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1 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
Intelligent Deposition of High Grade ITO Film for Touch Screen Process in a High Vacuum Sputter Web Coater
Eiichi SasakiFPDPV Division ULVAC Inc.October 8, 2019
2 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
• IntroductionULVAC Corp.
• Roll to Roll sputtering system SPW series-025, -060, -165
• Touch Sensor – ITO film processCathode and Pre. Process
• Other ProcessAR, FCCL
• Summary
Agenda
3 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
AIIoT Cloud Big DataAR, VRTechnology for Smart Society(Smart system)
〇Smart semiconductor(Smart ICT)
CPU、DRAM、NAND〇Smart Functional Device(Smart Functionalities)MEMS, Sensor, Communication(5G) 〇Smart Energy
Li Battery, PV, Power Device
Cloud Server
Portable Power Supply & Management
〇New Packaging〇New Material
Smart Society:Electronics (Electronic Device, Semiconductor)⇒Anytime, Anywhere, Safe, Wireless, High-speed, Low power, Automatic, Prospective.
ULVAC Technical portfolio for Smart Society
Smart Devices (e.g. Smart Phones)w/Edge computing
http://www.google.co.jp/url?sa=i&rct=j&q=&esrc=s&source=images&cd=&cad=rja&uact=8&ved=0ahUKEwjMl_zlwtrVAhVPOrwKHcBnB80QjRwIBw&url=http://www.linuxacademy.ne.jp/lablog/infrastructure/65/&psig=AFQjCNEWqc5r1ebRygFTGUR4RQNbP6joMg&ust=1502930557203680
4 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
Display
High Freq.device
TSVLogic EMIShieldCPULogic Board
Microphone
DisplayOptical Film
AdvancedPackaging
TFTBack plane Touch Screen
Optical FilmAR/AS
OLEDFront plane
AntennaComm.5G
DataProcess
MEMS
BatteryEnergy LiBTFB
AdvancedElectronic
Equip.
Semiconductor
Equip.
Flat PanelDisplayEquip.
ULVAC Technologies within Smart Device
Camera CMOSsensor
Non Volatile
Photo
DataStorage Memory
MEMSDetectSensorFinger Print
5 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
Display
Metal/ITO IGZO Metal/ITO PE-CVD for LTPS
Touch Panel / AR film OLED Color Filter
Vacuum Equipment for Smart Device
6 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
R2R Equipment for Smart DeviceSPW Series is high performance type sputtering roll coater for touch panel, optical film, window film, electric device. It is ideal for multi layer deposition.
SPW-165C1
80+Records SPW-025
7 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
Touch Screen & Optical film Market Portfolio
Wor
ld W
ide
Mar
ket S
ize
(Yea
r 202
2 M
$)
2018-2022 CAGR (%)
ULVAC research based on Fuji Chimera Research Institute
-5.0% 0.0% 5.0% 10.0%
5,000
10,000Wet AGLR2022 Market 1,000M$2018-2022 CAGR 1.8%
0
-10.0%
Dry AR2022 Market 140M$
2018-2022 CAGR 9.7%
MM Touch Screen2022 Market 130M$
2018-2022 CAGR 3.2%
ITO Touch Screen2022 Market 460M$2018-2022 CAGR -3.3%
M.$
0
200
400
600
800
1,000
1,200
2018 2019 2020 2021 2022
0200400600800
1,0001,200
2018 2019 2020 2021 2022
Wet AG/LR
Dry AR
ITO Touch
MM Touch
M.$
W/W Touch Screen Market Growth
W/W Optical Film Market Growth
Touch Screen & Optical film Market
Technical Trend
Market Trend
8 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
【ITO film】Key Points;• Sputtering Process • Index Matching(IM) layer. • Low Resistivity.
Touch Sensor – ITO film process
PETNbO : 10nm
SiO2 : 60nm
ITO : 20nm
PET
IM Layer
Adhesion LayerITO : 20nm
A BINVISIBLE
Dry Invisible IM Film
9 ULVAC Group | 2019 / 08 / 15 © 2019 ULVAC, Inc. | Confidential and Proprietary Information
• Index matching Layer to make ITO “invisible”
Touch Sensor – ITO film process
Rs (Ω/☐) T (%) Haze (%) b*
Layer Structure A B A B A B A B0 Base Film 91.6 0.51 Film/Nb2O5/SiO2/ITO 188 184 88.2 88.5 0.6 0.7 1.662 Film/Nb2O5/SiO2 90.0 0.7
ITOSiO2
PET Film
RR
05
10152025303540
400 450 500 550 600 650 700 750 800λ(nm)
R (%
)
ITONon-ITO
With IM Layer
Without IM Layer
Wavelength (nm)
Refle
ctio
n (%
)
Graph1
800800
799799
798798
797797
796796
795795
794794
793793
792792
791791
790790
789789
788788
787787
786786
785785
784784
783783
782782
781781
780780
779779
778778
777777
776776
775775
774774
773773
772772
771771
770770
769769
768768
767767
766766
765765
764764
763763
762762
761761
760760
759759
758758
757757
756756
755755
754754
753753
752752
751751
750750
749749
748748
747747
746746
745745
744744
743743
742742
741741
740740
739739
738738
737737
736736
735735
734734
733733
732732
731731
730730
729729
728728
727727
726726
725725
724724
723723
722722
721721
720720
719719
718718
717717
716716
715715
714714
713713
712712
711711
710710
709709
708708
707707
706706
705705
704704
703703
702702
701701
700700
699699
698698
697697
696696
695695
694694
693693
692692
691691
690690
689689
688688
687687
686686
685685
684684
683683
682682
681681
680680
679679
678678
677677
676676
675675
674674
673673
672672
671671
670670
669669
668668
667667
666666
665665
664664
663663
662662
661661
660660
659659
658658
657657
656656
655655
654654
653653
652652
651651
650650
649649
648648
647647
646646
645645
644644
643643
642642
641641
640640
639639
638638
637637
636636
635635
634634
633633
632632
631631
630630
629629
628628
627627
626626
625625
624624
623623
622622
621621
620620
619619
618618
617617
616616
615615
614614
613613
612612
611611
610610
609609
608608
607607
606606
605605
604604
603603
602602
601601
600600
599599
598598
597597
596596
595595
594594
593593
592592
591591
590590
589589
588588
587587
586586
585585
584584
583583
582582
581581
580580
579579
578578
577577
576576
575575
574574
573573
572572
571571
570570
569569
568568
567567
566566
565565
564564
563563
562562
561561
560560
559559
558558
557557
556556
555555
554554
553553
552552
551551
