Amtech Systems, Inc. · AMTECH SYSTEMS, INC. 1 Amtech Systems, Inc. Nasdaq: ASYS J.S. Whang Chairman & Chief Executive Officer Brad Anderson Chief Financial Officer February 2010

Solar & Semiconductor Solutions AMTECH SYSTEMS, INC.

1 1

Amtech Systems, Inc.

Nasdaq: ASYS

J.S. Whang Chairman & Chief Executive Officer

Brad Anderson Chief Financial Officer

February 2010

Solar & Semiconductor Solutions

25th LISTING ANNIVERSARY ASYS / NASDAQ


2 2

Safe Harbor Statement Certain statements in the following presentation relate to future results that are forward

looking statements as defined in the Private Securities Litigation Reform Act of 1995.

Actual results may differ materially from those projected as a result of certain risks and

uncertainties, including but not limited to, changes in the technologies used by Amtech’s

customers, change and volatility in the demand for diffusion, PSG and PECVD equipment,

the effect of changing worldwide political and economic conditions on government-funded

solar initiatives, capital expenditures, production levels, including those in Europe and

Asia, the effect of overall market conditions, market acceptance, risks associated with

dependence on suppliers, the impact of competitive products and pricing, technological

and product development risks (including the risks inherent in launching new products)

and other risk factors noted in our forms 10-K, 10-Q, and other filings with the SEC. This

presentation includes historical and forward-looking pro forma information. The Company

assumes no responsibility to update the information contained in this presentation.

This presentation and the information contained herein is the property of Amtech Systems,

Inc.


3

  A Market Leading Supplier of Solar Horizontal Diffusion Furnace Systems used for Solar Cell Manufacturing

 Partnering with solar manufacturers to achieve higher efficiencies!

Horizontal Diffusion Furnace

Revenue & Backlog

$M

$53

$100-$105 Est.

$74

$32

0

20

40

60

80

100

120

2009 2010 YTD

RevenueBacklog

* FY10 YTD orders include announced orders; FY09 backlog as of 9/30/09; FY10 backlog as of 12/31/09


4 4

Solar Strategy: Expand total available market by becoming the front-end “Technology Turnkey Provider”

Solar Cell Manufacturing Process Flow Chart

4. Etching Oxide (PSG)

5. Applying Anti- Reflective Coating

(PECVD)

6. Printing Rear Side Contacts 7. Drying 9. Drying 10. Printing Front

Side Contacts

11. Drying and Sintering

12. Testing and Sorting

8. Printing Aluminum on Back

Surface Field

1. Inspecting and Splitting Wafers

2. Etching Saw Damage

(Texturing)

3. Diffusion

Legend:

Existing Products

Targeted Products


5 5

A long-term player: over 26 years listed on NASDAQ

Named to Fortune’s 2009 List of America’s fastest-growing small public companies

Named to Deloitte’s Fastest 500

2008 - 25th Listing Anniversary


6 6

Revenue/Order Trends (in millions)

4046

80

53

100-105

0

20

40

60

80

100

120

2006 2007 2008 2009 2010

Est.

40

55

107

35

78

0

20

40

60

80

100

120

2006 2007 2008 2009 2010

YTD

($M) ($M)

REVENUE (FY) ORDERS (FY)

* Fiscal 2010 YTD orders include announced orders


7

32 33

13

22

4

34

74

22

8

73

0

20

40

60

80

100

120

2006 2007 2008 2009 2010 YTD

•   Semi •   Solar

Revenue Order Trend (solar/semi)

Transitioned to Solar dominant from Semi

$55M

$40M

$107M

$35M

$78M

* Fiscal 2010 YTD Orders include announced orders

·   OEM have comfortable order backlogs. Their plants are fully booked until at least the end of 2008.

·   Some players produce diffusion furnaces for R&D labs or small fabs and want to keep this product in their portfolio: ATV Technology (Germany), for example. These kind of manufacturers produce very specific and highly customized products.

·   Main players

— The main players are Tempress, Centrotherm, Sierratherm, SEMCO, SVCS.

— “Others” category integrates players such as Schmid, BTU, Koyo, Sevenstar, Tecnofimes, MRL.

Diffusion furnace market shares in 2008

Share of the capacity to sell in 2008

©2008• 150

Tempress

(Amtech)

39%

Centrotherm 33%

Sierratherm 12%

Semco 6%

SVCS 5%

Others 5%

Market study by Yole Development


9 9

  Significant SOLAR business opportunity   Large emerging solar market

 Grid parity expected to be reached in 3 - 5 years

  A market leader in solar DIFFUSION processing systems

  Gaining market share with newly developed DIFFUSION TECHNOLOGY

  On course to become technology turnkey provider with:  New Diffusion Technology

 New solar DEPOSITION product (anti-reflective coating system – PECVD)

 New solar DRY ETCH product (PSG removal)

  $42 million in cash at 12-31-09 to support growth initiatives


10

Solar Industry Segments

 MEMC, Hemlock, Wacker, REC, Tokuyama, SUMCO

Silicon Ingots and Wafers

COMPANY DOING BUSINESS IN THAT SEGMENT

 MEMC, Wacker, REC, LDK, SUMCO, Yingli, M.SETEK, ReneSola

 Kyocera, DelSolar, Q-Cell, E-ton, CSI, Motech, Yingli, Sharp, Trina, BP Solar, SolarWorld, GE Energy, Evergreen Solar, SunPower

 Amtech Systems (Tempress®), CentroTherm, Roth & Rau, BTU International, 48th Institute

 Sharp, Q-cell, Kyocera, Suntech, Yingli, Sunpower, SolarWorld, Evergreen, ErSol, CSI

Polycrystalline

Solar Cells

Solar Modules

Solar Cell Prod. Equip.


