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Agilent Turbo Pumping SystemsTPS-mobile and TPS-benchIntegratedTurboPumpingSolutions
Agilent TPS: Integrated Turbo Pumping Solutions
Agilent TPS-mobile•Roll-aroundcart,highcapacitysystems,withhighercompressionratioandwidepumpingspeedrange.•14possibleconfigurations,withAgilentTurbo-V81and301Navigatorpumps,andthenewAgilentTurbo-V750TwisTorr,•BackedbyAgilentDryScroll(UniqueIDP-3,SH-110,TS300/600)orDSMechanicalPumps•WidechoiceofGaugesandaccessories,customsolutionsavailable•T-PlusNavigatorSoftwareallowscommunicationwithyourPC•Voltage110/230V•CE,UL/CUL,CSAandSemiS2-0200certified
Agilent TPS-bench•Bench-top,compactandreliablevacuumsolutions•5possiblestandardconfigurationswithTurbo-V81orTurbo-V301Navigator,•backedbySH-110DryScroll,DS42orDS102RotaryVanePumps•Gaugesandaccessoriesavailable•T-PlusNavigatorSoftware•Isolationvalveintegrated/included•Voltage110/230V•CE,UL/CUL,CSAandSemiS2-0200certified.
Dry Scroll Pumps•Nomaintenancerequired,simpletipsealreplacement•CE,UL/CUL,CSAandSemiS2-0200certified•Isolationvalveintegrated/included•IDP-3:thesmallestscrollpumpinthemarket;peekpumpingspeed3.0m3/h,andultimatepressure3.3x10-1mbar•SH-110:peekpumpingspeed5.4m3/h•TriScroll300and600:pumpingspeedupto30m3/h(TS600)
Rotary Vane Pumps •WidePumpingspeedrangefrom1.8to20.5m3/h•DualStage•ForcedOilCirculation•GasBallastValve•Anti-suckbackvalveandventdevice
Unique Agilent Turbo Pump Technology •InnovativeTwisTorrmolecular-dragtechnologyavailable.•Nomaintenancerequired:AgilentTurboPumpsdon’tneedoilrefills.•Highercompressionratioandpumpingspeed.•Widepumpingspeedrangefrom46to700l/sec.
Benefits•Fast,clean,drypumpdownfromatmosphereto10–10mbar•Pressuremonitor•Portableandcompact•AgilentTurboPumps:nomaintenancerequired•Lowcostofownership
Applications•UHVSystempumpdown•Ionpumproughing•Lampandtubeprocessing•Cryopumpregeneration•HighVacuumSystemsoperation•HighandUltraHighVacuumsystemsbakeout
Turbomolecular PumpsTurbo Pump Model Inlet FlangeTurbo-V81-MPumpISO63,KF40*,CFF41/2”*Turbo-V301NavigatorPumpISO100,CFF6”*Turbo-V750TwisTorrISOCFF8”,160*,CFF6”**Configuration available on request.
TPS-mobile: 14 possible standard configurationsTMP DS42 DS102 DS302 DS402 IDP3 SH110 TS300 TS600TV 81M • • • •TV 301 • • • • • •TV 750 • • • •
TPS-bench: 5 possible standard configurationsTMP DS42 DS102 SH110TV 81M • • •TV 301 • •
Primary PumpsDry Scroll Pumps Peak Pumping Speed 50 HzIDP-3 3.0m3/hSinglePhase 90l/min-5.4m3/h-3.3cfmMotorScrollPumpSH110TriScroll300,singlephase,with 220VAC210l/minVacuumPumpIsolationValve(VPI) 2.6m3/h-7.4cfmTriScroll600,singlephase,with 220VAC420l/minVacuumPumpIsolationValve(VPI) 25.2m3/h-14.8cfm
Rotary Vane Dual Stage Pumps Pumping Speed 50 HzDS42-1phaseworldwidemotor 1.8m3/hDS102-1phaseworldwidemotor 5.0m3/hDS302-1phaseworldwidemotor 11.6m3/hDS402-1phaseworldwidemotor 17.4m3/h
Dimensio
ns:m
m(inches)
Width: 422 (16.61) Width: 400 (15.75)
TPS-bench withTV 81M and DS 42
TPS-bench withTV 301 and DS 102
TPS-bench withTV 301 and SH110
Depth: 453 (17.83)
1026
.90
(40.
43)
430.00 (16.93)784.40 (30.88)
410.
