uid ni tro gen, early de tec tion of he lium, one but tontest ing, 10 sec ond cy cle, 5 x 10 -6 atmcc/s re ject, mi cron pres sures.

Set- up: no liq uid ni tro gen im plies ei ther GROSS HOLD op era tion on anySpec tron 5000 or FINE mode of Spec tron 5000E- NL will be used.The cy cle time re quire ment will only be met by GROSS HOLD un lessthe test vol ume is <1 li tre be cause of the limi ta tions im posed by evacu at ing the test vol ume and by out gas sing from the in ner sur faces.

Con sole Ready Fil1

PCM setup Dis play StateGROSS H ONAuto rang ing ON

UNITS Leak rate atm cc/sPres sure mi cron

OP ERA TION ZERO NOR MALPEAK CHECKCAL EX TER NAL

FAC TORS CONC 100%Air/he lium HE LIUMEX TER NAL ON

Re sults RE SET 0

OUT PUT AUDIO OFF/ON ONLAN GUAGE ENG LISH

RE JECTS Re ject dis play ONRe ject dis play held ONFin ish if re ject ONMas sive re ject ONMas sive level 2.00-3 (atm cc/s)Mas sive de lay 10 (Equiva lent to 1.0 sec ond)

Spec tron 5000 4-99

RE JECTS (contd): Gross re ject ONGross level 5.00-6 (atm cc/s)Gross de lay 15 (equiva lent to 1.5 sec onds)

for 5000E- NL Fine re ject ON (oth er wise OFF)Fine level 5.00-6 (atm cc/s)Fine de lay 10 (equiva lent to 1 sec ond)Hi Sens re ject OFF

AU TOTEST Autov ent on fin ish ONVent time 20 (equiva lent to 2 sec onds)

Test time fin ish ON (for 1 but ton test)Test time 25 (equiva lent to 2.5 sec onds)Autoz ero on fin ish ONAuto abort ONRe cali bra tion promptedRe cal time 10 (10 hours)

FILA MENT Fila ment 1 ON

4.18.2 Visco testing

Re quire ment: con tin ual visco sniff ing, g/year Freon 12, test pres sure 1 bar 10%he lium,ap pli ca tion pres sure 11 bar Freon 12.

Con sole: Visco probe at tachedFine modeAuto rang ing ONState mes sage

PCM setup Dis play State

UNITS Leak rate g/year

OP ERA TION ZERO NOR MALPEAK CHECKCAL EX TER NAL

FAC TORS CONC HE LIUM 10 (10%)Air/he lium HE LIUMLEAK FAC TOR 9 x 10 +1

EX TER NAL OFFVISCO ONVISCO fac tor (al tered by cali bra tion)

4-100 Spec tron 5000

RE JECTS Re ject dis play ONRe ject dis play held OFFFin ish if re ject OFFFine ONFine LEVELFine RE LAY 0

AU TOTEST Vent on fin ish OFFTest time fin ish OFFAuto abort OFFRe cali bra tion promptedRe cal time 24 (hours)


4.18.3 High sensitivity R & D leak testing at mass 3

Re quire ment: High est sen si tivi tytest to 10 -15 mole/s for a mass 3 trace gas.RS232 port to IBM - PC se rial port.

Con sole (5000X): Hi Sens modeLiq uid ni tro gen in cold trapMan ual - 11 rangeState mes sage

PCM setup Dis play Leak rate

OUT PUT re corder lin ear

UNITS Leak rate mi cro mo les/sPres sure kPas cal

OP ERA TION ZERO RAMPPEAK OFF SETCAL EX TER NAL

FAC TORS Leak fac tor 1.00CONC HE LIUM 10 0 Mass HD/HE 3Air/he lium HE LIUMEX TER NAL OFFVISCO OFF

Spec tron 5000 4-101

RE JECTS Re ject dis play ONRe ject dis play held ONFin ish if re ject OFFHi Sens ONHi Sens level 10 -9 (µmol/s)

AU TOTEST Novent on fin ish ONAu totest OFFAuto abort OFFHi Sens auto ON


4.18.4 Near-standard setups

All the above examples use features of standard Spectron 5000 consoles. The available printerand PCSP interfaces provide the means for hardcopy output of results and calibrations and alsofor simple initiation of the leak test cycle and via the PCSP output channels, reject and auxiliarycan be interfaced to external indicators and pumps/valves.


4.19 Leak testing methods

4.19.1 Introduction

Leak testing with helium depends upon detecting the flow of helium through a leak. The flowmust be produced by a difference in total pressure between the inside and outside of the vesselunder test. A difference in the partial pressure of helium alone, if the total pressures were equal,would be insufficient; the flow of helium would then depend on diffusion, a very slow process.

A pressure difference can be produced by evacuation or by applying pressure, leading to twobroad classes of leak testing, vacuum testing and over-pressure testing.

Generally, vacuum testing is preferred for its simplicity. However, because leaks may behavedifferently according to the direction of applied pressure, it is always important to take intoconsideration the normal working conditions of a product and its mechanical strength whendeciding the leak test method.

4.19.2 Air/helium equivalent leaks

All mass spectrometer leak detectors measure the amount of helium passing through a leak.When helium equivalent is selected the Spectron will indicate the amount of helium passinginto its vacuum system.

More often it is necessary to know the amount of air that would pass through the same leak.This is the air equivalent value (AEV). In order to display the AEV the Spectron divides thehelium equivalent value (HEV) by 2.7. This assumed relationship between AEV and HEV is truefor molecular type leaks (these leaks, such as porosity in metal, where the diameter of the leakpath is very small, that is, collisions between molecules are less likely than collisions between t he molecules and the wall). Molecular leaks are to be expected below about 10 -5 mbar ls -1.

Alternatively leaks can be viscous. Here the gas collisions are more often with themselves ratherthan with the wall of the leak path. In this case the gas flow depends on its viscosity. Viscousleaks can occur above about 10 -7 mbar ls -1 .

Leaks between 10 -8 mbar ls -1 and 10 -4 mbar ls -1 can be either viscous or molecular, and hencequantifying an air leak from a helium leak detector can sometimes be difficult. The change inflow rate through a viscous leak with pressure is different to the change in the flow through amolecular leak, and this can sometimes be used to discriminate between the two types of leak.For molecular leaks the flow is proportional to the pressure difference across the leak. Forviscous leaks the flow is determined by the difference of the squares of the pressures on eitherside of the leak.

Viscous and molecular leaks

This paragraph shows how gas flow through a fixed leak changes with pressure differential andgas type dependant upon whether the leak is viscous or molecular. It also indicates correctionswhich must be made to the Spectron leak rate reading. If the test conditions are different fromthe operating conditions, for example, test with helium - operate with air.


Key to formulae:

P = PressureQ = Leak rate M = MassZ = Viscosity

Change in leak with pressure differential

For mo lecu lar leaks

Q2 = P3 - P4Q1 P1 - P2

For Viscous leak

Q2 = P32 - P42Q1 P12 - P22

Change in leak with gas


For molecular leaks Q2 = M1

Q1 √ M2

For viscous leaks Q2 = Z1Q1 Z2

General change with pressure and gas

Generally for molecular leaks Q2 = P3-P4 M1Q1 P1-P2 √ M2

Generally for viscous leaks Q2 = P32 - P42 Z1Q1 P12 - P22 Z2

4.19.3 Vacuum testing

In vacuum testing the test piece is evacuated. Helium is applied to the outside of the test pieceand its flow through the leak is detected and measured by the instrument.

