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1
BOOK OF ABSTRACTS
Institute of Optoelectronics Military University of Technology
Warsaw, Poland
2
The EXTATIC Welcome Week Workshop 2014 takes place in Warsaw (Poland) from
October 20th
to 24th
, 2014. The Workshop is organized under the Erasmus Mundus Joint
Doctoracte programme of the European Union on Extreme-ultraviolet and X-ray Technology
and Training for Interdisciplinary Coorporation (EXTATIC).
The aim of the EXTATIC Workshop 2014 is to provide an international forum for the
EXTATIC doctoral candidates to present and discuss their scientific achievements as well as
introduce new candidates starting the Programme this year.
Scope of the Workshop
The scope of the EXTATIC Welcome Week Workshop 2014 covers all aspects of EUV and
X-ray science and technology that exist in the EXTATIC Programme:
Laser and electrical discharge based light sources
Radiobiology
Optical systems
EUV and X-ray metrology
EUV nano-structuring and ablation of materials
Photoionization studies
Workshop webpage: http://www.ztl.wat.edu.pl/zoplzm/extatic/
3
Committees
Scientific Committee
Inam Ul Ahad (Military University of Technology, Poland)
John Costello (Dublin City University, Ireland)
Henryk Fiedorowicz (Military University of Technology, Poland)
Przemysław Wachulak (Military University of Technology, Poland)
Organizing Committee
Inam Ul Ahad (Military University of Technology, Poland)
Daniel Adjei (Military University of Technology, Poland)
Mesfin Getachew Ayele (Military University of Technology, Poland)
Alfio Torrisi (Military University of Technology, Poland)
Andrzej Bartnik (Military University of Technology, Poland)
Henryk Fiedorowicz (Military University of Technology, Poland)
Karolina Płatek (Military University of Technology, Poland)
Przemysław Wachulak (Military University of Technology, Poland)
4
Invited Speakers
Invited Lectures
1. Maciej Kozak – Synchrotron radiation and application in biology
2. Ryszard Sobierajski – X-ray free electron lasers and applications
3. Janusz Lekki – Radiobiology research using microfocus X-ray tube
4. Przemysław Wachulak – Nanoimaging using soft X-ray and EUV sources
Introductory Lectures
1. Eckhardt Foerster – X-ray optics and spectroscopy
2. Libor Juha – Interaction of EUV and X-ray pulses with matter
EXTATIC Partners Presentations
1. John Costello (DCU) – Research facilities and programmes at DCU and
internationally
2. Serhyi Danylyuk (RWTH) – EUV applications at RWTH Aachen
3. Jiri Limpouch (CTU) – Research of plasmas produced by intense laser pulses
and by capillary discharges at FNSPE CTU in Prague
4. Piergiorgio Nicolosi (UP) – EUV optics research at Padova
5. Tom McCormac (UCD) – Atomic, molecular and plasma physics at UCD
6. Henryk Fiedorowicz (MUT) – Laser plasma sources of soft X-rays and
extreme ultraviolet (EUV)`for application in science and technology
Associated Partners Presentations
1. Michael Meyer (European XFEL) - Investigations of atomic and molecular
photoionization dynamics at short-wavelength Free-Electron Lasers
2. Leszek Dobrzanski (ITME) - Photodetectors and diffractive optics at ITME
3. Martin Regehly (greateye) - Low readout-noise CCD-cameras for UV, VUV,
EUV and X-ray imaging and spectroscopy
4. Ladislav Pina (RIGAKU) -
ERS Invited Presentations
1. Bartłomiej Jankiewicz - Plasmonic nanostructures for applications in surface
enhanced spectroscopies, photocatalysis and photovoltaics
2. Przemysław Zagrajek - Detectors of THz radiation based on FETs
5
Programme Monday, October 20
th, 2014
15.00-15.15 Opening
15.15-16.00 M. Kozak (invited)
Synchrotron radiation - selected application in biology
16.00-16.30 I.U. Ahad
Extreme ultraviolet surface modification of polymers for biomedical
engineering applications Extreme ultraviolet surface modification of polymers
for biomedical engineering applications
16.30-17.00 Coffee break
17.00-17.30 D. Adjei
Development and application of a compact laser plasma soft X-ray source for
radiobiology experiments
17.30-18.00 H. Kim
EUV interference lithography with fractional Talbot effect
Tuesday, October 21st, 2014
09.00-09.45 R. Sobierajski (invited)
X-ray free electron lasers and applications
09.45-10.15 G. Bayene
Sn based laser assisted vacuum arc EUV source
10.15-10.45 F. Nawaz
Capillary discharge based XUV sources and applications in imaging
10.45-11.15 Coffee break
11.15-12.00 J. Lekki (invited)
Radiobiology research using a microfocus X-ray tube
12.00-12.15 M. Ayele
Compact laser plasma soft X-ray source for contact microscopy experiments
12.15-12.30 M. Tryus
Development of near-edge multi-angle spectroscopic EUV reflectometry
12.30-12.45 G. Wubetu
Polarization resolved laser produced aluminium plasma emission
12.45-13.00 A. Comisso
Characterization of TiO2 thin films and novel TiO2/Sc multilayers in the EUV
and soft X-ray region
13.00-15.00 Lunch break
6
15.00-15.45 P. Wachulak (invited)
Nanoimaging using soft X-ray and EUV sources
15.45-16.00 Hu Lu
Photoabsorption in ultrashort duration UV and VUV laser fields
16.00-16.15 M. Odstracil
Coherent diffraction imaging using laboratory light sources
16.15-16.30 R. Loksani
Laser-produced plasmas of Mo, Ru, Rh and Pd in the 2 to 13nm spectral
region
16.30-17.00 Coffee break
17.00-17.15 M. Miszczak
Optics for short pulse X-ray sources
17.15-17.30 S.J. Davitt
The slit-less spectrometr: a compact Fourier transform spectrometer with no
moving parts
17.30-17.45 W. Hanks
Numerical modelling of laser-plasma interaction
Wednesday, October 22nd
, 2014
09.30-10.15 E. Foerster (invited)
X-ray optics and spectroscopy
10.15-11.00 L. Juha (invited)
Interaction of EUV and X-ray pulses with matter
11.00-11.30 Coffee break
11.30-12.00 J. Costello (DCU presentation)
Research facilities and programmes at DCU and internationally
12.00-12.30 S. Danylyuk (RWTH presentation)
EUV applications at RWTH Aachen
12.30-13.00 J. Limpouch (CTU presentation)
Research of plasmas produced by intense laser pulses and by capillary
discharges at FNSPE CTU in Prague
13.00-15.00 Lunch break
15.00-15.30 M. Meyer (DESSY invited presentation)
Investigations of atomic and molecular photoionization dynamics
at short-wavelength Free-Electron Lasers
15.30-16.00 L. Dobrzański (ITME invited presentation)
Photodetectors and diffractive optics at ITME
16.00-16.30 M. Regehly (greatye invited presentation)
Low readout-noise CCD-cameras for UV, VUV, EUV and X-ray imaging and
spectroscopy
16.30-17.00 Coffee break
17.00-17.30 L. Pina (RIGAKU invited presentation)
18.00-20.00 Dinner
7
Thursday, October 23rd
, 2014
09.00-09.30 P. Nicolosi (UP presentation)
EUV optics research at Padova
09-30-10.00 Tom McCormack (UCD presentation) Atomic, Molecular and plasma physics at UCD
10.00-10.30 H. Fiedorowicz (MUT presentation)
Laser plasma sources of soft X-rays and extreme ultraviolet (EUV)
`for application in science and technology
10.30-11.00 Doctoral Panel meeting
11.00-11.30 Coffee break
11.30-13.00 Doctoral Panel meeting
13.00-15.00 Lunch break
15.00-17.00 Laboratory tour/Executive Management Committee Meeting
Friday, October 24th
, 2014
09.00-11.00 EXTATIC project presentations DC 2014
A. Torrisi
Nanoscale imaging using compact laser plasma SXR sources based on a
double stream gas-puff target and Fresnel optics
E.F. Barte
Using microstructures for laser-induced X-ray source enhancement from
plasma produced by femtosecond and nanosecond lasers
J. Bussmann
Coherent diffractive imaging employing a compact discharge plasma EUV
light source
D. Kos
A.E.H. Gaballah
11.00-11.30 Coffee break
11.30-12.00 B. Jankiewicz (ESR invited presentation)
Plasmonic nanostructures for applications in surface enhanced spectroscopies,
photocatalysis and photovoltaics
12.00-12.30 P. Zagrajek (ESR invited presentation)
Detectors of THz radiation based on FETs
12.30-13.00 Summary & Closing
13.00-15.00 Lunch
8
2014 EXTATIC Welcome Week Workshop October 20-24, 2014, Warsaw, Poland
Time Schedule
Time Monday Time Tuesday Time Wednesday Time Thursday Time Friday
Arrival 09.00-09.45
Invited presentation
IP -2
R.Sobierajski
09.00-09.30
Registration &
Opening
09.00-09.30
EXTATIC Partner
Presentation P.Nicolosi
09.00-11.00
EXTATIC projects
presentations (DC 2014
+ supervisors)
A. Torrisi
E.F. Barte
J. Bussmann
D. Kos
A. Gaballah
09.30-10.15
Introductory lecture 1
E. Foerster
09.30-10.00
EXTATIC Partner
Presentation T.McCormack 09.45-
10.15 DC 2012-4
G. Beyene
10.00-10.30
EXTATIC Partner
Presentation H.Fiedorowicz
10.15-10.45
DC 2012-5
M. Nawaz
10.15-11.00
Introductory lecture 2
L. Juha
10.30-11.00
Doctoral Panel meeting
10.45-11.15
Coffee Break
11.00-11.30
Coffee Break
11.00-11.30
Coffee Break
11.00-11.30
Coffee Break
11.15-12.00
Invited presentation
IP -3
J. Lekki
11.30-12.00
EXTATIC Partner
Presentation J. Costello
11.30-12.00
Doctoral Panel meeting: ;
finalise doctoral agreement,
discuss modules
specific to institution
11.30-12.00
ESR Presentation
B.Jankiewicz
12.00-12.15
DC 2013-1 M. Ayele
12.00-12.30
EXTATIC Partner
Presentation S. Danylyuk
12.00-12.30
12.00-12.30
ESR Presentation P.Zagrajek
12.15-12.30
DC 2013-2 M. Tryus
12.30-12.45
DC 2013-3 G. Wubetu
12.30-13.00
EXTATIC Partner
Presentation J. Limpouch
12.30-13.00
12.30-13.00
Summary &
Closing 12.45-13.00
DC 2013-4 A. Comisso
13.00-15.00
Registration & Lunch
13.00-15.00
Lunch 13.00-15.00
Lunch 13.00-15.00
Lunch 13.00-15.00
Lunch
15.00-15.15
Opening 15.00-15.45
Invited presentation
IP -4
P.Wachulak
15.00-15.30
Associated Partner DESY
M.Meyer
15.00-17.00
Laboratory Tour /
Executive Management Committee
Meeting
Departure
15.15-16.00
Invited presentation
IP -1
K. Kozak
15.30-16.00
Associated Partner ITME
L. Dobrzański 15.45-16.00
DC 2013- 5 H. Lu
16.00-16.30
DC 2012-1
I.U.Ahad
16.00-16.15
DC 2013-6
M. Odstracil
16.00-16.30
Associated Partner
M. Regehly 16.15-
16.30 DC 2013-7
R. Lokasani
16.30-17.00
Coffee Break
16.30-17.00
Coffee Break
16.30-17.00
Coffee Break
17.00-17.30
DC 2012-2
D.Adjei
17.00-17.15
DC 2013-8
M. Miszczak
17.00-17.30
Associated Partner
RIGAKU L.Pina 17.15-
17.30 DC 2013-9 S.J. Davitt
17.30-18.00
DC 2012-3
H. Kim
17.30-17.45
DC 2013-10 W. Hanks
17.30-18.00
18.00-20.00
Reception 18.00-20.00
Dinner
9
Invited presentations
10
IP -1
Synchrotron radiation - selected application in biology
Maciej Kozak
Department of Macromolecular Physics, Faculty of Physics, Adam Mickiewicz University,
Poznan, Poland.,
E-mail: [email protected]
The first experiment, which demonstrated the generation of synchrotron radiation by the use
of the small laboratory synchrotron, was carried out over 60 years ago in a group of Pollock
[1]. The next decades brought significant technological development in the field of generation
of synchrotron radiation. However, the rapid increase in the use of synchrotron radiation in
biology we observe since the 80’s of the last century [2].
