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Biomat (LV, 20 Pa)
Uncoated coccolith (LV, 20 Pa)
JSM-7001F-LV - Applications
Tin oxide on tin
Carbon nanotube
JSM-7001F-LV - Applications
EBSD grain orientation map of Mo (Ti,Zr) alloy
Fe L WDS map of polished thin section of ore
JSM-7001F-LV - Applications
MultiBeam JIB-4500
FIB Ion source Ga liquid metal
ion Acc. Voltage 1 to 30kV (in steps) Magnification 30x (wide view) 100x to 300,000x Max. beam current 30 nA (at 30kV)
SEM Beam source LaB6 Acc. Voltage 0.3 to 30 kV (in steps) Magnification 5x to 300,000x Max. beam current 1000 nA (at 30
kV) Goniometer stage X: 76 mm; Y: 76 mm; Z: 5 to 48mm T: -10 to 90º; R: 360º endless Vacuum pump SIP (x2), TMP/RP (x2)
Features and Functions of SEM/FIB
Features• High speed milling, large ion beam current
• High resolution ion column
• Simultaneous milling & image observation
• Bitmap milling for various shapes
• 3D view (S3 TM)
• High utility specimen chamber
• High performance SEM column with LaB6
Confidential
Functions
1.Progressive sectioning (slice and view)
2.Nanomachining
3.Site-specific preparation of TEM sections
Simultaneous Milling & Imaging
Volkert et al, MRS Bulletin 32, May, 2007
FIB and Micromachining
Mayer et al, MRS Bulletin 32, May, 2007
FIB and Micromachining
Mayer et al, MRS Bulletin 32, May, 2007
Neuron cage (Meng) – 6490, SEI, 1 kV
Neuron cage (Meng) – Video
Emitter tip
Tip radius less than 200nm
Milling time : 2h
Specimen : Si
Bitmap Milling for Various Shapes
Confidential
Types of Research Supported
• Biological and biomedical• Bio and non-bio nanoscience• Materials science / Chemistry / Physics• Earth science / geo / geo-bio• Electrical, mechanical, and civil engineering• Physics• Dental science• Pharmacological
Access / Scheduling / Rates
• Open to all USC users
• Supported by two full-time staff plus post-doc
• Web-based sign-up at http://www.usc.edu/dept/CEMMA/cemma.html
• Rates (present)
• $45/hr self-use• $75/hr with operator
Rates – EM Labs Nationwide
“The median fee for internal and external users in academic organizations was $65 and $150, respectively. “
Source: Microscopy Today, July 2007
$150
$65
Break Even Capacity - BEC
Assume 4 EMs, 2 techs, operating 8/5 and charging $50/hrRequires utilization of 52% to break even
Source: Microscopy Today, July 2007
Summary
• Many thanks to Provost
• Much work left to do
• Stronger infrastructure to be built
• Comments and suggestions welcome