550550
549549
548548
547547
546546
545545
544544
543543
542542
541541
540540
539539
538538
537537
536536
535535
534534
533533
532532
531531
530530
529529
528528
527527
526526
525525
524524
523523
522522
521521
520520
519519
518518
517517
516516
515515
514514
513513
512512
511511
510510
509509
508508
507507
506506
505505
504504
503503
502502
501501
500500
499499
498498
497497
496496
495495
494494
493493
492492
491491
490490
489489
488488
487487
486486
485485
484484
483483
482482
481481
480480
479479
478478
477477
476476
475475
474474
473473
472472
471471
470470
469469
468468
467467
466466
465465
464464
463463
462462
461461
460460
459459
458458
457457
456456
455455
454454
453453
452452
451451
450450
449449
448448
447447
446446
445445
444444
443443
442442
441441
440440
439439
438438
437437
436436
435435
434434
433433
432432
431431
430430
429429
428428
427427
426426
425425
424424
423423
422422
421421
420420
419419
418418
417417
416416
415415
414414
413413
412412
411411
410410
409409
408408
407407
406406
405405
404404
403403
402402
401401
400400
399399
398398
397397
396396
395395
394394
393393
392392
391391
390390
389389
388388
387387
386386
385385
384384
383383
382382
381381
380380
379379
378378
377377
376376
375375
374374
373373
372372
371371
370370
369369
368368
367367
366366
365365
364364
363363
362362
361361
360360
359359
358358
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353353
352352
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350350
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343343
342342
341341
340340
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334334
333333
332332
331331
330330
329329
328328
327327
326326
325325
324324
323323
322322
321321
320320
319319
318318
317317
316316
315315
314314
313313
312312
311311
310310
309309
308308
307307
306306
305305
304304
303303
302302
301301
300300
ITO
No ITO
λ(nm)
R (%)
10.64
10.03
10.63
10.04
10.45
10.01
10.38
10.1
10.4
10.15
10.16
10.08
10.16
9.95
9.97
9.96
9.87
9.88
9.76
9.98
9.77
9.98
9.73
9.91
9.62
9.85
9.61
9.8
9.59
9.73
9.54
9.66
9.51
9.55
9.54
9.64
9.45
9.6
9.4
9.56
9.48
9.59
9.42
9.55
9.52
9.52
9.6
9.62
9.66
9.51
9.61
9.68
9.68
9.68
9.7
9.81
9.76
9.79
9.74
9.79
9.78
9.88
9.78
9.96
9.78
10.06
9.82
10.07
9.77
10.17
9.83
10.18
9.73
10.34
9.69
10.26
9.75
10.28
9.67
10.34
9.63
10.32
9.58
10.31
9.44
10.36
9.4
10.31
9.42
10.36
9.25
10.26
9.16
10.23
9.19
10.09
9.22
9.99
9.14
9.99
9.06
9.93
9.03
9.77
9.07
9.67
9
9.49
9.02
9.34
9
9.27
9.02
9.19
9.01
8.97
9.12
8.87
9.24
8.77
9.33
8.71
9.38
8.65
9.54
8.47
9.6
8.38
9.74
8.32
9.78
8.26
10.01
8.2
10.11
8.19
10.28
8.24
10.37
8.26
10.52
8.27
10.62
8.25
10.79
8.4
10.88
8.46
10.93
8.4
11.03
8.48
11.07
8.66
11.19
8.64
11.29
8.73
11.25
8.84
11.26
8.9
11.27
8.97
11.34
8.99
11.35
9.12
11.25
9.23
11.23
9.2
11.15
9.26
11.1
9.25
11.05
9.29
10.96
9.23
10.93
9.27
10.83
9.29
10.78
9.27
10.72
9.21
10.62
9.19
10.63
9.14
10.53
9.18
10.53
9.19
10.52
9.13
10.49
9.19
10.47
9.08
10.48
9.13
10.52
9.11
10.51
9.17
10.46
9.19
10.54
9.26
10.49
9.3
10.6
9.35
10.53
9.46
10.55
9.56
10.57
9.66
10.47
9.75
10.58
9.9
10.48
9.97
10.5
10.07
10.45
10.19
10.41
10.28
10.32
10.42
10.24
10.49
10.13
10.49
10.05
10.57
9.98
10.61
9.85
10.66
9.87
10.69
9.69
10.62
9.61
10.6
9.52
10.57
9.42
10.49
9.39
10.44
9.33
10.31
9.3
10.23
9.23
10.19
9.29
10.07
9.26
9.95
9.33
9.83
9.33
9.7
9.42
9.63
9.53
9.48
9.59
9.38
9.72
9.34
9.83
9.3
9.92
9.28
10.07
9.17
10.23
9.1
10.27
9.15
10.4
9.15
10.5
9.16
10.62
9.23
10.66
9.24
10.67
9.21
10.72
9.23
10.79
9.34
10.8
9.27
10.87
9.37
10.82
9.31
10.83
9.32
10.82
9.29
10.8
9.27
10.81
9.24
10.8
9.22
10.8
9.14
10.76
9.09
10.79
9.05
10.8
9
10.77
8.93
10.84
8.86
10.88
8.83
10.83
8.79
10.93
8.76
10.99
8.74
10.98
8.77
11.01
8.76
11.09
8.88
11.04
8.91
11.08
9.03
11.07
9.14
11.09
9.25
11.05
9.3
11.05
9.43
10.94
9.57
10.91
9.66
10.82
9.8
10.69
9.87
10.62
9.96
10.53
10.07
10.38
10.14
10.28
10.2
10.17
10.25
10.11
10.3
9.99
10.28
9.9
10.28
9.77
10.25
9.76
10.22
9.71
10.2
9.71
10.19
9.73
10.12
9.76
10.07
9.78
10.03
9.79
9.98
9.83
9.99
9.87
9.95
9.92
9.94
10
9.9
10.02
9.93
10.12
9.95
10.16
9.88
10.22
9.96
10.24
9.91
10.28
9.98
10.3
9.98
10.36
9.91
10.39
9.91
10.35
9.87
10.44
9.83
10.42
9.8
10.45
9.76
10.51
9.63
10.54
9.57
10.62
9.54
10.65
9.47
10.65
9.38
10.76
9.29
10.82
9.22
10.87
9.14
10.93
9.11
10.97
9.08
11.02
9.06
11.05
9.04
11.09
9.1
11.11
9.11
11.11
9.14
11.13
9.18
11.1
9.26
11.04
9.25
11
9.34
10.97
9.38
10.9
9.43
10.85
9.54
10.77
9.6
10.72
9.6
10.62
9.61
10.57
9.64
10.51
9.7
10.44
9.72
10.45
9.75
10.38
9.79
10.32
9.81
10.36
9.86
10.25
9.84
10.24
9.88
10.21
9.94
10.19
10.01
10.19
10.02
10.14
10.01
10.16
10.07
10.11
10.14
10.1
10.09
10.14
10.1
10.16
10.12
10.19
10.1
10.2
10.09
10.25
10.06
10.34
10
10.36
9.97
10.37
9.96
10.45
9.94
10.52
9.91
10.58
9.87
10.63
9.81
10.67
9.78
10.72
9.78
10.71
9.71
10.79
9.69
10.79
9.66
10.83
9.6
10.85
9.61
10.83
9.56
10.85
9.52
10.87
9.48
10.86
9.41
10.88
9.41
10.9
9.37
10.94
9.38
10.96
9.35
10.96
9.35
10.94
9.39
11
9.39
10.95
9.45
10.96
9.49
10.88
9.58
10.8
9.64
10.69
9.7
10.65
9.71
10.51
9.74
10.48
9.83
10.4
9.79
10.4
9.78
10.4
9.75
10.33
9.73
10.3
9.7
10.4
9.69
10.47
9.66
10.51
9.64
10.6
9.66
10.72
9.72
10.79
9.83
10.76
9.79
10.79
9.9
10.8
9.94
10.72
10
10.79
10.01
10.64
10.05
10.67
10.01
10.64
9.96
10.61
9.9
10.61
9.82
10.72
9.7
10.85
9.62
10.88
9.49
10.97
9.44
11.09
9.37
11.16
9.38
11.31
9.43
11.37
9.5
11.37
9.57
11.29
9.65
11.23
9.78
11.04
9.82
11.03
9.87
10.81
9.94
10.77
9.89
10.74
9.8
10.76
9.72
10.81
9.52
10.82
9.4
11.05
9.32
11.1
9.24
11.3
9.21
11.41
9.25
11.52
9.31
11.59
9.42
11.51
9.58
11.44
9.74
11.33
9.73
11.14
9.94
11.01
9.84