At the moment, the leading areas of science, for which synchrotron radiation is the primary
research tool are structural biology and protein crystallography [3,4]. Today, more than 200
research stations in the synchrotrons worldwide can be used to study the structure of
biological samples.
During the lecture will be introduced basic information on synchrotron radiation and the
technical requirements for beam lines dedicated biological measurements [5]. The
presentation will be illustrated by some exemplary results of structural studies of proteins,
nucleic acids, lipid nanosystems, cell organelles or tissues [6-9].
References
[1] F.R. Elder, A.M. Gurewitsch, R.V. Langmuir, H.C. Pollock, Phys. Rev. 71 (1947) 829
830.
[2] M. Jaskolski, Z. Dauter, A. Wlodawer, FEBS Journal 281 (2014) 3985-4009.
[3] S. Skou, R.E. Gillilan, N. Ando, Nat. Protoc. 9 (2014) 1727-1739.
[4] I. Schlichting, J. Miao, Curr. Opin. Struct. Biol. 22 (2012) 613-626.
[5] E. Abola, P. Kuhn, T. Earnest, R.C. Stevens, Nature Struct. Biol. 7 (2000) 973-977
(Suppl.).
[6] A. Yonath, J. Royal Sci. Interface 6 (2009) S575-S585.
[7] M. Jaskolski, Acta Phys. Polon. A 117 (2010) 257-263.
[8] M. Kozak (2007). in: CP958, Nucl. Phys. Meth. Acceler. in Biol. and Med., (Ed. C.
Grranja, C. Leroy, and I. Stekl) AIP 978-0-7354-0472-4/07 (2007) pp. 178-182.
[9] C.A. Neldam, E.M. Pinholt, J. Cranio-Maxillofacial Surg. 42 (2014) 801-805.
11
IP -2
X-ray free electron lasers and applications.
Ryszard Sobierajski
Institute of Physics Polish Academy of Science, Warsaw, Poland
E-mail: [email protected]
Interaction of intense ultrashort extreme ultraviolet (XUV) and soft x-ray pulses with solid
matter will be described. The presentation is related to the development of presently most
sophisticated 4th generation synchrotron radiation sources - the short-wavelength free
electron lasers (FELs). With the advent of the sources, a unique combination of radiation
properties creates new research possibilities. In particular, radiation intensity produced in
FELs, by many orders of magnitude exceeds intensities available from other monochromatic
XUV and x-ray sources, making thus it possible to excite a solid material through phase
transition points. Thank to this a systematic studies of structural changes in materials and
electronic properties, as well as transition dynamics and energy transfer processes are
possible. As typical pulse duration, on the order of femtoseconds, is shorter than most of the
time constants related to structural transformations and to the energy transfer, it is possible to
separate the processes from influence of radiation absorption during the pulse duration.
Moreover, the photon energies, larger than value of energy gap in any material makes it
possible to avoid nonlinearities in absorption what radically simplifies the modeling of the
subsequent physical processes. However, properties of the intense FEL beam create, apart
new experimental opportunities, the extreme demands to optical elements applied in the
experimental equipment. Amongst the most serious issues is radiation load imposed on
detectors and to most of optical elements served for beam diagnostics, controlling and
shaping. For the above reasons, bulk silicon and nanolayers - materials applied in optical and
detection systems with intense short-wavelength beams - are of a particular interest.
Short introduction to the FEL sources will be presented. It will be followed by results of the
recent experimental work at three FEL facilities – FLASH in Germany, LCLS in US and
SACLA in Japan. Structural changes in bulk silicon, single- (a-C, B4C) and multilayer
(Mo/Si, MoNSiN) coatings under single shot irradiation will be described. In specific cases
they will be compared to the results of the irradiations with nanosecond pulses from table-top
plasma sources. Experimental damage threshold will be explained with simple theory.
Acknowledgments:
This work was supported by the Polish National Science Center (Grant No. DEC-
2011/03/B/ST3/02453).
12
IP-3
X-ray microprobe in radiobiology studies
Janusz Lekki
Institute of Nuclear Physics PAN, Cracow, Poland
E-mail: [email protected]
Radiation microprobes established new standard in radiobiology studies and have great
impact in a recent rapid increase in knowledge of biological pathways and the
physical/chemical processes occurring during radiation induced damage of cells and
their subsequent repair or elimination. Chronologically, mainly ion microprobes were used
to investigate cell response as a function of a precisely delivered radiation dose, counting the
numbers of apoptotic cells, irradiated cells forming micronuclei and surviving cells with
chromosome aberrations. Perhaps the most striking impact is related to experiments showing
non-targeted effects, when radiation induced damage is observed in some non-irradiated cells
in the vicinity of irradiated ones. Clinical medicine could vastly profit from the progress in
reliable knowledge about radiation induced non targeted effects. Another, vividly discussed
issue is the postulated existence of thresholds in the dose-response characteristics of the
biological system: at certain dose and dose rate levels, saturation of the repair centre
mechanism occurs and, at higher doses, a new repair mechanism emerges. If the threshold
concept is validated, such findings could have large impact in radiation protection and
microdosimetry.
It was however very clear from the beginning that the biological endpoints of radiation
damage depend not only on radiation dose, but also on the radiation quality – especially on
the density of ionization events and hence on the value of Linear Energy Transfer (LET).
Experiments performed with targeted light ions have subsequently been extended to heavier
ions of different energy, electron beams, gamma and X-rays, and UV radiation. In this
spectrum, X-ray microprobe is a tool delivering low-LET (< 1 keV/µm) radiation of sparse
ionization, causing scattered effects distributed in the whole volume. In spite of the fact that,
finally, it’s ionisation of the organic matter that is responsible for radiation damage, the above
mentioned features of X-ray radiation make it a very distinctive tool, delivering data
complementary to ion irradiation results.
The first construction of this type was the Gray Cancer Institute microprobe, delivering soft
radiation (carbon K line of 278 eV), focused with the Fresnel zone plate. Currently, several
groups develop different types of X–ray microprobes in wide range of X–ray energies – both
as standalone laboratory devices and setups at the synchrotron radiation facilities. In the
lecture, the short overview of current X-ray microprobe constructions will be shown, with the
special emphasis of the IFJ PAN design. Parallel to microprobe issues presentation, main
concepts of the targeted X-ray radiobiological experiments (already performed or eventually
possible) and the expected findings will be discussed.
13
IP -4
Nanoimaging using soft X-ray and EUV sources
Przemysław Wachulak
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
E-mail: [email protected]
Visualizing small objects in the nano-meter scale with high spatial resolution is very
important from the point of view of modern science and technology. To extend the diffraction
limit associated with the wavelength of radiation, one way is to reduce the wavelength,
allowing smaller features to be resolved.
This requires short wavelength sources, capable of delivering sufficient flux to achieve high
signal-to-noise ratio images. Those sources are synchrotrons, free electron lasers, but also
compact sources, such as laser-plasma, discharge-pumped, or high harmonic generation
sources plasma, among others.
The goal of achieving nanometre spatial resolution cannot be accomplished without
specialized optics, often dedicated for specific spectral range, mostly reflective and
diffractive, sometimes refractive optics for keV-range photon energies. Moreover, many
unique imaging techniques were also developed and will be mentioned in the presentation,
including: holography, Talbot imaging, diffraction (lensless) imaging, zone plate based
imaging, scanning microscopy, contact microscopy and tomography.
Of course this brief lecture cannot address all available possibilities to achieve nanoscale
imaging, however, it might be a good introduction to this innteresting and novel topic.
