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Coherence in Superconducting Materials for
Quantum ComputingDavid P. Pappas
Jeffrey S. Kline, Fabio da Silva, David WisbeyNational Institute of Standards & Technology,
Electronics & Electrical Engineering Laboratory, Boulder, CO
Collaborators
Will Oliver, Paul Welander – MIT/LL
Ray Simmonds, Kat Cicak, Josh Strong NIST, Boulder
Matthias Steffen, IBM Watson
Kevin Osborn, LPS, MD
John Martinis, Haohua Wang, UCSB
Rob McDermott, U of W
Sponsors
The quantum computing challenge
QubitPrepare
Measure
QubitPrepare
Measure
QubitPrepare
Measure
Implementations
PhotonsIon trapsNeutral atomsNMR~~~~~~~~~~~~~~
~~~~~~~~~~~~~~Spins in semiconductorsQuantum dots~~~~~~~~~~~~~~
Superconducting:~~~~~~~~~~~~~~~ChargeFluxPhase
Isolation Coupling
Decoherence:
external – radiation, heat, acoustic…internal – materials, crosstalk…
interact
interact
Superconducting qubit measurement setup
• Ante
• Dilution Refrigerator
• Low temperature, < 50 mK
• RF measurement
• Low power ~ 1 photon of energy
in cavity
• Improves coherence
• Removes quasiparticles in
superconductor
• Reduces thermal radiation
• Hurts coherence:
• Low-energy, two-level
excitations in amorphous
materials
The Josephson Junction
0
ie0
1.7 nm
• Building block of superconducting quantum bits (qubit)• Josephson relations (’62, ‘73)
Al
Al
amorphous AlOX
• Not ohmic = > I periodic in d• Voltage only when phase is changing
• System is nonlinear for high I
e2
V
)sin(II 0
IU cos
TEM photo
Types of qubits
“Charge”
“Flux”
“Phase”
You & Nori, Physics Today, November (2005)
Logic
Non-linear oscillatorExcited |1>
vsGround state |0>
IslandCharged
vs.Not charged
Current circulationLeft vs
Right
Anatomy of a conventional superconducting circuitMaterials perspective
Tunnel barrier
Wiring
Insulator
Substrate
Material Preparation method
Tunnel Barrier AlOX Thermal
Wiring Nb or Al Sputtered
Insulator SiOX CVD
Substrate Si/SiOX Thermal
Traditional
Conventional materials are usedfor a lot of really good reasons…
• Si substrate with thermal amorphous a-SiOX on top
– Smooth, standard lithography, inexpensive
• a-SiOX insulators – CVD
– Smooth (no pinholes), low T, easy
• a-AlOX tunnel barrier – thermal or plasma oxidation
– Smooth, no pinholes, low T, easy, self-limiting
• Nb or Al wiring – sputter deposit, polycrystalline
– Low temperature, smooth, relatively high TC
Need strong motivations for change …
8
Short lifetimes of quantum information in solid state superconducting qubits
• Relatively short lifetimes and operation cycles
• Need lifetime/gate operation time > 1000
0.5
0.25
00 100 200
T1 = 23 ns
Pro
b. |1
> s
tate
Meas. delay (ns)
0
1
Lifetime
“Rabi” oscillation
Outline
• Electrical model of a phase qubit• Two Level Systems (TLS) as loss mechanism
– substrate & insulators a-SiOX
– tunnel barrier a-AlOX
• Test structures for materials analysis• New directions in materials
– Improved substrates a-Si & removal– Crystalline barriers Al2O3
• Recent progress
LCR electrical model for phase qubit
=
CJ~1-100 x10-12LJ~sinf
JJ CL1
0
Inte
nsi
ty
JCVG )(T :state 1 of Lifetime 1
G(V)
• Quality factor – Energy stored/Energy lost/cycle
• Q = = w0/Dw
T1 = Q/w0
• Delectric loss tangent:
• tand = Im(e)/Re(e)
= 1/Q
Rjunction – non-linear QP tunneling - ?
Rdielectric – bound dipole relaxation ~ ?
