AMAT Centura 5200 3 Chamber HDP Ultima System - Shopify · 2015-12-17 · AMAT Centura 5200 3 Chamber HDP Ultima System MISSING PARTS BULLETIN# GTI-07122015-02 The following is a

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AMAT Centura 5200 3 Chamber HDP Ultima System

Descrip(on: • Wafer Size: 200mm •  Serial Number: C919 •  Vintage: 1999 •  Condi;on: Can be purchased As-Is or Semi-Refurbished with replacement of removed

parts or Fully refurbished/converted Mainframe: •  Load Locks: Narrow Body ;lt out with auto rota;on •  Buffer: HP Robot Assembly •  Chamber A: HDP Ul;ma Chamber with BoQom Feed MicroWave Clean •  Chamber B: HDP Ul;ma Chamber with BoQom Feed MicroWave Clean •  Chamber C: HDP Ul;ma Chamber with BoQom Feed MicroWave Clean • Mul; Slot Cool Down Chamber •  On-The-Fly Center Finder •  Orienter Chamber Gas Panel: •  Seriplex Control •  Four door box, no windows •  Single line drop with side feed through •  Side Gas Box Exhaust connec;on with Magnehelic •  Gas Pallets: A, B, and C System Controller •  Standard HDP controller set up for 3 HDP chambers •  RF Generator Racks •  HDP Generator Rack with Top, Side, Bias generators and MicroWave Control •  Seriplex Control Assembly for Chamber A/B •  Seriplex Control Assembly for Chamber C •  CH A Generator Rack •  CH B Generator Rack •  CH C Generator Rack Miscellaneous: •  SMC chiller with dual channel, hot and cold loops

SPECIFICATION BULLETIN# GTI-07122015-02

IDEAL DONOR TOOL FOR ULTIMA PLUS RE-CONFIGURATION



IMAGES SECTION BULLETIN# GTI-07122015-02


















MISSING PARTS BULLETIN# GTI-07122015-02

The following is a list of parts that have been removed from the tool and can be included if semi-refurbished or Fully refurbished op;on is chosen:

Load Locks Narrow Body ;lt out with auto Rota;on.

Missing both Le^ wafer mapping receiver assembly's 0010-76858 2 DETECTOR ASSY, RIGHT FAST WAFER MAPPING Missing both Right wafer Mapping receiver assembly's 0010-76859 2 DETECTOR ASSY, LEFT FAST WAFER MAPPING

Buffer HP robot assembly MSCD (Mul; Slot Cool Down) chamber

complete OTF (On The Fly) center finding

Missing all the OTF emiQers assy's and windows on top 0010-76764 3 ASSY, OTF RECEIVER, 200MM BANK Orienter Chamber

Missing Laser 0010-75207 1 ASSY ORIENTER LASER OPTICS Missing CCD array 0100-20068 1 PCB ASSY CCD Missing Control PCB and moun;ng 0100-20069 1 PCB WAFER ORIENTER

Gas Panel Seriplex control

Missing CH A control assembly 0010-35652 1 ASSY,SERIPLEX CHAMBER A Four door box, no windows Single line Drop , with side feed through Side Gas Box Exhaust connec;on with Magnehelix Gas Pallet's A, B, C System Controller Standard HDP controller set up for 3 HDP chambers

Missing DC power drawer 0190-35076 1 POWER SUPPLY DRAWER - 5200 Missing 2 phase MSCD li^ driver 0010-75183 1 ASSY, 2 PHASE STEPPER MOTOR Missing 5 phase robot driver 0870-01002 1 DRIVE 5-PHASE STEPPER MOTOR BIPOLAR Missing SBC PCB 0090-76111 1 SBC Synergy Electrical PCB Missing serial isolator PCB 0100-35065 1 Serial Isolator PCB Missing GEM MSM PCB 0100-76015 1 PCB ASSY, 486 PERSONALITY Missing 232, Video interface PCB 0100-76005 1 PCB ASSY, SERIAL/VIDEO/DCN DISTRIBUTION

Wafer temp monitoring controller RF Generator Racks HDP Generator Rack with Top, Side, Bias generators and MicroWave Cont. Seriplex control Assembly for Chamber A/B Seriplex control Assembly for Chamber C CH A Generator Rack

Missing 2 generator control PCB's 0190-18135 2 ETO RF GEN SYSTEM CONT, ULTIMA missing Side PA Tube 0540-01010 1 AMPLPOWER TRIODE WATER COOLED 5000 WATTS (ETO) Missing misc water fiings

