-
Excess Tools Part List & Accessories Declaration Form
Transaction Type : Retirement for Sale/Retirement for
Scrap/Intercompany/Inter Department/Temporary Storage
Scrap Reason : Tool needed to startup in ChengDu
FAB : Fab 7 For Sell : Sign-Off by Module HOD
Tool ID : FHDP738 For Scrap : Sign off by Module HOD/Cost
Driver/Fab VP
Date : 14-3-2019 Sign-Off on Tool Configuration/Condition
Working Condition/
Non Working Condition: Working Condition
Fab VP : Peter Benyon
a. General
Cat
Vendor / Supplier
Model
Process
Vintage (Year of Manufacture)
Serial No.
Fixed Asset No.
Asset Description
NBV
Tool Status
(Unhooked/Cold shutdown
/Warm shutdown/Online)
Software Version
CIM
b. Hardware Configuration (Fab)
Cat Description Qty / Units Status,tick if ok[√ ]
Buffer + Loadlock 1P
FI System + 2x Loadport 1P
NA 0 NA
VHP robot 1P
FI Kawasaki Robot 2P
Ultima X chamber 3P
Alcatel A100L iPump 1P
c. Hardware Configuration (Subfab / Auxilliary Units)
Sub Accessories / Auxilliary Units Qty / Units Status,tick if
ok[√ ]
Accessories SMC Chiller INR-498-011C 2P
Generator Rack 3P
Bias Generator 3P
Top/Side Generator 6P
Primary AC Rack 1P
Secondary AC Rack 1P
Pump Dnet Interface Box + Cables 3 SetsP
d. Missing/Faulty Parts / Accesorries List & Estimated
Value
(If NO missing/faulty parts/accessories please indicate NA)
Description Qty / Units Estimated USD $
2 $ 80,000
3 $ 30,000
SMIF System
Abatement (retained)
Handler System
Process Chms
Others
(Pls specify if any)
Pump (retained) (Price for overhaul only due to pump was from
PROMOS)
Main System
In Warehouse
B3731
Linked
PMC Manager
FHDP_AMAT_IMD FSG/USG HDP
2007
AMAT CENTURA AP ULTIMA X HDP
: Chia Bak Hong
Description
Applied Materials South East Asia
AMAT CENTURA AP ULTIMA X HDP
413846
1 of 4
-
Tool Photos (Photos must make sense to show all the major parts
intact)
FAB Fab 7
Tool ID : FHDP738
Date : 14-3-2019
a. General
Description
Eqpt ID
Fixed Asset No.
Vendor / Supplier / Model
b. Hardware Configuration (Fab)
Description
Main System
SMIF System
Handler System
Process Chms
Others (Pls specify if any)
c. Hardware Configuration (Subfab / Auxilliary Units)
Description Photos
Photos
: FHDP738
0
Applied Materials South East Asia
Photos
NA
NA
FI iPump MF
Chamber B Chamber A Chamber C
2 of 4
-
d. Missing Parts [photos showing major missing parts]
Description Photos
Primary AC Rack Secondary AC Rack RF Gen HX
3 of 4
-
Equipment Configuration
Process IMD FSG/USG HDP
Model Applied Material Centura AP
PROMOS Tool ID TC-SHP-10
Tool S/N 413846
Software version B3731
Chamber Type Ultima X
F7 Reference Tool ID FHDP738
Facility Requirement
Primary AC Rack 208 VAC ± 5% 3 phase, 50/60 Hz (± 1 Hz),
400A
Secondary AC Rack 208 VAC ± 5% 3 phase, 50/60 Hz (± 1 Hz),
250A
Platform Interface
Loadport and Carriers FOUP
Carrier Position on LP Wafers are Horizontal
Number of carrier stages 2
Online connection GEM
Loadlock Module
Loadlocks Standard SWLL x2
Buffer ROBOT
Robot type VHP Robot
Pick arms on Robot Primary and Auxiliary
Orienter (Aligner)
Prealigner KAWASAKI WITH LED SENSOR 300
Process chamber
Chamber Volume 78500cc
Number of Chamber 3
Chamber Config Chm A/B/C
ESC Type 300mm Mono-polar Ceramic chuck
Dome Ceramic Dome
Side Nozzle 36x ALN Ceramic Nozzle
Top Nozzle 1x ALN Ceramic Baffle
RF Match Top/Side/Bias
Throttle Valves Rough TV and Turbo TV
Turbo Pump Shimadzu TMP + Controller
RPS Astron AX7670 3L RPS
Dome Heaters 4 zones
Sub Fab Components
Process Chamber Pump Kashiyama SDE1203 Pump x3
Heat Exchanger 1x SMC Wall Temp HX and 1x SMC Dome Temp HX
Generator Rack x3
RF Generator 3x ENI Spectrum B-10513 10.5KW / 6x ENI Spectrum
11002-00 11KW
Primary AC Rack x1
Secondary AC Rack x1
Gas Box Config
GAS-1 O2 1000 sccm
GAS-2 H2 1000 sccm
GAS-3 HE 600 sccm
GAS-4 SiH4 400 sccm
GAS-5 AR 1000 sccm
GAS-6 HE-Top 600 sccm
GAS-7 AR-Top 100 sccm
GAS-8 SiH4-Top 50 sccm
GAS-9 AR$ 50 sccm
GAS-10 NF3 400 sccm
GAS-11 NF3-CLN 5000 sccm
GAS-12 AR-CLN 3000 sccm4 of 4
