ANNA UNIVERSITY CHENNAI - imghost1.indiamart.comimghost1.indiamart.com/tenders/doc/2009-11-23/293_2009-11-23_14.pdf · The instrument should be fast enough to measure 3D ... Component

ANNA UNIVERSITY CHENNAI :: CHENNAI 600 025

TENDER FORM NO :

TENDER DOCUMENT

To

The Registrar Anna University Chennai – 600 025.

Sir,

Having examined the detailed specifications together with tender schedules

‘A’ ‘B’ ‘C’ ‘D’ and ‘E’ of Technical Bid, we hereby undertake to provide part/whole

of the Material/equipment described in the Financial Bid according to the said

specifications and “GENERAL CONDITIONS” at the rates entered in the Financial

Bid.

We hereby undertake to deliver materials within the time specified in the

schedule.

Yours faithfully,

SIGNATURE

Encl: COVER ONE

1) EMD

2) Technical Specifications

3) Tender Conditions / Eligibility conditions / Instructions to Bidders

4) Brochures and supporting documents

COVER TWO

2) Financial Bid

Name :

Designation :


TENDER DOCUMENT

for

SUPPLY AND INSTALLATION OF NON-CONTACT SURFACE ROUGHNESS MEASUREMENT SYSTEM

to

THE DEPARTMENT OF MANUFACTURING ENGINEERING

Technical Bid

Critical Dates

Publish Date 19-Nov-2009 10:00 AM

Document Download / Sale Start Date

19-Nov-2009 10:00 AM

Document Download / Sale End Date

05-Dec-2009 03:00 PM

Clarification Start Date 19-Nov-2009 10:00 AM

Clarification End Date

04-Dec-2009 03:00 PM

Pre Bid Meeting Date

24-Nov-2009 03:00 PM

Bid Submission Start Date

25-Nov-2009 10:00 AM

Bid Submission End Date

05-Dec-2009 04:00 PM

Bid Opening Date

05-Dec-2009 04:00 PM


SCHEDULE A - Specifications

Non-contact Surface Roughness Measurement System

The instrument should be capable of non contact measurement and analyze high precision 3D profile for super-polished optical components, semiconductor, MEMS and other applications with 0.1Å (10pm) resolution. The instrument should use a proper correlation algorithm to find the coherence peak and phase position of an interference pattern produced by a precision optical scanning unit. The system should have both high resolution and excellent sensitivity to returning light. The instrument should be fast enough to measure 3D surface texture, step height and micro dimensional measurement system so that results are available in few minutes. The Instrument should have automated programmable X, Y & Z stages movement, Auto Focus, Auto Stitching in X, Y & Z and ability to follow complex shape. Equipment should consist of measurement head including digital scanner with turret for holding multiple lenses, study column, X/Y Stage (Automatic), various Objective Lenses, Lon g Life “LED” Light Source Calibration Standards, Workstation Desk with Vibration Isolation, computer with Colour Monitor, Printer & Software for 3D & 2D Surface Characterisation including Surface Roughness on precision machined metallic / non metallic parts. The instrument should be able to measure and analyze 3D surface texture of components having reflectivity between 0.3% and 100%. All material types including glass, metal, photo resist, polymer, liquid inks and pastes should be measured without any difficulty. Composite granite to be used to provide stiffness and stability of the instrument structure. Anti-vibration mounts to be provided to isolate the instrument from external vibrations. Suitable data stitching software to be provided as standard so that specimen areas larger than 6.6mm x 6.6mm field of view can be measured using the data stitching feature. The stitching feature should also be used to take very high resolution measurements over areas up to the maximum size of the automated X-Y-Z stage used. Software Should have automatic facility to identify, measure and sorting out surface features defined by diameter, area or volume. Software should have feature like:

• Data Stitching in X-Y Axis Range • Data Stitching in Z-Axis Range • High resolution zooming • leveling and rotation • inverted and mirror images • form and defect removal

• profile extraction • Waviness and roughness parameters in both 3D and 2D. • Dimensional measurement in X, Y and Z axes. • area and volume parameters • counting and sorting • automatic step height

