Cleanroom Lab Manual

8/8/2019 Cleanroom Lab Manual

1/30

CNST_Cleanroom_Laboratory_Manual_v3_1.doc 1 June 19, 2007

Nanofab Facility CleanroomLaboratory Manual


2/30

CNST_Cleanroom_Laboratory_Manual_v3_1.doc June 19, 20072

1. INTRODUCTION

2. ORGANIZATION

2.1 Organizational Structure of CNST

2.2 Organizational Structure of the Nanofab Facility2.2.1 Nanofab Manager2.2.2 Users Committee

2.2.3 Safety Committee

2.2.4 Proposal Review Committee2.2.5 Nanofab User Office

2.2.6 Nanofab Professional and Technical Staff

2.3 Users2.3.1 Nanofab User

2.3.2 Cleanroom User

2.3.3 Remote User

3 Cleanroom Description

3.1 Lobby3.2 Locker Rooms

3.3 Gowning Room

3.4 Cleanroom Bays3.4.1 General Wet Chemistry Bay

3.4.2 Clean Silicon Wet Chemistry Bay

3.4.3 Metrology Bay3.4.4 FESEM Bay

3.4.5 Optical Lithography Bay3.4.6 E-beam Lithography Bay

3.4.7 Metal Evaporation/Sputtering Bay3.4.8 Reactive Ion Etching Bay

3.4.9 Furnaces and CVD Bay

3.4.10 Open Class 100 Bays3.5 Equipment Chases

3.6 Sub-fab

3.6.1 Hazardous Material Cut-off Room (HPM)3.6.2 Chemical Storage

3.7 Phones

3.8 Wafer and Chemical Pass-thru3.9 Chemical receiving room3.10 Equipment Resources

4. ADMINISTRATIVE PROCEDURES AND POLICIES

4.1 User Access Processes4.1.1 Proposal Process


3/30


4.1.2 Funding Transfer Process

4.1.3 NIST Site Access Process

4.1.4 Nanofab Access Process

4.2 Usage Fees4.3 Hours of Operation

4.4 User Communication4.5Nanofab Governance and Appeals

4.6 Visitors

4.7 Acknowledgements and Publications

4.8 Intellectual Property

5 Cleanroom Technical Procedures and Policies

5.1 User Entry5.2 Samples, Supplies, and Equipment Entry

5.3 Cleanroom Etiquette and Contamination Control

5.4 Equipment Operation

5.5 Approved Users and Training5.6 Scheduling

5.7Coral Software System

5.8 EquipmentIntroduction, Installation, Modification, and Repair

5.9 Consumables, Maintenance, and Standard Test Runs

6. SAFETY POLICY

7. APPENDIX

7.1 Names and Contact Information7.2 Approved Chemical list

7.3 Nanofab Map7.4 Project Proposal Form


4/30


1. INTRODUCTION

The NIST Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all

phases of nanotechnology development, from discovery to production. It is composed of two

groups. The Electron Physics Group has the mission of advancing measurement science for thedetermination of electronic and magnetic properties of nanometer-scale systems. The research

areas are nanomagnetics, atomic scale characterization and fabrication, nanoscale measurement

and fabrication using laser-controlled atoms, and modeling nanostructures in mesoscopicenvironments. The Nanofabrication Facility Group maintains and operates the Nanofabrication

Facility, or Nanofab. It is operated as a national shared use Facility for NIST and external users,which includes both fabrication and characterization tools, as well as access to specialized

measurement tools and expertise residing in NISTs extensive measurement laboratories. Most

of the equipment in the Nanofab resides in the CNST Nanofab Cleanroom, which is the main

subject of this usage manual.

The NIST CNST Nanofab has approximately 745 m2

(8,000 sq-ft) of Class 100 bay and chase,

cleanroom space with extremely wide Class 1000 equipment corridors. NIST has invested in acomplete suite of new state-of-art semiconductor equipment (capable of processing 150 mm

wafers and various sizes of samples) that includes:

ATM furnaces (2 banks of 4 tubes each)

LPCVD (poly, nitride, LTO)

PECVD

Rapid Thermal Annealer

4 Reactive Ion Etchers (SF6/O2, Metal RIE, Metal ICP, Deep Silicon)

Microwave Asher

Critical Point Dryer 5 Metal deposition tools (thermal, e-beam, sputter)

3 Contact Mask Aligners (front- and back-side alignment)

2 E-beam lithography systems

Focused Ion Beam

Nanoimprint Lithography

Inspection (FE-SEM Zeiss Ultra 60)

AFM

Metrology Tools (Spectroscopic Ellipsometer, Contact Profilometer, 4-point probestation, Nikon Optical microscope with image capture, etc.).

Wafer Dicing Saw

Note: for more details and an up to date equipment lists see the nanofab website at www.cnst.nist.gov.

In addition to the cleanroom the nanofab operates additional equipment in separate rooms, also

open to the users. This equipment listed by room number is as follows:
http://heatlamp/cnst/Center_Office/Operations_Manual/04_Nanofab_Facility/042_User_Document_(originals)/epg_home.htmlhttp://heatlamp/cnst/Center_Office/Operations_Manual/04_Nanofab_Facility/042_User_Document_(originals)/nanofab.htmlhttp://heatlamp/cnst/Center_Office/Operations_Manual/04_Nanofab_Facility/042_User_Document_(originals)/nanofab.htmlhttp://heatlamp/cnst/Center_Office/Operations_Manual/04_Nanofab_Facility/042_User_Document_(originals)/epg_home.html


5/30


6/30


2. ORGANIZATION

2.1 Organizational Structure of CNST

The CNST is an Operational Unit of the National Institute of Standards and Technology, in the

United States Department of Commerce. CNST provides measurement methods, standards andtechnology to support all phases of nanotechnology from discovery to production; develops and

maintains a national facility, the CNST Nanofab, with unsurpassed nanoscale fabrication and

measurement capabilities; conducts long term research in measurement science to develop newmeasurement methods, standards and reference data and promulgates these methods, standards,

and data by publishing, conducting workshops, and collaborating with industry, universities and

other government agencies; applies multidisciplinary approach that involves partnering withindustry, academia, and other government agencies, serves as a hub to link the external

nanotechnology community to the measurement expertise that exists within the NIST

Laboratories; maintains appropriate collaborations with other laboratories in NIST, the nationand throughout the world; helps to educate the next generation of nanotechnologist.

