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Workshop on Fully Layout Technology 2002 / 03 / 23 林正松 / 矽拓科技有限公司 主講㆟:林正松 主講㆟:林正松 主講㆟:林正松 主講㆟:林正松 矽拓科技有限公司 矽拓科技有限公司 矽拓科技有限公司 矽拓科技有限公司 TEL03-5101949 THE ART OF ANALOG LAYOUT

Analog Ic Layout 1 1385

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Page 1: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司

主講㆟:林正松主講㆟:林正松主講㆟:林正松主講㆟:林正松

矽拓科技有限公司矽拓科技有限公司矽拓科技有限公司矽拓科技有限公司

TEL::::03-5101949

THE ART OF ANALOG LAYOUT

Page 2: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司2

前言前言前言前言

• 瞭解Analog佈局元件• 熟悉analog matching guide• 適當技巧性的放置• Design 與 layout 的共識

Page 3: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司3

ANALOG LAYOUT

• CMOS ANALOG LAYOUT

• BIPOLAR ANALOG LAYOUT

• BICMOS ANALOG LAYOUT

Page 4: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司4

CMOS ANALOG LAYOUT• CMOS Component Layout Guide

• CMOS Layout Application• Transistor• Capacitor• Resistor• Bipolar• Mos power transistor

• CMOS Layout Case Study

Page 5: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司5

s G D S G D

CMOS LAYOUT STRUCTURE

LV NMOS:(poly)&(active)&(nplus)&(psub)

LV PMOS:(poly)&(active)&(pplus)&(nwell)

Page 6: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司6

Asymmetric HV12V Device LayoutCMOS LAYOUT STRUCTURE

NMOS PMOS

N+

HV

POLYN+N++DIFF

DRAIN GATESOURCE DRAIN GATE SOURCE

CONTACT

NWELLP+POLY

PDD

HV

P+

MT1

DIFF

Page 7: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司7

Asymmetric HVP30V Device LayoutCMOS LAYOUT STRUCTURE

PMOS NMOS

DRAIN GATE SOURCE

DIFF

POLYHPF+BL

P+

HV

CO

NWELL+BLNWELL+HPF

POLYN+

HV

DIFFDRAIN GATE SOURCE

LL

Page 8: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司8

CMOS-RESISTOR LAYOUT STRUCTURE

>>Diff Resistor

>>Poly register >>Nwell ResistorCONTACT

DIFF

POLY1

NWELL

Ndiff

DUMMY DUMMY

NWELL

P+

Page 9: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司9

1、P1-P2 LAYOUT STRUCTURE

2、MOS LAYOUT STRUCTURE

poly1

M1

CO

POLY2M2

poly1

P+CO

N+

DIFF

CMOS-CAPACITOR LAYOUT STRUCTURE

Page 10: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司10

CMOS-CAPACITOR LAYOUT STRUCTURE3、MIN TOPMETAL 與 TOPMETAL-1之間加-MINLAYER

4、METAL POLY STRUCTURE

M5M4

VIA4

MIM

NWELLCONTACT

TOP=M1+M3BOTTOM=POLY1+M2

Page 11: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司11

CMOS-PNP LAYOUT STRUCTURE

NWELL

CONTACT

DIFFM1

P+

Page 12: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司12

CMOS-FUSE LAYOUT STRUCTURE

STYLE -3STYLE-1 STYLE-2

METAL FUSE POLY1 FUSE POLY1 FUSEM1

POLY1CONTACT

PASS

CONTACT

M1

POLY1

Page 13: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司13

CMOS LAYOUT APPLICATION -TRANSISTOR

>>MOS Matching Mirror M2

VIA

M1

CONTACT

P+

DIFFPOLY

Page 14: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司14

CMOS LAYOUT APPLICATION -TRANSISTOR>>交叉對稱(1)

OUT P

OUT N

Page 15: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司15

>>交叉對稱(2)

CMOS LAYOUT APPLICATION -TRANSISTOR

DUMMY POLY

Page 16: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司16

CMOS LAYOUT APPLICATION-CAPACITOR

DUMMY

>>Unit Capacitor

DUMMY

Well contact

poly

Page 17: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司17

CMOS LAYOUT APPLICATION-CAPACITOR

>>Unit Capacitor –Input Stage Matching

POLY1

POLY2

M1

WELL CONTACT

Page 18: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司18

CMOS LAYOUT APPLICATION-RESISTOR

>> Normal Resistor-兩端拉出即可兩端拉出即可兩端拉出即可兩端拉出即可

Page 19: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司19

CMOS LAYOUT APPLICATION-RESISTOR

>>Crocess ResistorM2 VIA WELLCONTACT

CONTACT

POLY

M1

Page 20: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司20

CMOS LAYOUT APPLICATION -RESISTOR>>交叉對稱

DUMMYDUMMY

Page 21: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司21

CMOS LAYOUT APPLICATION –PNP X 10

NWELLP+N+

P+

Page 22: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司22

CMOS LAYOUT APPLICATION –PNP X 9

NWELL

P+

P+

N+

Page 23: Analog Ic Layout 1 1385

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林正松 / 矽拓科技有限公司23STYLE -1 STYLE -2

CMOS LAYOUT APPLICATION-Power MOS Transistor(1)

ESD PROTECTION 佈局方式不影響面積 面積效益是最好ESD PROTECTION 能力差㆒點

Page 24: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司24

CMOS LAYOUT APPLICATION –Power MOS Transistor(2)