Data presentation tools User defined scale, viewing angle and rotation plus photo-realistic images in full color or monochrome to be provided. A full package of tools for desktop publishing to be provided which include templates for repetitive work. Should also include Photo Simulation, Contour Diagram, Frequency Spectrum, Text and Symbol Insertion Tools, Images Exportable as bitmaps Performance Measurement technique : Coherence correlation Interferometry : 2.2mm as standard (>10mm

Vertical range (Z) through Z-Stitching)

Vertical resolution : 0.01nm (0.1Å) over the entire Z-Range Noise floor (Z) : < 0.08nm (0.8Å) Step height repeatability : >0.1% Repeatability of surface RMS (Z) : <0.02nm (0.2Å) Max. Measurement area (X, Y) : 6.6mm x 6.6mm Min.Measurement area (X, Y) : 0.33mm x 0.33mm Number of measurement points : 1 Million Data points or better Optical resolution (X, Y) : 0.4µm-0.6µm (Depending on the surface) Surface reflectivity : 0.3% - 100% Measurement Time : Typically 5-40 seconds Measurement Array : 1024 x 1024 Pixels or better System Component size (max) : X = 110mm Y = 75mm; Z = 100mm Component weight (max) : 10 kg Automated X-Y stage (large) : 110x75mm or better Manual Tip /Tilt : +/- 4 Degrees Objective Mount : Three Position Turret Illuminator : Long life Green LED Z Scanner : Ultra High Precision Closed Loop Scanner

Installation conditions Temperature / humidity : 15 - 30Cº / 80% non-condensing Vibration : Anti-vibration mounts should be included Full system Dimension : Supplier to indicate Calibration Standards Step Height : 5 µm (25 nm, 50 µm or 500 µm optional) Lateral Calibration : Single standard with concentric circles

for all lenses Flatness : 2 Å (0.2 nm) RMS SiC Reference Flat Samples to be measured Material Type : Opaque or Transparent Material Surface : Specular or Scattering Optical specifications Magnification X 2.5 X 5 X 10 X 20 X 50 Numerical aperture 0.075 0.13 0.3 0.4 0.55 Working distance (mm) 10.3 9.3 7.4 4.7 3.4 Optical resolution (µm) 4.07 2.35 1.02 0.76 0.4 - 0.6 Maximum slope (degrees) 2.0 4.0 7.7 14.6 27.7

Measurement area (mm) 6.6 x 6.6

3.3 x 3.3 1.65 x 1.65

0.825 x 0.825

0.33 x 0.33

Lateral sampling resolution (µm)

6.6 3.3 1.65 0.83 0.33

3D Software capabilities The software should have the following features as standard Data manipulation tools Measured data Should be software levelled and aligned ,so that measurement setup is minimal • High resolution zooming • Levelling and rotation • Inverted and mirror images • Form and defect removal • 2D Profile extraction • Management of non-measured points throughout the program Data analysis tools • Flatness capability • Area and volume parameters • Surface subtraction • Material ratio in 2D and 3D • Step Height analysis


TENDER SCHEDULE ‘B’

IMPORTANT INSTRUCTIONS TO TENDERERS 1. E.M.D.: (1) EMD of Rs.56,000/- as DD should be enclosed along with Tender

document. Tender document received without enclosing EMD will be rejected.

(2) The successful tenderer should furnish Bank Guarantee as Security Deposit to the tune of 10% of the total value of the stores/equipments/materials before release of the purchase order towards security deposit. Thereafter the EMD paid at the time of tendering will be returned to the tenderer.

2. (i) The security deposit furnished by the successful tenderer will be returned only on completion of all the transactions in the respective purchase and on completion of the warrantee period.

(ii) This University is eligible to claim exemption from the payment of Excise

Duty in connection with the purchase of equipments/consumables. Necessary certificate will be issued to the firm so as to avail nil duty.

(iii) This University is not in a position to furnish form ‘C’ or ‘D’. The rate of VAT/C.S.T. as applicable should be indicated. (iv) The packing and forwarding charges where ever applicable should be quoted

separately. (v) As per Anna University Rules, Insurance charges will not be borne by this

University. (vi) The validity of the quotation should not be less than 120 days. 3. The Tenderers should adhere to the general conditions mentioned in tender

schedule ‘C’. Tenders found defective will summarily be rejected. 4. The tenderer should submit the tender bid in two parts. The first part relates to

Technical Bid submitting all the required details and documents complying with all the eligibility conditions and the other tender conditions/instructions as well as the statement of compliance. The second part relates to Financial Bid furnishing the rate for each item.