14
IP -5
X-ray crystal optics and spectroscopy
Eckhart Förster
Institute of Optics and Quantum Electronics, Friedrich Schiller University, Jena
and Helmholtz Institute Jena, Jena, Germany
E-mail: [email protected]
Much effort has been given both in development of modern dedicated synchrotrons and free
electron lasers with unique properties. Also, femtosecond laser plasma sources provide ultra-
short x-ray pulses of high peak brilliance and can thus be complementary x-ray sources to the
undulator based sources. All these modern x-ray sources need dedicated x-ray optics for
diagnostics and applications, respectively. An overview about different schemes of x-ray
optics will be given; these optic instruments differ in efficiency, spectral selectivity, and
focusing ability. Many x-ray experiments require either high-efficient point-to-point imaging
in narrow spectral channels or high spectral resolution, sometimes combined with 1-D spatial
resolution, perpendicular to the dispersion plane.
In order to fulfill all the different demands of these x-ray diagnostic or real-time application
experiments, our x-ray crystal optics have been designed by using ray-tracing and Bragg
reflection codes for the 1D or 2D bent crystals or combinations thereof. Selection of the bent
crystal spectrometers starts from values of wavelength (0.01 nm - 3 nm), curvature (radii: 50
mm - 2 m) and imaging parameters (1 - 30). In the preparation process, extreme care has been
set value on crystal perfection, selection of optimal reflections, precision bending, and
measurement of x-ray imaging and reflection properties. High resolution have been obtained
when structurally perfect wafers of Si, Ge, Quartz and Phthalate crystals are prepared whilst
monitored by x-ray topography and diffractometry.
15
IP -6
Interaction of intense extreme ultraviolet and X-ray radiation with matter
Libor Juha
Department of Radiation and Chemical Physics, Institute of Physics ASC, Prague, Czech Rep.
E-mail: [email protected]
Interaction of extreme ultraviolet radiation (EUV or XUV; 10 nm < < 100 nm), soft x-rays
(SXR; 0.2 nm < < 30 nm) and x-rays (< 0.2 nm) with matter differs dramatically from that
of the long-wavelength (i.e., UV-Vis-IR) radiation. The interaction of the short-wavelength
radiation occurs mostly due to the photo-effect in atoms of the irradiated material. Valence
electrons play in general a minor role in the interaction. Thus an absorption coefficient
depends mostly on the elemental composition and density of the irradiated material. Contrary
to the long-wavelength radiation, there is a little influence of the fine chemical structure of the
particular material chosen for an irradiation.
In addition to that, the short-wavelength radiation is deposited much effectively in the
material because an effect of plasma reflection of laser light is reduced. It follows from the
fact that in a certain spatial position in the plasma, where the oscillation frequency of plasma
electrons (so called plasma frequency and/or Langmuir frequency) oscillating in the
electromagnetic field is equal to the frequency of laser radiation, the index of refraction
becomes zero and the electromagnetic wave is reflected. Langmuir frequency is a function of
electron density (ne): e2 = ne e
2 / 0 me . Laser frequency is equal to the Langmuir frequency
at the critical density which depends on the laser wavelength in the following way: nc
[electrons in cm3] = 10
21 x
-2 [m]. Let compare a typical EUV and VUV laser from this
point of view. A critical electron density nc = 5x1023
cm-3
can be expected for 46.9-nm
radiation in the EUV spectral range. It means that the EUV-laser radiation can penetrate all
the parts of the plasma formation volume with an electron density < 5x1023
cm-3
. This value is
comparable to an electron density of solids. Therefore the sample can be heated by the short-
wavelength radiation in the whole volume irradiated. Thus the technique is called a
volumetric heating. In comparison, the critical density is at least 15x smaller for ArF excimer
laser. Expanding ArF-laser-induced plasma plume begins to reflect the 193-nm laser radiation
at a certain moment of the interaction course.
Currently, we may identify at least six strong sources of motivation to conduct systematic
study in the field of interaction of intense short-wavelength electromagnetic interaction with
matter: (a) Estimating and minimizing damages to surfaces of highly irradiated EUV/x-ray
optical elements developed and used for the guiding and focusing of short-wavelength laser
beams as well as those used for long-term irradiation with high repetition rate sources, (b)
durability assessments of materials suggested for the first walls of ICF reactors and optical
elements exposed to intense EUV/x-ray radiation in a laser-plasma interaction chamber, (c)
diffraction-limited ultrastructuring and patterning of solid surfaces for fabrication of
microelectronic and micromechanical elements and devices, (d) pump-and-probe, imaging
and high-dose-rate irradiations in radiation chemistry, radiobiology, and other scientific and
technological applications of high-power short-wavelength sources, (e) determination of
radiation field characteristics: imaging of spatial energy distribution in a focused beam
ablatively imprinted on the irradiated material and determination of pulse energy content, and
(f) production of very dense plasmas with low electron temperatures, i.e., warm dense matter
(WDM). In this contribution, specific features of the intense short-wavelength radiation-
matter interaction will be discussed with respect to the above-mentioned applications.
16
IP -7
Plasmonic nanostructures for applications in surface enhanced
spectroscopies, photocatalysis and photovoltaics
Bartłomiej Jankiewicz, Magdalena Gajda-Rączka, Bartosz Bartosewicz, Paulina Dobrowolska
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
E-mail: [email protected]
Plasmonic nanostructures, in form of noble metal colloids, hybrid nanostructures and thin
films, have a great potential for various applications due to their unique optical properties.
These materials exhibit surface plasmon resonance at certain wavelengths and accumulate
energy of electromagnetic field in nanosize regions called hot spots. The spectral position of
resonances is dependent on geometry of nanostructures and types of materials they are made
of. Plasmonic nanostructures are investigated for many applications including surfaced
enhanced spectroscopies such as Raman spectroscopy (SERS) [1,2], IR spectroscopy
(SEIRA) [1,2] or fluorescence spectroscopy (SEF) [3], cancer therapy [4], as well as
photovoltaics and photocatalysis.
We report here results of investigations on fabrication, characterization and applications of
various plasmonic nanostructures based on the noble metals (gold, silver), silica and titania
(including those shown below) fabricated using chemical methods. The results presented here
are effect of the research projects, which have been carried out in the Nanoplasmonic
Laboratory of IOE MUT for the last three years.
Acknowledgments
This work is supported by The National Centre for Research and Development, Grant No. O
N507 282540, the National Science Centre, Grant No. 2011/03/D/ST5/06038. This work was
also funded under grant A-1152-RT-GP “RAMBO” carried out in the frame of the EDA JIP
on CBRN protection.
References
[1] Le, F., Brandl, D. W. Urzhumov, Y. A., Wang, H., Kundu, J., Halas, N. J. Aizpurua, J.,
Nordlander, P. ACS Nano 2, 707-718 (2008).
[2] Levin, C. S., Kundu, J., Barhoumi, A., Halas, N. J. Analyst, 134, 1745-1750 (2009),
[3] Fort, E., Grésillon, S. J. Phys. D: Appl. Phys. 41, 013001, (2008)
[4] Lin, A. W. H, Lewinski, N. A., West, J. L., Halas, N. J., Drezek, R. A. J. Biomed. Opt.
10, 064035-1 (2005).
17
IP -8
Detectors of THz radiation based on FETs
Przemysław Zagrajek
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
E-mail: [email protected]
Terahertz radiation is a part of electromagnetic spectrum located between millimeter and
infrared waves. It has features interesting for various disciplines, e.g. surveillance (high
transmittance through clothing and packing materials, fingerprints of explosive materials),
medicine (imaging of diseased tissue), telecommunication (possibility of high speed
communication due to high bandwidth).
Development of applications still suffers from a lack of sensitive, compact and chip detectors.
One of the candidates, which are intensively investigated, are devices based on transistors.
According to the theory proposed by Dyakonov and Shur, it is possible to detect THz
radiation by Field Effect Transistors. Due to the plasma oscillations in the conduction channel
such kind of the detector is able to work with frequencies much higher than cut-off frequency
of the transistor. Detection proces was observed in High Electron Mobility Transistors as well
as in silicon MOSFETs.
Parameters of the detector like responsivity, frequency dependence, response time are
measured during characterization process.
18
EXTATIC Partners
Presentations
19
PP -1
Research facilities and programmes at DCU and internationally
John T. Costello (on behalf of the DCU partners and collaborators)
School of Physical Sciences & NCPST: Dublin City University, Dublin 9, Ireland
E-mail: [email protected]
At DCU we are mainly focused on the interaction of intense laser beams with matter.
Specifically we are interested in laser plasma generation, diagnostics and application in areas
such as pulse laser deposition (PLD), laser induced breakdown spectroscopy (LIBS),
Vacuum-UV (VUV) and Extreme-UV (XUV) light sources for photoionization of atoms and
ions in plasma plumes. Although much of our focus is on optical diagnostics from the Vis/UV
to the XUV range we are also growing our interest in particle (specifically ion) diagnostics.
The main staff involved are Eugene Kennedy (Professor Emeritus), Paddy Hayden (SFI SIRG
PI), Jean-Paul Mosnier (Senior Faculty), Mossy Kelly (PD Fellow), Pramod Pandey (PD
Fellow) and Colm Fallon (PD Fellow) with 8 research students on site and 2 incoming.
Away from DCU we are working in international collaborations on photoionization processes
in atoms and molecules at synchrotrons such as SOLEIL (Orsay, France) and XUV/X-ray free
electrons lasers (FELs) such as FLASH-Hamburg, LCLS-Stanford and FERMI@ELETTRA-
Trieste. The main experimental collaborators here are Jean-Marc Bizau (Orsay), Michael
Meyer (XFEL GmbH), Reinhard Kienberger (MPQ-Garching) and Adrian Cavalieri (CFEL-
Hamburg). Currently the main PD Fellow from our side is Mossy Kelly. Theoretical work is
led by Lampros Nikolopoulos both at DCU and in the frame of international collaborations.