The CNST Nanofab is operated by the CNST Nanofabrication Facility Group. It provides accessto state-of-the-art nanofabrication tools, technologies, and expertise in a shared-access, shared-cost environment to NIST and its partners; enables fabrication of prototypical nanoscale test

structures, measurement instruments, standard reference materials, electronic and magnetic

devices, MEMS, and bio-devices critical to the nations nanotechnology needs; fosters internalcollaboration in nanotechnology across NISTs laboratories; and fosters external collaboration in

nanotechnology with NISTs partners.

The other group under the CNST is the Electron Physics Group. This group develops advanced

electron probing techniques for nanoscale measurements such as scanning electron microscopy

with polarization analysis (SEMPA) and scanning tunneling microscopy (STM); manipulates

matter on an atomic scale with STM and fabricates nanostructures making use of the high degree

of control provided by laser-atom manipulation; Investigates electron interactions with atoms,molecules, and condensed matter; determines the electronic and magnetic properties of surfaces,

and develops and uses a range of theoretical techniques to study nanostructures and theirconnection with mesoscopic environments.

2.2 Organizational Structure of the Nanofab Facility

The Nanofab Facility Group consists of a user office, and a staff of process engineers and fixed

operation technicians reporting to the Nanofab Manager. In addition, its mission of operating thenanofabrication facility is supported by a User Committee, Safety Review Committee, and two

proposal review committees. The organizational structure is shown in figure 2-1 and theelements are described below. Contact information for Nanofab management is given in theSection 7 Appendix.


7/30


Figure 2-1 Organizational Structure of the Nanofab

2.2.1 Nanofab ManagerThe CNST Nanofab is managed by the Nanofab Manager who reports directly to the CNST

Director. He is formally responsible for all aspects of the operation and safety of the facility.

The Nanofab Manager is the supervisor of the Nanofab Staff. The Nanofab Manager isresponsible for the budget of the facility, outreach for the facility, and developing a user-base for

the facility.

2.2.2 NIST User CommitteeAt its discretion, the Nanofab Manager will convene meetings of or ask for input fromrepresentative users via the NIST User Committee. This is a group of NIST users, outside of

CNST appointed by the CNST director.

2.2.3 Safety Review CommitteeThe Safety Review Committee is an advisory committee that provides independent input and

guidance on safety-related issues and incidents appointed by the CNST Director. The Safety

Committee does not have line-management authority or responsibility related to safety. TheSafety Committee will review the development of safety policies and procedures, review the

development of and any major modifications to equipment and review the installation of any new

equipment and their respective operating procedures. The Safety Committee will also review allsafety incidents and may assist in preparing a report on the incident.

2.2.4 Technical Review CommitteeThe technical Review Committee is composed of the Nanofab Manager and two additionalCNST employees appointed by the CNST Director. The Technical Review Committee will

Center for Nanoscale Science and Technology (CNST)CNST Director

Nanofabrication Facility

Nanofab ManagerSafety Review Committee

NIST User Committee

Professional and Technical StaffUser Office

Technical Review Committee

Mission Review Committee


8/30


provide technical reviews of the incoming proposals for safety, feasibility and usage issues,

according to the following criteria.

1) Can the proposed project be carried out safely in the Nanofab? (refer to safety manual)

Yes___ No___

2)

Are appropriate tools available to carry out the project with a reasonable chance ofsuccess? Yes___ No___

3) Is it clear that the materials and processes proposed will not contaminate the facility or

equipment? Yes___ No___4) Is it clear that the tool usage for this project is within the Nanofab capacity and will not

create bottlenecks for other projects? Yes___ No___

2.2.5 Mission Review CommitteeThe Mission Review Committee is composed of three members of CNST Staff, appointed by theCNST Director. The Mission Review Committee reviews proposals to determine their level of

alignment with the CNST Mission, according to the criteria listed below. Scores are forwardedto the CNST director, whom determines if the project is eligible for a partial fee waiver.

1) Is the project non-proprietary? Yes___ No___

2) If yes, does the project support the CNST/NIST mission of providing measurement

methods, standards, and technology to support all phases of nanotechnology developmentfrom discovery to production? (100 points total)

a) Degree to which project advances measurement science, standards development

and/or nanomanufacturing technology (50 points)b) Scientific and technical merit of application (20 points)

c) Appropriateness of methods (10 points)d) Competence of personnel (10 points)

e) Reasonableness of proposed budget (10 points)

2.2.5 Nanofab Users OfficeThe Nanofabrication Facility User office is the first point of contact for users routine questions

regarding access, security, accounting, and local information such as travel and accommodations.

2.2.6 Nanofab Professional and Technical StaffThe Nanofab is staffed by Process Engineers and Technicians who are responsible for the day-to-

day operations of the Nanofab, for training users, and for operating the tools for remote users (atadditional cost). In addition, they are also available for collaborations involving process

development. The Nanofab Manager and Staff have immediate authority regarding all aspects ofsafety and operation in the cleanroom.