5. The Technical Bid in duplicate should be submitted in sealed cover and

superscribed as:

“Technical Bid in respect of tender for the Supply and Installation of Non-

contact Surface Roughness Measurement System”

Due on : 05.12.2009

6. Similarly the Financial Bid in duplicate for each item should be submitted in

sealed cover and superscribed as:

“Financial Bid in respect of tender for the Supply and Installation of Non-

contact Surface Roughness Measurement System”

Due on : 05.12.2009

7. Both the Technical Bid and the Financial Bid in sealed covers should be placed in

a third cover. The third cover shall be sealed and submitted superscribed as:

“Tenders for the Supply and Installation of Non-contact Surface

Roughness Measurement System”

Due on : 05.12.2009

8. The tender can be submitted online upto 3.00 p.m. on 05.12.09.

Or Tender Documents will also be received at the office of the Registrar, Anna University Chennai, Chennai – 25 upto 3.00 p.m. on 05.12.09 if the tenderers prefer to submit manually.

9. The Technical Bid will be opened in the Office of the undersigned in the presence

of such tenderers who may desire to be present at 4.00 p.m. on 05.12.2009 and the date of the opening of the Financial Bid will be intimated later.

10. The University reserves the right to cancel in full or part the purchase at any time

without assigning any reason there for even after calling for tenders.


TENDER SCHEDULE ‘C’

GENERAL CONDITIONS

1. a) The tenderers are expected to furnish their tenders for the equipment whose

specifications are given in the detailed specifications as given in the schedule ‘A’. The offer of the tenderer should strictly comply with all the specifications contained in the detailed specification.

b) The graduation of equipment to be offered should be in the metric system. 2. DRAWINGS AND SPECIAL SPECIFICATIONS:

Detailed drawings of the equipment wherever necessary and complete descriptions of

the parts should be furnished to enable complete verification of the equipment to be supplied. Pamphlets on detailed instructions for operation and maintenance of the equipments should be supplied along with each equipment. List of spare parts usually required should also be submitted. 3. PACKING: The Tenderer shall include and provide for securely protecting and packing the equipment or materials to be supplied, so as to avoid damage in transit. He shall be responsible for all loss or damage caused or occasioned by any defect in packing or in handling during transit, when the materials or equipment are delivered at the department concerned. 4. REPLACEMENT OF DEFECTIVE MATERIALS: a) If during the assembly or use of the equipment, any unsound or imperfect work or inferior quality material is noted, any officer authorized by the University shall decide and notify the tenderer of the same and the tenderer on receiving the details of such defects or deficiency shall, at his own expense, proceed to alter or supply fresh materials of the standard laid down in the specification. b) Rejected goods or materials shall be removed at the expenses of the tenderer within seven days after the issue of notice on such rejection. If not, the University may cause the equipment or materials to be removed and charge the tenderer with all expenses incurred in such removal. 5. GUARANTEE: The tenderer shall guarantee the quality of the equipment supplied and their satisfactory operation for a period of not less one year. 6. TEST CERTIFICATE: “ Maker’s Test Certificate” in duplicate should be supplied wherever applicable. Standard Test Certificate should also be furnished from approved standard laboratory wherever applicable.