阻抗考量,正方面型最好N+ DIFF NWELL

P+ DIFF

POLY

Page 25: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司25

CMOS LAYOUT APPLICATION- Power MOS Transistor((((3))))

N+DIFFP+DIFF

NDIFF

POLY

Page 26: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司26

CMOS LAYOUT APPLICATION –Power MOS Transistor((((4))))

>>M2 Finger Structure

M2

M1

Page 27: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司27

CMOS LAYOUT CASE STUDY >>OP1

NWODP+

N+P1P2

COM1

VIAM2

Page 28: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司28

CMOS LAYOUT CASE STUDY>>OP2

6 5

5 6

44 24 3

3 41

7 78 8

IP

IN

NWODP+N+P1P2COM1

VIAM2

Page 29: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司29

CMOS LAYOUT CASE STUDY-CIRCUIT

Page 30: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司30

BIPOLAR ANALOG LAYOUT

• BIPOLAR Component Layout Guide

• BIPOLAR Layout Application

• BIPOLAR Layout Case Study

Page 31: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司31

BLDCSPSNCOM1

VIAM2TOCAPIR

BIPOLAR LAYOUT STRUCTURE-VNPN

STYLE-1 STYLE-2

Page 32: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司32

BLDCSPSNCOM1

VIAM2TOCAPIR

BIPOLAR LAYOUT STRUCTURE-LPNP

STYLE-1 STYLE-2 STYLE-3

Page 33: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司33

BIPOLAR –CAPACITOR LAYOUT STRUCTURE

MT1

BIPOLAR-RISISTOR LAYOUT STRUCTURE

IR SP

>>Sn-cap type

cap

BL

SN

TO

Page 34: Analog Ic Layout 1 1385

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林正松 / 矽拓科技有限公司34

BIPOLAR LAYOUT APPLICATION-VNPN

Page 35: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司35

BIPOLAR LAYOUT APPLICATION-LPNP

STYLE-1 STYLE-2

Page 36: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司36

BIPOLAR LAYOUT APPLICATION-LPNP

STYLE-3

Page 37: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司37

BIPOLAR LAYOUT APPLICATION-Power Transistor

EMIT 面積效應最大 電流平均分散 讓熱不會集㆗

矩型 工字型

Page 38: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司38

BIPOLAR LAYOUT APPLICATION-VNPN增加EMIT的周長,提昇趨動能力

梯型

Page 39: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司39

BIPOLAR LAYOUT CASE STUDY

Page 40: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司40

BIPOLAR LAYOUT CASE STUDY -CIRCUIT

Page 41: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司41

BIPOLAR LAYOUT CASE STUDY

Page 42: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司42

BICMOS ANALOG LAYOUT

• BICMOS Component Layout Guide

• BICMOS Layout Application

• BICMOS Layout Case Study

Page 43: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司43

BICMOS LAYOUT STURCTURE

Page 44: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司44

BICMOS LAYOUT STURCTURE-VPNP

DIFF PW

P+

CONTACT

NWELL

N+

>>Double Base

Page 45: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司45

BICMOS LAYOUT STURCTURE-LPNP

PDIFF

NDIFF

NWELL

N+BL

POLY

Page 46: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司46

BICMOS LAYOUT STURCTURE-VNPN

>>Double Base-降低Base 阻抗

Page 47: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司47

BICMOS LAYOUT STURCTURE-RESISTOR

>>Base Resistor >>P2 resistor>>P1 resistor

Page 48: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司48

BICMOS LAYOUT STURCTURE

>>SNK Capasistor >>P1-P2 Capasistor

N+BLNWELLN+INP

Page 49: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司49

BICMOS LAYOUT APPLICATION-VNPN

>>交叉對稱

Page 50: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司50

BICMOS LAYOUT APPLICATION-VNPN增加Driver 趨動能力,節省面積

Page 51: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司51

BICMOS LAYOUT CASE STUDY-CASE 1>>OP1

R2R2

R2R2

R2 R2 R2 R2

M5 M5

M1

M3

M3

M4

M4

M2

R1 R1 R1 R1 R1

DU

MM

Y

DU

MM

Y

Q2 Q1

Q2Q1

INIP

Page 52: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司52

BICMOS CASE STUDY –OP CIRCUIT

Page 53: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司53

BICMOS LAYOUT CASE STUDY-CASE 2AMP

G1

DU

MM

YD

UM

MY

DU

MM

YD

UM

MY

DU

MM

Y

DU

MM

YD

UM

MY

DU

MM

YD

UM

MY

DU

MM

Y

DU

MM

YD

UM

MY

DU

MM

YD

UM

MY

COLLECT

IN

M7

Q2 Q1Q3

R1 R1

R1 R1 R1 R2 R3

R1 R1 R1 R1 R1 R1 R1 R2

R1 R1 R1 R1 R2 R2 R2 R2

R4 R3 R4 R3

R3 R4 R3 R4

R3

M6M6

M4M5

M1M1

M1M1

M5M4

M6M6

M3M2

M2M3

M2M3

M3M2

Page 54: Analog Ic Layout 1 1385

Workshop on Fully Layout Technology 2002 / 03 / 23

林正松 / 矽拓科技有限公司54

BICMOS CASE STUDY –AMP CIRCUIT