10.93
9.89
10.84
9.75
10.88
9.69
11.02
9.43
11.26
9.25
11.38
9.28
11.58
9.19
11.85
9.22
11.87
9.33
11.94
9.46
11.89
9.7
11.8
9.85
11.66
10.03
11.49
10.16
11.42
10.13
11.32
10.05
11.38
9.84
11.58
9.69
11.77
9.45
12
9.22
12.31
9.03
12.55
8.92
12.76
8.99
12.79
9.14
12.79
9.32
12.76
9.55
12.47
9.72
12.16
9.77
12.08
9.74
11.96
9.58
11.97
9.28
12.16
8.95
12.4
8.71
12.64
8.56
12.9
8.51
13.08
8.51
13.21
8.77
13.04
9.09
12.88
9.48
12.65
9.76
12.48
9.97
12.34
10.04
12.4
9.92
12.68
9.62
12.98
9.35
13.43
9.17
13.91
8.98
14.3
8.91
14.64
8.97
14.73
9.28
14.59
9.64
14.47
9.93
14.29
10.05
14.12
9.94
14.16
9.63
14.27
9.07
14.51
8.71
14.84
8.2
15.03
7.93
15.24
7.85
15.31
8.04
15
8.34
14.85
8.87
14.32
9.24
14.2
9.43
14.14
9.38
14.33
9.11
14.66
8.75
15.36
8.42
15.84
8.27
16.42
8.37
16.55
8.8
16.81
9.23
16.67
9.75
16.69
10.14
16.76
10.27
16.86
9.8
17.14
9.33
17.68
8.62
18.03
7.89
18.23
7.64
18.05
7.71
18.15
8
17.31
8.41
16.81
8.8
16.58
8.66
16.66
8.27
16.95
7.75
17.32
7.25
17.77
6.9
18.2
6.92
18.48
7.36
18.56
8.28
18.6
8.84
18.78
9.41
19.3
9.35
19.61
9.09
19.98
8.48
20.86
7.96
21.29
7.62
21.31
7.81
20.95
8.15
20.38
8.62
20.14
8.48
19.82
8.32
19.84
7.42
19.89
6.42
20.17
5.8
20.5
5.47
20.23
6
20.71
6.64
20.41
7.59
20.94
7.93
21.52
7.66
22.53
7
22.86
6.8
23.73
6.63
23.73
7.11
23.84
7.96
23.53
8.11
23.63
7.95
23.89
7.15
23.59
6.47
23.62
5.58
23.23
4.74
22.94
5.01
23.05
5.2
22.43
5.22
23.2
4.92
23.94
4.25
23.59
3.96
24.98
3.93
25.6
4.09
26.2
4.48
26.8
4.55
27.04
4.5
26.41
4.13
26.71
4.03
26.62
3.71
25.87
3.3
25.94
2.78
25.4
2.38
25.91
1.96
26.05
1.63
25.77
1.42
26.53
1.23
27.33
1.29
27.69
1.36
28.66
1.65
29.2
1.97
29.41
2.2
29.9
2.47
29.82
2.52
29.03
2.5
28.18
2.24
MEMO
DesignBSTAR
Reference Wavelength (nm)550
Incident Angle0
Wavelength
(nm)Reflectance
(%)Transmittance
(%)R-Phase
(deg)T-Phase
(deg)%T(貼り付け用) ハツヨウ
3907.1312887.06707148.546-85.23550.8706707
4004.6309290.58399151.207-82.858340.9058399
4102.7798793.19225153.6004-80.630770.9319225
4201.5525695.10246155.7639-78.536530.9510246
4300.7831496.50366157.7282-76.558750.9650366
4400.3856497.47498159.5181-74.688690.9747498
4500.2757398.09873161.1541-72.917720.9809873
4600.3838598.16659162.6555-71.234680.9816659
4700.6165898.09147164.0386-69.63330.9809147
4800.9698897.8845165.3196-68.109410.978845
4901.3284197.65067166.4979-66.654420.9765067
5001.7204197.37135167.5884-65.264280.9737135
5102.1549797.00743168.6016-63.933930.9700743
5202.5545796.66862169.5479-62.661190.9666862
5302.9409696.33709170.4302-61.440220.9633709
5403.311296.01664171.2542-60.267730.9601664
5503.6606195.71249172.0235-59.141330.9571249
5603.9860595.42829172.7413-58.058590.9542829
5704.2878695.16402173.4143-57.016050.9516402
5804.5702394.91634174.0462-56.011660.9491634
5904.8240794.69448174.6417-55.044130.9469448
6005.0508994.49712175.1988-54.111020.9449712
6105.2536494.31435175.7232-53.20990.9431435
6205.4653894.12179176.2174-52.339110.9412179
6305.6243793.97994176.6835-51.49710.9397994
6405.7607293.85948177.1235-50.682460.9385948
6505.9234293.71261177.5386-49.894230.9371261
6606.0228693.62382177.9302-49.131160.9362382
6706.1590293.4987178.3-48.391940.934987
6806.2253193.44167178.6505-47.675380.9344167
6906.3374793.33939178.9826-46.980260.9333939
7006.3748593.31015179.2974-46.305570.9331015
7106.4676593.2232179.5955-45.650820.932232
7206.4821193.21297179.877-45.015410.9321297
7306.5567593.14359-179.8557-44.397860.9314359
B star 計算
S(λ)y(λ)S(λ)y(λ)S(λ)zλ)T(λ)
波長(nm) ハチョウ"x""y""z"D65"x"D65"y"D65"z"D65S(λ)x(λ) T(λ)S(λ)y(λ) T(λ)S(λ)zλ) T(λ)
3900.00420.00010.020154.650.229530.0054651.0984650.87067070.19984504580.00475821540.9564012905
4000.01430.00040.067982.751.1833250.03315.6187250.90583991.07190299970.02998330075.0896652921
4100.04350.00120.207491.493.9798150.10978818.9750260.93192253.70887914430.102313907417.6832536675
4200.13440.0040.645693.4312.5569920.3737260.3184080.951024611.9420082940.355416913557.3642898408
4300.28390.01161.385686.6824.6084521.005488120.1038080.965036623.74805684930.9703327209115.9045705194
4400.34830.0231.7471104.8636.5227382.41178183.2009060.974749835.6005315612.3508820726178.5750464833
4500.33620.0381.7721117.0139.3387624.44638207.3534210.980987338.59082591974.361842311203.4110726126
4600.29080.061.6692117.8134.2591487.0686196.6484520.981665933.63103735476.9390035807193.0430796162
4700.19540.0911.2876114.8622.44364410.45226147.8937360.980914722.015300321210.2527754822145.0711396803
4800.09560.1390.813115.9211.08195216.1128894.242960.97884510.847513305415.772012023692.2492501812
4900.0320.2080.4652108.813.4819222.6324850.6184120.97650673.400118208922.100768357649.4292184614
5000.00490.3230.272109.350.53581535.3200529.74320.97371350.52173029934.391609505728.9613553732
5100.00930.5030.1582107.81.0025454.223417.053960.97007430.972538288752.600726798616.5436083092
5200.06330.710.0782104.796.63320774.40098.1945780.96668626.412229668671.92232329767.9215854674
5300.16550.8620.0422107.6917.82269592.828784.5445180.963370917.169865722689.42854533454.3780563957
5400.29040.9540.0203104.4130.32066499.607142.1195230.960166429.112882798595.63942902812.0350947686
5500.43340.9950.0087104.0545.09527103.529750.9052350.957124943.161805789299.09090161580.8664229589
5600.59450.9950.003910059.4599.50.390.954282956.73211840594.951148550.372170331
5700.76210.9520.002196.3373.41309391.706160.2022930.951640269.862850505187.27126844360.192510151
5800.91630.870.001795.7987.77237783.33730.1628430.949163483.310327779479.10071501480.1545646155
5901.02630.7570.001188.6991.02254767.138330.0975590.946944886.193327564463.57629247420.0923829877
