Constant pressing force is realized by the magnetic spring ... · Fine Buffer FBU2 Series TENSION CONTROLLING BUFFER FBU2 SERIES Constant pressing force is realized by the magnetic

Fine Buffer FBU2 Series

TENSION CONTROLLING BUFFER FBU2 SERIES

Constant pressing force is realized by the magnetic spring method.

CC-787A 5

For implementation and testing responding to sophistication of devices

　 Constant pressing forceA magnetic line emerges in an oblique direction when the magnet within the movable shaft shifts relative to the fixed shaft. The shaft-direction element of this oblique force acts as the returning force.

Fixed shaft

Fixed section

Movable section

Resolving drawback of metal spring method

N

N S

S

S SN

N

NN SS

SS NN

　 Lineup of general typeFBU2-SU series with 200-g load capacity has been added. This series has a stronger movable section to provide wider application cases.

This series is a completely new non-conventional buffering unit, which uses the magnetic attraction force for the buffering section. With soft contacting and stable pressing forces, it resolves the problem of damaging target works. This series is best suited to damage-free handling of minute devices and fragile works.

This series is a completely new non-conventional buffering unit, which uses the magnetic attraction force for the buffering section. With soft contacting and stable pressing forces, it resolves the problem of damaging target works. This series is best suited to damage-free handling of minute devices and fragile works.

　 Compact and lightweight (FBU2 series)

The FBU2 series only has two consisting parts: The movable section and the fixed section. This realized the compact and ultra-lightweight (FBU2-7D: 5 g or less) body. The lightweight movable section provides soft touching and reduced impact on works.

　 Compact and lightweight (FBU2 series)

The FBU2 series only has two consisting parts: The movable section and the fixed section. This realized the compact and ultra-lightweight (FBU2-7D: 5 g or less) body. The lightweight movable section provides soft touching and reduced impact on works.

　 Rotation prevention mechanismWith a 4-pole spline made by the magnetization on the inner surface of the fixed shaft and the outer surface of the movable shaft, the shafts are attracted to the origin position by the magnetic attraction force.

　 Rotation prevention mechanismWith a 4-pole spline made by the magnetization on the inner surface of the fixed shaft and the outer surface of the movable shaft, the shafts are attracted to the origin position by the magnetic attraction force.

　 Lineup of general typeFBU2-SU series with 200-g load capacity has been added. This series has a stronger movable section to provide wider application cases.

Pressing force profile

Movable shaft

Constant magnetic returning force in the shaft direction

Large

Pre

ssin

g fo

rce

Load capacityLight Heavy

Small

Magnet

Pre

ssin

g fo

rce

Stroke length (mm)

2.0

1.5

1.0

0.5

0 0.5 1 1.5

(N)Fine buffers

Spring buffers

1.0N

0.5N

0.2N

Semiconductor parts, crystal oscillators, IC devices, HDD, clock parts, etc.

Semiconductor substrates, solar cells, etc.

Metal spring buffer

FBU2-SU(General type)

FBU2-7D/8M(Lightweight type)

FBU2-12D/M(Standard type)

The magnetic pressing forces of 0.2 N, 0.5 N, and 1.0 N are selectable depending on the model. These pressing forces are almost constant regardless of the stroke.

The magnetic pressing forces of 0.2 N, 0.5 N, and 1.0 N are selectable depending on the model. These pressing forces are almost constant regardless of the stroke.

Magnetic returning force in the rotating

direction (magnetic prevention of

rotation)

Magnetic returning force in the rotating

direction (magnetic prevention of

rotation)

Outer diameter Bearing accuracy

Pressing force (N) Stroke length (mm) Head piece shape

Page0.2 0.5 1.0 2 6 16 No hole M3 M4

Standard

High-precision type

High-precision type with internal flow path

Standard

High-precision type

High-precision type with internal flow path

S

H

HV

S

H

HV

ø7 h7Lightweight typeFBU2-7

Standard typeFBU2-12

General typeFBU2-SU

M8 × 0.75

ø12 h7

M12 × 1

(Standard type only)-M12 × 1

Tail piece shape

No hole M3 M4 M5M5 M6M6

Compact high-precision fine buffer FBU2 series with stable pressing force, low dust emission, and long lifetime, realized by the employment of a unique buffering-effect magnetic spring that uses magnet attraction force.

FBU2 Series Variations

Rear attachment Side attachment

1

1

7

CKD Green Technology

　 Bracket for vacuum feeding

Attachable brackets are available for the spigot type For the high-precision HV type, vacuum feeding is possible from the bracket, which eliminates the reactive force of tubes providing yet more stable pressing forces.

　 Clean and long lifetime

Dust emission is very small compared to conventional springs because this series has no metal contacts and a very small contacting area of movable sections. Because thrust is provided by magnetic force, it has no fatigue of metal springs, has long lifetime, and provides stable performance.

　 Variety of usages

Variety of usages are possible such as picking and placing parts by vacuum suction, conveying parts, pressing works, and inserting parts.

　 Lineup of high-precision bearing type

A standard type and a high-precision type are available for rod guides. Select a bearing type according to the precision of repeated X-Y-direction returning of the movable shaft. (Only the standard type is available for FBU2-SU.)

　 Can be used for secondary battery manufacturing process

Use of copper materials is restricted as standard in air paths and sliding sections (equivalent to the P4 specification), so this series can be used for a manufacturing process of secondary batteries.

　 Flexible combination of heads and tails

The fine buffer allows flexible combination of head shapes and tail shapes to suit the usage.