00 (1
6.34
)
517.
80 (2
2.51
)
900.00 (35.43)
947.
00 (3
7.28
)
1024
.00
(40.
31)
319.70 (12.59)
315.00 (12.40)
373.
50 (1
4.70
)
430.00 (16.93)
410.
50 (1
6.16
)
383.80 (15.11)
438.
70 (1
7.27
)
Agilent TPS-mobile and TPS-bench - Ordering InformationTPS-mobile 110 VTurbo-V Pump Flange Forepump Part NumberTV81M ISO63 DS42 9698420TV81M ISO63 DS102 9698421TV81M ISO63 IDP3 9698422TV81M ISO63 SH110 9698423TV301 ISO100 DS102 9698424TV301 ISO100 DS302 9698425TV301 ISO100 DS402 9698426TV301 ISO100 IDP3 9698427TV301 ISO100 SH110 9698428TV301 ISO100 TS300VPI 9698429TV750 CFF8 DS302 9698439TV750 CFF8 DS402 9698440TV750 CFF8 TS300VPI 9698441TV750 CFF8 TS600VPI 9698442Other configurations available on request.
TPS-bench 110 VTurbo-V Pump Flange Forepump Part NumberTV301 ISO100 SH110 9698212TV301 ISO100 DS102 9698213TV81M ISO63 DS102 9698214TV81M ISO63 SH110 9698215TV81M ISO63 DS42 9698216Other configurations available on request.
Turbomolecular Pumps - Pumping Speed l/sec TV 81M TV 301 Nav TV 750 TwisTorr DN 40* DN 63 DN 100 DN 160* DN 100* DN 160Nitrogen 50 77 250 280 370 700Helium 56 65 220 230 500 680Hydrogen 46 50 200 210 470 580*Configuration available on request.
Recommended Forepumps TV 81M TV 301 TV 750 TwisTorrPrimaryPumpsDry SH110,IDP-3 SH110,IDP-3,TS300VPI TS300VPI,TS600VPIPrimaryPumpsMechanical DS42-DS102 DS102,DS302,DS402 DS302,DS402
Base Pressure with Recommended Forepump - Acc. to standard DIN 28 428 TV 81M TV 301 TV 750 TwisTorr
PrimaryPumpsDry 5x10-9mbar <5x10-9mbar <1x10-10mbar (3.8x10-9Torr) (<3.75x10-9Torr) (<7.5x10-11Torr)
PrimaryPumpsMechanical 5x10-10mbar <5x10-10mbar <1x10-10mbar (3.8x10-10Torr) (<3.75x10-10Torr) (<7.5x10-11Torr)
TPS-mobile 220 VTurbo-V Pump Flange Forepump Part NumberTV81M ISO63 DS42 9698413TV81M ISO63 DS102 9698411TV81M ISO63 IDP3 9698416TV81M ISO63 SH110 9698412TV301 ISO100 DS102 9698403TV301 ISO100 DS302 9698400TV301 ISO100 DS402 9698417TV301 ISO100 IDP3 9698418TV301 ISO100 SH110 9698402TV301 ISO100 TS300VPI 9698401TV750 CFF8 DS302 9698435TV750 CFF8 DS402 9698436TV750 CFF8 TS300VPI 9698437TV750 CFF8 TS600VPI 9698438Other configurations available on request.
TPS-bench 220 VTurbo-V Pump Flange Forepump Part NumberTV301 ISO100 SH110 9698203TV301 ISO100 DS102 9698208TV81M ISO63 DS102 9698204TV81M ISO63 SH110 9698202TV81M ISO63 DS42 9698200Other configurations available on request.
Managing GaugesGAUGE KIT Inlet Flange DIY FRG-700 Full Range Gauge Kit (atmosphere to 3.8 x 10-9 Torr)TV 81M KF40 9699190 ISO63 9699192 CFF41/2” 9699193TV 301 ISO100 9699194 CFF6” 9699201TV 750 TwisTorr ISO160K 9699195 CFF6” 9699201 CFF8” 9699202For other gauge configurations, please contact your local Agilent representative
CablesPowercordsareincludedfreeofchargeinallTPS-benchandTPS-mobilemodels,withUS,EUorUKplug.
Thisinformationissubjecttochangewithoutnotice©AgilentTechnologies,Inc.2011PublishedJuly31,2011VPD-0811EN
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Agilent TPS-mobile and TPS-bench