Junction & insulators
What can we easily measure & optimize?
frequency
8GHz @ s 125~T ) tan( ,10 ~ Q :Goal 16
Loss in amorphous materials (SiOX-OH-)
• Low energy displacements of dipoles, saturate at high T, P• Lose energy through phonon creation
– tan = d 3x10-3, Q ~333, T1~40 ns
• Approaches: 1) Reduce or eliminate dielectrics
2) Optimize mtls. – e.g SiN, a-Si…
Schickfuss & Hunklinger, (1974)
E d
++++ ++++
_ _ _ _ _ _ _ _
Minimize & optimize dielectric - qubit Rabi oscillations
Rabi oscillations > 600 ns !!
Sapphire substrate + SiN insulator:
Kevin Osborn Group
SiNX pillar from high-stress film
Al film
SiNX
200 nm
Optimized SiNx for coherent quantum circuits
Qi=25,000
Qi=1,400
Loss Tangent for SiNx films
The loss tangent is sensitive to PECVD growth!
smooth etch profile from HDP CVD filmprecursor ratio: N2/SiH4 = 1.8x-ray reveals polycrystalline orderstress = 600 MPa compressiveTgrowth = 300 C
other labs:NIST,UCSB
Optimize dielectrics with simple L-C circuits
L
C
LC – parallel plate C CPW
Material Q=1/tand
Si(111) 200,000
Sapphire – Al2O3 160,000
a-Si:H 45,000
a-SiN 10,000
a-SiOX 3,300
sT HSia 2.1:1
O’Connell, APL (2008)
Predicts:
Substrate
insulator
Other approach – remove dielectricsSimmonds, Strong, Cicak et. al, NIST Boulder (2008)
• Vacuum gap capacitor with an inductor
Q
Before dielectric removedSiN, 100 nm x 8000mm2
600
After dielectric is removed 40,000
=> Flexible circuit - allows us to test the loss in a junction under identical conditions
Add a 1.5 nm, 10 mm2 a-AlOX JJ to the circuit
Q
Before dielectric removedSiN 100 nm x 8000mm2
600
After dielectric is removed 40,000
With Josephson Junctiona-AlOX, 1.5 nm x 10mm2
400
• Generally understand dielectric problem – Improve & Reduce• Significant loss in the amorphous AlOX junction
• 1.5 nm thick – very strong coupling• Focus on tunnel barriers
Tunnel barrier material characterizationQubit spectroscopy
• Increase the bias voltage (tilt)• Frequency of |0> => |1> transition goes down
Splittings
IncreaseI bias
Splittings in charge qubit - Cooper-Pair Box
Vg
Cg (Ec,EJ)
1 mm
B
Al/AlOx/Alisland
BVg
gate
islandgate
junction
junction
Z Kim et al., Physical Review B 78, 144506 (2008).
Effects of splittings
• Quench Rabi Oscilations – strong coupling to qubit• Reduces the measurement fidelity
Rabi oscillations
Spectroscopy
Origin of spectroscopy splittings
• Individual, strongly coupled TLS’s in barrier
• Distribution of excitation energies - amorphous AlOX
Density of splittings ~ 1/GHz/mm2 in 1.5 nm thick junction
(1) Reduce materials where possible
(2) Improve materials by eliminating TLS’s
13 um2 junction
• Fewer splittings, large gaps
• stronger coupling
70 um2 junction
• More splittings, small gaps
• weak coupling
1) Reduce materials where possibleSteffen, et. al PRL (2006)
• Reduce size of junctions in qubits
• increases f0 due to smaller capacitance
• Add high quality external capacitor to bring f0 down (SiN, a-Si)
• T1 ~ 170 ns (SiN) & 600 ns (a-Si:H)
• Factor of 2 shorter than expected - Still have a-AlOX in barrier
Growth of single-crystal Al2O3 (sapphire) tunnel barrier
4×10-6 Torr O2, Al 10-6 Torr O2
Epitaxial Re/Al2O3
Re
@ 850 CAl
Amorphous AlOX
@ RT
Epitaxial Al2O3
@ 800 C
Polycrystalline Al
@ RT
• Rhenium bottom electrode:• Superconducting – TC ~1 K• hcp - lattice match Al2O3• high melting T
(2) Improve JJ’s with crystalline barriers - Al2O3 & MgO
• Good - High sub-gap resistance
• First high quality junctions
made with epitaxial barrier
• Fabricate into qubit
Re(0001)
Al2O3
Al
Re
Al
I-V curve
20 mK
V(mV)
• T1 > 500 ns
– best for SiO2 insulator & large junction
– No external capacitance• Splitting density reduced
– ~3-5 times lower than amorphous barrier of same area
Qubit with 25 mm2 epitaxial Al2O3 junctionKline, et. al, Supercond. Sci. Tech. 22, 015004 (2008)
Summary & OutlookMaterials in superconducting qubits
12 Qubit Test Die Layout
Bias coil Qubit loop
DC-SQUID
Two level systems in junction
Amorphous AlO tunnel barrier
• Continuum of
metastable vacancies
• Changes on thermal cycling
• Resonators must be 2 level,
coherent with qubit!