● Device conveyance

● Conveyance of DVD and HDD● Flexible suction conveyance of substrates● Suction conveyance of crystal devices● Parts insertion● Pressure test of mobile phone buttons

Head piece

Tail piece

1

Fine buffers

FBU2 SeriesOuter diameter: M8, M12, ø7, ø12Load capacity: 30, 80 g

Load capacity gθ °Z mm

Accuracy of origin return position

Note 4

Maximum torque sustained (Note 2) N•cmBearing clearance mmOperating ambient temperature °CBuffer strokePressing force fluctuation (Note 1)Buffer pressing force N

External view

Outer diameter

Specifications

Descriptions FBU2-8MS

±0.1 or less

0.2 or less5 to 50

0.1 to 0.2

M8 × 0.75

FBU2-12MS

±0.1 or lessNote 3

0.2 or less5 to 50

0.4 to 0.6, 0.9 to 1.1

M12 × 1

2 6 2 6 2 6 2 6 16 2 6 2 6 16

SFBU2-7D

±0.1 or less

0.2 or less5 to 50

H/HV

30 or less

±0.05 or less0.25 or more (reference value)

0.05 or less5 to 40

S

±0.1 or less

0.2 or less5 to 50

0.1 to 0.2

ø7h7

　3 or less ±0.1 or less

±15% or less

H/HV

FBU2-12D

80 or less

±0.05 or less

0.05 or less5 to 40

Note 3

0.4 to 0.6, 0.9 to 1.1

ø12h7

Note 1: This item indicates the fluctuation of the pressing force in the stroke. The pressing force is not proportional to the stroke. Note 2: With a rotation torque on the movable shaft that exceeds the maximum torque sustained, the movable shaft looses synchronism and rotates 180°. * Torque sustained: Force in the θ direction (Figure 1) with which the movable shaft may be misaligned but it will recover the original positionNote 3: For sustained torques of FBU2-12M/12D, see the table on the right. Note 4: For the returning position accuracy, see the figure below (Figure 1). This item indicates the returning accuracy during buffering. Note 5: Contact CKD for any requirement not fulfilled by the specification. Note 6: The load capacity is the maximum load (of a bracket or a suction object) on the head piece.

Values are for an ambient temperature of 23°C.

[Buffer actuation] [Returning]

(Figure 1) Returning accuracy detail

Z

X Y

θ

<FBU2-12M/12D Maximum torque sustained (reference)>

Indicates the torque sustained at the tip.

Pressing force (N) Stroke length (mm)

0.5

1

26162616

Torque sustained (N•cm)

2.5 or over1.2 or over1.2 or over1.2 or over0.5 or over0.5 or over

S/H HV S/H HV

X-Y mm

2

How to orderFBU2 Series

How to order

Symbol Descriptions

B Bearing accuracy

C Pressing force

D Buffer stroke

E Tail piece shape

Model no.

7D8M12D12M M12 × 1, all-screw type

ø12h7, spigot typeM8 × 0.75, all-screw typeø7h7, spigot type

●●

●●

FBU2

-

12M

FBU2

-

12D

Model no.

Outer diameterA

SH

HV (bearing clearance of 0.05 mm or less)High-precision internal flow path typeHigh-precision (bearing clearance of 0.05 mm or less)Standard (bearing clearance of 0.2 mm or less) ●

●●

●●●●●

Bearing accuracyB

020510

0.20.51.0

●●

●●

●●Pressing force (N)C

2616

2616

●●●

●●●

●●

●●

Buffer stroke (mm)D

TBT3T5 M5 female screw, depth 4

M3 female screw, depth 3No hole ●

●●

●●●

●●

●●

Tail piece shapeE

HBH3H5 M5 female screw, depth 4

M3 female screw, depth 3No hole ●

●●

●●●

●●

●●

Head piece shapeFF Head piece

shape

<Example of model number>

Outer diameter ø12h7, spigot typeFBU2-12D-HV-05-6-TB-H5

　Head piece shape : M5 female screw, depth 4　Tail piece shape : No hole　Buffer stroke : 6 mm　Pressing force (N) : 0.5 N　Bearing accuracy : High-precision internal flow path type　Outer diameter : ø12h7, spigot type

Model codes for standalone brackets for spigot types

A

B

C

D

E

F

FBU2

-

8M

FBU2

-

7D

FBU2 S 6 T3 H31012D

7D12D

FBU2- 7D -B1FBU2- 12D -B1

FBU2- 7D -B2FBU2- 12D -B2

Outer diameter

Standalone bracket model codesL-shaped attachment Straight attachment

A

A

Combinations of bearing accuracy and buffer stroke, tail piece shape, and head piece shape

2616TBT3T5HBH3H5

●●●●●●●●●

Bearing accuracyS

●●

●●●●●●

H●●

●

●●

HVB

Buffer strokeD

Tail piece shapeE

Head piece shapeF

Outer diameter

3

FBU2 Series

Internal structure and parts list

6

5

4321

No.

Head piece

Bearing

Ring magnet

Fixed shaft

Hexagon socket screw

Tail piece

Parts name

Aluminum alloy

Polyester resin

Fluorine resin

Plastic magnet

Stainless steel

Stainless steel

Aluminum alloy

Material

Electroless nickeling

Internal flow path type

Standard bearing type


Remarks

121110987

No.