Examples of products tested this way are:-

1 Vac uum com po nents and plant of all kinds.2 Elec tronic valves.3 Cath ode ray tubes.4 La ser tubes.5 Lamps.6 Cryo genic ves sels.7 Pace mak ers.8 Con tain ers of vari ous kinds in clud ing those for food prod ucts

and ex plo sives.9 Cast ings.10 Bel lows and other metal fab ri ca tions.11 Gas valves and regu la tors.12 Heat ing ele ments.13 Heat ex chang ers.14 Feedthroughs.

Testing small volumes

The Spectron is ideally suited for testing small volumes. Two methods are recommended. Thehood test or spray test.


Hood test

Used where the component is small enough for the leak detector to evacuate and testconveniently. The item or items for test are connected to the test manifold and pumped down.A hood is placed over the items and helium is sprayed into the hood. This is a useful methodwhere many small items are to be tested quickly.

Spray test with probe

This test is the simplest method and offers maximum sensitivity and direct readout of a leakrate in each of the test modes. This is because all the helium entering the leak is available to theleak detector. Leak location with spray probes is dealt with in detail in Section 4.19.6. The itemfor test is connected to the test manifold and pumped down. Helium is sprayed over the itemwith the spray probe.

Testing large volumes

Generally a gas spray probe is used to apply the helium, unless the test requires a highsensitivity for total leak rate, when a hood is used.

An auxiliary pump may be used to assist leak detection. This may be either a separate pump oran integral part of a vacuum process plant that requires testing.

In this situation there are two main points to be remembered:

1. Re sponse time = Vol ume Pump ing Speed

This gives typi cal dwell times un der hood for full de vel op ment of the leak age sig nal.

2. The in di cated leak rate is pro por tional to the frac tion of he lium flow ing into the leakde tec tor.

For ex am ple: if 1/2 the he lium is pumped by an aux il iary pump and 1/2 by the leakde tec tor then the in di cated leak rate will be 1/2 the true value. The ac ces sory could be auto mati cally com pen sated by set ting the ex ter nal fac tor to be 2 in this case (see Sec tion 10.5).

It follows that a leak detector connected into the backing line of a diffusion pump benefits fromthe high speed of the diffusion pump in terms of response time, and also shares the gas loadwith a pump with relatively low pumping speed, for example, a rotary pump.

4.19.4 Overpressure testing

In over-pressure testing the test piece is filled with helium, or a mixture of gases containing atleast 10% helium, to a pressure above atmospheric. The helium escaping is detected by theinstrument. The sensitivity is reduced in proportion to the dilution of the helium in the test gas.


Examples of products tested this way are:-

1 Heat ex chang ers.2 Hy drau lic and pneu matic sys tems.3 Proc ess plant, chemi cal/pe tro chemi cal etc.4 Pres sure ves sels, valves, fil ters.5 Air ships and bal loons.6 Re frig era tion/Air con di tion ing sys tems.7 Sat el lite sys tems.8 Gy ro scopes.9 Nu clear fuel rods.10 Her metic/semi her metic com pres sors.1 1 Auto mo bile com po nents, e.g. pet rol tanks, torque con ver tors, shock ab sorb ers,

gear boxes, wheels etc.

In many cases these products are tested in the overpressure mode because this is the mostappropriate method.

There are two categories of overpressure testing:

Where the product is very large or complex, and cannot be placed in a vacuum chamber.

Where the product can be placed in a vacuum chamber and has helium inside or can have itintroduced.

Testing large products (for example, items 1 to 5)

As with all leak testing, the purpose is to capture and measure helium flowing from a leak. Inthis case the sniffer probe is used to capture helium. There are two types of sniffer, a standard(or molecular flow type) and a viscous flow type. Molecular flow sniffer probes are used wheremaximum sensitivity is important and conditions are good. These probes are approximately 2 metres long and have a 2 second response time.

Where long distances are involved, a visco sniffer probe is used. This probe takes only a sampleof the helium gas into the mass spectrometer but allows an acceptably fast response time.Clearly sniffer probes are operator limited and have reduced sensitivity, but have the advantage of finding and pinpointing leaks.

A variation of the sniffing test is not to probe the surface of a product but simply sample the gasin an enclosure around the product. In this case, the partial pressure of helium is important.Each sniffer probe has a theoretical sensitivity of 1 part per million (ppm) An example of this testis that for Satellite fuel systems:

The rise in helium concentration in the surrounding enclosure

= Leak rate (mbar 1/sec) X 10 6 ppm PP V (li tres) x 1000 (mbar)

where the leak rate is that indicated by the Spectron, V is the residual volume of the enclosure.


The Spectron 5000 can be set up to read directly in ppm using the visco factor and the leakfactor to convert mbarl/s to ppm.

Testing helium filled products (for example, items 6 to 11)

Gyroscopes are normally charged with Helium for normal use, and are therefore a perfect itemfor this test (usually 12ins or smaller glass bell jar on Spectron).

Nuclear fuel rods are charged with some helium during manufacture to facilitate leak test dueto the size. The plant generally has an auxiliary pumping system.

Hermetically sealed devices can have helium introduced by the bombing technique. Electronic devices are a major product for this technique.

Industrial products which demand either reasonable leak tightness, e.g. refrigerationcompressors, or products that need a clean reliable automatic form of testing, are candidatesfor helium leak testing. Generally speaking, these products are high volume manufacture andoften require high internal pressures.

4.19.5 Leak blockages

Components to be leak tested should always be clean and dry. If manufactured by a cleanprocess, such as vacuum brazing, they should be protected from dust and moisture until theleak test has been completed. The very small holes which cause appreciable leaks under highvacuum are easily blocked by solid particles in the micron size range, which may be smallenough to be air-borne. Such blockages may be temporary or intermittent, giving rise tomisleading leak test results.

Blockages by liquids can also occur. A capillary of 2 microns diameter, for example, containingwater, will be blocked against a gas pressure difference of 1.5 atmospheres by surface tensionforces. The water will evaporate into the vacuum applied during leak testing but there will beno leak indication on the Spectron until all the water has evaporated. Then there will be a leakof about 10 mbar litres/s if the capillary is 2mm long. A thin oil in a similar capillary would flowunder a pressure difference of 1 atmosphere, but so slowly that the leak would not appearduring practical leak test procedure, thus giving rise to a leak which develops only after theplant has been under vacuum for weeks or months. Hydraulic pressure testing, whether withwater or with oil, is therefore better postponed until after the leak test.

Total leak measurement

Helium passing simultaneously through all the leaks in a test piece is collected and measuredby the Spectron. For testing by the vacuum method, the test piece is covered by a hood which isflooded inside with helium. The hood may be simply a plastic bag or a more permanentstructure such as a metal box or a bell jar, depending on the job in hand. The hood need not becompletely closed, but any opening should be at the bottom, so that the air can be swept out bythe lighter search gas. Time and helium can be saved by making the hood capable of beingroughly evacuated by the Spectron through a separate valved connexion, before filling thehood with helium.