The short talk will introduce the current facilities/programmes and those in planning/
development. Some illustrative published work from DCU and internationally includes:
Dichroism in the above-threshold two-colour photoionization of singly charged neon
V Richardson et al., J. Phys. B: At. Mol. Opt. Phys. 45 085601 (2012)
Ultrafast X-ray pulse temporal characterization for free-electron lasers
I Grguras et al., Nature Photonics 6 852-857 (2012)
Atomic mass dependent electrostatic diagnostics of colliding copper laser plasma plumes
P Yeates, C Fallon, E T Kennedy and J T Costello, Physics of Plasmas 20, 093106 (2013)
Dual-pulse laser induced breakdown spectroscopy with ambient gas in the vacuum ultraviolet:
optimization of parameters for detection of carbon and sulphur in steel
X Jiang, P Hayden, J T Costello and E T Kennedy, Spectrochimica Acta Part B: Atomic Spectroscopy
901 106-113 (2014)
Determining the polarization state of an extreme ultraviolet free-electron laser beam using atomic
circular dichroism
T Mazza et al., Nature Communications 5, 3628 (2014)
20
PP -2
EUV applications at RWTH Aachen
S. Danylyuk1, L. Juschkin
2
1Chair for Technology of Optical Systems, RWTH Aachen University
2Chair for the Experimental Physics of EUV, RWTH Aachen University
Email: [email protected]
The presentation will introduce a spectrum of EUV-related activites at the RWTH Aachen
university. Emphasis will be made on EUV metrology applications, such as EUV
reflectometry and defect inspecion, as well as on EUV interference lithography and proximity
printing activities. Emerging activities on EUV coherence diffraction imaging and tabletop
EUV magnetic circular dichroism imaging that can be of interest for EXTATIC community
will be also presented. Potential and perspectives of the laboratory based EUV/Soft-X-ray
applications will be discussed.
21
PP -3
Research of plasmas produced by intense laser pulses and by capillary
discharges at FNSPE CTU in Prague
J. Limpouch, A. Jančárek, P. Gavrilov, L. Pína
1Czech Technical University in Prague, Faculty of Nuclear Sciences and Physical
Engineering, Prague, Czech Republic
E-mail: [email protected]
We shall briefly introduce Czech Technical University in Prague together with our faculty
and with our Department of Physical Electronics. Research in the fields concerning
EXTATIC is performed in the laboratory of capillary discharges, in the laboratory of
femtosecond laser and in collaborating laboratories of other institutions.
Our capillary discharge installations will be described in detail. Our capillaries are filled
either by argon or nitrogen. Lasing in collisionally pumped argon at wavelength 46.9 nm was
demonstrated. Attempts to achieve lasing via recombination scheme in nitrogen have not been
successful yet due to stringent requirements on the high-voltage source. Capillary discharge
serves also as intense source of incoherent XUV radiation with various possible applications.
EUV radiation of argon laser was focused by symmetric ellipsoidal optics in order to enhance
radiation intensity.
Our laboratory of 10 mJ, 60 fs, 10 Hz Ti: Sapphire laser will be presented. Our laser is used
for surface modifications of various materials, for generation of XUV radiation in various
targets and also for some non-linear optics experiments. Our department has also capability to
prepare targets with various nanostructured surfaces. We are also collaborating in experiments
at PALS laboratory equipped with kJ-class subnanosecond iodine laser and 25-TW
femtosecond Ti-sapphire laser. Our groups has also vast expertize in fluid and PIC numerical
simulations of plasma dynamics.
22
PP -4
EUV optics research at Padova
P. Nicolosi
Dept. Of Information Engineering, Univ. of Padova and IFN CNR UOS Padova
E-mail: [email protected]
EUV Optics research carried on at Department of Information Engineering of University of
Padova and at LUXOR UOS of Padova Institute of Photonics and Nanotechnolgy CNR will
be presented. Emphasis will be made on Multilayer optics development, SPACE
instrumentation, Synchrotron and FEL instrumentation and optics for industrial applications.
23
PP -5
Laser plasma sources of soft X-rays and extreme ultraviolet (EUV)
for application in science and technology
H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, M. Szczurek, P.W. Wachulak
D. Adjei, I.U. Ahad, M.G. Ayele, T. Fok, A. Szczurek, A. Torrisi, Ł. Węgrzyński
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
E-mail: [email protected]
The Institute of Optoelectronics (IOE) (www.ioe.wat.edu.pl) is an interdisciplinary academic
research institute at Military University of Technology (MUT) with a mission to support
research and education in optoelectronics and lasers. The research staff of 180, including 100
scientists and 60 engineers and technicians, pursues numerous research projects funded by the
government or industry. IOE is a leading research institution on laser development and
application in Poland. The specific areas of research activities in the field include: laser optics
and electronics, laser systems, laser-matter interactions, laser cleaning, laser nanotechnology,
laser ranging and sensing.
The Laser-Matter Interaction (LMI) research group (www.ztl.wat.edu.pl/zoplzm) participating
in the EXTATIC programme is specializing in development of laser-driven X-ray and EUV
sources and their applications in science and technology. The sources are based on a gas puff
target approach. The gas puff targets formed by pulsed injection of a small amount of gas
under high-pressure are irradiated with nanosecond laser pulses from commercial Nd:YAG
lasers. We use lasers generating pulses with time duration from 1ns to 10ns and energies from
0.5J to 10J at 10Hz repetition rate. The targets are produced with the use of a valve system
equipped with a special nozzle to form a double-stream gas puff target which secures high
conversion efficiency without degradation of the nozzle and production of target debris. The
sources are equipped with optical systems to collect soft X-rays and EUV radiation and form
the radiation beam, including grazing incidence axisymmetrical ellipsoid mirrors, a “lobster
eye” type grazing incidence multi-foil mirror, and an ellipsoidal mirror with Mo/Si multilayer
coating. The EUV source with the grazing incidence ellipsoid mirror is used for processing of
materials by direct EUV photo-etching. Efficient micro- and nanoprocessing of various
polymers was demonstrated. EUV modification of polymer surfaces for biocompatibility
control is studied under the EXTATIC project. The source with the ellipsoidal mirror with
Mo/Si multilayer coating has been used for imaging with nanometer resolution using a
Fresnel zone plate as the objective. EUV imaging with the spatial resolution of about 50nm
has been demonstrated. The source with the grazing incidence ellipsoid mirror as the
condenser and the grazing incidence hyperboloid/ellipsoid (Wolter I type) mirror as the
objective was used for imaging in the “water window” wavelength range with sub-micrometer
resolution. Nanoimaging with soft X-ray and EUV photons will be studied under the
EXTATIC project. Laser plasma soft X-ray sources for application in radiobiology and
contact microscopy are developed under the EXTATIC projects. The EUV sources are also
used in research on photoionization processes of gases injected into the interaction region and
creation of a photoionized plasma. Spectra in the EUV/VUV region from photoionized
plasmas are measured using a grazing incidence, flat-field spectrometer. The EXTATIC
project on this subject has been proposed. The LMI group poses also a 10TW femtosecond
laser system to be used in the experiments on generation of ultra-short X-ray pulses and high-
order harmonic generation (HHG).
24
PP- 6
Atomic, Molecular and plasma physics at UCD
Tom McCormack*
1University College Dublin,Dublin, Ireland
The Atomic, Molecular and Plasma Physics Group at the School of Physics is a world leader
in soft x-ray and EUV physics and technology. We have developed a world class set of
experimental, computational and modelling laboratories. Our lab space, of over 400 square
metres, includes an array of photon spectrometers from the x-ray to the infra-red, an
electrostatic ion spectrometer, a photoelectron spectrometer and lasers that allow us to explore
a vast range of plasma parameters and examine them over a range of spectral, spatial and
temporal resolutions, unique in a university lab in the world. The School of Physics enjoys the
support of electrical and mechanical workshops (4.5 staff) that are essential for experimental
research projects.
The group currently consists of 5 academics, 3 postdoctoral researchers and 8 PhD students.
It collaborates with researchers at Utsunomiya University, The Japanese National Instiute for
Fusion Science, ILE Osaka, Tokyo Metropolitan University, NIST, JILA, Berkeley and
Lanzhou. The Group has made a major contribution to the development of EUV Lithography
light sources for semiconductor lithography. Over the last 6 years the group has received over
€5 million in research awards. These awards have covered the full gamut of research projects
looking at fundamental physics in plasmas and EUV/soft x-ray spectroscopy, to applied
research awards. We have also received substantial industrial funding and have begun
commercialiation of our research through our spin-out company NewLambda Technologies
Ltd (http://newlambda.com).
25
EXTATIC Associated Partners
Presentations
26
AP -1
Investigations of atomic and molecular photoionization dynamics
at short-wavelength Free-Electron Lasers
M. Meyer1, T. Mazza
1, A. DeFanis
1, M. Ilchen
1, M. Kelly
2, J.T. Costello
2, P. O’Keeffe
3,
P. Lambropoulos4, N. Kabachnik
1,5 and A. Kazansky
5
1European XFEL GmbH, Hamburg, Germany
2Dublin City University: School of Physical Science and NCPST, Dublin, Irland
3CNR: Instituto di Struttura della Materia, Monterotondo Scalo, Italy
4IESL-FORTH and University of Crete:Physics Department, Heraklion, Greece
5Donostia International Physics Center, San Sebastian, Spain
E-mail:[email protected]
The unprecedented characteristics of new XUV and X-ray Free Electron Lasers, such as
FLASH, FERMI and LCLS, have stimulated numerous investigations focusing on the detailed
understanding of fundamental photon-matter interactions in atoms and molecules. In
particular, the effect of high intensities (up to 1016
W/cm2) giving rise to multiple ionization
processes as well as the temporal evolution of ultra-fast photo-induced processes (down to a
few 10-15
s) can be studied for the first time in the short wavelength regime, i.e. at photon
energies high enough to excite and to interact with strongly bound core electrons.
In recent experiments, the high intensites of the XUX-FEL pulses were used to study multiple
ionization of Ar and Xe atoms as well as to explore multi-photon processes such as sequential
ionization and above-threshold ionization. These experiments serve as case studies for the
non-linear response of matter to short wavelength radiation and, in particular, allow for a
critical comparison with theoretical predictions for this type of processes. For atomic Ar
ionized at 105 eV photon energy, the study reveals e.g. the importance of strong electron
correlations, in particular the decisive role of shake-up and shake-off processes for the
interpretation of the observed high charge states, i.e. up to Ar7+
[1].
For time-resolved two-color experiments, the combination with an intense, synchronized
optical laser is enabling studies of photoionization dynamics in the presence of strong optical
fields, such as the modification of the angle-resolved photoelectron and Auger spectra, which
reveal strong intensity modulations induced by sub-cycle interferences. The use of circularly
polarized FEL light, recently available at FERMI, provides insight into dichroic phenomena.
In a first application, we have demonstrated how dichroism is induced and afterwards probed
in an intially unpolarized He target. The measurement of circular dichroism enables in
addition the characterization of the polarizationproperties of XUV FEL beams in an elegant,
non-invasive andstraightforward fashion [2].