Hexagon nut

O ring

Guide tube

Ring magnet

Tail joint

O ring

Parts name

Carbon steel

Nitrile rubber

Stainless steel

Plastic magnet

Aluminum alloy

Nitrile rubber

Material

Electroless nickeling (all-screw type only)

Internal flow path type

Trivalent chromate treatment

Remarks

● FBU2-*-S (standard) -*-H (high-precision)

● FBU2-*-HV (high-precision internal flow path type)

Weight

Note 1: Total weight of movable section = Movable section + Tail piece + Head piece,Product weight = Fixed section + Movable section + Tail piece + Head piece

Note 2: A bracket includes a plug and a fixing screw.

● FBU2-8M /7D (Unit: g)

Model no.

FBU2-8M-S-02-2FBU2-8M-S-02-6FBU2-7D-S-02-2FBU2-7D-S-02-6FBU2-7D-H-02-2FBU2-7D-H-02-6FBU2-7D-HV-02-2FBU2-7D-HV-02-6

0.3

H3

0.4

HB

0.7

T3

0.7

TB

-

13.1

B2

-

8.9

B11.21.31.21.3

1.0

Movable section (Note 1)

5.5

2.2

2.1

Fixed section

Head piece (movable section)Tail piece (movable section) Bracket (Note 2)

Note 1: Total weight of movable section = Movable section + Tail piece + Head piece, Product weight = Fixed section + Movable section + Tail piece + Head piece Note 2: A bracket includes a plug and a fixing screw.

● FBU2-12M/12D (Unit: g)

Model no.

FBU2-12M-S-05/10-2FBU2-12M-S-05/10-6FBU2-12M-S-05/10-16FBU2-12D-S-05/10-2FBU2-12D-S-05/10-6FBU2-12D-S-05/10-16FBU2-12D-H-05/10-2FBU2-12D-H-05/10-6FBU2-12D-HV-05/10-2FBU2-12D-HV-05/10-6

1.2

H3

1.2

HB

2.2

T3

1.1

H5

2.0

T5

2.2

TB

-

28.6

B2

-

18.3

B12.42.53.92.42.53.92.42.52.42.5

Movable section (Note 1)

10.2

14.0

8.3

12.9

8.1

7.1

Fixed section

Head piece (movable section)Tail piece (movable section) Bracket (Note 2)

Bracket material

FBU2- 7D -B1FBU2- 7D -B2FBU2- 12D -B1FBU2- 12D -B2

Aluminum alloy

Model no. Material


Remarks

1

7 8 9 10 12

2 3 4 5 6 1

7 8 9 1011

2 3 4 5 6

Glue attachment

Glue attachment

Glue attachment

Glue attachment

4

DimensionsFBU2 Series

Note: Values in [ ] are dimensions for 6 strokes.

Dimensions (FBU2-7D, FBU2-8M)

● FBU2-7D-S● FBU2-7D-H


● FBU2-8M-S

● FBU2-7D-HV

Vacuum hole 2-ø1

6(Width across

flats)

6(Width across flats)

(10.

5)19

35 [39]

Stro

ke le

ngth

2, 6

O ring

ø7h7

2.1

3.5

8

(10.

5)19

35 [39]

Stro

ke le

ngth

2, 6

ø7h7

2.1

8

Ｍ8 × 0.75

(12.7)

Stro

ke le

ngth

2, 6

35

3.5

3.5

3.5

[39]

19(1

0.5)

3

ø6.6

6(Width across

flats)


3.5

ø6.6

6(Width across

flats)

6(Width across

flats)

3.5

Hexagon side distance: 11

ø6.8

ø6.8

ø6.8

ø6.8 ø6.8

ø6.8

Note: Values in [ ] are dimensions for 6 strokes. Note: O-rings are attached to the body before being

shipped. Make sure that lubricant does not adhere to guide tubes and bearings. It may affect the functionality.

Note: The indicated dimensions are the same regardless of the shapes of the head piece and the tail piece.

5

FBU2 Series


Dimensions (FBU2-12M, FBU2-12D)

● FBU2-12M-S　Stroke length: 2, 6 　Stroke length: 16


Note: Values in [ ] are dimensions for 6 strokes. Note: O-rings are attached to the body before being shipped. Make sure that lubricant does not adhere to guide tubes and bearings. It may affect the functionality. Note: The indicated dimensions are the same regardless of the shapes of the head piece and the tail piece.

● FBU2-12D-S/H　Stroke length: 2, 6

● FBU2-12D-HV

　Stroke length: 16

Vacuum hole 2-ø1.2

40 [44]

21

(12)

(12)

21 4

(16.2)

Ｍ12 × 1Hexagon side distance: 14

2.6

8

64

Stro

ke le

ngth

O ring

ø12h7

2.6

8

31

Stro

ke le

ngth

2, 6

5

55

5

540 [4

4]

Stro

ke le

ngth

2, 6

(12)

40 [44]

21

ø12h7

2.6

8

Stro

ke le

ngth

2, 6

(12)

4

(16.2)

ø12h7

Ｍ12 × 1

14

(12)

64

Stro

ke le

ngth

1616

31

10(Width across

flats)

10(Width across

flats)

5

10(Width across

flats)


5

10(Width across

flats)

10(Width across

flats)

5ø11

10(Width across

flats)

10(Width across

flats)

5

ø11

10(Width across

flats)


ø11

5

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

ø10.7

6

DimensionsFBU2 Series

Bracket dimensions

● FBU2-7D-B1(Attachments: FPL-M3 1 pcs, fixing screw M2 × 2 1 pcs)

● FBU2-7D-B2(Attachments: FPL-M3 1 pcs, fixing screw M2 × 2 1 pcs)

● FBU2-12D-B1(Attachments: FPL-M5 1 pcs, fixing screw M2.5 × 2.5 1 pcs)

● FBU2-12D-B2(Attachments: FPL-M5 1 pcs, fixing screw M2.5 × 2.5 1 pcs)

2-Ｍ3(Used for vacuuming)

2-Ｍ2(For fixing FBU2)

indicates the reference surface for FBU2 installation.