6001.06220.6310.000890.0195.60862256.796310.0720080.944971290.347394261753.67087721630.0680454862
6101.00260.5030.000389.689.8329645.06880.026880.943143584.725372309842.50634577280.0253516973
6200.85440.3810.000287.774.9308833.41370.017540.941217970.526285518831.44957254520.016508962
6300.64240.265083.2953.50549622.0718500.939799450.284433037520.74311138690
6400.44790.175083.737.4892314.647500.938594835.18719633413.7480673330
6500.28350.107080.0322.6885058.5632100.937126121.26199020558.02480759080
6600.16490.061080.2113.2266294.8928100.936238212.3832753274.58083562730
6700.08740.032082.287.1912722.6329600.9349876.72374583352.46178337150
6800.04680.017078.283.6635041.3307600.93441673.42323931811.24348436770
6900.02270.0082069.721.5826440.57170400.93339391.47723025550.53362502620
7000.01140.0041071.610.8163540.29360100.93310150.76174114190.27395953350
7100.00580.0021074.350.431230.15613500.9322320.40200640540.14555404330
7200.00290.001061.60.178640.061600.93212970.16651564960.05741918950
7300.00140.0005069.890.0978460.03494500.93143590.09113727710.03254902750
1003.9982981056.7796361149.602456L*955.96725869981010.68504098021120.404645149
XnYnZn98.28XYZ
1003.9982981056.7796361149.602456a*90.4695.64106.02
K0.0946271073-0.83X/XnY/YnZ/Zn
b*0.0901001690.09049966380.0922237509
-1.25f(X/Xn)f(Y/Yn)f(Z/Zn)
0.44830667150.44896827640.4518014225
10
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキInvisibleのサンプル作成 サクセイ
100118-2
KeywordAimCore、タッチパネル。
<ハード条件> ジョウケン
フィルム客先支給基材(東山、両面クリアHC、125μm) キャクサキシキュウキザイヒガシヤマリョウメン
張力150N、成膜MR温度:0℃ チョウリョクセイマクオンド
脱ガス ダツMR
BMBDC BMB
Nb2O55inch*18inch Normal Mag, DC-Pulse
SiO2130*510mm DL AC
ITOSnO2:3wt%、強磁場、DC-Pulse キョウジバ
<プロセス条件> ジョウケン
到達圧力 トウタツアツリョク×10-4Pa(巻取室) マキトシツ
×10-4Pa(成膜室) セイマクシツ
脱ガス ダツ80℃×1.0m/min
BMBAr:500sccm, 1000V, 0.02A
Nb2O5Ar:300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ
SiO2Ar:300sccm、O2:76sccm、Power8kw、D.Rate:520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ
ITOAr:200sccm、O2:2.5sccm、Power:2.5kw、D.Rate:250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ
<条件表> ジョウケンヒョウ
SiO2Nb2O5SiO2ITO
No膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド
11005.2780.953012101.2Invisible Film(200Ω/□狙い) ネラ
単位:Å、m/min Pass数 タンイスウ
<結果> ケッカ
Rs%THazeB*
NoSiO2Nb2O5SiO2ITOABABABAB
110078530210********
単位:Å、Ω/□ タンイ
A:As-depo、B:150℃×1hr大気アニール タイキ
<サンプル巻姿> マスガタ
%T%R
AA
<結果> ケッカITOITO
80088.1711.03
79988.0411.02
79888.4410.94
79788.3910.9
79689.0110.69
79588.4810.73
79488.5710.51
79388.4110.51
79288.6510.26
79188.7410.4
79089.0910.07
78989.1610.05
78888.969.88
78789.289.92
78688.969.77
78588.69.9
78489.29.87
78389.389.71
78289.229.75
78188.699.71
78088.899.73
77988.679.76
77888.869.72
77789.519.73
77688.759.78
77589.079.8
77488.879.89
77389.059.85
77289.039.82
77188.739.89
77088.69.92
76988.859.92
768899.95
76789.1210.04
76688.9310
76589.0310.04
76489.139.92
76389.169.91
76289.199.9
76189.199.83
76089.629.77
75989.529.7
75889.549.61
75789.689.55
75689.759.48
75589.889.42
75489.839.25
75390.099.13
75290.199.11
75190.129
75090.688.87
74990.688.86
74890.278.82
74790.578.78
74690.338.74
74590.578.62
74490.328.61
74390.548.71
74290.418.69
74190.188.74
74090.248.77
<結論> ケツロン73990.358.82
予備テストとほぼ同等。 ヨビドウトウ73889.648.96
73790.139.03
73689.99.15
以上 イジョウ73589.479.34
73489.39.43
73389.39.59
73289.239.66
73189.249.9
73088.6910.02
72988.7110.14
72888.8310.38
72788.7810.41
72688.3310.57
72588.4910.77
72488.2310.74
72388.0110.93
72287.9911.02
72188.1711.06
72087.8911.07
71987.9911.16
71888.0111.19
71788.1211.23
71687.7911.21
71588.3211.18
71488.0911.15
71388.111.09
71288.2811.07
71188.3911.03
71088.3510.94
70988.2910.88
70888.5510.82
70788.3310.77
70688.3710.73
70588.3410.69
70488.7410.65
70388.5410.62
70288.1110.6
70188.6810.64
70088.3210.59
69988.3310.55
69888.2810.65
69788.1810.64
69688.1510.7
69588.4110.65
69488.0210.7
69388.0710.79
69287.9510.75
69187.8410.76
69087.8510.78
68987.9810.85
68887.9510.81
68788.110.84
68688.1810.81
68588.2810.71
68488.2110.67
68388.2510.61
68288.5310.45
68188.6610.39
68088.6510.3
67988.7510.15
67889.0510.02
67789.269.87
67689.19.77
67589.449.67
67489.729.51
67389.599.43
67289.829.29
67189.649.21
67089.979.09
66989.959.06
66889.919.06
66789.768.99
66689.79.01
66589.99
66489.379.03
66389.629.13
66289.69.18
66189.389.19
66089.269.35
65989.259.42
65889.329.51
65789.129.62
65688.999.73
65589.029.83
65488.859.98
65388.8210.08
65288.6610.12
65188.6610.24
65088.7710.29
64988.610.41
64888.5510.42
64788.4510.49
64688.6610.47
64588.5710.52
64488.5110.54
64388.6310.48
64288.6710.55
64188.6310.49
64088.7110.5
63988.5810.48
63888.710.5
63788.4710.53
63688.2510.55
63588.4510.55
63488.2310.58
63388.3910.63
63288.1410.69
63187.8810.74
63087.9810.81
62987.710.88
62887.7310.98
62787.6211.03
62687.5611.07
62587.4811.1
62487.8411.16
62387.4211.17
62287.7211.2
62187.3211.18
62087.7411.12
61987.7911.13
61888.0410.97
61787.910.99
61687.6910.86
61588.2810.73
61488.1510.6
61388.3510.5
61288.3810.34
61188.4510.25
61088.5810.08
60988.799.98
60888.889.9
60788.549.79
60688.929.72
60588.849.72
60489.039.68
60388.759.64
60288.749.66
60188.839.66
60088.799.63
59988.799.75
59888.779.8
59788.869.8
59688.589.89
59588.659.94
59488.549.93
59388.769.99
59288.8210.01
59188.7810.03
59088.8110.06
58988.6410.06
58888.6410.07
58788.6310.03
58688.9210.03
58588.6910.01
58488.7210.03
58388.5810.07
58288.6710.1
58188.5510.1
58088.6210.2
57988.4410.27
57888.2210.36
57788.2510.42
57687.810.48
57587.9810.61
57487.9110.67
57387.8110.79
57287.6410.85
57187.510.91
57087.5110.99
56987.5810.97
56887.5510.94
56787.7811.03
56687.510.99
56587.5611.01
56487.6810.95
56387.7610.9
56287.810.8