The evacuated enclosure method is most suitable for small components that can be filled inadvance with helium at atmospheric pressure. They may be tested singly, or in batches, bysimply putting them in an enclosure which is pumped by the Spectron.

Sealed components can be tested by an extension of the evacuated enclosure methodsometimes referred to as 'bombing'.

The components are placed in a pressure vessel which is filled with helium at atmospheric orhigher pressure. Helium enters the components through any leaks, provided the pressureinside them is well below the helium pressure. The components are then placed in the enclosure which is evacuated by the Spectron. Any helium escaping from the components is detected bythe instrument.

This method has only a limited application. The time taken for enough helium to enter thecomponent through a leak becomes very long if the leak is fine or the internal volume is large. Agross leak will not be detected if the helium has already escaped when the Spectron test hasbegun. Spurious indications may be given if the outside of the component has porosity, trappedvolumes, or is dirty.

4.19.6 Leak detecting with probes

An individual leak can be found by localizing helium leaking through it. In vacuum testing,helium is applied by a spray probe. In over-pressure testing a sniffer probe is used.

The audio facility is especially useful in probe testing; it avoids the need to watch both the probeand the leak rate meter. Headphones on a long lead are useful when testing large apparatus.The portable process control module is also a valuable aid in making leak measurements awayfrom the Spectron.

Spray probe

This accessory consists of a jet with a push-button on/off valve. It is supplied with plastic tube for connection to the outlet of the pressure regulator on a helium bottle, and typically requires only2 psi gauge .

Spray probe handling

The search for a leak should begin at the top of a test piece, working downwards so that as thehelium rises it passes only over areas which have already been searched.

The tip of the probe should be about 3 mm away from the surface of the test piece.

The probe should be passed slowly over the area to be searched, moving it at about 1 or 2centimetres per second. Initially a moderate flow of helium should be used, producing a jet ofgas which can easily be felt on the skin at a distance of a few millimetres from the probe tip.

When a leak is found, the flow rate should be reduced to permit the leak to be located precisely.Verify the position of the leak by stopping the flow of helium until the leak rate meter falls to alow value, then repeat the test.


To measure a leak, hold the probe still and wait for the leak rate meter deflection to stabilize.Check that the helium flow is great enough to exclude air from the leak by increasing the flowfor a few seconds. Note the leak rate indication.

Mark the position of the leak for repair.It may be masked with adhesive tape or ApiezionCompound Q so that it will not interfere with the location of other leaks.

Sniffer probe (vacuum)

This accessory consists of a hand unit with an isolation valve and a 1.5 m length of vacuum tube,with a vacuum coupling that fits the test port. Two probes (50 mm and 150 mm long) areprovided. Each has an internal capillary tube adjusted to give a pressure of 5 x 10 -5 mbar at themass spectrometer when sampling air at atmospheric pressure.

Sniffer probe handling

The search for a leak should begin at the bottom of the test piece, working upwards in the wakeof the rising helium.

The tip of the probe should be held about 1mm from the surface of the test piece and passedslowly over the area to be searched, moving at about 1 or 2 centimetres per second.

When a leak is found, verify its position by moving the probe away or closing its valve until theleak rate meter deflection falls, then repeat the test.

The leak may be measured by holding the probe still until the meter deflection stabilizes. Notethe leak rate indication. Leaks down to 2 x 10 -8 mbarl/s can be detected with the vacuum sniffer,and around 10 -6 mbarl/s with a visco probe.

For a Visco probe, first se lect <<USER 5 Fac tors 8 Ex ter nal OFF9 Visco ON (Ac ces sory LED is ON).

If re quired, visco probe cali bra tion may be achieved once the visco probe is fit ted and thecon sole is in Fine test. (Ex ter nal cali bra tion se lected).

Mark the position of the leak for repair. It may be masked with adhesive tape or ApiezonCompound Q so that it will not interfere with the location of other leaks.

4.19.7 Leak detecting vacuum systems

When connecting a leak detector to a pumping system, there will be a loss in sensitivity asshown in Figure 4.10 since only part of the helium search gas will pass into the leak detector. Theloss in sensitivity will depend on the ratio of the conductance (or pump speeds) of the leakdetector and connecting hose to the total speed of the pumping system at the point ofconnection.



Figure 4.9 - Leak detection of vacuum systems.

Figure 4.10 - Conductances of round pipes for air at 20 degC

Because the pumping speed above the high vacuum pump is generally high compared withthe pumping speed in the backing line of the test system, the backing line is the best place toconnect the leak detector. This is also good practice in preventing any possible contaminationof the high vacuum chamber.

The loss in sensitivity due to the relative pumping speeds of the test system and the leakdetector can be easily estimated. The conductance of the sample pipe from the test system tothe leak detector can be estimated from the graphs in Figure 4.11. The overall sensitivity of thesystem can be checked by pumping a calibrated leak on the high vacuum chamber of the testsystem.

The speed of the leak detector at point B in Figure 4.10 is given by the formula:

1 = 1 + 1S S2 C2

The loss in sensitivity at the leak detector due to the high pumping speed of the rotary pump inthe vacuum system is given by:

Frac tional sen si tiv ity = S S1 + S

Suppose a typical large vacuum system with a rotary pump of speed of:

S1 = 40 ls -1 and S = 2 ls -1

where the conductance of the connecting pipe is negligible and so the fractional sensitivity isapproximately 5%.

For the Spectron leak detector, the advised pressure at point B in Figure 4.10 should be less than1.0 x 10 -1 mbar for Gross Mode and less than 1.0 x 10 -2 mbar* for Fine Mode.

*This can be higher where there is a large outgassing of water vapour from the test piece whena liquid nitrogen trap is used, which has a very high pumping speed for water vapour.

For a connection pipe of 3 meters, 25 mm internal diameter, the conductance from Figure 4.11 is approximately 1 ls -1 and so the resultant pumping speed of the leak detection system is 2/3ls -1 ,and the fractional sensitivity is approximately 1.6%.

Under these circumstances, the preferred maximum pressures at point B Figure 4.10 arehigher: less than 3 x 10 -1 mbar for Gross Mode and less than 3 x 10 -1 mbar for Fine Mode becauseof the pressure drop along the connecting pipe. For a pipe of conductance C2 the maximumallowed pressure drop is:

2/C2 x 10 -1 mbar for Gross Mode and 2/C2 x 10 -2 mbar for Fine Mode.

If the above calculation shows the backing pressure of the test system to be marginal or too high for testing in the Fine Mode, then the Spectron should be used in Gross Mode.

In Gross Mode the test port pressure should generally be below 1 x 10 -1 mbar.


In Fine Mode the mass spectrometer pressure should generally be below 5 x 10 -5 mbar.Gross Mode should be used in dirty applications.

Testing vacuum systems in Gross Hold

Select <<USER 7 Autotest, 1 Autovent, 1 action OFF/ON, 2 No vent, enter, display so that thetest port is not vented on Finish. The No vent LED should light on the PCM.