I
What we need:
Crystalline barriera-Al2O3
Poly - Al
Poly- Al
Existing technology:
Amorphous tunnel barrier a –AlOx – OH-
No spurious resonatorsStable barrier
Amorphous Aluminum oxide barrierSpurious resonators in junctionsFluctuations in barrier
Silicon
amorphous SiO2
Low loss substrate
Design of tunnel junctions
SC bottom electrode
Top electrode
Q: Can we prepare crystalline Al2O3 on Al?
Binding energy of Al AES peak in oxide60
59
58
57
56
55
54
900800700600500400300Annealing Temp (K)
AE
S E
nerg
y of
Rea
cted
Al (
eV)
Al in sapphire Al203
Metallic aluminum
Aluminum Melts
68
10 Å AlOx on Al (300 K + anneal) 10 Å AlOx on Al (exposed at elevated temp.)
Anneal the natural oxides Oxidize at elevated temp.
A: No – need high temperature bottom wiring layer
Motivations – New wiring materials• Conventional Al, Nb:
– Surface oxides with spin polarized traps• 1/f flux noise, dephasing times, density ~ 1017/m2
• Alternative materials:– Re: resists oxidation, high melting T, hcp lattice => Al2O3,
– Al passivated with Re or Ru => resists oxidation
Koch, Clark, di Vincenzo(PRL 2007)
e- traps Kondo traps
Faoro, Ioffe PRB (2007)
Coupled TLS
McDermott, et. al (2007)
Improvement of junctionsseen in spectroscopy of 01 transition
T = 25 mK
Amorphous barrier70 m2
Epitaxial barrier70 m2
• Density of coherent splittings reduced by ~5
in epitaxial barrier qubits
Source of Residual TLFs: Al-Al2O3 interface?
Electron Energy Loss Spectroscopy (EELS) from TEM shows1. Sharp interface between Al2O3 and Re2. Noticeable oxygen diffusion into Al from Al2O3
1. Indicates presence of a-AlOx at interface2. Will “heal” pinholes
Distance (μm)
Oxy
gen
cont
ent
Al2O3White is oxygen
Need to improve top barrier interface!