9/30


2.3 UsersThere are currently three types of users for the CNST Nanofab Facility; Nanofab Users,Cleanroom Users, and Remote Users. This manual is intended to serve as a resource for the

Cleanroom User.

2.3.1Nanofab UserNanofab users are persons certified to operate Nanofab equipment located outside the cleanroom.

They are required to take the Nanofab orientation and training specific to the instruments they

will be using.

2.3.2 Cleanroom UserCleanroom users are persons who are certified to operate equipment located inside thecleanroom. In combination with the orientation, they receive additional training on cleanroom

safety and cleanroom operational procedures. Before gaining access to the cleanroom they must

pass a safety exam. They will also be required to take training specific to the instruments theywill be using.

2.3.3 Remote UserRemote users are people who do not wish to operate the equipment themselves, but insteadspecify work to be performed by Nanofab Staff (at an additional hourly rate). They must still

receive an orientation for the Nanofab.


10/30


3 CLEANROOM DESCRIPTIONThe following section describes various locations within the Nanofab Cleanroom and rulesregarding access by Certified Cleanroom Users. See Section 7.3 for the Facility Layout Map.

See Section 3.8 regarding visitors.

3.1 Main Lobby-D101/Bldg.215This room is the main entrance to the Nanofab Cleanroom; it is room D101 in bldg 215. This

room is where the controlled environment begins. This room is certified as a Class 1000 clean

area. This room has a card reader on the door and can only be accessed by authorized individualsand certified Cleanroom Users only.

3.2 Locker Rooms/Pre-gowningThere are men and womens lockers available for your personal belongings (hats, coats, cell

phones, phone-cameras, PDA, notebooks, other). The locker rooms are used as the Pre-gowning

areas for accessing the class 1000 corridor prior to entering main gowning.

3.3 Main Gowning RoomThis room is for final gowning before entering the Class 100 cleanroom proper. Entry is made

through the door marked Entrance. Do not cross over to the clean area without full gowningapparel.

3.4 Cleanroom Work Bays

3.4.1 General Wet Chemistry Bay-B101This bay is for all common chemistry work, not recommended for CMOS or Electronic deviceprocessing. Access to this bay is for all certified Cleanroom users.

3.4.2 Clean Silicon Wet Chemistry Bay-B102This wet chemistry bay is dedicated to ultra-clean silicon processes. General chemistry work is

prohibited and must be done in the general chemistry area. The Nanofab management and staffstrictly enforce this policy.

3.4.3 Metrology Bay-B103This bay is open to all trained and certified Cleanroom Users and is available on a first come firstserved basis.

3.4.4 FESEM Bay-A101This bay is open to all certified Cleanroom Users who have been trained and authorized to use

this equipment by the Nanofab Management.

3.4.5 Optical Lithography Bays (Photo 1 and Photo 2)-A102 and A103Open to all certified Cleanroom users who have been trained and authorized to use this

equipment by the Nanofab Management.

3.4.6 E-beam Lithography Bay-A104 and A101


11/30


Open to all certified Cleanroom users who have been trained and authorized to use this


3.4.7 Metal Deposition Bay-B104Open to all certified Cleanroom Users who have been trained and authorized to use this


3.4.8 Dry Etch Bay-B105Open to all certified Cleanroom Users who have been trained and authorized to use thisequipment by the Nanofab Management.

3.4.9 Oxidation and Diffusion Furnaces and CVD Bay-B106, B107Open to all certified Cleanroom Users who have been trained and authorized to use this


3.4.10 Open Class 100 Bays-A105, A106

These bays are held as reserve space for future NIST partners or NIST collaborations related tonanotechnology.

3.5 Service ChasesService chase areas contain mechanical, electrical and other ancillary equipment and are not to

be accessed from the cleanroom proper by Cleanroom Users. Cleanroom Users can enter theseareas from the Class 1000 corridors in order to place materials into the appropriate pass-through

for retrieval from the cleanroom.

3.6 Sub-fab-215 BasementThis area is restricted, and can only be accessed by Nanofab staff and authorized NIST Plantpersonnel.

3.6.1 Hazardous Material Cut-Off Room-E05Restricted and can only be accessed by the Nanofab Staff.

3.6.2 Chemical Storage-D106Process chemicals are stored here. This room is restricted, Users may not enter

3.7 Phones-CleanroomPhones are located inside the cleanroom along the walls at the end of the bays near the centerhallway.

3.8 Chemical Pass-thruAir-lock pass-thrus are used for passing items (chemicals and other materials) into the

cleanroom from the outside. Access to a specific pass-thru is done from the class 1000 corridor,

and entering into the respective service chase for that particular pass-thru. Pass-thrus are labeled

for Acid and Solvent materials.


12/30


3.9 Chemical receiving room-D107This room is where the chemicals are received. They are brought up from the basement using thedumb waiter, wiped down, inventoried, and transferred into the two way chemical closets for

storage in the chemical storage room.

3.10 Equipment ResourcesThis section includes a general description of the capabilities of each processing tool and

includes what kinds of materials can go in each tool, wafer sizes, etc. The operating manuals for

each tool are not a part of this document.

Tool Sample Size Capability Restrictions Tool ID Bldg/Room #

Tystar ATMFurnaces

3, 4, 6 wafers

Wet/Dry SiO2,

Diffusion, Solid

source doping,

Anneal

Tool C is for

CMOS and Ultra

clean silicon only!