Always press Gross Hold until Gross Hold LED is on, before pressing test. When the test systembacking pressure is steady, press test and after 4 seconds open valve to test system. Leak testingcan commence. Always check that the Gross Hold LED is on in the event of a power interruption or after closing down the instrument.

After leak testing, close valve to the test system and then press Finish.

If it is necessary to disconnect the instrument from the test port couplings, select <<USER 7menu Autotest, 1 Autovent, 1 action OFF/ON, 1 Vent on finish, enter, display so that the Novent LED should be off. Now disconnect the test port couplings.

4.19.8 Testing the tightness of hermetically sealed components

Introduction

There are two methods of testing hermetically sealed components. The component can be filledwith helium (or any tracer gas) during manufacture or pressurised with helium prior to testing.

Components prefilled during manufacture can be tested for helium evolution under vacuum.For components pressurised with helium there are three distinct parts of the test.

1 Pres sur ing the test ob ject un der he lium.2 Time lapse bef ore ap ply ing vac uum.3 Test ing for evo lu tion of he lium un der vac uum in a leak de tec tor.

The measured leak rate is a function of the initial pressure and time of pressurising and the timelapse before vacuum testing. The properties of the test piece affecting the measured leak rate arethe internal volume, the size of the surface leaks and also for the pressurising technique theabsorption properties of the surfaces of the test piece.

Scope of tests

Prefilling components

For components which have been prefilled with helium, the measured leak rate is a function ofthe following:

1 In ter nal pres sure of he lium dur ing manu fac ture.2 The limit of the leak de tec tor sen si tiv ity.3 The type of leaks (mo lecu lar, very large etc.).4 The time be tween fill ing and leak test ing.


Figure 4.11 shows the features for a typical item under test. The measured leak rate versus' leaksize is fairly linear for small leaks, but for large leaks the helium escapes through diffusion andthe measured leak rate is a function of time.

(Typi cal item un der test prefilled with he lium).

A = Minimum detectable leak - governed by leak detector sensitivity.

B= Maximum detectable leak - governed also by time between manufacture and leak testing.

C = Departure from linearity - governed by the time between manufacture and leak testing.

Pressurising components with helium

For components which have been pressurised with helium just before leak testing the measured leak rate is a function of the following:

1 Ini tial over pres sure of He lium.2 Time of pres sur is ing.3 In ter nal vol ume of com po nent un der test.4 Time bef ore leak test ing.5 The type of leak (mo lecu lar or vis cous leaks.6 The sur face prop er ties of the test piece.


Figure 4.11 - Leak size versus measured leak rate.

(Typi cal item un der test pres sur ised with he lium).

A - Minimum detectable leak - governed by leak detector sensitivity.

B - Maximum detectable leak - governed also by time between manufacture and leak testing.

C - Departure from linearity - governed by time between manufacture and leak testing.

Figure 4.12 shows the corresponding features for a typical item under test. For small leaks thehelium might not have time to allow a large build up of helium inside the test piece, whereas forlarger leaks a pressure significantly above one atmosphere of helium might be reacheddepending on the overpressure of helium. However very large leaks are still not detectablebecause the helium diffuses away during the time lapse between pressurising and leak testing.The Figure shows the limit of detectability of the leak detector, but this might be below thatgoverned by the surface properties of the item under test which could severely limit themaximum detectable leak size.

Leak testing

For prefilled components there are two important points to note. Firstly the measured leak rateis proportional to the fraction of helium in the gas used to fill the components. Secondly,reproducable results rely on the components being tested at the same time after manufacture.

For components tested after pressuring with Helium it is obvious that, because the resultsobtained are a function of many variables, that a standard method must be used to giveconsistent results.


Figure 4.12 - Leak size versus measured leak rate.

For instance microelectronics and semiconductor devices are tested for the effectiveness of theirseals by the standard MIL-STD-883D Method 1014.5, which defines variables such as heliumpressure, pressure time, lapse time and,reject level for measured leak rate.

The expected measured leak rate can be estimated using the following equation:

When Lm = the measured leak rate in mbar litre s-1 (air equivalent)

L = air equiva lent stan dard leak rate in mbar li tres -1

Pe = Pres sure of he lium ex po sure mbar

Po = At mos pheric pres sure mbar

Ma = Av er age mo lecu lar weight for air (29)

M = Mo lecu lar weight for he lium (4)

t = ex po sure time for over pres sure

t2 = lapsed time be tween pres sur is ing and leak de tec tion in sec onds

V = In ter nal vol ume of de vice in li tres

For the meas ure ment of small leaks, tested im me di ate ly af ter he lium ex po sure this equa tionre duces to:

Lm = Pe t1 V Po

So the measured leak rate is proportional to the product of the helium overpressure and thetime of exposure - Usually t can be increased, but the maximum allowed over pressure might belimied by the possible damage to the item under test.

Liquid leaks and equivalent tracer gas leak rates

The accurate conversion of liquid leakage rates to equivalent air or helium leak rates assumesthe flow characteristics are knowable and calculable but in general this is not true. Limits can,however, be placed on the level of liquid leakage through a leaking wall or weld, using as a basissome simple physical results, the first being that for surface tension.


For liquid water, the surface tension at room temperature is about 70 dyne-cm, and completelysuppresses water leakage through wall defects of diameter D (microns) if the pressuredifference across the wall is less than about 2.9/D (Bar). At higher temperatures, or for differentliquids, the numerical factor of 2.9 for water surface tension should be linearly scaled for theapplication.

Dry defects of size D (microns) will have a conductance for trace gas which is calculable for theconditions applicable during the leak test. [See for example, Modern Vacuum Practice by NigelHarris, available from Edwards as part number ]. Therefore, ignoring evaporation of liquid from the defect orifice, for trace gas leakage below a certain level there will be NO liquid loss in theapplication.

In practice, even when the trace gas leakage exceeds this level, the fluid loss will be very slow.The liquid flow tends to depend on the diameter D whereas the trace gas flow will vary as D-cubed for small leakage and D-fourth power for viscous flow. Furthermore, no real leak issimply a round hole, which tends to suppress the leakage, and may be multiple paths ofcompletely differing flow characteristics, which makes calculations intractible.

Mass flow conversions for trace gases are somewhat easier to handle, and are instructive as aguideline for liquid leakage to trace gas leak rate factors. Thus for Freon 12, which has amolecular weight of 120.7, and helium, which has a molecular weight of 4, the small leakscenario has a conversion factor of square root of (4/120.7) at common temperature and pressuredifferential between helium and Freon 12 trace gas leak rates.

In the Freon example, the liquid would normally be at 11 bar gauge, but it is assumed that smallleakage rates will allow the material time to reach room temperature within the defect, so thattemperature changes will be ignored. Thus the Freon 12 rate will be 11 times the square root of(4/120.7) in comparison with the helium tracer gas leak rate.

The best method in practice is to construct a reference leaker, measure its leakage by both tracegas and liquid loss rate methods, and then deduce the conversion factor, which should applydirectly to other tests if the reference leak testing conditions are comparable and the leak defectis of similar nature and characteristic to the defects likely to be encountered.