56187.8410.76
56088.0510.68
55987.7410.59
55887.910.55
55787.9410.46
55688.1310.48
55588.0410.4
55487.9910.37
55387.9710.35
55288.110.25
55187.9210.28
55088.1210.25
54988.2510.24
54888.0710.21
54788.1610.18
54688.2710.12
54588.310.13
54488.3110.08
54388.2810.06
54288.3610
54188.469.95
54088.289.95
53988.49.94
53888.429.95
53788.29.99
53688.2510.03
53588.1710.04
53488.310.11
53388.0910.13
53288.0610.19
53187.9910.32
53087.7710.38
52987.9910.42
52887.9610.5
52787.8210.52
52687.7410.56
52587.7610.65
52487.7910.61
52387.6410.59
52287.7610.65
52187.6810.66
52087.5710.64
51987.710.66
51887.6110.69
51787.2610.69
51687.4610.69
51587.410.67
51487.2210.7
51387.610.78
51287.1610.73
51187.3410.81
51087.310.8
50987.2110.71
50887.5310.66
50787.510.66
50687.6210.54
50587.7510.47
50487.8810.46
50387.7910.33
50287.6710.29
50188.1110.26
50087.5310.21
49987.6210.24
49887.6410.26
49787.5810.3
49687.6910.39
49587.3710.43
49487.4110.49
49386.9810.55
49287.1610.55
49187.4110.62
49087.2810.62
48987.3910.56
48887.410.51
48787.2910.49
48687.3210.47
48587.4210.45
48487.2710.44
48387.3210.49
48287.2310.53
48187.1310.56
48087.1110.65
47986.6810.78
47886.710.92
47786.7810.95
47686.6611.08
47586.4311.1
47486.7711.09
47386.8311.04
47286.6811.01
47186.7910.96
47087.1310.83
46986.9610.79
46886.9610.74
46786.9610.68
46686.6510.76
46586.6810.75
46486.4210.98
46386.4311.02
46286.0311.22
46185.9511.32
46085.8211.42
45985.7311.4
45886.0211.46
45785.8711.42
45686.0611.28
45585.9711.13
45486.2611.01
45386.2710.89
45285.8510.86
45186.0610.88
45086.0411.01
44985.4911.09
44885.4811.19
44785.6411.42
44685.1511.6
44584.9711.67
44485.0611.73
44385.2411.74
44285.611.66
44185.111.54
44085.6711.42
43985.4611.32
43885.6411.29
43785.1711.26
43685.0411.37
43584.7611.51
43484.3811.94
43384.4812.23
43283.7612.47
43183.912.63
43083.6412.91
42983.4312.85
42883.4712.85
42783.5512.7
42683.5912.54
42583.5912.48
42483.5812.3
42383.3412.27
42283.0312.43
42182.3612.62
42082.3712.88
41981.8913.07
41882.0113.24
41781.7413.27
41681.6813.2
41581.9713.05
41482.4812.8
41382.0812.67
41282.4312.51
41182.0512.42
41081.512.61
40981.1612.92
40880.6513.34
40779.9813.82
40679.514.3
40579.5214.53
40479.2414.74
40379.1614.88
40278.9314.76
40178.9314.64
40078.8314.64
39978.1714.72
39877.914.91
39777.4315.16
39676.6315.42
39576.1815.82
39475.815.92
39376.0815.99
39275.7715.86
39176.3715.39
39076.4415.09
38976.2914.66
38876.2214.59
38775.5814.7
38674.514.99
38574.2215.45
38473.5115.87
38373.1916.21
38273.0716.64
38172.2516.97
38072.4416.8
37971.9116.85
37871.0717.19
37770.5517.23
37669.4617.86
37568.4518.53
37467.519.03
37366.6819.53
37266.9919.53
37166.8919.06
37067.0418.95
36966.8518.35
36866.2217.96
36766.0217.88
36665.1617.71
36564.2218.01
36463.5818.27
36363.2318.59
36262.4918.72
36162.6618.57
36061.9219.1
35961.1419.03
35860.0819.58
35758.8119.93
35657.4120.99
35556.1521.75
35455.2622.11
35354.4722.32
35254.7322.26
35154.5922.15
35053.5822.13
34953.3621.4
34852.2321.44
34751.221.56
34650.6821.72
34550.4421.49
34450.1721.3
34349.8720.77
34249.0820.83
34148.421.04
34046.4721.84
33945.922.28
33844.6323.34
33742.6923.95
33642.3224.94
33541.0124.66
33440.725.03
33339.5825.19
33238.7725.27
33136.7325.04
33036.5325.5
32935.6624.62
32835.2124.05
32734.4623.96
32632.823.55
32530.7224.02
32428.0923.91
32325.724.94
32223.5125.45
32120.625.79
32017.1326.77
31914.1926.97
31811.2527.5
3177.5627.98
3164.4428.71
3152.3828.39
3141.1228.45
3130.3527.85
3120.1226.93
3110.0826.66
3100.0726.6
3090.0526.58
3080.0326.39
3070.0427.53
3060.0428.18
3050.0328.73
3040.0329.73
3030.0230.64
3020.0230.83
3010.0331
3000.0330.74
1
12
No.1
No.2
No.3
No.4
No.5
30mm
30mmm
150mm
測定ポイント(透過率・反射率)
Center
1
12
10m
Invisible(250Ω/□)
10
ITO
λ(nm)
%T
Invisible Film
9
ITO
λ(nm)
%R
Invisible Film
8
ITO
λ(nm)
%R
Invisible Film(拡大)
7
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキInvisibleの予備テスト ヨビ
100118-1
KeywordAimCore、タッチパネル。
<ハード条件> ジョウケン
フィルム客先支給基材(東山、両面クリアHC、125μm)をPETに貼り付け キャクサキシキュウキザイヒガシヤマリョウメンハツ
張力150N、成膜MR温度:0℃(結晶化のため。成膜は全て0℃) チョウリョクセイマクオンドケッショウカセイマクスベ
脱ガス ダツMR
BMBDC BMB
Nb2O55inch*18inch Normal Mag, DC-Pulse
SiO2130*510mm DL AC
ITOSnO2:3wt%、強磁場、DC-Pulse キョウジバ
<プロセス条件> ジョウケン
到達圧力 トウタツアツリョク2.8×10-4Pa(巻取室) マキトシツ
4.5×10-4Pa(成膜室) セイマクシツ
脱ガス ダツ80℃×0.5m/min(結晶化は3Pass) ケッショウカ
BMBAr:500sccm, 1000V, 0.02A
Nb2O5Ar:300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ
SiO2Ar:300sccm、O2:76sccm、Power8kw、D.Rate:520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ
ITOAr:200sccm、O2:2.5sccm、Power:2.5kw、D.Rate:250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ
<条件表> ジョウケンヒョウ
SiO2Nb2O5SiO2ITO
No膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド
11005.2780.953012101.2Invisible Film(200Ω/□狙い) ネラ
単位:Å、m/min Pass数 タンイスウ
<結果> ケッカ
Rs%THazeB*
NoSiO2Nb2O5SiO2ITOABABABAB
11007853021018818488.288.50.60.71.66*
2100785300**90*0.7***
単位:Å、Ω/□ タンイ
A:As-depo、B:150℃×1hr大気アニール タイキ
<サンプル巻姿> マスガタ
%T%R
ABAB
<結果> ケッカITONo-ITOITOITONo-ITOITO
80088.4989.388.6610.6410.0310.73
79988.7489.7188.910.6310.0410.81
79888.4489.1788.6510.4510.0110.6
79788.7789.6588.8510.3810.110.59
79688.7589.3188.7710.410.1510.54
79588.8989.3189.1310.1610.0810.53
79489.1689.388.9910.169.9510.5
79389.3889.789.249.979.9610.41
79289.0889.4588.589.879.8810.35
79189.3289.7989.319.769.9810.36
79089.689.5489.329.779.9810.32
78989.5989.2589.089.739.9110.26
78889.3389.7889.79.629.8510.4
78789.5789.7189.549.619.810.4
78689.7590.1689.379.599.7310.41
78589.8289.8889.319.549.6610.36
78489.789.7789.569.519.5510.54
78389.5889.3489.299.549.6410.4
78289.6989.9689.269.459.610.49
78190.0189.9789.089.49.5610.51
78089.8689.9789.139.489.5910.49