7. PRICE AND PERIOD OF VALIDITY: All tenders must indicate the delivery cost for delivery at the department concerned and taxes payable (Central and State). The period of validity should be furnished in the tenders and it should not be less than 120 days. Prices should be firm and free from adjustments due to variation in cost of raw materials and labour. Wherever accessories are involved, such items must be indicated separately and rates for them should be shown separately. Since the University is eligible for concession on payment of Customs Duty partially on equipment procured under OGL LICENCE, C.I.F., Duty free and Duty paid prices should be quoted separately so that eligible concession of customs duty for Educational Institutions may be availed of from the Government of India. 8. TIME OF DELIVERY: Delivery period will be reckoned from the date of receipt of the order by the tenderer. Therefore the time required for supply by the tenderer from the date of receipt of the order should be clearly indicated in the tender for each item. A reasonable extension of time shall be granted on application for reasons beyond the control of the tenderer. The University reserves the right to cancel in part or in full in the order, if the due date of delivery is not kept up. 9. TERMS OF PAYMENT: (i) Invoice(s) in duplicate is/are to be sent/furnished by the supplier at the time of delivery of goods/materials. The duplicate will be returned by the Head of Department concerned or the officer authorized by him with the quantities or numbers received duly noted thereon. The supplier should send his bill(s) after the supply of complete set of items in the tender to the Head of the Department concerned indicating the amount due correctly calculated according to the prices agreed upon. After examination of the claim subject to any deduction by the Head of the Department (may be authorized to make under the tender) the tenderer shall be entitled to the payment of the bills(s) within a reasonable period of time after the satisfactory operation of the equipment. (ii) University Payment terms: 90% of the cost will be paid within a reasonable period after the delivery of the item and 10% within one month after the receipt of the certificate from the user department about the good performance of the equipment. Payment on other terms will not be made under any circumstances. 10. All costs towards damages or expenses, which the University might have paid for which the tenderer is liable may be deducted by the Head of the Department concerned from any money due or becoming due to tenderer under the tenders.

11. The final payment for goods or materials under the contract shall be made only on production of a certificate by the suppliers obtained from the Income Tax authorities that all the Income Tax payable by him upto the end of the financial year has been duly paid. 12. Any notice to the Tenderer shall be deemed to be sufficiently served, if given or left in writing at his usual or last known place of abode or business. 13. The Tenderer shall produce an Income Tax Certificate in the prescribed form from the Income Tax Officer of the Circle/Ward/District where he is accessed or assessable to Income Tax. 14. Tender may be sent for each and every item separately indicating the serial number of the item in the Tender documents. 15. IN THE CASE OF IMPORT: The supplier/local agent is required to watch the shipment and advice the Registrar, Anna University Chennai by Fax No.044 – 2235 1956 about the shipment on the same day for speedy clearance of cargo. If this University is forced to pay the demurrage in the absence of the receipt of information of shipment, the local agent will be held responsible for the demurrage, and the demurrage paid will be deducted from the agency commission. If the demurrage exceeds the agency commission the local agent will be liable to compensate the same. 16. ELIGIBILITY CONDITIONS:

• The tenderer should have supplied atleast 2 similar equipments to academic / research institutions in India in the last five years. (Indicate the number of machines of similar kind supplied in India during the past five years)

• The tenderers should have factory trained accredited Engineers preferably in

Chennai or atleast in India for servicing of the equipment.


TENDER SCHEDULE ‘D’

INSTRUCTIONS TO BIDDERS ON E-TENDERING

[URL: http://www.annauniv.edu/tender URL: http://www.tntenders.gov.in

Email: [email protected] Phone: 044 - 2235 7004] (1) In order to enhance transparency in the tendering process, tenders are invited

through Online Tendering system. However there will be physical form of tenders / manual submission also if the vendors prefer.

(2) Though the tenderers could submit the tender document manually in physical

form, the tenderers are encouraged to submit tenders through electronic tendering (E-Tender) system.

(3) Tenderers shall ensure that their tenders complete in all respects, are submitted

online on the website www.tntenders.gov.in on or before the closing date and time as per server system clock in Anna University Chennai.

(4) Aspiring Tenderers may obtain the User ID & Password for participating in

Electronic Tendering (eTendering) in the tenders of Anna University Chennai, Chennai – 600 025.

(5) Aspiring Tenderers will be enabled only after registering for Electronic

Tendering System. (6) Tenderers can access tender documents on the website, www.tntenders.gov.in

fill them and submit the completed tender document into electronic tender on the website itself.

(7) Tenderers shall attach all the scanned copies of certificates pertaining to their

product literature and any other tender related documents, if required by the University, failing which, their tenders will be disqualified. The hard copies of the scanned documents shall also be submitted to Registrar Anna University Chennai on or before the last date as mentioned.

(8) Bidder should do the registration in the tender site using the option available.

Then the Digital Signature registration has to be done with the e-token, after logging into the site. The e-token may be obtained from any one of the authorized Certifying Authorities such as SIFY/TCS / nCode.

(9) Bidder then login to the site through giving user id / password chosen during

registration. (10) The e-token that is registered should be used by the bidder and should not be

misused by others.

(11) After downloading / getting the tender schedules, the bidder should go through

them carefully and then submit the documents as asked, otherwise, the bid will be rejected.