After these illustrating examples, future opportunities opened up with the start of operation of
the European XFEL at the end of 2015 will be presented. Special focus will be given to one of
the six permanent experimental stations, the SQS (Small Quantum System) Scientific
Instrument, which is dedicated to the investigation of atoms, ions, molecules and clusters in
intense fields and to the study of non-linear phenomena [3].
References
[1] M. Ilchen et al., submitted to Phys. Rev. Lett. (2014)
[2] T. Mazza et al., Nat. Commun. 5:3648 doi: 10.1038/ncomms4648 (2014)
[3] http://www.xfel.eu/documents/technical_documents
27
AP -2
Photodetectors and diffractive optics at ITME
Lech Dobrzański
Institute of Electronic Materials Technology, Warsaw, Poland
Email: [email protected]
We developed UV detectors on basis of the GaN/AlGaN hetrostructure. Detectors of the
Schottky type - visible and solar blind cover the UVA, UVB and UVC range. The unique UV
detectors are of the p-i-n type which exhibit banpass spectral sensivity characteristics. We can
control detector band position and band witdth and analyse some specific emission
sources.The MSM photodetectors for UV have been developed as well.
We will present some realizations of fast photodetectors on basis of InP, GaAs and SiC
designed for sensing of short light pulses.
Moreover, we have 20 years of experience in direct e-bem writing and subsequent rective ion
etching of substrates. These technologies enable realization of diffractive optical elements.
We realized DOEs for infrared and visible spectral range. Now we can extend our activity to
UV range, because we invested in the new e-beam writer. The smallest feature size we can
expose and etch is 50nm. The examles of developed devices and lenses will be presented, as
well as some application of these products in more complex systems.
28
AP -3
Low readout-noise CCD-cameras for UV, VUV, EUV and X-ray imaging
and spectroscopy
Martin Regehly
greateyes GmbH, Berlin, Germany
E-mail: mailto:[email protected]
For the simultaneous measurement of space- and frequency-resolved light signals, CCD
sensors based cameras achieve currently the highest sensitivity and dynamics. For the
detection of weak light signals an important eligibility criteria is, besides a high sensitivity in
the respective spectral range, an acquirable signal-to-noise ratio (SNR). In this presentation
the noise processes which are involved in measurements and their influence on the SNR are
discussed based on the fundamental functionality of CCD sensors and camera electronics.
Besides that detectors for the measurement of weak light signals in the spectral range of UV,
VUV, EUV and X-Ray are presented. The CCD cameras combine scientific CCD sensors
with ultra low noise electronics for optimal detection of weak signals.
29
AP -4
30
EXTATIC Doctoral Candidates
Presentations
31
DC 12-1
Extreme ultraviolet surface modification of polymers for biomedical
engineering applications
Inam Ul Ahad
1,2, Beata Butruk
3, Bogusław Budner
1, Tomasz Jan Kaldonski
4, Andrzej
Bartnik1, Henryk Fiedorowicz
1, Tomasz Ciach
3 and Dermot Brabazon
2
1Institute of Optoelectronics, Military University of Technology, Warsaw, Poland 2
Advanced Processing Technology Research Centre, School of Mechanical and
Manufacturing Engineering, Faculty of Engineering & Computing, Dublin City University,
Dublin 9, Ireland 3Department of Biotechnology and Bioprocess Engineering, Warsaw University of
Technology, Warsaw, Poland 4Faculty of Mechanical Engineering, Military University of Technology, Warsaw, Poland
E-mail: [email protected]
Tuning of polymer surface properties is often desirable for various applications in bio-
implants, artificial muscles and diagnostic devices. Surface properties can be modified by
fabrication of micro- and nano-structures on their surfaces by direct-photo etching technique
using ultraviolet irradation. However degradation of bulk material is reported which is
undesirable in biomedical engineering applications. This limitation can be avoided by using
short wavelength radiation in the extreme ultraviolet (EUV) range that is absorbed in very
thin (less than 100 nm) layer of the polymer. EUV photons can be produced by synchrotron
radiation (SR) sources or laser-plasma sources. The limited number and accessibility to large
scale SR facilities encouraged the development of compact laboratory scale EUV sources.
Polytetrafluoroethylene (PTFE) is widely used for fabrication of vascular prostheses and
tubes for nerve regeneration. The associated challenges of PTFE, such as the low free surface
energy, thrombogenic surface and low wear resistance can be overcome by surface
modification.
In this study, PTFE samples were irradiated with a laser-plasma EUV source. The source is
based on a double-stream gas-puff target, irradiated with a 3 ns/0.8J Nd:YAG laser pulse at
10Hz. Using a gold-plated grazing incidence ellipsoidal collector, an effective EUV radiation
at the wavelength centred about 11 nm is focused at 0.5 mm spot. The source is equipped with
an auxiliary gas-puff valve to inject nitrogen gas into the EUV – sample interaction region in
order to change chemical composition. The physical and chemical properties of irradiated
samples were characterized by scanning electron microscopy (SEM), atomic force
microscopy (AFM), water contact angle (WCA) measurements, and x-ray photoelectron
spectroscopy (XPS) respectively. Pronounced wall type structures appeared on the surfaces of
polymers which provide focal adhesion points for better cell adhesion. The surface roughness
increased up to many folds and increment in WCA (up to 20º) observed. The elemental
analysis by XPS showed deposition of nitrogen atoms on upper layer surface of EUV
modified polymers. In-vitro cell culture studies, using L929 mouse fibroblasts demonstrated
strong cell adhesion and increased cell viability in EUV modified PTFE samples as compared
to pristine control sample.
Acknowledgements.
The authors acknowledge financial support from the EU FP7 Erasmus Mundus Joint
Doctorate Program EXTATIC under framework partnership agreement FPA-2012-0033 and
from the 7th Framework Programme's Laserlab Europe project (No. 284464).
32
DC 12-2
Development and application of a compact laser-produced plasma
soft X-Ray source for radiobiology experiments
Daniel Adjei1, Mesfin Getachew Ayele
1, Przemysław Wachulak
1, Andrzej Bartnik
1,
Luděk Vyšín2, Libor Juha
2, Henryk Fiedorowicz
1, Łukasz Wegrzynski
1, Anna Wiechec
3,
Janusz Lekki3, Wojciech M. Kwiatek
3
1Institute of Optoelectronics, Military University of Technology,Warsaw, Poland
2Institute of Physics Czech Academy of Sciences, Prague, Czech Republic
3Institute of Nuclear Physics Polish Academy of Sciences, Cracow, Poland
Email: [email protected]
A desk-top laser produced plasma source of soft X-rays has been developed for radiobiology
research. The source is based on a double-stream gas puff target irradiated with a commercial
Nd:YAG laser. The source has been optimized for maximum emission in the X-ray “water
window” spectral wavelength range from 2.3 nm to 4.4 nm wavelength (280 - 540 eV) by
using argon gas puff target and spectral filtering. The source delivers nanosecond pulses of
soft X-rays with fluence of about 4.20x103 photon/µm2/pulse at a sample placed inside the
vacuum chamber and about 7.48x102 photon/µm2/pulse at a sample outside the chamber.
The design and characterization measurements of the source will be discussed. The source has
been used for the first time in radiobiology experiments. Remarkable strand breaks were
observed in irradiated supercoiled plasmid pBR322 DNA by gel electrophoresis and the
results will be presented. The source can be useful in addressing observations related to
cellular sensitivity to “water window” X-ray spectral range.
Acknowledgments
The authors acknowledge the financial support from the EU FP7 Erasmus Mundus Joint
Doctorate Programme EXTATIC under framework partnership agreement FPA-2012-0033.
With the support from the 7th Framework Programme’s Laserlab Europe project (No.
284464). PW greatly acknowledges the support by the National Centre for Science, award
number DEC-2011/03/D/ST2/00296 and the National Centre for Research and Development,
Lider programme, award number LIDER/004/410/L-4/12/NCBR/2013.
33
DC 12-3
EUV interference lithography with fractional Talbot effect
Hyun-su Kim1, 3
, Serhiy Danylyuk2, Sascha Brose
2, Wei Li
4, Mario C. Marconi
4,
William S. Brocklesby3, Larissa Juschkin
1
1 Chair for the Experimental Physics of EUV, RWTH Aachen University and JARA –
Fundamentals of Future Information Technology, Aachen, Germany 2 Chair for the Technology of Optical Systems, RWTH Aachen University and JARA -
Fundamentals of Future Information Technology, Aachen, Germany 3 Optoelectronics Research Center, University of Southampton, Southampton, UK
4 Engineering Research Center for Extreme Ultraviolet Science and Technology, and
Electrical and Computer Engineering Department, Colorado State University,
Fort Collins,USA
Email: [email protected]
Extreme ultraviolet (EUV, spectral range below DUV and above soft X-ray) interference
lithography is a powerful method of fabricating sub-micron structures for many applications
such as semiconductor devices, plasmonics, photonic crystals, quantum dots, etc. Talbot
lithography is a mask-based interference lithography technique using Talbot effect that
produces a replicating pattern in the near field of a periodic mask illuminated with coherent
plane wave, which can produce very fine detail.
In this work we demonstrate the Talbot lithography with fractional Talbot effect under highly
coherent EUV light of 46.9 nm wavelength generated by a capillary discharge Ne-like Ar
laser in order to achieve high special frequency multiplication more than 2x. A transmissive
diffraction grating or Talbot mask, defined directly into a gold deposited Si3N4 membrane by
focused ion beam milling, is illuminated under the EUV. The fractional patterns form through
the space behind the mask as a function of Talbot distance from the mask. As a result, various
spatial frequency multiplications, Msf = up to 5x are achieved from one parent mask.
Sampled patterns are compared to theoretical predictions of the pattern, and good agreement
is seen.
We envision that the grating with the smaller pitch size could be used for further reduction as
well as the grating with narrower slit could be used to get higher Msf values, more than Msf =
5x. Also the utilization of recently developed EUV lasers in the vicinity of 13 nm can further
decrease the feature size achievable with this patterning approach.