B,C 215/B106

Tystar LPCVD 3, 4, 6 wafers

Polysilicon, Silicon

Nitride, Low TempOxide

Silicon only A 215/B106

Modular ProcessTechnology RTP

4, 6 wafers

Rapid thermal

Anneal. Forming

Gas, Argon,

Nitrogen, Oxygen

E 215/B105

Unaxis PECVDSamples to 10

substrates

Low temp:

Polysilicon, SiliconOxide, Nitride

Silicon only D 215/B106

Unaxis SiliconRIE

Samples to 10substrates

Thin Film etching:

SiO2, Poly, Nitride,

Organics

Silicon only F 215/B105

Unaxis Metal

RIE-Fluorine

Samples to 10

substratesW, Au, Cu G 215/B105

Unaxis Metal

RIE-Chlorine

Samples to 10

substratesAl J 215/B105

Unaxis DeepSilicon Etch

Samples to 10substrates

Deep Siliconetching

Silicon only I 215/B105

Xactix XeF2

Silicon Etch

Samples to 6

wafers

Isotropic siliconetching, High

silicon selectivity

H 215/B105

Denton Thermal

Evaporator

2, 3, 4 and 6

wafersAl K 215/B104

Denton Thermal

and E-Beam Evap.

2, 3, 4 and 6

wafers

Au, Cr, Ti, Ni, Ag,

Fe, Al, CuM 215/B104

Denton Sputter2, 3, 4 and 6

wafers

SiO2, Au, Cr, Ti,

Ni, CuO 215/B104

CVC Evaporator 3 , 4 wafersAu, Cr, Ti, Ni, Ag,

Co, HfL 215/B104

Myers Dry

Evaporator

Samples to 6

wafers

Au, Ti, Al

(Oil-free vacuum

system)

Dedicated to

Molecular

Electronicsresearch

N 215/B104

Woollam M-2000

Ellipsometer

Up to 6 wafersThin film

measurement

P 215/B103

Nanometrics

Nanospec

Samples to 4

wafers

Thin film

measurementQ 215/B103

Dektak 6M

Profilometer

Samples to 6

wafers

Step height and

stress analysisR 215/B103

RudolphEllipsometer

Samples to 4wafers

Thin filmmeasurement

S 215/B103

Nikon MicroscopeUp to 6

substrates

Inspection, image

captureZ 215/B103

4-point Probe

station

Any size, up to

three inches

thick

Resistivity, dopingmeasurements

AA 215/B103


13/30


JEOL 6400

SEM/E-beam

Samples up to 3

wafers

Inspection and

lithographyV 215/A104

Suss MicroTec

Contact Aligner-

MA6/BA6

2 3, 4 and 6

wafers

Lithography(0.75um)

I-line, G-line, UV-

400. Backside

Alignment. Wafer-

to-wafer bond

alignment.

Avoid touching or

moving backside

scopes.

T 215/A102

Suss MicrotecContact Aligner-

MA8/BA6

6 wafers

Lithography

(0.75um)I-line, G-line, UV-

400. Wafer-to-

wafer bond

alignment.

U 215/A102

HTG Mask

Aligner2, 3, 4 wafers

Lithography (1-2

um) I-Line, G-lineW 215/A103

Zeiss FESEMSamples to 6

waferInspection CC 215/A101

Leica VB-300-UHR E-beam

Lithography

Up to 6 (300mm

Capable)

10 Wafer Air-Lock,Resolution < 4 nm,

Linewidth < 10 nm

215/A101

Disco 341 WaferDicing Saw

Small pieces to8 wafers.

Silicon, Sapphire,Ceramic, Quartz

215/C02-2

PVA Tepla

Microwave Asher

Pieces up to 25

8 wafers

Removes hardbaked photoresist,

SU-8, etc. Alsorelease of MEMS

structures without

Stiction.

CF4 requires

ceramic chamber215/105B

Tousimis Critical

Point DryerUp to 8 wafer MEMS 215/102A

Focused Ion Beam TBAMilling, Deposition,

Inspection, etc.TBA 216/E102

K&S Wire Bonder Au Wedge Bonder 216/E111

Atomic Force

Microscope218/C010

InspectionMicroscopes

218/C010


14/30


15/30


4.1.2 Funding Transfer Process Once a Proposal is accepted and the Fee level established, discus the amount of the initial

funding transfer with the Nanofab Manager.

NIST Staff and Current Guest researchers may transfer funds via NIST Work Orders see

your Group Leader and/or AO for further instructions. External Users may transfer funds to CNST via advanced payment or submit a purchase

order to establish a reimbursable order. Contact the CNST User office for further

instructions

Nanofab Funding

Transfer Procedure

CNST AO

Sets up

Coral Account

Is User a

NIST Staff or

Guest Researcher?

Transfer Funds to CNST

via advanced payment orsubmit a purchase order to

establish a reimbursable order

Continue with User

Site-Access Process

Yes

No

Transfer Funds to CNST

via NIST Work Order

Project Proposal

Approved

Discuss InitialFund Transfer

amount with

Nanofab Manager

CNST Director Signs

User Agreement and

Send copies to NIST

Council, OTP, and

CNST AO

Return Signed User Agreement

and Coral Application Form to

CNST User Office


16/30


4.1.3 NIST Site Access Process Current NIST Staff and Guest researchers already have access to the NIST site and may skip

to the Lab Access Process

Current external Nanofab or Cleanroom users must contact the User Office at least one day

in advance of their arrival to arrange for site access

If a new external user requires access to the Nanofab for more than a total of 6 months in agiven year, contact the User office to request the necessary forms to become a Guest

Researcher

If a new external user requires access to the Nanofab for less than a total of 6 months in agiven year, contact the User office to request the necessary forms to become a Facility User

As the application for Guest Researcher of Facility user status approaches completions

schedule an appointment for the level of training appropriate to your intended use of theNanofab.

When arriving at NIST for training, all external users and persons applying for Guest

Researcher Status must check in at the Visitors Center at the NIST Main Gate to obtain a siteaccess badge, then proceed to the CNST User Office for additional check in procedures.

US Citizen?

