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concentrated nature of our customer base; Applied’s ability to (i)
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achieve the objectives
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attract, motivate and retain
key employees; and other risks described in our most recent SEC
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assumptions as of July 8, 2013, and Applied undertakes no
obligation to update any
forward-looking statements.
Sundar Ramamurthy General Manager, Metal Deposition Products
Satheesh Kuppurao General Manager, Front End Products
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MOBILITYPersonal COMPUTING
HIGH PERFORMANCEPERFORMANCE
LOW-POWER versus
MICROPROCESSOR DRAM
Advanced
Transistors
“OFF”
7
pMOS Epi
nMOS Epi
1st Gen HKMG
Materials scaling will drive the Transistor revolution for the next
decade
HIGH-K METAL GATE FINFET
8 Source: Gartner 2012 Market Share report
in Implant#1
in RTP#1
in Epi#1
in CMP#1
in these ENABLING Transistor Technologies.
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9
Endura® PVD/ALD metal gate #1 in PVD for over 20 years with >75%
share
>5000 systems worldwide
>800 systems worldwide
Fastest Growing Areas of Transistor Built on Applied’s Benchmark
Metals and Epi Platforms
External Use
Selective Epi films deliver speed
Integrated PVD Metal Gate
~$800M Incremental Revenue in 2016 vs. 2012
(assumes 2016 WFE of $37B)
*Source: Gartner
Metal Gate –
12
Metal Gate with High-k Cuts Power Consumption by Reducing
Leakage
Low Leakage
13
14
15
16
17
integrated on the same platform
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cap / etch stop
20
• Precision films needed for setting turn-on voltage in
FinFETs
• New materials needed to address gate resistance
FinFET Transistor
e ta
Planar
Metal Gate
8X increase
in steps
Metal Gate will grow to >$600M cumulative revenue over next 3
years
3D Today
Silicon
Atoms
smaller atoms are fit into the
same available space
SiGe
Layer
SiGe
Epi
>60%
Improvement
Applied Materials’ Epi equipment
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HIGH VALUE PROBLEM
Temperature Pre-clean
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27
0
2
4
6
8
10
Device performance
2012 TAM
>$500 M
Epi is One of the Fastest Growing Segments of Wafer Fab
Equipment
Today
# o
28
Future device
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Performance improvement is not about scaling… At 28 nm, 90% of the
performance gains came from materials and device architecture
innovation
ARM, IBM & IC INSIGHTS
• The TRANSISTOR revolution has just begun.
• Applied’s leadership in Metal Gate and Epi will drive strong
revenue growth
as 20nm and 14/16nm fan out to full production.
• NEW MATERIALS will drive transistor performance into the next
DECADE.
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Applied MATERIALS