34
DC 12-4
Sn Based Laser Assisted Vacuum Arc EUV Source
Girum Abebe Beyene1,3
, Isaac Tobin2, Larissa Juschkin
3, Gerry O’Sullivan
1, and Fergal
O'Reilly1
1School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
2School of Physics, Trinity College Dublin, Dublin 2, Ireland
3Department of Physics, RWTH Aachen University, D-52074 Aachen, Germany
The aim of this work is to produce bright EUV photons from laser triggered discharge plasma
formed from liquid Sn coated on rotating-wheel-electrodes. The EUV output was found to
correlate with the localized ablation of the thin film. This was studied by tailoring laser
parameters, mainly the pulse duration and energy density, using two Nd:YAG lasers of
~160ps and ~7ns, each 1064nm, with power density range of ~3-300 GW/cm2.
The picosecond (ps)-laser showed an increase in CE and spectral purity compared to ns-
triggering. The difference, as to the time resolved visible images and ion probe measurements,
is mainly due to the expanding plasma dynamics. The ps-laser produced collimated plasma
with higher axial speed which improved stability during the pinch.
35
DC 12-5
Capillary discharge based XUV sources and applications in imaging
Fahad Nawaz1, J. Limpouch
1, A. Jancarek
1, M. Nevrkla
1, H. Fiedorowicz
2, P. Wachulak
2
1Czech Technical University in Prague, Faculty of Nuclear Sciences & Phy. Engg. Prague,
Czech Republic 2Military University of Technology, Institute of Optoelectronics, Warsaw, Poland
Email: [email protected]
A compact laboratory source based on capillary discharge, working in the “water-window”
range has been optimized for applications in imaging. Nitrogen plasma was exploited as one
of the suitable sources of intensive line radiation in the water window. The focus, in terms of
diagnostics is on the energy of 2.88 nm radiation, corresponding to the 1s2-1s2p quantum
trasnition of helium-like nitrogen. For a realization of a soft x-ray microscope based on
capillary discharge, rotationally symmetric nickel coated ellipsoidal mirror has been
employed for focussing of the 2.88 nm radiation. The spot size at the focus and out of focus,
along with the photon flux at the sample plane for 2.88 nm photons has been measured and
reported. Calculations for a suitable objective (fresnel zone plate) have been carried out,
considering the existing parameters i-e source size, divergence, condenser numerical aperture
and focused spot size etc. Experiments related to similar application with laser-plasma soft x-
ray source at the Military University of Warsaw have been carried out, with some
observations about the fresnel optics. Design of a whole soft x-ray imaging setup (to be
implemented) based on capillary discharge source is outlined.
36
DC 13-1
Compact laser plasma soft X-ray source for contact microscopy
experiments
Mesfin Getachew Ayele, Daniel Adjei, Przemysław Wachulak, Andrzej Bartnik,
Łukasz Węgrzyński, Mirosław Szczurek, Roman Jarocki and Henryk Fiedorowicz
Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
Email:[email protected]
Recent advancements in soft X-ray contact microscopy (SXCM) have improved the ability to
visualize fine cellular structures and their elemental distribution [1-3]. The improvements in
design and performance of soft X-ray sources have increased the resolution up to a few tens
of nanometers to visualize living biological wet cells. Soft X-rays ranging from 1 nm to 10
nm wavelengths can be produced by synchrotron radiation (SR) sources or laser-plasma based
sources. SR sources are able to produce high intensity radiations with reduced exposure time
and can be tuned for elemental mapping. However, limited number and access to SR sources
encouraged development of laboratory scale pulsed laser-plasma based soft X-ray sources,
which produce burst of soft x-rays that can be used to image living wet cells. Laser plasma X-
ray sources that have been used so far in the studies with SXCM technique are based on a
solid target irradiated with nanosecond laser pulses; however, it creates serious problems with
the source operation due to an inevitable target debris production [4]. To avoid this, a source
based on a gas puff target has been proposed that was used in preliminary SXCM
experiments. In this study, a compact laser-plasma soft X-ray source based on a double-
stream gas puff target system has been developed for contact microscopy experiments. The
gas puff target composed of argon encapsulated by helium gas has been irradiated with a
nanosecond Nd:YAG laser pulse operating at 10 Hz repetition rate.Characterisation
measurements of the source, including spectra and soft X-ray yield measurements have been
performed employing a transmission grating spectrograph (TGS) and a silicon PIN
photodiode, respectively. Results of these measurements has demonstrated that strong soft X-
ray yields can be obtained from the argon/helium gas puff target irradiated with high power
laser. Furthermore, optimization of the source has also been carried out in order to maximize
the soft X-ray yield in the ‘water window’ spectral range (280 eV – 540 eV). The laser-
plasma soft X-ray source described in this work provides high intensity and short exposure
time, and will be used in the experiments on soft X-ray contact microscopy.
Acknowledgements: The authors acknowledge financial support from the EU FP7 Erasmus Mundus Joint Doctorate Programme
EXTATIC under framework partnership agreement FPA-2012-0003. With the support from the 7th
Framework
Programme’s Laserlab Eorpoe project (No. 284464).
References
1.Cheng, P. C., R. Feder, D. M. Shinozaki, K. H. Tan, R. W. Eason, A. Michette, and R. J. Rosser. "Soft x-ray
contact microscopy." Nuclear Instruments and Methods in Physics Research Section A: Accelerators,
Spectrometers, Detectors and Associated Equipment 246, no. 1 (1986): 668-674.
2. Michette, A., P., Cheng, R., Easons, R., Feder, F., O'Neill, Y., Owadano, R., Rosser, P., Rumsby and M. J.,
Shaw, “Soft x-ray contact microscopy using laser plasma sources," J phy 19(3), 363 (1986).
3. Batani, D., C.,Botto, M., Moret, M., Milani, G., Lucchini, K., Eidmann, F., Cotelli, C., C., Lora Lamia Donin,
G., Poletti, T., Ford, and Stead, A., "The use of high energy laser-plasma sources in soft X-ray contact
microscopy of living biological samples." Eur Phys J D 21(2), 167-179 (2002).
4. Fiedorowicz, H., A., Bartnik, Z., Patron and Parys, P., "X‐ray emission from laser‐irradiated gas puff
targets," Appl phys lett 62(22), 2778-2780 (1993).
37
DC 13-2
Development of near-edge multi-angle spectroscopic EUV reflectometry
Maksym Tryus1, Larissa Juschkin
1, Serhiy Danylyuk
2, Stefan Herbert
2
1RWTH Aachen University, Chair for Experimental Physics of EUV, Steinbachstr. 15, 52074
Aachen, Germany 2RWTH Aachen University, Chair for Technology of Optical Systems, Steinbachstr. 15, 52074
Aachen, German
Email: [email protected]
Modern nanotechnology is constantly raising demands to quality and purity of thin films and
interlayer interfaces. As thicknesses of employed layers decrease to single nanometers,
traditional characterization tools are no longer able to satisfy throughput, precision or non-
destructibility requirements.
Extreme ultraviolet (EUV) and soft X-ray reflectometry has not only demonstrated the ability
to detect the sub-nm thickness variations but also has shown to be very sensitive to the
chemical composition changes. Extention of spectroscopic reflectometry to multi-angle
measurements allows decoupling of the fitting parameters in the analytical model, making the
method more reliable when characterizing complex layered systems.
The region near elemental absorption edges in reflectivity spectra is of particular analytical
intertest, and complementary to the abovementioned, since it contains Near Edge X-ray
Absorption Fine Structure (NEXAFS). It gives a key to determination of chemical bonds
structure and local-site symmetry of a sample, being irrelative to the presence of long-range
order, thus suitable for studying amorphous and crystalline materials.
Our laboratory setup for multi-angle spectroscopic reflectometry, based on a discharge-
produced plasma EUV source, and first experimental results obtained with Si-based layer
systems, as well as future plans and prospective will be demonstrated and discussed.
38
DC 13-3
Polarization resolved laser produced aluminium plasma emission
1,2
G.A. Wubetu, 1T. Kelly,
1P.V. Kampen,
2H. Fiedorowicz and
1J.T. Costello
1NCPST and School of Physical Science, Dublin City University, Glasnevin, Dublin 9,
Republic of Ireland. 2Institute of Optoelectronic, Military University of Technology, Warsaw, Poland
Email: [email protected]
Laser Induced Breakdown Spectroscopy (LIBS) is an elemental charcaterisation technique
which permits the classification, and potentially the quantification, of atomic elements in a
host material referred to as a matrix [1]. There are significant efforts currently being made
worldwide to increase the main performance parameter of LIBS, namely the limit-of-
detection or LOD. For example single pulse in a background gas and double pulse LIBS is
investigated in the UV-Vis-IR spectral range in many labs. In our laboratory VUV LIBS in
both single pulse [2] and double pulse [3] configurations have been explored. The main figure
of merit underlying LIBS LOD is the signal=to-background ratio or SBR. The main objective
of the current phase of my work is to improve SBR and we will use both variation of laser
parameters and spectral detection to maximise the SBR and hence LOD for this technique.
As a first here is some evidence that Polarization Resolved Laser Induced Breakdown
Spectroscopy (PRLIBS) could be useful in this regard [4]. Hence, we have explored PRLIBS
on an Aluminium (Al) target in vacuo and in air using a Q-switched Nd: YAG nanosecond
laser pulses. PRLIBS has been performed by placing a polarizer in front of the time integrated
spectrometer. We detect polarization anisotropy of optical radiation of the Al plasma plume.
The idea of using PRLIBS is to increase the Signal to Background Ratio (SBR) by improving
the Limit of Detection (LOD). Later we will turn the experiment on its head by varying the
polarisation of the plasma producing laser field.
References:
1. D. W. Hahn and N. Omenettto, Applied Spectroscopy 64 335A-366A (2010)
2. M A Khater, J T Costello and E T Kennedy, Applied Spectroscopy 56 970-983 (2002)
3. X Jiang, P Hayden, J T Costello and E T Kennedy, Spectrochimica Acta Part B: Atomic
Spectroscopy 901 106-113 (2014)
4. L. Yaoming , J. S. Penczak, and R. J. Gordon, Opt. Letts. 35, (2010)
39
DC 13-4
Characterization of TiO2 thin films and novel TiO2/Sc multilayers in the
EUV and Soft X-ray region.