NIST Site Access ProcedureResearch

Proposal

Approved

Are You a

NIST Staff

or Guest

Researcher?

Complete Domestic Guest

Researcher Paperwork

30 Days Prior to

Expected Start Date

Arrive at NIST, check in

at the Visitors Center,

and Obtain Site-Access

Badge

Begin Lab

AccessProcess

No

Yes

Yes

No

Complete Foreign Guest

Researcher Paperwork

60 Days Prior to

Expected Start Date

Proceed to CNST

User Office tocomplete check in

Funding

Transfer

In Progress

Will your

days at NIST

total > 6 months

this year?

Yes

No

CNST User Office Submits

Web-based Visitor Registration

and (if Foreign) Form 1260,

Report of Foreign Visitors

Complete Domestic Facility

User Paperwork

2 Days Prior to

Expected Start Date

Complete Foreign Facility

User Paperwork

30 Days Prior to

Expected Start Date

US Citizen?

Yes No

Are you a

current Nanofab

facility User

Yes

NoNo

Contact CNST User

Office to Schedule Visit

1 Day Prior to

Expected Start Date

CNST User

Office

Submits NAIS

Forms

Schedule Required

Training with

Nanofab Safety

Coordinator &

CNST User Office


17/30


4.1.4 Nanofab Access Process Nanofab or cleanroom training should be scheduled with the CNST Nanofab Safety

Coordinator

Cleanroom Users must also take and pass a Cleanroom Exam

Users then may receive training for the specific tools they intend to use.

Once all the requirements are satisfied the User can independently use the tools they aretrained for

Subsequent scheduling of tool use is done using the Coral.

External Users must also schedule subsequent site visits one day in advance with the UserOffice

Additional tool training may be scheduled by contacting the Nanofab Manager.

Contact Nanofab

Manager for

Appointment

Receive Lab

Orientation

Receive

Cleanroom

Training

Receive

Validation

Badge

Pass

Cleanroom

Exam

Will you need

to use the

Cleanroom?

Enter Laboratories

or Cleanroom

Accompanied

by Nanofab Staff

Nanofab Access Procedure

No

Yes

Receive

Training

for Tools

to be used

New User

with

Coral Account

in Progress

Do you wish to

Visit the Nanofab

for purposes other

than to do work?

Exam Results

are sent to CNST User Office

(for Coral Account)

Yes

Equipment

Qualifications are

sent to CNST

User office (for

Coral Account)

Visitor Access ProcessSchedule subsequent tool

use via Coral.

If not NIST Staff or

Guest Researcher,

contact CNST User Office

to schedule subsequent

site visits 1 day prior to

expected start date

Are all requirements for Nanofab use satisfied?1 . Proposal Acce pted

2. User Agreement and Coral Form on file

3. Funds Transferred or Billing System in place

4. NIST Staff or Registered in NAIS as Guest Researcher or Facility User

5 . Or ien tat ion Take n

6. Cleanroom Training Taken (if applicable)

7. Cleanroom Exam Passed (if applicable)

8. Tool tra ining completed


18/30


4.2 Usage Fees

All Cleanroom Users are charged usage fees. The usage fees are used to pay for consumables,

maintenance, and facility staff. Cleanroom Users are charged an hourly rate for entering the

facility and an additional hourly rate for using tools. The hourly rate for entering the facility

includes use of wet chemistry, contact lithography and metrology tools (Ellipsometers,Reflectometer, Profilometer, Optical Microscopes, 4-point Probe). The hourly rate for using the

Nanofab and tools are available from the Nanofab Manager.

An individual or group of individuals must create an account (see section 3.1.2) that will be

charged on a per hour basis. When a Cleanroom User logs into the facility and onto a particular

tool through the Coral Software System the user will be asked to enter the account number tocharge. The user must log onto the Coral Software System for a particular tool prior to

performing any work and log off of the Coral Software System for that particular tool after all

work (including shut down and cleans as dictated) is completed on that tool. The Coral SoftwareSystem will not allow a Certified User to log into the facility or onto a particular tool if there is

no balance remaining on the account. The user is responsible for ensuring that a positive balanceremains on the account.

Remote Users who ask Nanofab Staff to perform service processing are charged the per hour

user fees that the Nanofab Staff incur when using the facility for the remote project plus an

additional hourly rate for the Facility Staff time. The Remote User should first discuss planswith the Nanofab Manager. This initial consultation is free of charge. Based on this initial

consultation, the Nanofab Manager will generate an estimated cost for the service processing.

The Remote User will issue an interdivision work order for the estimated cost. Nanofab Staffwill then perform the service processing.

**See Nanofab Website for up-to-date fee schedule athttp://cnst.nist.gov

4.3 Hours of Operation Unless otherwise notified, the Nanofab will be open from 7:00 AM to 7:00 PM. Nanofab

staff may not be available after hours (Staff Hours: 8:00 to 5:30)

All tools can be operated outside of Staff Hours except for:

o LPCVD/PECVD (toxic gas)o Wet chemical processing (PR spin and develop and solvent use may be performed

out of hours)

o Metal RIE-Chlorine (toxic gas)

Out-of-hours policy:

o The user must contact the Nanofab Management ahead of time to schedule out of

hours work.o The user may be given specific responsibilities for out of hours work.

Get authorization from the Nanofab Cleanroom Management.

The Nanofab Cleanroom Management will contact Emergency Response

Group at ext. 6190. The after hours user will be required to contact the Emergency Services

Group at ext. 6190 when they are done using the lab for the day.
http://cnst.nist.gov/http://cnst.nist.gov/


19/30


Should the Nanofab Cleanroom be closed due to laboratory conditions or other problems, the

main entry doors to the facility will be locked, a sign will be posted on the main door, andthis will also be posted on the Nanofab Forum on the Nanofab website

http://nanofab.cnst.nist.gov.