11

Amtech History (Diffusion Experts) 1981 Founding of Amtech Systems, Inc., semi quartz consumable

business.

1983 Acquired Intel Corp invention: Diffusion processing tool (ATMOSCAN).

1994 Acquired Tempress® Systems: Diffusion furnace business.

1997 Acquired P.R. Hoffman®, silicon polishing consumable business.

2004 Acquired Bruce Technologies® from Hitachi Kokusai; Diffusion furnace business.

2005 Became No. 1 semi horizontal Diffusion company in the world.

2006 Entered Solar Diffusion market using core semiconductor diffusion competency.

Acquired R2D™ Ingenierie SAS; Solar Diffusion Automation. 2007

Introduced Solar PECVD. 2008

Introduced Solar Dry Etch (PSG removal) product. 2009


12 12

Solar Market Opportunity & Growth Strategy


13

5.36 5.16

8.34

12.09

19.42

29.95

5.23 3.54

5.05

8.77

16.36

25.90

0.00

5.00

10.00

15.00

20.00

25.00

30.00

35.00

2008 2009 2010 2011 2012 2013

13

iSuppli Total PV Installations (Nov 09)

iSuppli Total PV Installations (May 09)

Data: Energy Information Administration PV-tech.org, ISuppli Corp, November 14, 2009

Solar Industry Installation Forecast

(In GWs)


14

China’s Domestic PV Demand Potential

Data Source: GTM Research September 2009

242

679

1050

1406

461

1171

1823

2461

0

500

1000

1500

2000

2500

3000

2009 2010 2011 2012

BaseDemandScenario UpsideDemandScenario

(In MWs)


15

Global PoliSi Capacity

0

50

100

150

200

250

300

2008 2009 2010 2011 2012 2013 2014

Poly

Si M

etric

Ton

s (th

ousa

nds)

ConservativeAll News

With 4 billion US$ in announced expansions, projects reaching manufacturing capacities of 63,000 metric tons by 2014 at its plants in Michigan and Tennessee - up from its current capacity of just under 30,000 MT.

Hemlock Semiconductor VP Gary Homan:

by Homan

Data Source: PV Tech – www.pv-tech.org September 2009


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—  Renewable Energy push by all G-8 and G-20

—  Energy Security & Independence Issue

—  Economic Stimulus Plan focuses on Solar industry

—  Creating True New Jobs

—  30% Tax Credit, No Cap; $3 Billion in tax grants

—  Solar Energy Cost achieving Grid Parity within next 5 years

—  Record low interest rate around the world

—  Solar Value Chains largely remain focused on future growth

Solar Fundamentals Remain Intact


17 17

Our Products


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Diffusion Furnace, PSG & PECVD

Furnace Automation & Wafer Handling Systems Wafer Carriers

Silicon Wafers Solar Cells & Semiconductor Chips

®


19 19

52%

28%

20%

68%

16%

16%

67%

19%

14%

Customer Base: Asia-Focused

Largest Customer (% of Rev)

FY09: 25%

FY08: 20%

FY07: 13%

Asia

Europe

North America


20 20

Financial Overview


21

$0

$20

$40

$60

$80

$100

$120

2006 2007 2008 2009 2010 Est

Summary of Annual Net Revenue R

even

ue

Fiscal Year (Oct. 1 Sep. 30)

($ in Millions)

$46M $40M

$100 -$105M *

$80M

$53M

* Guidance reaffirmed 2-10-10


22 22

-0.3

1.3

2.42.9

-1.6

0.5

2.2 2.3

5.1

1.2

($2.0)

($1.0)

$0.0

$1.0

$2.0

$3.0

$4.0

$5.0

$6.0

2005 2006 2007 2008 2009

Annual Earnings Summary $

In M

illio

ns

GAAP Net Income (Loss) EBITDA (before impairment & restructuring charges)


23 23

Balance Sheet

(In Millions)

9.0

$7.21

$73.7

$0.2

$91.7

$42.5 Cash and cash equivalents

Total assets

Total debt

Shareholders’ equity

Shares outstanding

Tangible BV per share

December 31, 2009


24 24

  Significant SOLAR business opportunity   Large emerging solar market

 Grid parity expected to be reached in 3 - 5 years

  A market leader in solar DIFFUSION processing systems

  Gaining market share with newly developed DIFFUSION TECHNOLOGY

  On course to become technology turnkey provider with:  New Diffusion Technology

 New solar DEPOSITION product (anti-reflective coating system – PECVD)

 New solar DRY ETCH product (PSG removal)

  $42 million in cash at 12-31-09 to support growth initiatives


25 25

Amtech Systems, Inc.

Nasdaq: ASYS

J.S. Whang Chairman & Chief Executive Officer

Brad Anderson Chief Financial Officer

February 2010

Solar & Semiconductor Solutions

25th LISTING ANNIVERSARY ASYS / NASDAQ

Documents

Amtech Systems, Inc. · AMTECH SYSTEMS, INC. 1 Amtech Systems, Inc. Nasdaq: ASYS J.S. Whang Chairman & Chief Executive Officer Brad Anderson Chief Financial Officer February 2010