2-ø2.7

17.5

3 12

22

4.5

6 ±

0.03

14

8 ± 0.03

3

16

311

.5


18.5

3.5 18

32

2-Ｍ2.5(For fixing FBU2)

2-ø3.4

8 ±

0.03

20

12 ± 0.032-C

6

2-C4

24

410

.5

3

5

5

9 ± 0.03

2-Ｍ2(For fixing FBU2)


13

26

8.5

4

6

64.

5

2-ø2.714

18

2-C4

13 ± 0.03

2-C6

19

20

26

4

9.5

2-ø3.4

28

2-Ｍ2.5(For fixing FBU2)


5

56.

5

17

8 ±

0.03

12 ±

0.0

3

25

ø12+0.03+0.01

ø7+0.03+0.01




Note: When using for vacuuming, put plugs (FPL-M3, M5) on unused screws (M3, M5).

6.5

ø7+0.03+0.01

ø12+0.03+0.01

7

D Head shape

Fine buffers

FBU2-SU SeriesOuter diameter: M12, all-screw typeLoad capacity: 200 g

Specifications　Descriptions FBU2-SUOuter diameter M12 × 1

Buffer pressing force N 0.4 to 0.6, 0.9 to 1.1

Pressing force fluctuation (Note 1) ±15% or less

Buffer stroke mm 2, 6, 16

Operating ambient temperature °C 5 to 50

Bearing clearance mm 0.2 or less

Maximum torque sustained N•cm (Note 2)Accuracy of origin return position X-Y mm ±0.1 or less

(Note 3) Z mm ±0.1 or less

θ ° 3 or less

Load capacity g 200 or less

Note 1: This item indicates the fluctuation of the pressing force in the stroke. The pressing force is not proportional to the stroke.Note 2: With a rotation torque on the movable shaft that exceeds the maximum torque sustained, the movable shaft looses synchronism and rotates 180°. * Torque sustained: Force in the θ direction (Figure 1) with which the movable shaft may be misaligned but it will recover the original positionNote 3: See the figure below for the accuracy of returning position. This item indicates the returning accuracy during buffering.Note 4: Contact CKD for any requirement not fulfilled by the specification.

[Buffer actuation] [Returning]

θ

Z

X Y

<FBU2-SU Maximum torque sustained (reference)>

Indicates the torque sustained at the tip.

Pressing force (N) Stroke length (mm)

0.5

1

26162616

Torque sustained (N•m)

2.5 or over1.2 or over1.2 or over1.2 or over0.5 or over0.5 or over

<Example of model number>FBU2-SU-05-16-T5-H3A Pressing force (N) : 0.5 NB Buffer stroke (mm) : 16 mmC Tail shape : M5 female screw, depth 4D Head shape : M3 female screw, depth 3

How to order

B Buffer stroke

A Pressing force

FBU2 SU 6 T3 H305Symbol Descriptions

A Pressing force (N)05 0.510 1.0

B Buffer stroke (mm)2 26 6

16 16

C Tail shape

Model no.

C Tail shapeTB No holeT3 M3 female screw, depth 3T4 M4 female screw, depth 4T5 M5 female screw, depth 4T6 M6 female screw, depth 5

D Head shapeHB No holeH3 M3 female screw, depth 3H4 M4 female screw, depth 4H5 M5 female screw, depth 4H6 M6 female screw, depth 5

8

Internal structure and parts list

(Unit: g)

Model no. Fixed section

Movable section

FBU2-SU-05/10-2 19.1 4.2FBU2-SU-05/10-6 19.1 4.5FBU2-SU-05/10-16 25.2 7.9

Dimensions● FBU2-SU-05/10-6

4321

No.

Ring magnet

Hexagon nut

Fixed shaft

Adapter (tail)

Parts name

Plastic magnet

Steel

Stainless steel

Aluminum alloy

Material

Zinc plating, trivalent chromate finish


Remarks

8765

No.

Bearing

Rod

Adapter (head)

Ring magnet

Parts name

Polyphenylene sulfide

Stainless steel

Aluminum alloy

Plastic magnet

Material

With a filler


Remarks

78

1 62 3 4 5 Screw tighteningScrew tightening

Note 1: Total weight of movable section = Movable section + Adapter (tail) + Adapter (head), Product weight = Fixed section + Movable section + Adapter (tail) + Adapter (head)

● FBU2-SU-05/10-16


　　8(Width across flats)

ø10.7

5

M12 × 1.0

Stro

ke le

ngth

2, 6

28(1

5)

60 [64]

15


(19.6)



M12 × 1.0

5

Stro

ke le

ngth

1648

(15)

15

94

ø10.7

(19.6)

Weight(Unit: g)

AdapterT/H B T/H 3 T/H 4 T/H 5 T/H 6

3.4 3.3 3.2 3.1 2.9

Internal structure and parts listDimensions

FBU2-SU Series

Note: The widths across flats of the adapter (tail) and adapter (head) can be at any position.