Keep and mark those rejects: they may well prove to be your best QA pal!



CON TENTS

SEC TION 5 MAIN TE NANCE


WARN INGS AND CAU TIONS 5-15.1 Clean ing 5-25.2 Re mov ing pan els 5-25.2.1 Front and side pan els 5-25.2.2 Top panel 5-25.3 Weekly main te nance 5-25.4 Mini mum ro tary pump main te nance 5-35.5 Gas bal last ing 5-35.6 Fil ters 5-45.6.1 Test port fil ters 5-45.6.2 Oil mist fil ters 5-45.6.3 Fore line trap 5-55.7 Dif fu sion pump 5-65.7.1 Dif fu sion pump heat ers 5-65.7.2 Ther mal snap switches 5-65.8 Re mov ing and clean ing cold trap 5-75.9 Check ing ion source 5-75.10 Re plac ing MS fila ment 5-85.11 Re plac ing the ce ramic bushes 5-105.12 Fuses and cir cuit break ers 5-115.12.1 Elec tron ics tray fuses 5-115.12.2 Con sole fuses and cir cuit break ers 5-11

Spec tron 5000 5-i

Illustrations

Fig ure Ti tle Page

5.1 Ce ramic bush as sem bly 5-105.2 ION source pin dia grams 5-13/5-145.3 Ion source fila ments 5-13/5-145.4 Cuta way view of Spec tron 5000 Con sole 5-15/5-165.5 Cuta way view of Spec tron 5000 Con sole 5-17/5-185.6 Cuta way view of Spec tron 5000 Con sole 5-17/5-185.7 Elec tron ics tray fuses 5-19/5-205.8 Con sole cir cuit break ers and fuses 5-19/5-20

5-ii Spec tron 5000

5 MAIN TE NANCE

WARNING

Obey the safety instructions given below and take note of appropriate precautions. If youdo not, you can cause injury to persons and damage to the equipment.

WARNING

High voltages exist within the console when the electrical supply is switched on. Ensurethat maintenance is done by a suitably trained and supervised technician. Obey your local

and national safety requirements.

WARNING

Switch off the electrical supply at the circuit breaker on the front panel of the console andremove the separable plug from the electrical supply before carrying out the following

maintenance procedures.

WARNING

When carrying out maintenance procedures with the covers removed, high temperaturesmay exist on all pump and motor casings and the mass spectrometer assembly.

CAUTION

Do not tip the Spectron onto its sides as all the pumps contain oil which will spill andcause contamination of the equipment.

The Console contains components such as pumps, valves and gauges, which have their ownseparately available instructions.

This section on maintenance deals with the required inspections and anticipated actions forroutine operation of the Spectron 5000 leak detector.

Contract maintenance (World wide)

Edwards operate a routine maintenance service. Engineers normally visit the customer to carryout an appropriate “run hours” service on the equipment. Special arrangements to suit thecustomer's requirements can also be made. Details are available on request from your supplier.

Spec tron 5000 5-1

5.1 Cleaning

Wipe exposed external surfaces with a soft cloth dampened with iso-propyl alcohol (or othersuitable proprietry solvent), avoiding liquid spillage into the console or PCM. Avoid vapourcontact with hot surfaces and ensure adequate ventilation. Smoking must be prohibited whenusing solvents.

Any large fluid spillage, for example, rotary pump oil, should be absorbed by spreading sand,earth or mineral absorbent and disposed of in accordance with the Local and National Safetyregulations.

To remove grime and dirt found in normal use, a proprietry cleaning agent may be used, appliedwith a damp cloth and removed with clean water, finally drying with a dry, lint free cloth.

Dry dusty areas should be vacuumed. It is important that the blades and ducts of all the fansshould be cleaned at every service interval, since a build up of dust in the covers will reduce thecooling efficiency and will increase the danger of overheating.

Clean the fan blades and ducts with a soft brush to dislodge the dust, then remove the loose dustwith a vacuum cleaner.

5.2 Removing panels

5.2.1 Front and side panels

Locate the access holes to the fixing bolts (one at the top of each panel) and with a screwdrivergive the bolt a quarter turn anticlockwise. Ease out the panel and before lifting off the locatingpegs remove the earth strap. There is one earth strap on each panel.

5.2.2 Top panel

Remove test port clamp or test chamber as appropriate and replace with a test port blank toprotect the vacuum system from ingress of foreign matter, before starting maintenanceprocedures.

Two retaining bolts which require a quarter turn with a flat bladed screwdriver to release theworktop, are located at the left and right hand side of the worktop surface (under the mat, iffitted). After release of both bolts, raise the worktop slightly and remove the earth strap from itsspade terminal, before lifting the worktop completely clear.

5.3 Weekly maintenance

To prepare the Spectron 5000 console for all routine maintenance procedures, ensure that thecold trap , if fitted, is not filled, but allowed to warm up, preferably overnight.

See Figures 5.4, 5.5 and 5.6 for cutaway views of the Spectron 5000 Console.

Switch off the circuit breaker, Item 37, remove the separable plug from the electrical supply, thenremove the front panel from consol.

5-2 Spec tron 5000

1 Rough ing pump, item 15 - In spect oil level in sight glass - must be above mini mum level.2 Back ing pump, item 12 - In spect oil level in sight glass - must be above mini mum level.3 Check lev els in oil mist fil ters, items 11 and 36 , drain if nec es sary.

Note: The oil drained from the oil mist filters may be re-used if it is not discoloured.

Re place front panel, en sur ing that the earth strap is con nected.

Insert the gas ballast plug into the Visco Probe inlet (see Figure 3.1). Switch ON. Press STARTbutton. Leave to run overnight, if possible, with the Leak Detector in Standby. Remove gas ballastplug from the visco probe inlet before resuming normal testing.

5.4 Minimum rotary pump maintenance

A Leak Detector in daily use on clean test pieces should receive the following routine pumpmaintenance.

Change the oil every six months/3000 hours operation.

Note: On ma chines fit ted with a cold trap, the cold trap must be empty bef ore start ing any main te nance ac tiv ity (see Sec tion 5.8).

If the pumps are cold, switch the Spectron to Standby for approximately 10 minutes, then pressclose down and when the PCM displays CLOSED DOWN switch off the circuit breaker, item 37on Figure 5.5, then remove the separable plug from the electrical supply.

Remove the front panel. Using a suitable drip tray to catch the waste oil, unscrew the drainplugs, item 35 on Figure 5.5, then unscrew the filler caps, item 45 on Figure 5.4 and drain the oil from both roughing and backing pumps. Clean and replace the drain plugs, fill the pumpswith the appropriate Ultragrade oil (see Section 3.5) halfway between MAX and MIN on thepump sight glasses and replace the filler caps.

5.5 Gas ballasting the rotary pumps

After prolonged use it may be necessary to Gas Ballast the rotary pumps to remove anycondensable fluids (mainly water) from the oil. Gas Ballasting of the roughing pump isindicated if the ultimate manifold pressure in gross hold with the test port blanked off is higherthan usual. Gas ballasting of the backing pump is indicated if the backing pressure when inReady to test mode is higher than normal.