4.4 User Communication All issues that pertain to the Nanofab Cleanroom, including closures, emergency situations,

equipment failure and repair; will be posted on the forum.

Please reference the forum frequently enough to ascertain that the lab is safe for entry and theequipment is operational and accessible.

Signage will also be used.

4.5 Facility Governance and Appeals The Nanofab Cleanroom Management will consult with the Nanofab Staff, Safety

Committee, Nanofab Safety Coordinator and users prior to pursuing any changes to thepolicies set forth in this manual.

The Nanofab Cleanroom Management and Nanofab Staff have immediate authority on allissues and equipment.

A decision by the Nanofab Cleanroom Management or Nanofab Staff can be appealed to theCNST Director.

Failure to follow rules or directions of the Nanofab Cleanroom Management or Nanofab

Staff can result in suspension of privileges for any time frame to be determined by the CNSTNanofab Manager.

4.6 Visitors A visitor is defined as ANY person entering the facility who is not a Certified Cleanroom

User or Nanofab Staff.

Before a visitor enters the facility approval must be obtained from the Nanofab Cleanroom

Management.

Visitors must be escorted at all times by a Certified Nanofab Cleanroom User or NanofabStaff, and are the sole responsibility of this individual.

Visitors may observe work, but should never operate or touch any equipment including

processing equipment, chemical processing or measurement tools.

4.7 Acknowledgements and Publications All output including, but not limited to, publications, presentations, reports, test structures,

reference materials, and reference data, involving work performed wholly or partially at theNanofab, must acknowledge the facility and its sponsors. Please use the following text:

Research performed in part at the NIST Center for Nanoscale Science and Technology

If the Nanofab Manager or Nanofab Staff contributed in a significant way to the

accomplishment of the reported research, then consideration should be given to including the

staff as co-author(s). This is most appropriate if the project involved the development ofspecial processing technology by the staff. If you have any questions on who should be

included as co-author(s), please do not hesitate to contact the Nanofab Management.
http://nanofab.cnst.nist.gov/http://nanofab.cnst.nist.gov/


20/30


Copies of publications resulting from your work at the Nanofab should be given to the CNSTNanofab Manager as soon as they are published.

If at any time during your research at the Nanofab you have developed new processes, please

informally communicate these to the Facility Staff, for the benefit of your colleagues.

If at any time during your research at the Nanofab you have interesting results, please

informally communicate these to the Facility Staff, for use in our outreach.

4.8 Intellectual Property

There are a very wide range of interactions possible with CNST. The type of interaction agreed

upon for your project will be based on whether your research is proprietary or nonproprietaryand the level of collaboration, and will include appropriate provisions governing intellectual

property. NIST has a long record of cooperation formal and informal with outsideorganizations. Agreements used to formalize these collaborations include Cooperative Research

and Development Agreements, Guest Research Agreements, and Facilities User Agreements.Each type of agreement describes in detail the protection and ownership of intellectual property

under that agreement. The agreement used to formalize your collaboration with the CNST will

include the intellectual property provisions that are most appropriate for that collaboration.

External users performing proprietary research in which NIST employees do not participate

generally will retain all intellectual property rights. External users conducting collaborativeresearch with NIST employees will negotiate appropriate intellectual property terms in their

agreements. Additional Information can be obtained by reviewing the User Agreement for yourtype of work and by discussing the issue with the Nanofab Manager.

5 CLEANROOM TECHNICAL PROCEDURES AND POLICIES

5.1 User EntryEntry into the Nanofab Cleanroom is for Certified Cleanroom Users and Nanofab Staff only.

Access is controlled and restricted, and can only be obtained if the user has followed the

requirements in section 3.1.1. Unless leaving the facility due to an emergency, users shall neverenter the equipment corridors or chases without first contacting facility staff.

Certified Cleanroom Users will enter the Nanofab Cleanroom through Bldg. 215, roomD101.

The User must have a valid NIST ID badge programmed to open the main doors 215/D101.

Users must log-in and out of the cleanroom computer upon every entry and exit. This allows

the facility staff to monitor who is in the cleanroom at all times. The Coral Software Systemfor managing user entry, equipment use and authorization is described in Section 5.


21/30


After successfully logging in, the user can enter the appropriate locker room (men or

women). The locker room is for personal belongings. Hair covers, gloves, face masks andbooties are required beyond the locker rooms in the Class 1000 gowning room, equipment

chases, and corridors.

The gowning area is where the critical clean area begins, and can be entered through the

automatic doors. Cleanroom etiquette and contamination control instructions are given in thenext section.

The following provides the gowning procedure:

1. The locker rooms are the pre-gowning staging areas.

Put on:

Hair net

Face Mask

Shoe covers

Latex gloves

Safety Glasses

2. When entering or exiting the gowning area, always use the door to your right. Select gown, hood and boots.

Begin to dress from top down. Pull hood over head, and adjust. Step into coverall, and tuck hood into coverall.

Put on rubber sole boots and tuck coverall into boots. Adjust. Check yourself in the mirror to ensure there are no gaps in your suit. Swing legs over bench into clean area.

Enter the cleanroom through the automatic sliding door.

3. Safety glasses must be worn at all times.

4. Do not wear open toe shoes or sandals when working in the facility.

5. After gowning, do not loiter in the gowning room; do not store your materials(i.e. wafer boxes, cleanroom notebooks, or other supplies) in the gowning

room. Enter the cleanroom through the automatic door, and proceed to thework stations. Log into tool computers when tool use is required.