(12) If there are any clarifications, this may be obtained online through the tender

site, or through the contact details. Bidder should take into account of the corrigendum published if any, before submitting the bids online.

(13) Bidder, in advance, should get ready the bid documents to be submitted as

indicated in the tender schedule and they should be converted into PDF format after duly digitally signing them. If there are more than one document, they can be clubbed together.

The Scanned copies of the documents are to be uploaded by the bidder at the time of submission of bids through the website by converting the documents to .pdf form.

TECHNICAL BID: 1. Scanned copy of EMD 2. Filled in and Signed copy of Technical Specifications in pdf 3. Filled in and Signed copy of Tender Conditions / Eligibility conditions / Instructions to Bidders in pdf 4. Brochures and supporting Documents FINANCIAL BID: 1. Filled in and signed copy of Financial Bid in pdf

(14) In case of online tendering, tenderers shall ensure that the necessary

supporting documents along with the EMD of value mentioned has reached Registrar Anna University Chennai, Chennai – 600025 before the closing date and time, failing which the tenders will be treated as late and rejected.

(15) The details of the Earnest Money Deposit document submitted physically

before the tender date and scanned copies of EMD furnished at the time of submission in the website bid submission of tender online should be the same. Otherwise the Tender will be summarily rejected.

(16) The bidder should read all the terms and conditions and accept the same to

proceed further to submit the bids. (17) The bidder has to submit the tender document online well in advance before

the prescribed time to avoid any delay or problem during the submission process.

(18) After the bid submission, the acknowledgement given by the e-tendering

system should be printed by the bidder and kept as a record of evidence of online submission of bid for the particular tender.

(19) Anna University Chennai, Chennai 25 will not be held responsible for any sort

of delay or difficulty faced in the submission of tenders online by the bidders. (20) he bidder may submit the bid documents either by online mode through the

site (http://tntenders.gov.in) or by manual mode to the Registrar, Anna University Chennai. If a bidder submits the bid, both online and in manual form, only the online bid will be acceptable.

(21) The tendering system will give a successful bid update message after

uploading all the bid documents submitted and then a bid summary will be shown with the bid number and the date and time of submission of the bid with all other relevant details. The documents submitted by the bidders will be digitally signed with the e-token of the bidder and then submitted.

(22) The bid summary has to be printed and kept as an acknowledgement as a

token of the submission of the bid. The bid summary will act as a proof of bid submission for a tender floated and will also act as an entry point to participate in the bid opening date.

(23) Bidder should log into the site well in advance for bid submission so that he

submits the bid in time i.e on or before the bid submission time. If there is any delay, due to other issues, bidder only is responsible.

(24) Each document to be uploaded through online for the tenders should be less

than 2 MB. If any document is more than 2MB, it can be reduced through, zip and the same can be uploaded. However if the file size is less than 1 MB the transaction uploading time will be very less.

(25) The time settings fixed in the server side and displayed at the top of the tender

site, will be valid for all actions of requesting, bid submission, bid opening etc., in the e-tender system. The bidders should follow this all the time during bid submission.

(26) All the data being entered by the bidders would be encrypted using PKI

encryption techniques to ensure the secrecy of the data. The data entered will not be viewable by unauthorized persons during bid submission and not be viewable by any one until the time of bid opening. The submitted tender documents become readable only after the tender opening even by the authorized individuals.

(27) The confidentiality of the bids is maintained since the secured Socket Layer

128 bit encryption technology is used. Data storage encryption of sensitive fields is done.

(28) Vendors who wish to undergo training shall attend the Pre Tender Meeting at

the venue and time notified by Anna University Chennai. During the training, user manual and CD will be given to each vendor for participating through electronic tendering system.

(29) The Tender Enquiry Documents are not transferable.

(30) Corrigendum/modifications/corrections, if any will be published in the website

www.tntenders.gov.in. (31) In the event of any of the mentioned dates being declared as a holiday / closed

day for the Anna University Chennai, the tenders will be sold / received / opened on the next working day at the appointed time.

(32) Further details of the tender can be obtained from the office of The Registrar,

Anna University Chennai. (33) For any clarification on e-Tender participation or request for training on e-

Tendering, Vendors can contact e-Tendering Help Desk Tel Nos. 044 – 2235 7050.