CH B Generator Rack Missing 3 Ganerator controller PCB's 0190-18135 3 ETO RF GEN SYSTEM CONT, ULTIMA missing Side PA Tube 0540-01010 1 AMPLPOWER TRIODE WATER COOLED 5000 WATTS (ETO) Missing misc water fiings

CH C Generator Rack Missing 3 Ganerator controller PCB's 0190-18135 3 ETO RF GEN SYSTEM CONT, ULTIMA missing Side PA Tube 0540-01010 1 AMPLPOWER TRIODE WATER COOLED 5000 WATTS (ETO) Missing misc water fiings NA



MISSING PARTS BULLETIN# GTI-07122015-02

The following is a list of parts that have been removed from the tool and can be included if semi-refurbished or Fully refurbished op;on is chosen:

HDP Ul(ma Chambers with boLom feed MicroWave clean Chamber A

Missing turbo pump controller 1 FOR USE WITH 3620-01542 PUMP TURBO ET1600WS 208VAC Missing Bias RF Match Assembly with ESC controller 0190-18116 1 RF MATCH, LOW K CHAMBER, HDPCVD Missing Side RF Match assembly 0010-18130 1 SIDE LOCAL MATCH ASSEMBLY Missing ThroQle Vavle Assembly 0010-18088 1 THROTTLE VALVE ASSEMBLY, HDP-CVD,LOW K CHAMBER Missing Magnetron Assembly 0190-18128 1 MAGNETRON HEAD, ETO MICROWAVE, ULTIMA Missing isolator, microwave 0190-18130 1 ISOLATOR, ETO MICROWAVE, ULTIMA Missing Mis Lid parts, thermo logic PCB and others 0660-01722 1 PCB4-INPUT 5-OUTPUT PID TEMP CONTROL W/OFFSET Missing Mis Lid parts, thermo logic PCB and others 0100-18039 1 ASS, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18051 1 ASSY, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18058 1 PCB ASSY., TC AMP INTERLOCK, ULTIMA

Chamber B Missing turbo pump controller 1 FOR USE WITH 3620-01542 PUMP TURBO ET1600WS 208VAC Missing Bias RF Match Assembly with ESC controller 0190-18116 1 RF MATCH, LOW K CHAMBER, HDPCVD Missing Side RF Match assembly 0010-18130 1 SIDE LOCAL MATCH ASSEMBLY Missing ThroQle Vavle Assembly 0010-18088 1 THROTTLE VALVE ASSEMBLY, HDP-CVD,LOW K CHAMBER Missing Magnetron Assembly 0190-18128 1 MAGNETRON HEAD, ETO MICROWAVE, ULTIMA Missing isolator, microwave 0190-18130 1 ISOLATOR, ETO MICROWAVE, ULTIMA Missing Mis Lid parts, thermo logic PCB and others 0660-01722 1 PCB4-INPUT 5-OUTPUT PID TEMP CONTROL W/OFFSET Missing Mis Lid parts, thermo logic PCB and others 0100-18039 1 ASS, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18051 1 ASSY, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18058 1 PCB ASSY., TC AMP INTERLOCK, ULTIMA

Chamber C Missing turbo pump controller 1 FOR USE WITH 3620-01542 PUMP TURBO ET1600WS 208VAC Missing Bias RF Match Assembly with ESC controller 0190-18116 1 RF MATCH, LOW K CHAMBER, HDPCVD Missing Top RF Match assembly 0010-18129 1 TOP LOCAL MATCH ASSEMBLY Missing ThroQle Vavle Assembly 0010-18088 1 THROTTLE VALVE ASSEMBLY, HDP-CVD,LOW K CHAMBER Missing Magnetron Assembly 0190-18128 1 MAGNETRON HEAD, ETO MICROWAVE, ULTIMA Missing isolator, microwave 0190-18130 1 ISOLATOR, ETO MICROWAVE, ULTIMA Missing Mis Lid parts, thermo logic PCB and others 0660-01722 1 PCB4-INPUT 5-OUTPUT PID TEMP CONTROL W/OFFSET Missing Mis Lid parts, thermo logic PCB and others 0100-18039 1 ASS, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18051 1 ASSY, PCB, TC FILTER Missing Mis Lid parts, thermo logic PCB and others 0100-18058 1 PCB ASSY., TC AMP INTERLOCK, ULTIMA

Documents

AMAT Centura 5200 3 Chamber HDP Ultima System - Shopify · 2015-12-17 · AMAT Centura 5200 3 Chamber HDP Ultima System MISSING PARTS BULLETIN# GTI-07122015-02 The following is a