77989.6689.6889.039.429.5510.56
77889.8889.6789.29.529.5210.71
77789.5489.5788.979.69.6210.62
77689.2889.6289.279.669.5110.53
77589.6789.8589.39.619.6810.73
77489.4689.5288.979.689.6810.63
77389.2789.1689.259.79.8110.7
77289.2289.6388.899.769.7910.8
77189.789.8188.789.749.7910.54
77089.2389.2789.299.789.8810.6
76989.1289.1389.259.789.9610.65
76889.2189.0489.149.7810.0610.53
76789.2589.2389.29.8210.0710.44
76689.4389.4689.329.7710.1710.35
76588.8188.6689.039.8310.1810.28
76489.6489.1489.579.7310.3410.23
76389.3689.0589.789.6910.2610.08
76289.7389.3289.579.7510.289.96
76189.1588.7989.769.6710.349.86
76089.5688.7690.089.6310.329.72
75989.6589.2189.869.5810.319.58
75889.5188.8989.999.4410.369.44
75789.7189.0990.069.410.319.23
75689.4788.9190.249.4210.369.16
75589.5389.0690.59.2510.269.07
75489.9589.4690.979.1610.238.94
75389.5789.2990.519.1910.098.85
75289.9289.4790.349.229.998.81
75189.7989.4690.679.149.998.66
75089.8889.7290.749.069.938.6
74989.5289.5490.569.039.778.54
74889.4289.8590.839.079.678.56
74789.7689.9590.6599.498.58
74689.8790.290.589.029.348.51
74589.7789.9790.3799.278.56
74489.9390.5690.59.029.198.6
74390.190.5590.229.018.978.58
74289.8490.7690.399.128.878.66
コメント400nmで多少ずれがある。もう少し調整の余地があるが、これ以上時間をかけない。 タショウスコチョウセイヨチイジョウジカン74189.5390.890.419.248.778.77
74089.8491909.338.718.8
<結論> ケツロン73989.5590.9489.969.388.658.95
この条件でサンプルを作成する。 ジョウケンサクセイ73889.2890.8689.719.548.479.1
73789.391.2989.679.68.389.21
以上 イジョウ73689.0690.5889.349.748.329.43
73589.3591.3489.299.788.269.5
73488.7591.0789.3910.018.29.61
73388.7291.0788.9810.118.199.78
73288.1790.718910.288.249.9
73188.6491.1488.7210.378.269.99
73088.189188.8210.528.2710.09
72988.491.2588.6210.628.2510.21
72887.6490.9288.6910.798.410.26
72788.190.8988.3710.888.4610.37
72687.8391.0588.0810.938.410.5
72587.7890.7788.2311.038.4810.51
72487.6890.5988.4511.078.6610.59
72387.9291.0388.3211.198.6410.6
72287.490.4588.311.298.7310.62
72187.4590.3388.0711.258.8410.64
72087.5590.4688.3511.268.910.65
71987.6490.4388.2711.278.9710.68
71887.7690.488.3711.348.9910.6
71787.8390.3588.5711.359.1210.62
71687.4689.9388.3311.259.2310.59
71587.8690.4288.2911.239.210.56
71487.8289.9388.3211.159.2610.58
71388.1390.1988.3711.19.2510.56
71287.8390.1988.5311.059.2910.49
71188.1590.2388.4610.969.2310.5
71088.2690.4888.5210.939.2710.58
70988.5290.2888.3310.839.2910.59
70888.5690.4288.610.789.2710.54
70788.490.2788.6110.729.2110.63
70688.490.1588.5310.629.1910.65
70588.590.3188.4910.639.1410.78
70488.6990.8188.3410.539.1810.76
70388.6990.3888.2910.539.1910.83
70288.6490.3988.4810.529.1310.91
70188.290.1588.3610.499.1911.03
70088.6890.5488.2110.479.0811.06
69988.6290.3588.2310.489.1311.19
69888.5990.1888.1110.529.1111.2
69788.6690.3188.2810.519.1711.32
69688.690.3688.2410.469.1911.35
69588.6290.288.0810.549.2611.39
69488.8790.3787.910.499.311.44
69388.4989.7888.0610.69.3511.48
69288.5289.9287.9410.539.4611.49
69188.5489.7888.1210.559.5611.51
69088.5589.888.1810.579.6611.44
68988.6489.7588.3210.479.7511.35
68888.5989.5888.1310.589.911.32
68788.5589.4588.2610.489.9711.28
68688.6989.1888.2710.510.0711.12
68588.6989.2388.5110.4510.1911.06
68488.6589.0988.7310.4110.2810.9
68388.8389.2788.8510.3210.4210.8
68288.6888.8888.9510.2410.4910.6
68188.9188.9289.2410.1310.4910.48
68088.9488.8889.2610.0510.5710.28
67988.9788.8889.589.9810.6110.18
67889.1888.989.599.8510.6610.01
67789.3188.7289.829.8710.699.88
67689.5288.9589.829.6910.629.72
67589.2888.72909.6110.69.6
67489.5589.0989.859.5210.579.55
67389.588.990.029.4210.499.39
67289.338990.269.3910.449.33
67189.7189.0789.989.3310.319.31
67089.6689.3690.079.310.239.31
66989.6989.4890.119.2310.199.27
66889.5189.489.959.2910.079.3
66789.5189.3789.99.269.959.31
66689.6989.6189.759.339.839.37
66589.3489.6289.689.339.79.41
66489.6689.9189.649.429.639.43
66389.1889.7489.819.539.489.48
66289.1690.1389.459.599.389.61
66189.289.8289.249.729.349.65
66088.8390.1589.389.839.39.67
65988.8890.0389.069.929.289.73
65888.7890.0989.1610.079.179.8
65788.3590.0788.9510.239.19.86
65688.1789.8389.0110.279.159.88
65588.1289.9388.5910.49.159.86
65488.1690.0688.8210.59.169.95
65387.8189.8188.6310.629.239.95
65288.2290.0688.9310.669.249.94
65187.8389.8888.6810.679.2110.04
65087.7389.8888.6510.729.239.96
64987.9390.0588.4710.799.349.98
64887.6289.8388.6810.89.279.95
64787.6989.9588.8510.879.379.96
64687.829088.8910.829.319.93
64587.8189.9988.7210.839.329.92
64488.2290.1288.5710.829.299.91
64387.5789.7988.7210.89.279.91
64287.99088.7610.819.249.93
64187.9590.2588.5710.89.229.96
64087.7990.3188.6510.89.1410.02
63987.9190.1688.6610.769.0910.15
63888.1490.5588.5210.799.0510.22
63787.7590.2388.4310.8910.29
63687.9790.4988.2810.778.9310.37
63587.8190.3788.2510.848.8610.54
63487.9490.5188.1610.888.8310.65
63387.9590.5388.0910.838.7910.74
63287.9390.3688.1310.938.7610.87
63187.9890.6288.0310.998.7411.02
63087.9290.6487.7710.988.7711.15
62987.6990.4287.8711.018.7611.22
62887.8190.7287.8111.098.8811.35
62787.9790.5187.5211.048.9111.37
62687.9990.287.8711.089.0311.44
62587.6690.1587.4611.079.1411.49
62487.8689.8587.5811.099.2511.51
62387.7889.9287.7511.059.311.51
62287.9489.7687.8611.059.4311.44
62187.8789.6587.710.949.5711.44
62088.1189.5387.7710.919.6611.34
61987.8989.3187.9210.829.811.3
61888.1389.587.8910.699.8711.21
61788.1389.288.2310.629.9611.03
61688.3689.3288.410.5310.0710.92
61588.4389.2188.2510.3810.1410.83
61488.4789.1888.5410.2810.210.74
61388.4988.8288.7610.1710.2510.65
61288.8289.0788.8510.1110.310.57
61188.7989.2388.929.9910.2810.49
61088.8188.8888.819.910.2810.37
60988.9689.1789.049.7710.2510.34
60888.7788.8288.969.7610.2210.27