REGISTRAR

ANNA UNIVERSITY CHENNAI. CHENNAI – 600 025.


TENDER SCHEDULE ‘E’

IMPORTANT NOTICE TO BIDDERS ON E-TENDERING (E-tendering System,Government of Tamil Nadu,Chennai-600 006.)

Govt of Tamil Nadu has successfully rolled out the e-bid submission Tendering System through its web site http://tntenders.gov.in Tenders of various Departments have been uploaded, their bids submitted and the same have been opened on line. Bids for various tenders published in the web site of Government Departments can be submitted online by enrolling with the above mentioned web site. The web site currently has a provision to accept bids submitted manually. However even for manually submitted bids, online enrollment of the bidder is necessary. The bidders can enroll themselves on the website http://tntenders.gov.in using the option “Click here to Enroll”. This enrollment is free at this point of time. Possession of a Valid Class II Digital Signature Certificate (DSC) in the form of smart card/e-token in the Company's name is a prerequisite for registration and participating in the bid submission activities through this web site. Digital Signature Certificates can be obtained from the authorized certifying agencies, details of which are available in the web site http://tntenders.gov.in under the link “Information about DSC”. The web site also has user manuals with detailed guidelines on enrollment and participation in the online bidding process. The user manuals can be downloaded for ready reference. Queries pertaining to the e-Tendering system may be addressed to the E-tender Cell by sending an E-Mail to [email protected] Vendors can also attend the training/familiarization programme on the e-tendering system conducted periodically by the Government of Tamil Nadu in association with NIC. Advantages of E-Tendering System The bidders will be able to see the status of the tenders for which they have submitted quotes in different stages and would also be informed of the status by E-Mail. For the bidders who have registered themselves on the website through the “Stay Updated” option, information of all the tenders for which they are interested to participate will be sent by E-Mail. Please note that all the departments of Govt of Tamil Nadu are gradually switching over to e-Tendering system in a phased manner. All the tenders in future, will be issued only through the e-Tendering system and only registered vendors will be allowed to participate in the tendering process. In view of the stated advantages, vendors are hereby requested to register in the e-Tender web site with their DSC and a copy of the enrollment details may be sent by E-Mail to the mail address [email protected] without fail.

Administrator,

e-Tendering System


TENDER DOCUMENT

for

SUPPLY AND INSTALLATION OF NON-CONTACT SURFACE ROUGHNESS MEASUREMENT SYSTEM

to

THE DEPARTMENT OF MANUFACTURING ENGINEERING

Financial Bid

Critical Dates

Publish Date 19-Nov-2009 10:00 AM

Document Download / Sale Start Date

19-Nov-2009 10:00 AM

Document Download / Sale End Date

05-Dec-2009 03:00 PM

Clarification Start Date 19-Nov-2009 10:00 AM

Clarification End Date

04-Dec-2009 03:00 PM

Pre Bid Meeting Date

24-Nov-2009 03:00 PM

Bid Submission Start Date

25-Nov-2009 10:00 AM

Bid Submission End Date

05-Dec-2009 04:00 PM

Bid Opening Date

05-Dec-2009 04:00 PM


FINANCIAL BID

Supply and Installation of Non-contact Surface Roughness Measurement System

Sl. No. Quantity Details of Item Unit Rate Amount

1. 1 number Supply and Installation of Non-contact Surface Roughness Measurement System with the following specifications

The instrument should be capable of non contact measurement and analyze high precision 3D profile for super-polished optical components, semiconductor, MEMS and other applications with 0.1Å (10pm) resolution. The instrument should use a proper correlation algorithm to find the coherence peak and phase position of an interference pattern produced by a precision optical scanning unit. The system should have both high resolution and excellent sensitivity to returning light. The instrument should be fast enough to measure 3D surface texture, step height and micro dimensional measurement system so that results are available in few minutes. The Instrument should have automated programmable X, Y & Z stages movement, Auto Focus, Auto Stitching in X, Y & Z and ability to follow complex shape. Equipment should consist of measurement head including digital scanner with turret for holding multiple lenses, study column, X/Y Stage (Automatic), various Objective Lenses, Lon g Life “LED” Light Source Calibration Standards, Workstation Desk with Vibration Isolation, computer with Colour Monitor, Printer & Software for 3D & 2D Surface Characterisation including Surface Roughness on precision machined metallic / non metallic parts. The instrument should be able to measure and analyze 3D surface texture of components having reflectivity between 0.3% and 100%. All material types including glass, metal, photo resist, polymer, liquid inks and pastes should be measured without any difficulty. Composite granite to be used to provide stiffness and stability of the instrument structure. Anti-vibration mounts to be provided to isolate the instrument from external vibrations.


