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QuietSeis TM An Ultra-low noise MEMS accelerometer for Seismology [email protected] [email protected] April 10 th , 2018

An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

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Page 1: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

QuietSeisTM

An Ultra-low noise MEMS accelerometer for Seismology

[email protected]@sercel.com

April 10th, 2018

Page 2: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Introduction

SERCEL• French company founded in 1956, subsidiary of CGG

• More than 1500 employees in 8 countries and 14 sites

• Market leader in seismic instrumentation for O&G exploration in marine, land and transition zones

• Longstanding culture of technological innovation

2

Page 3: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Introduction

Context• Sensors for low frequency seismic applications (<2Hz):

- Geophones (10Hz, ~5Hz)

- Seismometers (1-2Hz)

- Force Balance Accelerometers (FBA)

�bulky, costly, power consuming, not deemed industrial..

�phase rotation at low frequency, manufacturing tolerances, aging, environmental conditions: amplitude & phase distortions detrimental to the fidelity of the signal

3

-180

-150

-120

-90

-60

-30

0

0,01 0,1 1 10 100

Ph

ase

(deg

rees

)

Frequency (Hz)

Phase response2Hz seismometer (damping 0,7)

Page 4: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Introduction

Context

• MEMS accelerometers often perceived as too noisy at low frequencybecause of 1/f noise

- True for most of the seismic MEMS on the market

• Latest generation of digital closed-loop MEMS accelerometer, initiallydesigned for seismic imaging, exhibits very good noise performances at low frequency.

4

Page 5: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS accelerometer

Some benefits of MEMS accelerometer

• No sensor leveling required, can be used in any orientation

• Measures its own tilt (DC response)

• Compact and very low power

• Digital closed-loop architecture:

- Frequency response flat and highly stable in amplitude and phase (down to DC):

≫ Perfect time synchronization of events between sensors

- Very low distortion

- Very fast clip recovery time

5

Page 6: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

6

Noise floor for seismic imaging (Lainé, 2014)• Noise measured above 1Hz in LSBB (France)• <15ng/sqrt(Hz) above 10Hz• 1/f noise at low frequency not characterized

Page 7: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

7

Low frequency noise measurement

• Basement of office building in peri-urban area

• Vibration isolation platform (f0~2,7Hz) • Soundproof acoustic chamber• Data acquired at night over the course

of several months• Raw data processed using

ANSS/USGS Matlab script: ANSS_noise_rms_rev4.m

Page 8: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

8

Low frequency noise measurement

• 2 QS-DB boards: Vertical and horizontal – QuietSeis MEMS accelerometer– UART serial data transmission to external device

• 10 Hz and 5Hz geophone channels– low noise 24 bits / ADC– Velocity data converted in acceleration

QS-DB

Page 9: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

9

Low frequency noise measurement

Noise limited by

ambient vibrations

above ~2Hz

5Hz 10Hz

MEMS 1/f noise lower than :

• 10Hz-geophone noise below ~2Hz

• 5Hz-geophone noise below ~0,1Hz

• NHNM down to ~0,1Hz

Page 10: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

10

Low frequency Dynamic Range

Full scale @ +/-13m/s² pk :• Vertical MEMS Dyn. Range ~131dB

0,02-2Hz

Dyn. Range

133dB

Dyn. Range

126dB

Full scale

+/- 5 m/s² pk

(3,5m/s² rms)

Page 11: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

MEMS Noise measurements

11

Comparative testing vs. Trillium Compact broadband seismometer in a low noise test site is being scheduled with a French seismology institution.

Test site Noise PPSD (vertical)

Trillium Compact QS-DB

Page 12: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Earthquake detection

12

IRAN-IRAK border M7.4 earthquake

• Nov 12th,2017• 18:18:19 (UTC)

Page 13: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Earthquake detection

13

MEMS Noise

floor (typ.)

Earthquake ground acceleration

(Clinton, 2002)

MEMS Full scale

5m/s² pk

Vertical axis MEMS Vertical axis MEMS Vertical axis MEMS Vertical axis MEMS accelerometeraccelerometeraccelerometeraccelerometer

(Power (Power (Power (Power spectrumspectrumspectrumspectrum))))

Natural frequency

of isolation platform

Page 14: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Earthquake detection

t=180s � 18:25:09 in NANTES

P-wave @ 18:25:06 in CLF

t=515s � 18:30:24 in NANTES

S-wave @ 18:30:35 in CLF

Good correlation with

CLF seismic station!

Page 15: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Conclusion

15

A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for very weak signals and very low frequency measurements. A noise floor below NHNM down to 0.1 Hz has been demonstrated.

New possibilities for low frequency, weak signal applications:• Ambient seismic noise imaging and monitoring

• Seismology

- Replacement of Force Balance Accelerometers, seismometers,…

• Structural Health Monitoring of large structures

- Operational Modal Analysis using ambient vibrations

• Active stabilization platforms in low noise

or low-g environments

Page 16: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for

Bibliography

16

References• Clinton J.F., Heaton T.H., 2002, Potential Advantages of a Strong-motion

Velocity Meter over a Strong-motion Accelerometer: Seismological Research Letters Volume 73, Number 3, 332-342.

• Lainé J., 2014, A high-sensitivity MEMS-based accelerometer: The Leading Edge 33/11, 1234-1242

• Observatoire GEOSCOPE (doi: 10.18715/GEOSCOPE.G), Centre de Données de l'Institut de Physique du Globe de Paris.

http://geoscope.ipgp.fr/index.php/fr/catalogue/description-d-un-seisme?seis=us2000bmcg

Page 17: An Ultra-low noise MEMS accelerometer for Seismology · Conclusion 15 A new MEMS accelerometer with improved noise floor and reduced 1/f noise contribution has been evaluated for