9

FBU2 Series

1 Leakage magnetic flux

[Measurement instruments]Magnetic flux meterprobe

[Results]- Magnetic flux densities in different positions

<Before buffer actuation>

<After buffer actuation>

Maximum

Maximum This is a measurement result in an environment with a magnetic flux density of 0.03 to 0.07 mT.

① FBU2-7D-S-02-6② FBU2-12D-S-05-6

…① FBU2-7D-S-02-6…② FBU2-12D-S-05-6

Unit: mT (1 G = 0.1 mT)

Measurement direction of magnetic flux

ProbeMagnetic flux meter

…① FBU2-7D-S-02-6…② FBU2-12D-S-05-6

[Targets]① FBU2-7D-S-02-6② FBU2-12D-S-05-6③ FBU2-12D-S-05-16

[Measurement method]① Put a probe on each measurement point of FBU2. ② Rotate FBU2 around the center axis to measure the maximum magnetic flux density.

0.050.09

0.070.05

0.130.20

0.790.34

0.620.33

0.651.19

7.379.59

4.461.59

17.0516.09

12.595.34

17.1018.64

23.7057.60

Technical data (reference)

10

Technical data (reference)FBU2 Series



Maximum

Maximum

Maximum

This is a measurement result in an environment with a magnetic flux density of 0.03 to 0.07 mT.

This is a measurement result in an environment with a magnetic flux density of 0.03 to 0.07 mT.

③ FBU2-12D-S-05-16



④ FBU2-SU-05-6

Unit: mT (1 G = 0.1 mT)

Unit: mT (1 G = 0.1 mT)

0.26 0.22

0.060.1016.34 0.202.87

0.35

0.42

0.13

0.29

0.05

0.20 0.191.79 1.7119.76

19.88

16.10

148.45

153.1

149.0

15.59

0.03

0.05

0.07

0.07

11

FBU2 Series

Technical data

2 Dust emission

[Measurement instruments]

[Test circuit]

Air intake : 28.3 ℓ/minSmallest measurable particle diameter : 0.1 μmParticle counter : Laser dust monitor

[Measurement method]① Put a test sample in a static-free chamber (stainless steel). ② Provide a clear air flow (through a 0.01 μm filter) with a flow intensity as much as the particle counter take in (23.8 ℓ/min). ③ Confirm that the particle counter reading is 0 when the test sample is not operating. ④ Start the test sample operation, and measure the particle count during operation.

[Measurement conditions]

FBU2-SU-05-16- Sample : FBU2-12D-S-10-16- Measurement period : 1 minute, during which 1000 strokes are made- Stroke condition : No load, placed parallel to the purge flow direction- FBU2 stroke speed : 50 mm/s For purge : "Grade 1.2.1" + 0.01-μm gas filter- Air quality

[Measurement result]

* Use a sealed chamber so that particles do not enter the chamber except for those from the test sample. * Confirm in advance that the dust emission is 0 coming from the actuator (vacuum cleaning type) to be used for clean instruments.

Dust emission in 5000 strokesFBU2-12D-S-10-16FBU2-SU-05-16

FBU2-12D-S-10-16 FBU2-SU-05-16Stoke (times)

10

0 1000 2000 3000 4000 5000

8

6

4

2

0

Dus

t em

issi

on (p

cs)

Air purge

0.01 μm filter

Actuator for clean instruments FBU2

Chamber

28.3 ℓ/min

Pressure relief portFrom vacuum cleaning port

Particle counter

Number of strokes0

Total dust emission2.0 μm or larger1.0 μm or larger0.5 μm or larger0.3 μm or larger0.2 μm or larger0.1 μm or larger 0

000000

5000005

0000000

0000000

0110002

2010003

1000 2000 3000 4000 5000Particle diameterNumber of strokes

0

Total dust emission2.0 μm or larger1.0 μm or larger0.5 μm or larger0.3 μm or larger0.2 μm or larger0.1 μm or larger 6

000006

6000006

3000003

7000007

8000008

8000008

1000 2000 3000 4000 5000Particle diameter

12

-10 -8 -6 -4 -2 0 2 4 6 8 10

10

8

6

4

2

0

-2

-4

-6

-8

-10

3 Stop position accuracy (X-Y)

[Measurement instruments] [Measurement overview] [Measurement method]Laser position sensor

[Measurement result]Repeated stop positions (X-Y)

* The above data are actual measurements.

FBU2-7D-S-02-6 (Standard bearing)Y-direction (μm)

FBU2-7D-HV-02-6 (High-precision bearing)

FBU2-12D-S-05-16 (Standard bearing)

FBU2-12D-HV-05-6 (High-precision bearing)

FBU2-SU-05-16

[Targets]FBU2-7D-S-02-6FBU2-7D-HV-02-6FBU2-12D-S-05-16FBU2-12D-HV-05-6

[Measurement method]

Piping : NoneDegree of vacuum : Not vacuumInstallation orientation : DownwardLoad : None

Buffer stroke(full stroke)

y

x

Returned(origin position)

Laser position sensor

X Y

Measure the accuracy of X and Y positions when the test sample is given a full stroke manually.