Note: A typical ultimate pressure for the roughing pump is 2 x 10 -3 mbar and the backing pressure should be less than 5 x 10 -2 mbar.

To gas ballast the roughing pump, press Standby from the “Ready” or “Finish” state. To gasballast the backing pump use the procedure described in Section 5.3 above.

Spec tron 5000 5-3

5.6 Filters

5.6.1 Test port filters

Replace the NW40 test port filter at six month/3000 operating hour intervals. Remove the top panel(refer to Section 5.2.2), unscrew the two M8 nuts holding the NW40 C-clamp and test port to the topof the manifold block and lift away. Remove the filter and replace with a new item. Refit, replace theO-ring, then replace the top panel, ensuring that the earth strap is replaced before fastening the toppanel in place.

5.6.2 Oil Mist Filters

Change the oil mist filter elements every six months/3000 hours operation.

1 Re move the front and right hand side pan els (ref er to Sec tion 5.2.1).

2 Lo cate the oil mist fil ters, items 11 and 36 on Fig ures 5.4 and 5.5.

3 If there is any oil in the fil ters drain by re mov ing the drain plug. When the fil ter isfully drained re place the drain plug.

4 Wipe clean the out side of the fil ter and con nec tions.

5 Un screw the clamp re tain ing the ex haust hose at the top of the fil ter and re move.

6 Un screw the clamp re tain ing the oil mist fil ter onto the pump fit ting and re move the fil ter.

7 Un screw and re move the four screws se cur ing the two halves of the fil ter as sem bly.

8 Lift out the fil ter ele ment that re quires chang ing. Dis pose of the used ele ment safely.

9 Wipe clean the in side of the fil ter body and the mat ing sur faces. Do not re move the seal ing ring.

10 Fit new fil ter ele ment, en sure that the foam seal ing rings on the top and bot tom of the ele ments are cor rectly seated.

11 Re join the two halves of the fil ter body and se cure us ing the screws re moved in 7 above.

12` Re con nect the fil ter and clamp to the pump fit ting.

13 Rec lamp the ex haust pipe to the top of the fil ter.

14 Re place the front and right hand side pan els, en sure the earth straps are re con nected.

Note: If the MF30 Oil mist filter is fitted (E2M28 versions only), the procedure is identical, except that Actions 6 and 12 may be omitted.

5-4 Spec tron 5000

5.6.3 Foreline Trap (Clean Roughing Option)

WARNING

Activated alumina is a dessicant and will absorb materials from your process system. Youmust take suitable precautions to protect personnel from harmful effects of any noxiousmaterials released if you attempt to reactivate spent alumina by baking. Avoid inhalation

of its dust, eye contact and unnecessary skin contact.

• Ιn com mon with other types of sorbent, ac ti vated alu mina ab sorbs mois ture. This will not af fect its oil va pour trap ping prop er ties but may tend to pro long rough pump ing on suc ces sive pump ing cy cles. Regu lar re gen era tion by bak ing of the trap or re newal of thesorbent will be nec es sary for rapid pump- down.

• If the fore line trap has been open to the at mos phere for a long pe ri od of time, pro longedpump ing with a gas bal lasted ro tary pump may be re quired to re move ab sorbedmois ture. Al ter na tively, you may re move the bas ket from the trap and bake it at 250 °Cfor two hours.

• Change the sorbent ma te rial every three months/1500 hours op era tion.

• When re new ing the sorbent it is rec om mended that the bas ket is baked as above bef orere plac ing in the trap.

1 Re move the left hand side panel (ref er to Sec tion 5.2.1). Undo the two M6 screws atthe top and bot tom of the right hand side of the elec tron ics tray and swing the trayto the left.

2 Lo cate the fore line trap, item 5b on Fig ure 5.4.

3 Un screw and re move the knurled nut and the lid.

4 Re move the bas ket and com pres sion spring from the trap body, re mem ber ing theor der in which all the items are re moved.

5 Re move the wing nut and end cap from the bas ket. Re move the washer, com pres sion spring and per fo rated end disc.

6 Empty the used alu mina balls into a suit able con tainer for dis posal.

7 If the trap body in te rior ap pears oily or dirty, wash it out with iso- propyl or ethyl al co hol and then dry thor oughly.

8 Fill the bas ket with sorbent. The level of the alu mina balls and per fo rated disc mustalign with the line shown on the bas ket spin dle, tap the bas ket gen tly to en sure theballs set tle and add fur ther alu mina if nec es sary.

Spec tron 5000 5-5

9 Place the per fo rated end disc on top of the alu mina balls and slide the spring over the spin dle so that it rests on the end disc. En sure that both end discs have their smooth side in con tact with the balls.

10 Re place the washer and re fit the end cap over the spin dle. Re place the sec ond washerand wing nut over the spin dle and tighten the wing nut. To ease tight en ing the wingnut push the lid down gen tly.

11 Po si tion the charged bas ket in the trap, en sur ing that it is fully lo cated on the bot tom O-ring seal.

12 Re place the spring lid and nut.

13 Re po si tion the elec tron ics tray against the frame and re place the two M6 screws.

14 Re place the side panel, en sur ing that the earth strap is re con nected.

5.7 Diffusion pump

CAUTION

Use only Santovac 5 diffusion pump fluid for charging the diffusion pumps.

Recommended service attention every two years to the E203D diffusion pump. The EO50 diffusion pump, if fitted, will require service attention at more regular intervalsdepending on the cycling of the console., typically six months for harsh service.

5.7.1 Diffusion pump heaters

Diffusion pump heaters can suffer transitory condensation effects after prolonged storage athigh humidity. This may cause apparant insulation breakdown across the heaters (less than 10 MΩ) until the pump heaters have dried out, which, normally, may take a few minutes.

On subsequent warm up the electrical insulation will be restored to its normal very high value.

5.7.2 Thermal snap switches

The snap switch will protect the diffusion pump if the air cooling fails, by switching off theelectrical supply to the pump heater when the switch opens. The switch will reset when thepump cools down to a pre-set temperature. The EO50 pump, if fitted, has an additional controlwhich will prevent the EO50 from restarting until the machine has been closed down anddisconnected from the electrical supply at the circuit breakers.

Service of the thermal snap switch and the diffusion pump must be carried out if repeatedthermal snap cycles occur.

5-6 Spec tron 5000

5.8 Removing and cleaning the cold trap (If fitted)

WARNING

If liquid nitrogen is present eye protection and gloves must be worn.

Most of the deposit on the cold trap will evaporate when the cold trap warms up. However it isrecommended that the cold trap is periodically removed for cleaning. The interval betweencleaning will depend on the application but will typically be several months. Where a partiallyfilled cold trap is removed for filament changes it may not always be necessary to use solvent atstep 7.

1 Close down the Leak De tec tor and af ter 10 min utes switch off at the elec tri calsup ply cir cuit breaker.

2 Re move the work top and right hand side panel.3 Re move the 6 bolts se cur ing the cold trap, item 42 on Fig ure 5.6. 4 Vent the Leak De tec tor with the air ad mit tance valve on the top of the mani fold, item

46 on Fig ure 5.6.5 Lift out the cold trap in ner.6 Tak ing great care pour away ex cess liq uid ni tro gen and al low cold trap in ner to warm up.7 Wipe off con den sa tion and clean trap with al co hol or other suit able sol vent.

