Valves & Controls for Semiconductor Fabs. Executive Summary: Engineered thermoplastic valves,...

Valves & Controls for Semiconductor Fabs

Executive Summary:

Engineered thermoplastic valves, automatic controls, and specialty piping components that provide performance, longevity, and value that is superior to all other brands.

Standard and custom products that solve pressure and flow control problems.

PVC, Corzan CPVC, Natural Polypro, PTFE, Kynar PVDF, and custom materials.

Manufactured in USA since 1967.

Products for Improving Performance in:

PVAC ICW, PCW, RO WATER

DI WATER AQUEOUS CHEMICALS

ACID WASTE

Pressure Reducing Valves

ICW, PCW

RO WATER

DI WATER

AQUEOUS CHEMICALS

The most significant advantage of a Plast-O-Matic regulator is flow capacity. As you can see from the next performance curve, the Plast-O-Matic regulators have much higher flow capacities than “the Competition.”

These higher flow capacities are achieved at much lower pressure losses resulting in greater sensitivity,finer adjustability and superior accuracy.

Now Available:

New design features non-rising stem

No exposed external fasteners

Same superior flow performance of standard Plast-O-Matic Regulator

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

PRHM RE-DESIGNOLD NEW

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

SUMMARY OF IMPROVEMENTSSERIES PRHM ¾” & 1” (Molded Body)

Non-Rising Stem

Overall Height Reduced

Upper Housing Ribs Extended & Strengthened

ALL Elastomers now Metal Ion-Free EPDM

Connection Hubs Enlarged & Strengthened

Shaft & Seat Redesigned

Base Plate Cross Section Increased

Bolts Recessed

Mounting Support Holes Added

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

SUMMARY OF IMPROVEMENTSSERIES PRH 1½” & 2” (Machined Body)

ALL Elastomers now Metal Ion-Free EPDM; optional FFKM or Kalrez

Shaft & Seat Redesigned

Base Plate Cross Section Increased

Bolts Recessed

Mounting Support Holes Added

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

PVDF SHAFT RE-DESIGN

OLD NEW

• NO metal components in flow area

• Smooth flow design tapered seat & lower profile has improved flow

performance by 13%

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Summary Depicting Finite Element Analysis (FEA) performed on 1 pc stem – Loadings from Pressure

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Summary Depicting FEA performed on 1 pc stem, continued

Pro-Mechanica analysis of stem P/N 7828 used in PRH075EP-U & PRH100EP-U. These loadings represent 125 PSI outlet pressure with no spring load (worst case). The tensile strength is 7,450 PSI. The maximum stress is 4,563 PSI.

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

EFFECT OF BODY, BASE & SHAFT RE-DESIGN

FULLY OPEN FULLY CLOSED

Lowest Cost of Ownership:Best Performance

Lifetime Cost of OwnershipPlast-O-Matic PRH200 Ultra Pure Regulator vs Competitive Regulator

$0

$2,000

$4,000

$6,000

$8,000

$10,000

$12,000

$14,000

$16,000

$18,000

Initial Cost 200,000 400,000 600,000 800,000 1,000,000 1,200,000 1,400,000 1,600,000 1,800,000 2,000,000

cum

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Plast-O-Matic Competitor

Assumes Plast-O-Matic initial cost $4300. (PRH200EPU1-PF). Plast-O-Matic is inspected and serviced with seal kit every 1,000,000 cycles; competitive valve requires replacement every 400,000 cycles or less.

Connections Available in:

• Virgin Polypro

• PVDF

• PTFE

PVDF or PTFE Body

Plast-O-Pure, continued

THOUSANDS of Plast-O-Matic Pressure Regulators are “White Paper” specified & installed at Intel

Fabs worldwide.

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Summary of Upgrades & Differences between standard Plast-O-Matic Regulators and High-

Purity PVDF Regulators:

• Includes Spigot Connections

• Proprietary Cleaning Process

• Two Day DI Hot & Cold Rinse

• Contracted Class 10 Clean & Double-Bag Procedure

1/2" PRH050EP-U1-PF3/4" PRH075EP-U1-PF1" PRH100EP-U1-PF1½" PRH150EP-U1-PF2" PRH200EP-U1-PF

Kynar PVDF & Metal Ion-Free EPDM Part #Size

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

METAL ION-FREE EPDMTEST DATA

POM POM 4/30/08 POMCleaned Not Cleaned Cleaned Seal Kit

Contaminate EPDM EPDM EPDM GF++Al ND* 10 20 46Ca ND 50 62 2900Pb ND 9 27 NDMg ND 20 17 180K ND 5 11 33

Na ND 20 16 98Zn ND 590 180 0.77

*ND=Not Detected

ETA Labs

Results reported as ppb (parts per billion)

Balazs Labs

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

METAL ION-FREE EPDMBENCHMARK OF SUCCESS:

• Since 2008, ALL Plast-O-Matic Series PRHM/PRH-U Pressure Regulators have been shipped with Metal Ion-Free EPDM Rolling Diaphragms…

Part # 0940-02.

