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The Anti-Gravity MicroMachine
What are Micromirrors?
• Change the angle of a reflected beam in multiplexing and de-multiplexing of optical signals
• Very precise and flawless• Aim: raise the mirror to the desired
angle
Mirror Animation
The Problem
• Vertical lift cannot be obtained through horizontal movement
• Fabrication process leads the mirror to sag down
Fixed Hinge
MirrorLever Applied
Force
Wafer
The Solution
• Provide initial lift to the mirror
Fixed Hinge Mirror Lever Applied
Force
Wafer
Thermal Actuators
• Make use of differing arm thickness to provide movement
• Problem: using the principles described, it is difficult to obtain vertical movement
Vertical Thermal Actuators
• Design 1: Built to provide a downward motion but is overdriven; when current is removed the actuator snaps up
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More Vertical Thermal Actuators • Design 2: Provides upward motion
through the use of thin flexible connectors
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Even More Vertical Thermal Actuators• Design 3: U-shaped designed to
prevent thicker arm from conforming
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Thermal Actuator Animation
Levers
• Design 4: Downward Vertical Thermal Actuator is used to create lift by pressing down on one end of a lever
Mirror Hinge Thermal Actuator
Lever
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More Levers
• Design 5: Flexible connector used to transfer downward force of Vertical Thermal Actuator to a lever
Mirror Hinge Thermal Actuator
Lever
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Lever Animation
Linear Stepper Motor
• Makes use of 2 banks of horizontal thermal actuators to provide a drive mechanism
Staple HingeRotating Bar
Staple
Staple Hinge
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Staple Hinge Issues
Rotating bar
Rotating bar
Applied Force
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Torsion Hinge
• Thin flexible rods attached to mirror on either side
Mirror
Rotating Bar
Lever
Applied Force
Prevent Bar from Bowing Out
Torsion Hinge
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Final Picture
Possible Issues
• Torsion hinge might break or not be flexible enough
• Actuating arms might bend• Vertical thermal actuators might not give
enough deflection
Conclusion
• Testing has yet to be done• “We are confident of positive results…”
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