Antonela Comisso1,2
, Piergiorgio Nicolosi 1,2
1 University of Padova, Department of Information Engineering, via Gradenigo 6B, 35131
Padova, Italy. 2 Consiglio Nazionale delle Ricerche—Institute for Photonics and Nanotechnologies
Laboratory for Ultraviolet and X-Ray Optical Research, via Trasea 7, 35131 Padova, Italy
Email: [email protected]
We propose a novel Sc/TiO2 multilayer with high theoretical reflectivity in the soft x-ray
wavelength range, for normal incidence. A theoretical study of the parameters that define the
film stack is performed, observing the effects and impacts of interface imperfections, optical
constants fluctuations, thickness ratio and period changes. Testing performance of the
multilayer for normal incidence near the Sc L2,3 edges (403.6 eV, 398.7 eV). In order to
begin an experimental study of the multilayer, we´ve deposited TiO2 thin films using e-beam
evaporation technique and partially characterized them, studying their surface roughness,
thickness and optical constants.
40
DC 13-5
Photoabsorption in ultrashort duration UV and VUV laser fields
Hu Lu1,2
, Patrick Hayden1, Paul van Kampen
1, Bill Brocklesby
2 and John T. Costello
1
1NCPST and School of Physical Science, Dublin City University, Dublin, Republic of Ireland.
2Optics Research Centre, University of Southampton , Southampton,UK
Email: [email protected]
The overall objective of this project is to investigate the interaction of laser ablated vapours
and plasmas with ultrashort UV and VUV pulses from a variety of laboratory and FEL facility
sources.
At DCU, the dual laser plasma (DLP) technique [1] has been used to investigate VUV and
XUV photoabsorption. In DLP spectroscopic experiments, one laser is used to generate the
back-lighting plasma source of continuum radiation while the other laser is used to produce
the absorbing plasma. By recording photoabsorption spectra at various spatial positions, one
can get a spatio-temporal profile of the plasma. This technique will permit the identification
of resonances that can be subsequently probed with ultrafast VUV and XUV sources. In
particular the formation of the absorbing plasma material, appropriately chosen, can be used
to form a shutter to gate off a fast or ultrafast VUV ot XUV pulse.
In Southampton (Optics Research Centre), the laser ablated atomic vapours and lowly
charged plasma plumes will be probed by few femtosecond coherent XUV high harmonic
generated (HHG) pulses [2] with a view to studying the dynamics of this process.
References
1. J. T. Costello, E. T. Kennedy, J. P. Mosnier, P. K. Carroll and G. O’Sullivan. Physica
Scripta T34, 77 (1991)
2. P. N. Anderson, P. Horak, J. G. Frey and W. S. Brocklesby, Phys. Rev.A 89 013819 (2014)
41
DC 13-6
Coherent diffraction imaging using laboratory light sources
M. Odstrcil, P. Baksh, W. S. Brocklesby
University Southampton, Southampton, UK
Email:[email protected]
Coherent diffractive imaging, also called lenses imaging methods, are now a standard tool for
Xray imaging on synchrotron devices [1,2,3]. The diffractive imaging methods can avoid
limitations of imperfect optics in the Xray region and also limit the dose exposed to the
sample. Therefore, these methods allow to reach higher resolution compared to the standard
lens based methods. Moreover, lensless methods allow to extract full information about the
wavefront behind the sample and hence relative phase and amplitude can be recovered.
Finally, advanced lenseless methods such as ptychography allow to extract information about
the illumination that can be used for beam metrology purposes [3].
In recent years, the coherent diffractive imaging is getting to be used also with the laboratory
sources and longer wavelengths such as EUV and visible light region. Limitation of the
laboratory EUV sources is lower signal, worse coherence properties and generally lower time
stability of the signal. The requirements for lateral and temporal coherence can be slightly
relaxed if the reconstruction is sufficiently overconstrained [4,5,6].
In this work, we will introduce and compare numerical methods that can significantly help to
improve convergence and reconstruction quality. We will introduce the methods using
numerical examples and also real measured data from EUV and IR light experiments. We will
use ptychography method for the reconstruction, although most of the proposed methods can
be used also with other lensless imaging techniques.
References
[1] Rodenburg, J. M. & Faulkner, H. M. L. A phase retrieval algorithm for shifting
illumination. 85, 4795–4797 (2004).
[2] Maiden, A. M. & Rodenburg, J. M. An improved ptychographical phase retrieval
algorithm for diffractive imaging. Ultramicroscopy 109, 1256–62 (2009).
[3] Kewish, C. M. et al. Ptychographic characterization of the wavefield in the focus of
reflective hard X-ray optics. Ultramicroscopy 110, 325–9 (2010).
[4] Enders, B. et al. Ptychography with broad-bandwidth radiation. Appl. Phys. Lett. 104,
171104 (2014).
[5] Abbey, B. et al. Lensless imaging using broadband X-ray sources. Nat. Photonics 5, 420–
424 (2011).
[6] Thibault, P. & Menzel, A. Reconstructing state mixtures from diffraction measurements.
Nature 494, 68–71 (2013).
42
DC 13-7
Laser-produced plasmas of Mo,Ru,Rh and Pd in the 2 to13nm
spectral region
Ragava Lokasani
1,2, Elaine Long
2, Girum Beyene
2, Patrick Hayden
2, Padraig Dunne
2, Jiri
Limpouch1, Akira Endo
3, Fergal O’Reilly
2 &Gerry O’Sullivan
2
1Czech Technical University, Prague, Czech Republic
2UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland.
3HiLASE Project, Prague, Czech Republic
Email: [email protected]
The Rayleigh criterion resolution implies that the use of shorter wavelength radiation
improves spatial resolution in photon based imaging and patterning systems. Over the past
decade the development of sources at extreme ultraviolet and even shorter, soft X-ray
wavelength is of a great interest for semiconductor patterning and cellular microscopy where
high resolution is required. In this context we investigated the spectral behaviour of laser
produced plasmas of Mo, Ru, Rh and Pd in the spectral region from 2.5 to 13 nm and their use
as sources for beyond EUV and soft x-ray region.The laser energy range covered by the
experiments was from 623mJ to 5mJ. In the sequence of spectra Mo to Pd, the strongest
emission was observed in the 2-8nm spectral region. Spectral analyses of emission from
different ion stages were identified in successive steps and classification of 3d-4p, 3d-4f and
3p-3d transitions. These transitions in a number of neighbouring of ion stages were identified
by comparison with Cowan code calculations and previous results from spectral studies
particularly on the adjacent elements Mo and Pd.
Acknowledgements
The authors acknowledge financial support from the EU FP7 Erasmus Mundus Joint
Doctorate Program EXTATIC under framework partnership agreement FPA-2012-0033.
43
DC 13-8
Optics for short pulse X-ray sources
Magdalena Miszczak1, Jeremy G. Frey
2, William S. Brocklesby
1
1Optoelectronics Research Centre, University of Southampton, Southampton SO17 1BJ, UK
2Chemistry, University of Southampton, Southampton SO17 1BJ, UK
Email: [email protected]
The Extreme Ultraviolet (EUV) radiation wavelength range (30–250 eV1) has many
advantages in imaging applications, such as EUV lithography and EUV microscopy. To
achieve high resolution imaging, EUV optics must be able to manipulate and focus the beam.
However, due to the strong absorption of EUV in all materials, experiments must be
conducted in a vacuum. The appropriate selection of chemical reagents and a proper
construction of optical elements in the system, allows the resolution of the image to be
improved. One of the crucial optical components in the optical arrangement is a beam splitter
(BS), which separates the XUV and VIS/IR components of a beam and can be manufactured
as a single layer or multilayer. The BS plays an important role in the High Harmonic
Generation (HHG) process1, where it attenuates the fundamental laser pulse and reflects the
desired harmonic. However, there are only a few beam splitters with good efficiency to
date2,3,4
as it is a challenging task to choose materials and develop structure with high
reflectivity in the EUV spectrum and high attenuation of the fundamental laser pulse. We
explored techniques for the production and characterisation of multilayer structures.
Magnetron sputtering and e-beam evaporator were used to develop optical elements, to
measure surface roughness we applied an optical profilometer.
We are making good progress to producing and testing a new beam splitter consisting of
MoS2 material that has shown from simulations approximatly 76% reflectivity for a
wavelength of 95eV. Introducing this beam splitter into EUV experiments to aid filtering,
could increase the ratio of EUV flux to the attenuation of the fundamental field. The thin film
deposition of MoS2 allows for acceptable surface roughness on the order of tens of
nanometres. The sample will be tested using a reflectometry experiment to investigate
reflectivity in the VIS/near IR spectrum and EUV spectrum. We anticipate our beam splitter
to have reflectivity close to the simulations and to be a starting point to gain experience on
testing more EUV components.
References:
1. D. Atwood, Soft X-rays and extreme ultraviolet radiation, Principles and Applications.
Berkeley: Cambridge University Press, (1999)
2. Y. Nagata, Y. Nabekawa and K. Midorikawa, “Development of high-throughput, high-
damage-threshold beam separator for 13 nm high-order harmonics,” Optics Letter, 31(9),
1316–1318, (2006)
3. E. Takahashi and H. Hasegawa, “High-throughput, high-damage-threshold broadband
beam splitter for high-order harmonics in the extreme-ultraviolet region,” Optics Letter,
29(5), 507–509, (2004)
4. Y. Sanjo, “TiO2/sapphire Beam Splitter for High-order Harmonics,” J. Laser
Micro/Nanoengineering, 7(3), 375–379, (2012)
44
DC 13-9
The slit-less spectrometer: A compact Fourier transform spectrometer
with no moving parts
Stephen J. Davitt, Thomas J. Kelly, John T. Costello
National Centre for Plasma Science & Technology (NCPST),
School of Physical Science Dublin City University (DCU)
Email: [email protected]
Compact spectrometers are becoming increasingly more popular with many research groups
owning at least one of these devices. This is most likely due to: small footprints; impressive
resolution and ease of use of the devices. Companies such as OceanOptics™ and Stellarnet™
offer many different compact spectrometer models to fit specific applications. These
spectrometers are grating based and require an entrance slit typically on the order of one or
two hundred microns in order to achieve the required spectral resolution. However, this
entrance slit limits the spectrometer throughput as it can block out a large proportion of the
available signal.