Technical dataFBU2 Series

13

FBU2 Series

List of suction pads

■ Pad characteristics

Pad material

Descriptions

Nitrile rubber Silicon rubberUrethane

rubberFluoro rubber

Fluorosilicone rubber

Butadiene rubber(Low resistance

type)

Chloroprene rubber

(Sponge type)

NBR Si U FKM FSi BR CRPad color Black*2 White Blue Gray Light brown Black Black

Mat

eria

l pro

perti

es

Surface rigidness 40 to 60 40 to 50 60 60 40 60 –Maximum working temperature 110 180 60 230 180 100 80Minimum working temperature -30 -40 -20 -10 -50 -50 -45Weathering performance △ ◎ ○ ○ ○ ○ ○Ozone resistance △ ◎ ◎ ◎ ◎ × ○Acid resistance △ ○ × ◎ ○ △ △Alkali resistance ○ ◎ × × ◎ ○ ◎Oil resistance

(Gasoline, gas oil) ◎ △ ◎ ◎ △ × ×(Benzene, toluene) △ △ △ ◎ △ × △

Symbols: ◎ : Best suited, ○ : Suited, △ : Good, ×: Not applicable*1: The surface resistivity of the low resistance type pads is 200 Ω or less.*2: The color of pads conforming to Food Sanitation Act is gray.Note 1: The material properties are indicated for synthetic rubbers generally used for pads.Note 2: The working temperature limits should be experienced only for a very short time. Care should be taken if the condition lasts for a certain time.

■ List of suction pads

Pad shape ApplicationsPad size Pad material Drop

preventionø0.7 ø1 ø1.5 ø2 ø3 ø4 ø6 ø8 ø10 N S U F SE E G FSStandard type smallVSP-ME*RM Suited to small works such

as semiconductor components

● ● ● ● ● ● ● ● ● ● ● ● ● ●

Standardtype generalVSP-ME*RVSP-E*R*

Suited to thick and flat works ● ● ● ● ● ● ● ● ● ● ● ● ● ●

Thin work typeVSP-ME*PVSP-E*P*

Suited for the conveyance of thin works such as copying paper and plastic sheets

● ● ● ●

Sponge typeVSPG-*S*A Suited to works with uneven

surfaces such as exterior wall materials

● Chloroprene only

Pad shape ApplicationsPad size Pad material Drop

prevention4 × 10 4 × 20 5 × 10 6 × 10 N S U F SE E G FSOval typeVSPG-*E*A Suited to works with a limited

suction area such as IC substrates

● ● ● ● ● ● ●

Pad materialN Nitrile rubberS Silicon rubberU Urethane rubberF Fluoro rubber

SE Anti-static silicon rubberE Anti-static butadiene rubber (low resistance type)G NBR conforming to Food Sanitation ActFS Fluorosilicone rubber

14

List of suction padsFBU2 Series

■ Matching table

Model no. Pad diameter

FBU2-7D FBU2-8M FBU2-12D FBU2-12M FBU2-SUM3 female screw M3 female screw M3 female screw M5 female screw M3 female screw M5 female screw M3 female screw M5 female screw M6 female screw

Sm

all

VSP-ME0.7RM*-M3 ø0.7 ● ● ● ● ●VSP-ME1RM*-M3 ø1 ● ● ● ● ●VSP-ME1.5RM*-M3 ø1.5 ● ● ● ● ●VSP-ME2RM*-M3 ø2 ● ● ● ● ●VSP-ME3RM*-M3 ø3 ● ● ● ● ●VSP-ME4RM*-M3 ø4 ● ● ● ● ●

Gen

eral

VSP-ME6R*-M5 ø6 ● ● ●VSP-ME8R*-M5 ø8 ● ● ●VSP-E1R* ø1 ● ● ● ● ●VSP-E2R* ø2 ● ● ● ● ●VSP-E3R* ø3 ● ● ● ● ●VSP-E4R* ø4 ● ● ● ● ●VSP-E6R* ø6 ● ● ●VSP-E8R* ø8 ● ● ●

Thin

VSP-ME8P-M5 ø8 ● ● ●VSP-ME10P-M5 ø10 ● ● ●VSP-E8P* ø8 ● ● ●VSP-E10P* ø10 ● ● ●

Spo

nge

VSPG-10SA ø10 ●

Ova

l

VSPG-4*10E*A 4 × 10 ●VSPG-4*20E*A 4 × 20 ●VSPG-5*10E*A 5 × 10 ●VSPG-6*10E*A 6 × 10 ●

Note: Use them for works that do not exceed the conveyable weight of FBU2.Using them exceeding the conveyable weight may result in a damaged product.

■ The theoretical lifting force is calculated by the pad area and the vacuum pressure of the pad.

<kPa, N>

W＝ C × P101 × 10.13 × f

W: Theoretical lifting force (N) C: Suction area (cm2) P: Vacuum pressure (-kPa) f: Safety factor*1: For sponge type pads, the calculation is made with the inner diameter of the sponge pad.

See another table.*2: Be noted that the actual lifting force of the bellows type (multistage bellows) and soft type (soft

bellows) may be different from the theoretical values due to their pad properties.*3: The theoretical lifting forces are values for still conditions. So apply safety factors of 1/4

and 1/8 for horizontal and vertical directions, respectively. In the case of conveyance, the conveyance acceleration should also be considered. (See the figure on the right.)

<mmHg, kg>

W＝ C × P760 × 1.0332 × f

W: Theoretical lifting force (kg)C: Suction area (cm2)P: Vacuum pressure (-mmHg)f: Safety factor

Horizontal attachment

Vertical attachment

How to select a suction pad

15

Safety PrecautionsAlways read this section before use.

When designing and manufacturing equipment that employs CKD products, you are responsible for checking that the equipment's mechanism, pneumatic control circuit, hydraulic control circuit, and the electrical controls that control these parts can ensure safety. You are also responsible for manufacturing safe equipment.It is important to select, use, handle, and maintain the product appropriately to ensure that the CKD product is used safely.Observe warnings and precautions to ensure device safety.Check that device safety is ensured, and manufacture a safe device.

