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MLD: Technology and principle (1/2)
In short: ALD, but with molecules
(Generally) self-limiting reactions
Solution-based and gaseous phase techniques
Hybrid technology with ALD to create ALD-MLD films
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MLD: Technology and principle (2/2)
Basic cycle:
Fill chamber with inert gas to purge atmosphere of foreign particles
Replace with desired gaseous reactant
Substrate surface will react with gaseous reactant until all of surface is covered
One layer of desired material is deposited
Repeat from the top, changing reactants for different materials
[1] p.534
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Opportunities and challenges
Organic component increases flexibility, decreases density and can reduce cost
Structural benefits from hollow/cavernous structures for catalysts (after removing organic constituent)
Wide range of possibilities (metal + organic molecule)
Issues with even growth per cycle, due to molecule geometry
[1]: p.539
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Applications
Widest research area so far: metalcones (metal+alcohol)
Al, Zn, Zr, Hf, Mg, Sn, In, Ti, V, Mn are all viable metals for metalcones
Organic component: Ethylene glycol, Glycerol, Hydroquinone
Zincones can be used for flexible transparent conductive displays
Titanicone structures can be utilized in solar cells
Porous films can act as catalysts or sensors (Sn, In, V, Mn)
MLD also used to coat fine particles (passive or active)
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Summary
MLD: In essence ALD, but with organic molecules
Self-limiting surface reactions
Stackable with ALD for organic-inorganic composite films
Main benefits in flexible and lightweight structures
Tuneable thin-film structural composition
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Sources
[1]: Lee, B.H., Yoon, B., Abdulagatov, A.I., Hall, R.A., George, S.M. Growth and properties of hybrid organic-inorganic metalcone films using molecular layer deposition techniques. (2013) Advanced Functional Materials, 23 (5), pp. 532-546. http://www.scopus.com/inward/record.url?eid=2-s2.0-84873356095&partnerID=40&md5=dc679dabf8c7895d0e39926b603cd207
[2]: http://www.hanyang.ac.kr/code_html/H3HNCK886/introEng/research/img/2.jpg
[3]: King, D.M, Liang, X., Weimer, A.W. Functionalization of fine particles using atomic and molecular layer deposition. (2011) Powder Technology, 221 (2012), pp.13-25.
[4]: http://3.bp.blogspot.com/_tCh0LGvTCqE/THyN-E7cAOI/AAAAAAAAALY/kyT9eUPSSZg/s1600/MLD.JPG
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