Note: With use a film of hydrocarbons will form on the cold trap. Unless the cold trap has been cleaned recently it is recommended that it is removed and wiped with a suitable solvent and dried.

8 Re place cold trap en sur ing that the vi ton 'O' rings are clean and sound.9 Tighten up the six bolts pro gres sively, op po site pairs to gether.10 Hand tighten the air ad mit tance valve, Item 46 on Fig ure 5.6.11 Re place the work top and side panel, re mem ber ing to re con nect the earth leads.12 Switch on the front panel iso la tor and Start- up.

5.9 Checking the mass spectrometer ion source continuity

If the label EMISSION ERROR is displayed or NO PEAK FOUND and an open circuit filament orion source error is suspected, disconnect the ion source plug from the ion source.

Check the continuity of the pins. There should be no continuity between any other pins, otherthan as stated below. There should be no continuity (resistance >100 MΩ) between any pin andearth. (See Figure 5.3)

Spec tron 5000 5-7

Re sis tance be tween pins:

1 and 3 = 0.3 ohms5 and 7 = 0.3 ohms

1 Fila ment 223 Fila ment 24 Ion grid5 Fila ment 167 Fila ment 18 Ion box9 To tal pres sure col lec tor

If the filaments are open circuit, or if resistance between pins 1 or 3 or 5 or 7 and 8 is <100 MΩ replace them; or use replacement ion source.

5.10 Replacing the mass spectrometer filaments

The Ion Source is fitted with two non-identical filaments, 1 & 2 at locations marked P & S.Usually these will both be replaced at the same time. Care should be taken not to interchangethe two filaments.

Note: If a cold trap is fitted and filled, the Spectron must be vented and the cold trap removed (see Section 5.8) before removing the ion source. If a cold trap is fitted but not filled and is at room temperature, the ion source can be removed without removing the cold trap.

Procedure:

1 Close down the Leak De tec tor and wait at least 10 min utes, to al low the equip ment to cool.

2 Switch off at the iso la tor and re move the sepa ra ble plug from the elec tri cal sup ply.3 Re move the Work top and right hand side panel.

WARNING

The ion source and socket will be hot to the touch.

4 Re move the socket from the ion source.5 Vent the Leak De tec tor us ing the man ual air ad mit tance valve at the top of the

mani fold by un screw ing sev eral turns (do not un screw it com pletely).

5-8 Spec tron 5000

WARNING

When a cold trap is fitted, do not touch any part of the liquid nitrogen reservoir orconnected pipelines. Do not allow liquid nitrogen vapour to touch your skin. The surfaces

and vapour are at very low temperatures and can cause tissue damage.

WARNING

When venting a filled cold trap to atmosphere the liquid nitrogen may boil off rapidly and spill over the top cover of the console. Always follow the the instructions in

Section 5.8 for removal and venting.

6 Close the man ual air ad mit tance valve.7 Re move the clamp from the ion source and care fully with draw the ion source from

the hous ing.

CAUTION

DO NOT TOUCH THE SOURCE except with clean instruments or with gloved hands.

8 In a clean en vi ron ment loosen the screws on the bar rel con nec tors at the twofila ments. (See Fig ure 5.3). Loosen the two screws on the longer con nect ing leads and care fully lift the con nect ing leads clear of the fila ment as sem blies.

9 Re peat 8 above for the two shorter leads.10 Loosen the screw hold ing one of the fila ments about 1/2 turn and care fully slide

the fila ment out.

Note : The letter (P or S) stamped on the girder adjacent to the ion box. P indicates that filament 1 should be fitted on that side. Similarly S indicates filament 2.

Note: Replacement filaments are packed in coloured boxes for ease of recognition. Filament 1 is packed in a RED box and Filament 2 is packed in a BLACK box.

11 Fit the ap pro pri ate re place ment fila ment by slid ing the as sem bly un der the se cur ingscrew as far as it will go. DO NOT TOUCH THE AS SEM BLY with fin gers.

Note: Primary filament 1 has a white coating with a thin wire in front.

12 Tighten (but do not over tighten!) the se cur ing screw.13 Re peat steps 10- 12 for the other fila ment.14 Re place the fila ment con nect ing leads and tighten the screws in the bar rel

con nec tors. Make a vis ual check for short ing parts.

Spec tron 5000 5-9

15 If the ion source is fit ted with metal seals, re place the alu min ium seal. If the ion source is fit ted with Vi ton seals, the seals may be re used.

16 Re place the source in the hous ing and tighten the quick re lease clamp. Re place the elec tri cal socket.

17 Re place the work top and side panel re mem ber ing to re con nect the earth leads.18 Switch on at the main iso la tor and press Start- up.19 Se lect Fila ment 1 for nor mal op era tion. See Sec tion 4.9.8.20 Af ter a suit able warm up pe ri od peak and cali brate the leak de tec tor

bef ore start ing test ing.

5.11 Replacing the ceramic bushes

The top hat ceramics are supplied in the Ion Source Kit (see Service kits Section 7).

The ceramic bushes (Item 1) are positioned on top of the filament support plate (Item 3), seeFigure 5.1.

Remove the filaments as described in Section 5.10 and then carefully remove one nut (Item 2),remove one ceramic bush and replace with a new one, replace and tighten the nut. Only replaceone ceramic bush at a time so as not to disturb the ion source alignment.

5-10 Spec tron 5000

1 Ceramic bushes2 Retaining nut3 Filament support plate1

Figure 5.1 - Ceramic bush assembly

5.12 Fuses and circuit breakers

5.12.1 Electronics Tray fuses (See Figure 5.7)

Num ber Rat ing Type

F1 1 A 20 mm Anti- surge (T)F2 1.6 A 20 mm Anti- surge (T)F3 5 A 20 mm Quick act ing (F)PSU1 2 A 20 mm Quick act ing (F)PSU2 2 A 20 mm Quick act ing (F)EO50 5 A 20 mm Quick act ing (F)(If fit ted)

5.12.2 Console Fuses and circuit breakers (See Figure 5.8)

Num ber Rat ing TypeF1 6.3 A 20 mm Quick act ing (F)F2 1 A 20 mm Quick act ing (F)CB Volt age and pump Cir cuit BreakerCB de pend ent. See ta ble Cir cuit Breaker

Spec tron 5000 5-11

200 to 240 VOLTS

CIRCUITBREAKER

ROUGHING PUMP BACKING PUMP

E2M8 E2M18 E2M28 E2M1.5

CB1 - - - 2A

CB2 6A 10A 10A -

115 VOLTS

CB1 - - - 4A

CB2 10A 20A 20A -

5-12 Spec tron 5000

Spec tron 5000 5-13/5-14

Figure 5.2 - Ion source pin connections.

1 Short lead barrel connectors2 Filament 2 securing screw3 Filament 24 Long lead barrel connectors5 Filament 16 Filament 1 securing screw

Figure 5.3 - Ion source filaments.