Installed Population with Metal Ion-Free EPDM Rolling Diaphragm: 1210

Installed Population with ALL elastomers (including U-Cups, Seat, Rolling Diaphragm) Metal Ion-Free EPDM / CDB Procedure: 250

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Kynar PVDF Resin & Extruded RodTEST DATA

Click image for EXCEL file

Source: Arkema/Balasz Labs

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Plast-O-Matic Proprietary 2-Part Cleaning Process (Prior to CDB Procedure)

1. Surface is treated to be amenable to the scavenging of metallic residues, mold release agents and ancillary contaminants.

2. SEMI F-57 compatible agents are then used to scour the activated surface of the previously indicated classes of contaminants. The contaminants and scouring agents are then flushed from the EPDM parts with 18 meg ohm water for 16 hrs.

• Internal valve components are carefully cleaned and scrubbed using 18 meg ohm water. The valves are then assembled in our clean room prior to secondary CDB procedure.

CONFIDENTIAL: Independent test data from a semiconductor fab customer.

SUPERIOR FLOW PERFORMANCE HAS BEEN MAINTAINED THROUGHOUT THIS PROCESS…

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

POM PRHM Exceeds requirements

Parker PR3

GF V182

COMPARATIVE ANALYSIS1” Pressure Regulator Droop Performance Curves

Industry requirement 20 GPM @ 14 PSI droop

Do not meet requirements

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

Valve Body, Shaft/Seat Retainer and Base Plate Redesigned

ALL Clean Kynar, All standard Elastomers now Metal Ion-Free EPDM, or optional Kalrez or FFKM, Cleaning procedures standardized

Improved Flow Performance

HIGHLY CONFIDENTIAL – PROPRIETARY DATA

ULTRA-PURE REGULATOR • RE-DESIGNEDNO WETTED ELASTOMERS IN DEVELOPMENT

ALL WETTED MATERIALS SEMI F-57 COMPLIANT:

TFM BODY

PTFE DIAPHRAGM

PVDF SPIGOTS

The best case for POM Regulators:

“White Paper” specs & thousands of valves at Intel Fabs worldwide…

Pressure Sustaining Valves

ICW, PCW

RO WATER

DI WATER

AQUEOUS CHEMICALS

Also known as Relief Valves, Backpressure Valves, Bypass Valves, and Backpressure

Regulators

The most significant advantage of a Plast-O-Matic pressure sustaining valve is flow capacity. As you can see from the next performance curve, the Plast-O-Matic valves have much higher flow capacities than “the Competition.”

These higher flow capacities provide significant improvements in system performance, with far less wear and tear on the pump.

Lowest Cost of Ownership:Best Performance

The Difference is inside…

Plast-O-Matic orifice

Competitor’s orifice

Better engineering results in superior flow capacity

Now Available: PTFE “flanged” PSV for use on Lined CS for CUP Chemical Applications

PROCESS COOLING WATER APPLICATIONS

Lateral Drops:• LMBV

• Manifolds• Custom Products

Supply Side:• PCWS

• Custom Products

Return Side:• PCWR

Ball Valve orDiaphragm Valve

• Custom Products

PROCESS COOLING WATER APPLICATIONS

Plast-O-Matic Lateral Ball Valves are “White Paper” specified & installed at Intel Fabs worldwide.

PROCESS COOLING WATER APPLICATIONS

Process Cooling Water SticksSupply & Return, Fully Customizable

ADVANTAGES OF PLAST-O-MATICWATER STICKS VS. METAL

• Superior pressure regulator performance

• No corrosion, no maintenance

• 2 connections per stick

• Lower cost

• One tag number per stick

• Molded, Machined & Assembled in USA

• 100% tested at the factory

• No glue joints

• Smaller footprint

• Easily adapts to any piping configuration

Standardizing on Plast-O-Matic Summary of Benefits:

• Plast-O-Matic exceeds all equipment regulator specifications for flow

• Plast-O-Matic has the highest purity level of any valve supplier

• Plast-O-Matic is moving towards Semi F57 standards on all UHP regulators and is currently the UHP standard in many FABs