FINANCIAL BID (Contd……..)

Suitable data stitching software to be provided as standard so that specimen areas larger than 6.6mm x 6.6mm field of view can be measured using the data stitching feature. The stitching feature should also be used to take very high resolution measurements over areas up to the maximum size of the automated X-Y-Z stage used. Software Should have automatic facility to identify, measure and sorting out surface features defined by diameter, area or volume. Software should have feature like:

• Data Stitching in X-Y Axis Range • Data Stitching in Z-Axis Range • High resolution zooming • leveling and rotation • inverted and mirror images • form and defect removal • profile extraction • Waviness and roughness parameters in both

3D and 2D. • Dimensional measurement in X, Y and Z axes. • area and volume parameters • counting and sorting • automatic step height

Data presentation tools User defined scale, viewing angle and rotation plus photo-realistic images in full color or monochrome to be provided. A full package of tools for desktop publishing to be provided which include templates for repetitive work. Should also include Photo Simulation, Contour Diagram, Frequency Spectrum, Text and Symbol Insertion Tools, Images Exportable as bitmaps



Performance Measurement technique : Coherence correlation Interferometry Vertical range (Z) : 2.2mm as standard (>10mm through Z- Stitching) Vertical resolution : 0.01nm (0.1Å) over the entire Z-Range Noise floor (Z) : < 0.08nm (0.8Å) Step height repeatability : >0.1% Repeatability of surface RMS (Z) : <0.02nm (0.2Å) Max. Measurement area (X, Y) : 6.6mm x 6.6mm Min. Measurement area (X, Y) : 0.33mm x 0.33mm Number of measurement points : 1 Million Data points or better Optical resolution (X, Y) : 0.4µm-0.6µm (Depending on the surface) Surface reflectivity : 0.3% - 100% Measurement Time : Typically 5-40 seconds Measurement Array : 1024 x 1024 Pixels or better System Component size (max) : X = 110mm Y = 75mm; Z = 100mm Component weight (max) : 10 kg Automated X-Y stage (large) : 110x75mm or better Manual Tip /Tilt : +/- 4 Degrees Objective Mount : Three Position Turret Illuminator : Long life Green LED Z Scanner : Ultra High Precision Closed Loop Scanner Installation conditions Temperature / humidity : 15 - 30Cº / 80% non- condensing Vibration : Anti-vibration mounts should be included Full system Dimension : Supplier to indicate



Calibration Standards Step Height : 5 µm (25 nm, 50 µm or 500 µm optional) Lateral Calibration : Single standard with concentric circles for all lenses Flatness : 2 Å (0.2 nm) RMS SiC Reference Flat Samples to be measured Material Type : Opaque or Transparent Material Surface : Specular or Scattering Optical specifications Magnification X 2.5 X 5 X 10 X 20 X 50 Numerical aperture

0.075 0.13 0.3 0.4 0.55

Working distance (mm)

10.3 9.3 7.4 4.7 3.4

Optical resolution (µm)

4.07 2.35 1.02 0.76 0.4 - 0.6

Maximum slope (degrees)

2.0 4.0 7.7 14.6 27.7

Measurement area (mm)

6.6 x 6.6

3.3 x 3.3

1.65 x

1.65

0.825 x

0.825

0.33 x

0.33 Lateral sampling resolution (µm)

6.6 3.3 1.65 0.83 0.33

3D Software capabilities The software should have the following features as standard Data manipulation tools Measured data Should be software levelled and aligned ,so that measurement setup is minimal • High resolution zooming • Levelling and rotation • Inverted and mirror images • Form and defect removal • 2D Profile extraction



• Management of non-measured points throughout the program

Data analysis tools • Flatness capability • Area and volume parameters • Surface subtraction • Material ratio in 2D and 3D • Step Height analysis

Taxes

TOTAL

((Rupees ……………………………………..only)