• Interfacial effect• ~1 in 5 oxygens at Al interface• Agrees with reduced splitting density
~1.5 nm
epi-Re interface
non-epi Al interfaceOxygen
Re
Al
a-AlOx
0
5
10
15
20
25
0 100 200 300 400 500
Al/a-AlOx/Al
V (uV)
Al/a-AlO/Al
0
4
8
12
0 200 400 600
Re/c-Al2O3/Al
V (uV)
Re/c-AlO/Al
0
5
10
15
20
0 200 400 600
Re/c-MgO/Al
V (uV)
Re/c-MgO/Al
a: Amorphousc: Crystalline
Supports conclusion that Al top electrode “heals” pinholes
substrate
Al top electrodeTunnel barrierBottom electrode
Top electrode mattersAl top electrode always gives good I/V
0
10
20
30
0 200 400 600
Re/c-Al2O3/Re/Al
V (uV)
Re/c-AlO/Re
substrate
Re top electrodeTunnel barrierBottom electrode
=> Pinholes in tunnel barrier
Re on top makes JJ leaky
Electrical Testing Summary & ComparisonPhase qubits
Materials Wiring & barrier
Insulator T1
(ns)
T2*
(ns)
Splitting density(N/GHz/mm2)
Reference
Al/AlOx/Al
1 mm2 w/shunting C
min-SiNx 110 90(160)
1 Steffen - tomographyPRL 97 050502
Al/AlOx/Al
13 mm2
min-SiNx 500 150 1 Martinis Dielectric lossPRL 95 210503
Al/AlOx/Al min-SiO2 170 * 1 Simmonds 2005
Re/Al2O3/Al epi-junction max-SiO2 150 90 0.2 PRB 74 100502
12 qubit - Re/Al2O3/Al
49 mm2
max-SiO2 200-400 * 0.2 Submitted APS08
12 qubit - Re/Al2O3/Al
49mm2
min-SiO2 500 140 0.2 Submitted APS08
12 qubit – Re/MgO/Al 80 50 0.4 New results
Goals1. Inter-laboratory compatibility
– Infrastructure - 6”-wafer chamber for epitaxial trilayers
• Develop 6” substrate capability
• Re/Al2O3/Al, Re/Al2O3/Re
– Supply samples to flux qubit, 6” wafer fabrication facililty
2. Extend work on epitaxial tunnel barriers to flux qubits
– Continue on barriers at chip level
• Chip level
– Develop JJ and qubit circuits compatible w/flux qubits
– study fully epitaxial systems
3. Study new materials for wiring layers
– Al/Ru capping with anneal
– Push to understand flux noise and wiring surfaces
• “Medium” K dielectrics?• Si• SiN• Al2O3
• MgO• Diamond• ZrSiO• CaO• SiC
Þ Need to use thicker insulators
• “low” K dielectrics? • doped SiOx (F, C• Porous SiOx• Spin-on polymers (HSQ)
Probably not
new
Other potential new insulators – from VLSI world?
New directions
tunnel barrier
insulator
wiring
substrate
Substrate Sapphire(Al2O3)
Crystalline Expensive, difficult to work with, can be atomically rough
Wiring Re, Al/Ru Annealed Complicated, hard to prepare, Hi-T
Insulator SiN, a-Si, Al2O3
SputteredEpitaxial
High T, adhesion, processingHomogeneity, rough
Barrier Al2O3 Epitaxial High T, homogeneity, rough
Materials Difficulties
CMOS
• TLS bath saturates at high E (power), decreasing loss
Schickfus and Hunklinger, 1975
Two-level systems in a-SiO2
E d
SiO2 - Bridge bond
UDAmorphous material has all barrier heights present
High E
Low ELow E
2 RSiO2Ceff 27ns
~T
RSiO2
=2.1kW
Temperature Dependence of QQ also decreases at low temperature!
Problem - amorphous SiO2
Why short T1’s in phase Josephson qubits?
Dissipation: Idea - Nature:At low temperatures (& low powers)environment “freezes out”:
dissipation lowers
dissipation increases, by 10 – 1000!
Change the qubit design:
Þ find better substrates
Þ find better dielectric & minimize insulators in design
Common insulator/substrate materials
• SiOX
– Bridge bond, unstable• Amorphous films have uncompensated O- , H, OH-
• Si3N4
– N has three bonds – more stable• Amorphous films, still have uncompensated charges, H• 20% H for low T films, ~ 2% H in high T films
• Al2O3
– Amorphous – high loss, similar to a-SiO2, has H, OH- in film– Single crystal (sapphire) - Very low loss system
Insert qubit pic here
Qubit LStripline (C-SiOX )
Josephson Junction(L&C)
=> Measure “Q” of simple LC resonators
Qubit has SiO2 Cap in || with J.J. & around lines
SiOX AlOx
Superconductor - Aluminum
I
Tunnel junction a- AlOx-OH-
Found improvements due to optimized materials in insulators
Tunnel barrier materials