To exit the work stations and Nanofab, the following procedure shall be followed:

1. Clean up tool work area.

2. Run required cleaning recipes if applicable.3. Log out of tool computer.

4. Exit cleanroom through the gowning room automatic door.

5. If you are done for the week (which runs Thursday through Wednesday), place your garment into the garment hamper and exit the gowning roomthrough the door marked Exit. If you are returning to the cleanroom in the

same week, hang your garment on the numbered garment rack for use when

you return.6. Exit to the appropriate locker room.

7. Discard your pre-gowning supplies, and retrieve your personal belongings.


22/30


8. Exit the locker room into the Nanofab Lobby and log out on the Nanofab

Computer.9. Exit the Nanofab.

5.2 Samples, Supplies, and Equipment Entry The Nanofab Cleanroom Management must be contacted PRIOR to bringing ANY

chemicals, equipment, or questionable items into the facility.

Personal equipment such as cell phones, camera-phones, digital cameras, PDAs, notebookcomputers, magazines, books, etc. CANNOT be brought into the cleanroom but can be stored

in pockets or in the locker room. Samples (tools, wafer containers, supplies, etc.) MUST be cleaned using Propanol-2 and

approved cleanroom wipes in the lobby of the cleanroom prior to entering the facility. If you

feel that your samples cannot be cleaned prior to facility entrance, contact the Nanofab

Management. The proper process for cleaning samples prior to cleanroom entrance iscovered in the user orientation.

5.3 Cleanroom Etiquette and Contamination ControlThe Nanofab Cleanroom is a Class 100 Cleanroom (Fed. Std.209E). The following rules arebased on accepted Class 100 protocols:

No person, whether certified or not, shall enter the cleanroom unless their physical presence

is necessary.

Personal items that cannot be stored easily in pockets are not allowed.

Bulky clothes, furs, angora, linty stockings or similar types of clothes are not allowed.

Clothing minimizing the amount of bare skin is required.

No cosmetics of any kind are recommended.

Adequate personal hygiene is required.

Persons suffering from colds, flu, allergies, and similar illnesses should avoid entering the

cleanroom.

Clean shoes and clothes are required.

Damaged or dirtied gloves and garments shall be replaced immediately.

New cleanroom garments shall be used weekly.

The Nanofab Manager must be contacted prior to bringing any chemicals into the facility.

Always wear all required gowning as described in 3.3.

No foam, paper, cardboard or wrapping and packaging material are allowed.

No paper, except approved cleanroom paper or approved encased paper products, is allowed.

No tobacco products, spitting, eating, drinking and gum chewing.

No wooden items are allowed.

No pencils, felt tips, magic markers or erasers are allowed. Only approved cleanroom pens

are allowed (supplied).

No abrasives such as steel wool, emery cloth or sandpaper are allowed.

No trash is allowed on the floor and trash shall be immediately put in the appropriate

dispenser.


23/30


5.4 Equipment Operation All equipment in the facility (including chemical processing and inspection tools) has an

operations manual available on the CNST website. These manuals describe the procedures

and limitations of the equipment. This will includes the types of samples that may be put

into the tool.

Nanofab Cleanroom Staff are responsible for the development and revision of equipmentoperating procedures.

ANY use or operation of equipment that falls outside of the procedure described in the

operating manual must first be approved by the Nanofab Management.

The Nanofab Management will base decisions to authorize a change in operating procedure

proposed by a user on the recommendations of the user, Safety Committee (if applicable).

Operating procedures for particular tools can be obtained from the Nanofab website(http://cnst.nist.gov ).

5.5 Approved Users and Training Users must contact the appropriate Nanofab Cleanroom training staff or management to

become trained to operate equipment. The training schedules will be posted on the Nanofab Forum.

Only the Nanofab Staff may train a new user on a particular tool.

A new user must be formally tested and authorized by a Nanofab Training staff to be

approved to independently use a particular tool.

The Coral Software System will allow only approved users to log-in to the tool.

5.6 Scheduling A user must be authorized on that tool to reserve equipment for usage.

Tools are reserved using the Coral Software System described in 5.4.

If a user is not using the tool during the reserved time (within 30 minutes), another user mayaccess the tool without reservation.

Failure to cancel an unneeded reservation is inconsiderate to other users and causes

inefficient utilization of resources. It is realized that all projects require a certain processflow between tools so that one problem can throw off your entire schedule. Also, processes

can take longer than expected. Thus, while we encourage you to sign up ahead, we also

encourage you to be flexible and cooperative with other users in stretching, sharing, and

relinquishing time slots.

5.7 Coral Software System - Features Reserving (either a multi-day or multi-machine view) of equipment in order to better share

scarce resources among the members of the laboratory.

Software enabling and disabling of equipment to generate records of equipment use for

billing purposes.

Support for maintaining lists of qualified users for each piece of equipment and for checking

that each lab member is properly qualified to enable any given piece of equipment.

Support for reporting and displaying equipment problem and shutdown conditions and for

returning that equipment to normal service following repair by maintenance personnel.

Interface for adding new users to the system and for controlling projects and accounts to

which their laboratory use will be allocated.
http://cnst.nist.gov/http://cnst.nist.gov/


24/30


Mechanisms to allow staff members to charge users for equipment used on their behalf and

to independently re-charge their time to users.

Please see the tutorial at http://cnst.nist.gov to learn how to use Coral

5.8 Equipment Introduction, Installation, Modification, and Repair

ANY introduction, installation, modification, or repair of equipment must be approved by theNanofab Cleanroom Management.

The prioritization of installation, modification, or repair of equipment will be addressed by

the Nanofab Cleanroom Management.

5.9 Consumables, Regular Maintenance, and Standard Test Runs The Facility Cleanroom Technicians are responsible for replenishing of consumables, regular

equipment maintenance, and performing of standard test runs.