1 This product was designed and manufactured for use as equipment and parts for general industrial machinery.It must be handled by an operator having sufficient knowledge and experience in handling.

2 Use this product in accordance with specifications.This product must be used within its stated specifications. Do not attempt to modify or additionally machine the product.This product is intended for use as a general-purpose industrial device or part. It is not intended for use outdoors or for use under the following conditions or environment.(If you consult CKD upon adoption and consent to CKD product specification, it will be applicable; however, safeguards should be adopted that will circumvent dangers in the event of failure.) ❶ Usage with or within components or applications that come into direct contact with nuclear energy, railroad,

aviation, ships, vehicles, medical devices, beverage, and food. Usage in applications where safety is required such as amusement equipment, emergency shutoff circuit, press machine, brake circuit, and safeguards.❷ Use for applications where life or assets could be adversely affected, and special safety measures are required.

3 Observe corporate standards and regulations, etc., related to the safety of device design and control, etc.ISO 4414, JIS B 8370 (pneumatic system rules)JFPS 2008 (Principles for pneumatic cylinder selection and use)Including High Pressure Gas Maintenance Law, Occupational Safety and Sanitation Laws, other safety rules, body standards and regulations, etc.

4 Do not handle, pipe, or remove devices before confirming safety.❶ Inspect and service the machine and devices after confirming safety of the entire system related to this product.❷ Note that there may be hot or charged sections even after operation is stopped.❸ When inspecting or servicing the device, turn off the energy source (air supply or water supply), and turn off power to the

facility. Discharge any compressed air from the system, and pay attention to possible water leakage and leakage of electricity.❹ When starting or restarting a machine or device that incorporates pneumatic components, make sure that the

system safety, such as pop-out prevention measures, is secured.

5 Observe warnings and cautions on the pages below to prevent accidents.

Warning

■ The safety cautions are ranked as "DANGER", "WARNING" and "CAUTION" in this section.

DANGER: When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries, or when there is a high degree of emergency to a warning.

WARNING:When a dangerous situation may occur if handling is mistaken leading to fatal or serious injuries.

CAUTION: When a dangerous situation may occur if handling is mistaken leading to minor injuries or physical damage.

Items listed under "caution" can also possibly lead to serious results depending on the situation.Important details are listed for each; please make sure to follow them.

Precautions when ordering

1 Warranty period”Warranty Period" is one (1) year from the first delivery to the customer.

2 Scope of warrantyIn case any defect attributable to CKD is found during the term of warrantyNote that the following faults are excluded from the warranty term:(1) Product abuse/misuse contrary to conditions/environment recommended in its catalogs/specifications(2) Failure caused by other than the delivered product(3) Use other than original design purposes(4) Third-party repair/modification(5) Faults caused by reason that is unforeseeable with technology put into practical use at the time of delivery(6) Failure attributable to force majeureThe warranty mentioned here covers the discrete delivered product. Only the scope of warranty shall not cover losses induced by the failure of the delivered product.

3 Compatibility confirmationIn no event shall CKD be liable for merchantability or fitness for a particular purpose, notwithstanding any disclosure to CKD of the use to which the product is to be put.

■The operating ambient temperature varies depending on the type of the bearing. Use the instrument with an ambient temperature of the specification range.- Standard bearing type (S): 5 to 50°C- High-precision bearing (H/HV): 5 to 40°CNote: FBU2-SU is a standard bearing type.

■ This product has built-in magnets. Do not use it in a place having the chips of

magnetic substance or dust. Doing so may result in damage or malfunction.

■To fix the product, use nuts (all-screw type: 8M, 12M, or SU) or hexagon socket screws (spigot type: 7D or 12D). When you use fixing screws, use the groove of the fixed shaft.

■ Install the product vertically.A lateral load or moment on the movable shaft affects the product properties and the lifetime.

Design & Selection

Pneumatic components

Safety PrecautionsBe sure to read the instructions before use.For general precautions, see Overall Catalog of Air Pressure, Vacuum, and Auxiliary Instruments (No. CB-024S).

Warning

Installation and adjustment

■ Before operation, check the product for any slackness on the load or joint and for any abnormality.

■ Confirm that the product works properly before you start to use it.

After installation, repair, or modification, conduct a proper functional test to ensure correct installation.

■ Confirm that there is no mechanical interference or abnormality in system operation.

■ Do not give a jolt to the product by, for example, dropping it. A jolt may cause damage on the product.

■ After installation and piping, confirm that the system works smoothly before you start using it. Piping with hard tubes or a small bending radius may cause malfunction and failure.

Warning

■ When you use the product for vacuuming, the tension from the tube adds to the pressing force. So use a tube with a low piping tension.

Recommend tube: UP series(Anti-static tube, air fiber)

■ Make sure that the load (of a bracket or a suction object) on the movable shaft does not exceed the load capacity.

- FBU2-7D/8M: 30 g or less- FBU2-12D/12M: 80 g or less- FBU2-SU: 200 g or less

■ Make sure to keep the acceleration of work conveyance within 4 G.

Too intensive acceleration may damage the product.

■ If the product is rotated during use, be careful of the maximum torque sustainable by the magnet.

A force exceeding the maximum sustainable torque may cause the product to loose synchronism and to rotate 180°.