KEY

1 Process control module (PCM shown out of cradle with flap open2 Gross leak path, valve and restrictor (option shown)3 NW40 test port (option shown)4 Large flip lid chamber (option shown)5a Clean roughing by-pass valve (option shown)5b Clean roughing, foreline trap (option shown)6 Test valve (vacuum actuated)7 Roughing valve (vacuum actuated)8 Air admit filter9 Front fans and ventilation ducting10 Air admit valve (vacuum actuated)11 Backing pump oil mist filter (EMF3)12 Backing pump (E2M1.5 interstage)13 Diffusion pump (E203D)14 Exhaust line from E2M28 (option) to external MF30 filter15 Roughing pump (E2M28 option shown)16 Electronics tray (shown in service position)17 Thermal snap switch on E203D diffusion pump18 Roughing (fore)line19 Gas ballast connection pipe20 Ventilation deflector21 Vacuum valve actuator block22 Head pirani gauge (PRL10-K)23 E-block for L17XX no nitrogen consoles24 Rear panels (electrical supply cord, fans, visco, exhaust and I/O ports)25 Head pump backing line for no nitrogen consoles26 Ion source27 Permanent magnet on vacuum tee tube with head heater28 Preamplifier and backing volume29 Head pump for no nitrogen consoles (E050 shown)30 Backing volume connection to backing valve31 Interstage to visco port connection pipe32 Backing valve (PV10EK)33 Electrical supply contactor, fuses and pump trips34 Backing line from E2M1.5 backing pump35 Oil drain plugs for E2M18 roughing pump & E2M1.5 backing pump36 Oil mist filter (EMF10) for E2M8 or EMF20 for E2M18 roughing pump37 Front panel electrical circuit breaker38 Startup button on upper front panel of console39 Test port Pirani gauge (PRM10K)40 Main manifold block for Spectron 5000 console41 Accumulator valve (Hi sens option shown)42 Liquid nitrogen cold trap43 Internal quartz helium reference leak44 Electrical supply autotransformer and head heater transformer45 Oil filler plugs for rotary pumps46 Manual air admit valve

Spec tron 5000 5-15/5-16

Figure 5.4 - Cutaway view of Spectron 5000.


Spec tron 5000 5-17/5-18


KEY to Figure 5.7

1 Fan2 Relay unit 13 Diff. pump controller board (5000E/NL only)4 Ion source board5 Relay unit 26 Lamp and power distribution7 Multifunction board8 Switched mode power supply 19 Switched mode power supply 210 24 V transformer11 Fuse 112 Fuse 213 Fuse 3

KEY to Figure 5.8

14 Circuit breaker 115 Circuit breaker 216 Fuse 117 Fuse 2

Spec tron 5000 5-19/5-20

Figure 5.7 - Electronics tray fuses.

Figure 5.8 - Console circuit breakers and fuses.

CON TENTS

SEC TION 6 STOR AGE AND DIS POSAL


6.1 Ma te ri als 6-16.2 Con tami na tion 6-1

Spec tron 5000 6-i

6-ii Spec tron 5000

6 STOR AGE AND DIS POSAL

AZIDE WARNING

Customers must provide suitable on-site decontamination facilities before disposal ofazide exposed equipment.

6.1 Materials

The Edwards Leak Detector contains some items which may require disposal in accordancewith local or national regulations. The following items are listed for information:

1. Tho rium ox ide coated fila ments in the mass spec trome ter.2. Lith ium bat ter ies on the elec tron ics panel.3. San to vac 5 Oil used in the dif fu sion pumps.4. Ul tra grade 15 Oil used in the ro tary pumps.5. Ul tra grade 19 Oil used in the ro tary pumps.6. Alu mina Balls from Fore line Traps.7. Oil Mist Fil ter ele ments.

6.2 Contamination

If the leak detector has been used to measure contaminated or radio active materials, disposalmust be in accordance with the regulations currently in force for those contaminants.

Spec tron 5000 6-1

6-2 Spec tron 5000

CON TENTS

SEC TION 7 SPARES AND AC CES SO RIES


7.1 In tro duc tion 7-17.2 Ac ces so ries 7-17.3 Spares 7-27.4 Serv ice kits 7-27.5 Serv ice cen tre elec tron ics 7-2

Spec tron 5000 7-i

7-ii Spec tron 5000

7 SPARES AND AC CES SO RIES

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies in Brazil,Canada, France, Germany, Hong Kong, Italy, Japan, United Kingdom, U.S.A, and a world widenetwork of distributors. The majority of these centres employ Service Engineers who haveundergone comprehensive Edwards training courses.

Order spare parts and accessories from your nearest Edwards company or distributor. Whenordering, please state for each part required:

• Model and Item Number of your equipment

• Serial number (if any)

• Item Number and description of part

7.2 Accessories

De scrip tion Item Num ber

Gas Spray Probe MKII D169- 12- 000NW40 Vac uum Snif fer Probe D169- 55- 000S 5000 Visco Probe D169- 58- 000NW40 Quartz Ref er ence Leak D321- 08- 000S 5000 Pow der Leak D163- 17- 000Com pressed Pow der Leak - RED D163- 05- 000Com pressed Pow der Leak - BLUE D163- 06- 000Com pressed Pow der Leak - YEL LOW D163- 07- 000Stick Test Cham ber (SF) D154- 41- 500Stick Test Cham ber Adapter Kit (SF) D154- 41- 105Adap tor NW40/ 1.125 BSP D154- 05- 725S 5000 PCM Ex ten sion lead D154- 81- 743S 5000 Mo dem lead D154- 81- 749S 5000 IBM PC lead D154- 81- 750S 5000 Printer lead D154- 81- 752Air- admit port spe cial el bow D154- 81- 276

Spec tron 5000 7-1

7.3 Spares

De scrip tion Code Num ber

Fila ments Spares (set of 2) D154- 20- 102Ion Source re place ment D154- 20- 400Oil mist fil ter ele ments EMF3 A223- 04- 081Oil mist fil ter ele ments EMF10 A223- 04- 079Oil mist fil ter ele ments EMF20 A223- 04- 077Oil mist fil ter ele ments EMF30 A223- 04- 057Ac ti vated alu mina (0.45 kg) H026- 00- 050


Oil - U ltragrade 15 1 li tre H110- 26- 015Oil - Ul tra grade 19 2 li tres H110-25-015Oil - San to vac 100 ml A110- 10- 001

7.4 Service kits

There are three main service kits and intervals. These are the 6000 hour/1 year, 12000 hour/2 yearand 50000 hour/5 year kits. In addition there is an “O”-ring kit for intermediate requirements.Service policy on items not listed in these kits are available on a demand only basis.


6000 Hour/1 year Serv ice Kit D154- 81- 80112000 Hour/2 year Serv ice Kit D154- 81- 80250000 hour/5 year Serv ice Kit D154-81-819

“O”-ring kit D154- 81- 804

7.5 Service centre electronics


S5000 elec tron ics boards D154- 81- 805

7-2 Spec tron 5000

Documents

D154-81-880 Instruction Manual - MHz Electronics Scope of this man ual 1-1 ... usually helium, ... Various models in the Spectron 5000 range are available to suit the leak test application