We propose a compact slit-less spectrometer, based on a design by Andrew Harvey and Miles
Padgett’s for a Fourier transform spectrometer [1,2,3], which uses a Wollaston Prism to create
a spatial interferogram of a light source. The spectral intensity is then calculated by Fourier
transforming the interferogram. This design allows us to achieve the same spectral resolution
as grating based spectrometers but without the use of an entrance slit thereby giving us higher
optical throughput. The use of the Wollaston prism means we can measure the interferogram
without scanning any mirror as is common in conventional Fourier transform spectrometers
such as those based on the Michelson interferometer. This gives us a recording time and/or
signal to noise advantage by reducing the dwell time for any particular spectral component.
This talk is aimed at giving an overview of the progress we have made in the design of such a
spectrometer: from initial investigations to a functioning early alpha stage prototype.
References:
[1] Padgett MJ, Harvey AR, Duncan AJ, Sibbett W. Single-pulse, Fourier-transform
spectrometer having no moving parts. Appl. Optics. 1994 September ; 33(25): 6035-6040
[2] Harvey AR, Begbie M, Padgett MJ. Stationary Fourier transform spectrometer for use as a
teaching tool. Am. J. Phys. 1994 November; 62(11): 1033-1036.
[3] Padgett MJ, Harvey AR. A static Fourier-transform spectrometer based on Wollaston
prisms. Rev. Sci. Instrum. 1995 April; 66(4): 2807-2811.
45
DC 13-10
Numerical modelling of laser-plasma interaction
W Hanks, J. Costello, L A.A. Nikolopoulos
School of Physical Sciences, Dublin City University Dublin, Ireland
and
National Plasma Center for Plasma & Technology, Dublin, Ireland
Email: [email protected]
In this talk I will present our progress on the development of the simulation of the
interactions of plasmas with laser fields. There is much activity and collaboration in the laser
plasma research group in DCU, and so there will be a direct connection between this work on
simulations and the experimental realizations.
Computer simulation of systems is merited as they can be used to: design practical
experiments with the finding of key parameters and conditions to test with physical apparatus;
and to: investigate ahead of practical experiments when the experimental conditions are
difficult to perform.
The equations we are using which describe the laser-plasma interactions are based on the
work of Rambo and Denavit [1]. In their research these equations were solved using finite
difference numerical methods. In our research, finite difference and finite element numerical
methods were considered and studied, and we wish to use a finite element method for our
simulations, and to exploit the most sophisticated algorithmic techniques to date.
In preparation for the modeling of plasmas, we have tested our approach on advection-
diffusion partial differential equations. It is our intention to extend this technique to laser
plasma equations. Our finite element approach utilises the widely successful B-Splines
polynomial basis (in fluid dynamics and most recently, in atomic physics dynamics) [2,3].
References:
[1] PW Rambo, J Denavit. J Comput Phys, 92, 185, (1991) and J Comput Phys, 98, 317,
(1992)
[2] RC Mittal, RK Jain. IJAMC, 4, 115, (2012)
[3] H Bachau et al. Rep Prog Phys, 64, 1815, (2001)
46
DC 14-1
Nanoscale imaging using compact laser plasma SXR sources based on a
double stream gas-puff target and Fresnel optics
Alfio Torrisi1, Przemyslaw Wachulak
1, Henryk Fiedorowicz
1, Ladislav Pina
2
1Institute of Optoelectronics, Military University of Technology, Warsaw, Poland
2Czech Technical University, Prague, Czech Republic
Email: [email protected]
Developments in nanoscience demand tools capable of capturing images with a nanometer
spatial resolution. To extend the diffraction limit associated with the wavelength of radiation,
according to the Rayleigh criterion, one way is to reduce the wavelength, allowing smaller
features to be resolved.
Laser-plasma SXR wavelength is ~100-400x shorter than the visible light and allows to
significantly improve the imaging resolution. The spectral range between the K-absorption
edges of carbon (280 eV) and oxygen (540 eV), which is called “water window”, is attractive
for high-contrast biological imaging.
Laser-plasma gas puff target sources were presented, suitable for SXR microscopy in the
“water window” spectral range. Microscopy with Fresnel zone plates requires a
monochromatic radiation, such as emission from nitrogen plasma SXR source at 2.88 nm
wavelength.
The main motivation for development of a compact, table-top “water-window” sources and
microscopes is to open the possibility to perform experiments without necessity to employ
large “photon facilities” such as synchrotrons or free electron lasers. These compact sources
represent an important alternative to perform some experiments in a university laboratory and
could have a huge impact on the speed of nanotechnology development.
Acknowledgements
The authors acknowledge financial support from the EU FP7 Erasmus Mundus Joint
Doctorate Program EXTATIC under framework partnership agreement FPA-2012-0033 and
from the 7th Framework Programme's Laserlab Europe project (No. 284464).
47
DC 14-2
Using microstructures for laser-induced X-ray source enhancement from
plasma produced by femtosecond and nanosecond lasers
Ellie Floyd Barte
1,2, Jiri Limpouch
1,Padraig Dunne
2,
1Czech Technical University in Prague, Czech Republic
2UCD School of Physics, University College Dublin, Belfield, Dublin 4, Ireland
Email: [email protected]
Laser-produced plasma X-ray sources are compact and inexpensive and provide intense short
X-ray pulses [1], enhancement of this pulses will be beneficial for future researches and
various applications. One attractive way to increase X-ray pulses generation is to use a
structured surface targets that has a low average density and high local density [2]. By using
also a high-Z material, higher X-ray intensity with a continuous smooth spectrum can also be
achieved [2]. The research aims to achieve a significant increase of X-ray pulses both in the
hard and soft X-ray regions using different targets with defined characteristics.
For the hard X-ray energy region (>1keV), thick layers of low density foam doped by medium
and/or heavy elements will be used as a target for a nanosecond Nd: YAG laser at UCD
Dublin. For the soft X-ray energy region (<1keV), surface layer with microstructures like
nanowires, nanorods, nanoholes array or microspheres will also be used as a targets for the
0.1 TW fs laser at CTU in Prague and 25 TW fs laser at PALS laboratory in Prague.
The results of the experiments will be complemented by numerical modeling of the X-ray
source.
References:
[1] T.Nishikawa, S.Suzuki, Y.Watanabe, O.Zhou, & H.Nakano. (2004). Efficient water-
window X-ray pulse generation from femtosecond-laser-produced plasma by using a
carbon nanotube target. Applied Physics B, 73, 885-890. doi:10.1007/s00340-004-1429-2
[2] T.Nishikawa, H.Nakano, K.Oguri, N.Uesugi, M.Nakao, K.Nishio, & H.Masuda. (2001).
Nanocylinder-array structure greatly increases the soft X-ray intensity generated from
femtosecond-laser-produced plasma. Applied Physics B, 78, 185-188.
doi:10.1007/s003400100625
Acknowledgement:
The authors acknowledge financial support from the EU FP7 Erasmus Mundus Joint
Doctorate Program EXTATIC under framework partnership agreement FPA-2012-0033.
48
DC 14-3
Coherent diffractive imaging employing a compact discharge plasma EUV
light source
Jan Bußmann
1, Denis Rudolf
1, Lars Lötgering
1, Rui Xu
4, Sascha Brose
3, Serhiy Danylyuk
3,
Jianwei Miao4 and Larissa Juschkin
1,2
1Peter Grünberg Institute 9, JARA-FIT, Research Centre Jülich, 52425 Jülich, Germany
2RWTH Aachen University, Experimental Physics of EUV, JARA-FIT, Steinbachstrasse 15,
52074 Aachen, Germany 3RWTH Aachen University, Chair for Technology of Optical Systems, Steinbachstrasse 15,
52074 Aachen, Germany 4Department of Physics and Astronomy, and California NanoSystems Institute, University of
California, Los Angeles, CA 90095, USA
Email: [email protected]
Diffraction limited microscopy in the EUV and soft X-ray spectral region requires either low
roughness reflective optics or diffractive optics (Fresnel zone plates) structured on the
nanometer scale. The fabrication of such optical elements is difficult and expensive.
Alternatively, a high resolution imaging technique called coherent diffractive imaging (CDI)
offers the possibility to replace the optics completely by image reconstruction algorithms
[1,2].
Experimentally, a sufficiently coherent beam illuminates the test object and the resulting
diffraction pattern is recorded on the detector. Then, the object is reconstructed from its
diffraction pattern by means of phase retrieval techniques [3]. It was demonstrated that the
technique is capable to achieve diffraction-limited lateral resolution [4].
So far, the most experiments were performed at synchrotron and free electron laser facilities.
Only few laboratory based CDI experiments employing either a high harmonic [5] or a soft
X-ray laser source were conducted so far. In our work, we explore the feasibility to perform
CDI with laboratory based high radiance plasma sources developed for EUV lithography.
In this talk, we would like to present our first results of CDI experiments employing a
compact discharge plasma EUV light source [6]. We will address the spatial and temporal
coherence properties of our EUV source which we tuned to fulfill the requirements of the CDI
experiment, show the successful reconstruction of a test object (10 μm pinhole) and the results
of CDI on a test sample. The next steps of the project - ptychography and waveselection by
phase gratings - will be presented in the outlook of the talk.
References
1. J. R. Fienup, “Reconstruction of an object from the modulus of its Fourier transform”, Opt. Lett. 3, 27-29
(1978)
2. C. C. Chen, J. Miao, C. W. Wang and T. K. Lee, “Application of optimization technique to noncrystalline x-
ray diffraction microscopy: Guided hybrid input-output method”, Phys. Rev. B 76, 64113 (2007)
3. S. Marchesini, “Invited Article: A unified evaluation of iterative projection algorithms for phase retrieval”,
Rev. Sci. Instrum. 78, 011301 (2007)
4. H. N. Chapman and K. A. Nugent, “Coherent lensless X-ray imaging”, Nat. Photon. 4, 833 (2010)
5. M.D. Seaberg et al., “Ultrahigh 22 nm resolution coherent diffractive imaging using a desktop 13 nm high
harmonic source”, Opt. Express 19, 22470 (2011)
6. L. Juschkin et al., Proc. of SPIE, Vol. 8849, 88490Y (2013)
7. P. Thibault et al., “High-resolution scanning x-ray diffraction microscopy”, Science 321, 379 (2008)