■ The high-precision internal flow path type (HV) has leakage. For better pressing force stability and the accuracy the

returning position, this type uses a gap sealing structure. This allows vacuum leakage to occur. (For an initial pressure of -80 kPa, the pressure fall is 10 kPa or less.)

Caution

NG NGOK

■Please be noted that the product may be damaged by a rotating load generated by the tension of the tube at the time of sideways removal.

　　■The following ways of use put a moment on the

movable shaft, causing malfunction or failure, even if the load does not exceed the load capacity.

1. Mounting a large bracket other than a suction pad on the head piece

2. Mounting a large or wrong-shaped suction pad3. Putting an uneven load on the movable shaft4. Holding the same bracket or work by multiple

FBU2 units

Contact CKD when you use the product in a way listed above.


16


Pneumatic components

Safety PrecautionsBe sure to read the instructions before use.For general precautions, see Overall Catalog of Air Pressure, Vacuum, and Auxiliary Instruments (No. CB-024S).

■ Do not unpack the product until just before piping. Too early unpacking may allow foreign objects to

come inside through the piping port and the gap between shafts, causing failure and malfunction.

■Before piping, do not fail to make air brushing to remove foreign objects and chips in the pipes.

■ Join pipes with proper tightening torques.

Caution■ Do not put lubricant on the guide tube or the rod.

Doing so may result in functional fluctuations.

■ Do not put a scratch or a dent on the guide tube by striking it.

Handle the guide tube carefully because it is made of thin steel, and therefore, easy to deform.

A scratch or a dent on the guide tube may damage the bearing, causing failure or malfunction.

(except for FBU2-SU)

■ Be sure to read the instruction manual. Understand the instruction manual before you use

the product.

■ To fix an outer diameter spigot type (7D and 12D), use a hexagon socket screw and tighten it with a proper torque.

Too intensive torque may damage the product body or the bearing, causing failure or malfunction.

M3M4

0.3 to 0.60.9 to 1.1

M5 1.0 to 1.5M6 2 to 2.7

Tightening torque (N•m)Joining screw

FBU2-7FBU2-12

M2 Hexagon socket screwM2.5 Hexagon socket screw

Fixing screw size0.10 to 0.120.18 to 0.20

Tightening torque (N•m)Product code

During use and maintenance

■ Conduct maintenance carefully according to the instruction manual.

Wrong handling may cause damage or malfunction of the instrument or the equipment.

Warning■ For proper maintenance, conduct daily and

periodical inspections according to a plan. Improper maintenance may significantly deteriorates

the product functionality, causing shorter lifetime, damage, malfunction, and other problems.

■ Do not use the product in case of increasing leakage or an improper behavior of the product.

After installation, repair, or modification, conduct a proper functional test to ensure correct installation.

Caution

When tightening, be sure to hold the hexagon faces at the tightening position. Holding the hexagon faces at other side may damage the product from a structural reason.

MEMO

17

MEMO

18

MEMO

19

20

Air fiber® for handy joints

Vacuum system device SELVACS

Related products

Catalog No.CC-784

Catalog No.CC-796

Air fiber UP/EH■ Ultra-thin air fiber (outer diameter ø1.8 × inner diameter ø1.2) saves energy and space.■ After piping, the tube repulsion force is equivalent to that of lead wires, so that

there is very small impact on the equipment precision. ■ Series of clean models using high-anticorrosion materials (Tube: polyolefin, joint:

stainless steel). ■ The materials do not include substances that adversely affect the global

environment. ■ Flexible piping■ Prevention of adherence of static and dust

Handy joint PG/CG for air fibers■ Mounting and dismounting just by inserting and pulling off the tube while pressing

the push ring of the joint Polypropylene (PP) resin is used as standard for higher corrosion resistance.

■ Compact design The compact design of the devices saves the installation space. ■ Extensive models and options This series has extensive models and options to provide application to a wide range of

fields and uses. ■ Unitization and modularization In the pursuit of further compactness and handiness, the ejector system and the vacuum

pump system - the core of vacuum systems - are unitized and modularized.

Ejector system and vacuum pump systemVacuum ejectors and vacuum units, which represent the core of vacuum systems. This series features various standalone types and unit types that combine the different related devices.

Sticking padAttachment that directly sticks to works. Models with various materials, shapes, and pad diameters are available to suit the size, weight, and profile of the target work.

Devices for vacuumVarious related devices are available for different uses of vacuum systems, such as vacuum destruction valves, pressure switches for vacuum, and filters for vacuum.

Related devicesRelated devices are available that suit more sophisticated vacuum systems, such as filters for vacuum, vacuum regulators, quick valves, precision suction plates, and buffer units.

( 器 ) 世界カ (15.04.03)A-38.ai

TAIWAN CKD CORPORATION

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CKD CZECH OFFICE CKD SINGAPORE PTE. LTD.CKD CORPORATION BRANCH OFFICE

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●Specifications are subject to change without notice.

The goods and their replicas, or the technology and software in this catalog are subject to complementary export regulations by Foreign Exchange and Foreign Trade Law of Japan.If the goods and their replicas, or the technology and software in this catalog are to be exported, laws require the exporter to make sure they will never be used for the development or the manufacture of weapons for mass destruction.

2016.03CKD Corporation 2015 All copy rights reserved.

Website http://www.ckd.co.jp/

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Documents

Constant pressing force is realized by the magnetic spring ... · Fine Buffer FBU2 Series TENSION CONTROLLING BUFFER FBU2 SERIES Constant pressing force is realized by the magnetic