6078989.2689.169.7110.210.26
60689.0189.2788.859.7110.1910.23
60588.9789.1189.019.7310.1210.22
60488.9889.3189.119.7610.0710.21
60389.0689.389.079.7810.0310.21
60288.7489.3188.869.799.9810.2
60188.689.0788.999.839.9910.24
60088.789.388.919.879.9510.15
59988.7389.4688.969.929.9410.2
59888.4989.2988.96109.910.14
59788.6889.2488.9310.029.9310.15
59688.5589.3988.7910.129.9510.09
59588.3989.388.9710.169.8810.05
59488.1789.289.0610.229.9610.02
59388.1489.2288.8910.249.919.95
59288.2389.4588.9610.289.989.87
59188.1589.2188.8910.39.989.86
59088.0589.1488.9210.369.919.77
58987.8289.188.8910.399.919.74
58888.2489.428910.359.879.71
58787.9889.2488.8210.449.839.7
58688.1789.6988.7810.429.89.74
58587.989.4189.0210.459.769.74
58487.8189.6188.710.519.639.79
58388.0189.5888.6810.549.579.76
58287.8389.788.6610.629.549.86
58187.7189.6288.5710.659.479.97
58087.7889.7888.4210.659.3810.02
57987.7689.9288.3610.769.2910.17
57887.6589.9888.3510.829.2210.32
57787.6690.2387.7810.879.1410.4
57687.4389.9988.1110.939.1110.55
57587.5690.2487.8510.979.0810.62
57487.4190.0487.9411.029.0610.72
57387.7790.4187.9711.059.0410.78
57287.4990.187.6611.099.110.84
57187.490.0887.811.119.1110.91
57087.5190.187.5311.119.1410.98
56987.4989.8887.7111.139.1810.96
56887.3189.8287.7211.19.2611
56787.5189.8287.7311.049.2510.98
56687.689.9587.83119.3411
56587.6789.6387.8410.979.3811.01
56487.3389.6587.8410.99.4310.98
56387.7889.9287.7610.859.5410.94
56287.7989.7487.9510.779.610.93
56187.7389.487.7810.729.610.93
56087.8289.558810.629.6110.9
55988.0889.5888.1510.579.6410.83
55887.9489.4688.0310.519.710.85
55788.1189.4587.7410.449.7210.82
55688.0889.2788.0510.459.7510.85
55588.2189.5288.0710.389.7910.79
55488.1989.3688.2410.329.8110.8
55388.289.2588.1510.369.8610.75
55288.1589.2988.310.259.8410.76
55188.2389.3188.2510.249.8810.69
55088.2189.1888.210.219.9410.66
54988.2889.3588.3510.1910.0110.58
54888.1489.0388.4210.1910.0210.51
54788.1589.0788.510.1410.0110.45
54688.2389.1388.4910.1610.0710.39
54588.3189.1988.5210.1110.1410.31
54488.0789.0688.3910.110.0910.24
54388.1789.1688.4910.1410.110.13
54288.0989.0388.6710.1610.1210.06
54188.1989.0888.6710.1910.110.06
54087.9388.9488.5110.210.0910.03
53987.988.9488.7310.2510.069.99
53887.8589.0588.4310.34109.97
53787.8389.0288.510.369.979.96
53687.8789.1688.4310.379.9610.03
53587.7289.0688.2310.459.949.99
53487.4989.0188.210.529.9110.06
53387.6189.2988.3110.589.8710.09
53287.6389.2588.0610.639.8110.11
53187.6489.2188.1410.679.7810.16
53087.5189.2888.1910.729.7810.22
52987.4489.1587.9210.719.7110.26
52887.2889.2987.9410.799.6910.28
52787.4489.4487.8910.799.6610.33
52687.489.4387.9810.839.610.35
52587.4289.4487.9710.859.6110.38
52487.3489.4887.8910.839.5610.45
52387.2589.4487.7910.859.5210.51
52287.2989.4787.8410.879.4810.56
52187.2289.6587.5310.869.4110.6
52087.3189.6387.6310.889.4110.66
51987.2189.7187.6410.99.3710.71
51887.3889.6687.610.949.3810.77
51787.2589.687.5510.969.3510.88
51687.1789.5687.3210.969.3510.89
51587.2589.7487.610.949.3910.93
51487.2289.3787.46119.3910.91
51387.1189.5587.7410.959.4510.94
51287.2989.4587.3910.969.4910.93
51187.2489.3987.6610.889.5810.89
51087.489.3287.6510.89.6410.89
50987.5989.5587.5510.699.710.81
50887.489.2287.8110.659.7110.8
50787.3989.1687.7910.519.7410.67
50687.5689.2387.9310.489.8310.65
50587.689.3888.0110.49.7910.64
50487.6489.3387.8810.49.7810.65
50387.6789.3987.9710.49.7510.51
50287.5489.1887.9810.339.7310.57
50187.4788.9587.9410.39.710.56
50087.5289.2887.9910.49.6910.6
49987.4789.387.8310.479.6610.59
49887.3289.2587.6310.519.6410.63
49787.1889.0387.710.69.6610.61
49687.3589.2987.6410.729.7210.64
49587.1188.9187.4410.799.8310.56
49487.1388.9287.610.769.7910.49
49387.1788.8187.5910.799.910.5
49286.9588.7587.9310.89.9410.44
49187.0288.7987.7510.721010.35
49087.2188.7887.8210.7910.0110.3
48986.8588.7187.9110.6410.0510.28
48887.1188.8387.6510.6710.0110.29
48787.0288.5187.810.649.9610.3
48687.2489.0487.6810.619.910.4
48586.8388.5587.4810.619.8210.43
48487.1289.187.5310.729.710.48
48386.9889.4987.5110.859.6210.58
48286.7289.186.9610.889.4910.73
48186.7989.2687.2410.979.4410.76
48086.689.1487.0511.099.3710.87
47986.3489.1286.7611.169.3810.95
47886.4389.186.8311.319.4310.96
47786.4589.3186.9911.379.510.92
47686.3188.938711.379.5710.91
47586.388.7887.1311.299.6510.83
47486.6388.9887.211.239.7810.83
47386.4888.7587.2211.049.8210.71
47286.6588.8287.1611.039.8710.74
47186.6788.8787.0310.819.9410.67
47086.8888.9987.0410.779.8910.76
46986.8589.1187.1110.749.810.79
46887.0589.3186.8410.769.7210.94
46786.7589.1886.8610.819.5211.04
46686.6689.3586.6610.829.411.18
46586.3489.286.7611.059.3211.34
46486.4889.6186.3811.19.2411.39
46386.0489.186.4211.39.2111.42
46286.1289.3986.2511.419.2511.36
46185.8188.986.211.529.3111.36
46085.9589.0886.3311.599.4211.3
45986.1688.9286.6311.519.5811.18
45885.6288.386.9511.449.7411.04
45786.288.4486.5211.339.7310.9
45686.3388.586.7511.149.9410.9
45586.2288.5186.8411.019.8410.83
45486.3388.7586.6210.939.8910.91
45386.2388.4786.5210.849.7510.99
45286.2588.9686.1410.889.6911.1
45186.2689.1286.1411.029.4311.28
45086.0489.1785.811.269.2511.49
44985.6389.3285.911.389.2811.67
44885.5489.2485.7711.589.1911.6
44785.1989.0185.4311.859.2211.58
44685.1388.9985.4211.879.3311.58
44585.2288.5685.7411.949.4611.52
44484.9388.5185.8211.899.711.34
44384.8988.385.7811.89.8511.08
44285.2688.3185.8911.6610.0311.07
44185.2187.8785.8411.4910.1611.04
44085.4488.1886.1411.4210.1311.04
43985.1488.3386.0511.3210.0511.2
43885.1388.5385.311.389.8411.4
43785.0889.0385.1211.589.6911.7
43684.9688.9484.9911.779.4511.78
43584.2288.6984.38129.2212.12