The Facility Cleanroom Technicians have procedures and schedules that describe and track

consumables replenishing, equipment maintenance, and standard test runs.

The Facility Cleanroom Technicians may delegate authority to specific users to replenish

consumables, provide for regular equipment maintenance, or perform standard test runs.

6. SAFETY POLICY

Contact ext. 2222 with emergencies

A separate Safety Manual describes the details of safety rules including chemical safety, gas

safety, and emergency response.

The Safety Manual can be obtained from facility web site http://nanofab.cnst.nist.gov .

The staff and management of the Nanofab have implemented all reasonable measures toensure that the laboratory provides a safe working environment.

It is the responsibility of all users, visitors, and staff to act in a safe manner at all times while

in the facility.

Safety rules and policies set forth in this manual and the Safety Manual are no substitute for

common sense. Operating safely is more important than getting your project, or anything

else, done. Ignorance of the rules, lack of common sense, language difficulties, carelessness,

and haste are not adequate excuses for unsafe behavior.

The CNST Nanofab Manager and Nanofab Staff have immediate authority on all safety

issues.

Users violating the safety rules of the facility or endangering the safety of themselves orother users may be denied further access to the facility at the discretion of the management.

All Certified Cleanroom Users must pass an annual safety and policy exam.

The Safety Committee will review the development and any revision of the Safety Manualand equipment operating procedures, and all other areas where safety is a concern.

The Safety Committee will review all safety incidents and will assist in preparing a report on

the incident.
http://nanofab.cnst.nist.gov/http://nanofab.cnst.nist.gov/


25/30


7. APPENDICIES

7.1 Names and Contact Information

Title Name Ext. E-mail Office

CNST Director Robert Celotta 8001 [email protected] 216/A221

Nanofab Manager Gerard Henein 5645 [email protected] 217/A239

Nanofab Assistant

Manager

Russ Hajdaj 2699 [email protected] 217/A247

Facility Technicians Larry Buck 2242 [email protected] 217/A243

Process Engineers Marc Cangemi 5993 [email protected] 217/A255

Richard Kasica 2693 [email protected] 217/A233

Lei Chen 2908 [email protected] 217/A227

Safety Committee Russ Hajdaj(Nanofab Safety

Coordinator)

2699 [email protected] 217/A247

James Mike

Blackmon(Environmental

Safety)

5822 [email protected] 301/B122

Dennis Myers(NIST Occupational

Health and Safety)

Division)

5823 [email protected] 301/B122
mailto:[email protected]:[email protected]:[email protected]:[email protected]:[email protected]:[email protected]:[email protected]:[email protected]


26/30


7.2 Approved Nanofab Chemical List

(For Additional Information on Chemicals, Please see the CNST Nanofab Safety Manual)

2-propanolAcetic Acid

Acetone

Aluminum EtchantAmmonium Hydroxide

Ammonium Peroxidisulfate

Buffered Oxide EtchCR7 Chromium Etchant

CR9 Chromium Etchant

HeliumHexamethyldisilazane

Hydrochloric AcidHydrofluoric Acid

Hydrogen PeroxideMethanol

Microposit 1165 remover

Microposit 351 DeveloperNitric Acid

Oxygen

PAE EtchantPhosphoric Acid

Potassium HydroxideRS 100 Photoresist Stripper

Silicic Acid

Silicon EtchantSulfuric Acid

Tetramethylammonium Hydroxide, 25%

Xenon Difluoride

Ammonia GasDichlorosilane

Forming gas

Hydrogen chloride gasHydrogen Gas

Nitrogen Gas

Oxygen GasSilane

Ethyl Alcohol

Methyl Alcohol

OxygenXylene


27/30


7.3 Nanofab Cleanroom Location Map

7.4 Nanofab Project Proposal FormTo Serve as a guideline the Project Proposal form current at the time of this revision is

included on the following page. Before submitting your proposal, please check theCNST website (www.cnst.nist.gov) for an up to date form.

B101B102B103B104B105

A101A102A103A104A106

B106
http://www.cnst.nist.gov/http://www.cnst.nist.gov/


28/30


CNST Nanofab Project Proposal Form (v2.0)

Project Title:

Proprietary Yes NoIf Collaborative, Name(s) of CNST Collaborator(s) ___________________________________________________

Principle Investigator (Person responsible for project if not Primary Researcher)

Name:

Affiliation:

If NIST: Lab Division Guest Researcher NIST Employee

Nationality (please specify country):

Category: Student Post Doc Senior Scientist Other

Email: Telephone:

Funding Agency:

Primary Researcher (Person who would visit the Nanofab, if not Project Leader)

Name:

Affiliation:




Email: Telephone:

Co-Researcher 1 (Any others working at the Nanofab)

Name:Affiliation:




Email: Telephone:

Co-Researcher 2 (Any others working at the Nanofab)

Name:

Affiliation:

If NIST:Lab Division Guest Researcher NIST Employee



Email: Telephone:

(If there are additional co-researchers, attach text containing names and the above information)


29/30


Please clearly answer the following:

1. Which aspects of this project require Nanofab capabilities?

2. Describe in some detail the work you intend to conduct in the Nanofab. Specify materials and chemicals you will

be using.

3. What equipment will be used to do the work described above, and what is the estimated usage time?


30/30

4. Expected start date and duration, and proposed budget.

NOTE: If applying for a fee waiver for non-proprietary research in support of the CNST mission, please answer the

following. (Non-proprietary research is not confidential, public access is permitted to the resulting data, and the

research in general will be published.)

5. Describe the long-term goal of your research project and its relation to the CNST mission to providemeasurement methods, standards and technology to support all phases of nanotechnology development from

discovery to production.

6. What is the expected significance of this project and its impact on the field?

Documents

Cleanroom Lab Manual