43484.1589.1183.9412.319.0312.26
43383.8589.0483.9612.558.9212.4
43283.788.8584.2212.768.9912.37
43183.4188.4983.8212.799.1412.29
43083.4888.4684.1112.799.3212.13
42983.7288.3484.4612.769.5512.07
42883.8888.3184.212.479.7211.95
42783.8588.0784.2512.169.7712.01
42684.1388.3784.1112.089.7412.15
42584.0188.6183.3811.969.5812.37
42484.0988.983.4911.979.2812.63
42383.5588.8383.0312.168.9512.89
42283.489.1782.812.48.7113.22
42182.7789.3182.5512.648.5613.29
42082.989.282.3212.98.5113.42
41982.4689.0482.4113.088.5113.2
41882.588.5182.7913.218.7712.99
41782.3988.1282.9513.049.0912.75
41682.2787.9782.9712.889.4812.51
41582.4487.5482.9212.659.7612.3
41482.5887.682.8312.489.9712.32
41382.2987.1382.9812.3410.0412.29
41282.0287.6282.512.49.9212.48
41181.8288.181.5512.689.6212.86
41081.4888.4481.0812.989.3513.18
40980.6688.3980.7313.439.1713.44
40880.3188.3280.5413.918.9813.52
40779.5488.2880.2214.38.9113.63
40679.4687.880.3614.648.9713.63
40579.2287.488014.739.2813.44
40479.0486.9679.9114.599.6413.5
40379.3986.9580.0514.479.9313.46
40279.5687.3879.8714.2910.0513.63
40179.7987.4479.3814.129.9413.94
40079.3287.578.7514.169.6314.37
39979.128878.2214.279.0714.8
39878.7788.7377.3614.518.7115.37
39778.0588.8977.0914.848.215.63
39677.4688.576.7115.037.9315.82
39577.4788.4376.8515.247.8515.7
39477.4688.2177.0115.318.0415.49
39377.0987.6976.48158.3415.24
39277.2987.4777.1914.858.8715.01
39177.3787.1777.1614.329.2414.77
39077.1287.2177.2114.29.4314.81
38977.1887.3576.614.149.3814.92
38876.5687.375.9514.339.1115.23
38775.7487.8275.414.668.7515.48
38674.9787.8774.7215.368.4215.58
38573.9487.6273.9815.848.2715.69
38473.4687.3473.7716.428.3715.41
38372.386.1373.5416.558.815.23
38272.9385.9773.6116.819.2315.04
38172.4185.8773.216.679.7514.99
38072.428573.1416.6910.1415.08
37972.2285.7571.7816.7610.2715.74
37871.6985.7770.9116.869.816.54
37770.9786.2869.7117.149.3316.96
37670.6287.0469.2417.688.6217.65
37569.2686.5668.9818.037.8918.15
37469.338767.818.237.6418.3
37368.8786.2568.1918.057.7118.39
37268.7585.1968.1518.15818.29
37168.6685.3668.2217.318.4118.07
37069.1784.7567.816.818.818.21
36969.0585.0267.3716.588.6618.39
36867.7785.1466.1816.668.2718.57
36767.0785.5865.7816.957.7518.69
36666.4685.9165.1217.327.2518.59
36565.3385.6564.6317.776.918.7
36464.1785.5364.2718.26.9218.28
36363.3284.1163.9618.487.3617.59
36263.283.0463.2918.568.2817.27
36162.3482.0362.818.68.8417.08
36061.981.6262.0918.789.4117.42
35960.7781.5560.9119.39.3518.03
35860.4582.1259.119.619.0918.81
35759.1182.158.3819.988.4819.15
35658.4782.4357.3420.867.9619.84
35557.481.3956.8921.297.6220.13
35457.0680.4256.0321.317.8120.24
35357.4179.8155.9820.958.1520.83
35257.1979.3555.2720.388.6221.05
35156.9679.0154.7820.148.4821.42
35056.4479.5253.8219.828.3221.75
34955.8980.4353.1619.847.4221.95
34854.5480.4852.419.896.4222
34752.5479.6251.7320.175.822.36
34652.1279.4952.0720.55.4721.68
34551.3978.3851.7320.23621.36
3445177.4651.3220.716.6420.43
34350.0775.9550.3320.417.5920.23
34249.2975.9348.8120.947.9320.59
34147.9475.8548.1921.527.6621.06
34046.7776.2346.1622.53721.26
33945.4375.3945.2822.866.821.2
33843.917444.0923.736.6321.44
33743.6972.5243.2923.737.1121.87
33643.371.1142.2823.847.9622.57
33543.570.7741.4523.538.1123.07
33442.7369.6740.6623.637.9524.13
33342.4870.839.3623.897.1524.72
33240.7770.1938.1923.596.4725.2
33139.969.537.723.625.5825.25
33038.5568.3436.9223.234.7425.15
32937.3866.5235.9422.945.0125.04
32835.5364.6334.9623.055.224.48
32734.3262.6333.4522.435.2224.3
32632.760.6631.8823.24.9224.23
32530.1258.4829.6123.944.2524.04
32427.4756.4527.5923.593.9623.25
32325.1152.1125.1124.983.9323.57
32222.6747.0923.0125.64.0923.7
32119.9140.3820.1826.24.4823.95
32017.8435.2416.6426.84.5524.62
31914.6129.413.3227.044.524.84
31811.1122.4310.5126.414.1326.39
3177.5315.67.2126.714.0326.56
3164.6810.114.1726.623.7127.75
3152.645.492.2125.873.327.56
3141.032.10.9625.942.7828.16
3130.310.640.2925.42.3828.29
3120.110.260.1225.911.9628.11
3110.080.180.0726.051.6327.99
3100.050.180.0725.771.4227.38
3090.060.140.0526.531.2326.8
3080.040.10.0427.331.2926.49
3070.040.10.0527.691.3626.25
3060.040.10.0328.661.6526.8
3050.040.090.0229.21.9727.31
3040.020.070.0429.412.227.48
3030.030.070.0329.92.4728.75
3020.020.080.0429.822.5229.54
3010.030.070.0129.032.530.23
3000.030.060.0428.182.2430.75
1
12
No.1
No.2
No.3
No.4
No.5
30mm
30mmm
150mm
測定ポイント(透過率・反射率)
Center
1
12
10m
Crystal(250Ω/□)
7
ITO
No-ITO
λ(nm)
%T
Invisible Film
6
ITO
No ITO
λ(nm)
%R
Invisible Film
5
ITO
No ITO
λ(nm)
%R
4
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキInvisibleのシミュレーション結果 ケッカ
基材 Galss キザイ
simulation
4層 ソウITO210ÅITO210Å
3層 ソウSiO2530ÅSiO2530Å
2層 ソウTiO278ÅTiO278Å
1層 ソウSiO2100ÅSiO2100Å
λ%R%Tλ%R%T%R 差 サ指標 シヒョウ
3907.6581287.296033907.6421592.23620.01597
4007.0020388.862464007.5963592.30967-0.594320.59432
4106.6628789.814194107.5476992.3784-0.884820.88482
4206.4405290.595674207.4936592.45021-1.053131.05313
4306.2891.261194307.4477192.50589-1.167711.16771
4406.1640291.848664407.4068392.56222-1.242811.24281
4506.081292.359864507.3628592.61269-1.281651.28165
4606.1701692.397484607.3150592.66133-1.144891.14489
4706.2622892.42234707.262892.71436-1.000521.00052
4806.3515792.441544807.2098192.76809-0.858240.85824
4906.4318992.465834907.1574292.8248-0.725530.72553
5006.5061692.490345007.0996592.88763-0.593490.59349
5106.6361992.413395107.0450292.94471-0.408830.40883
5206.7547892.344355206.9866793.0052-0.231890.23189
5306.8582992.286985306.9316793.06174-0.073380.07338
5406.9495192.239135406.8742793.120520.075240.07524
5507.027292.202365506.8225993.173330.204610.20461
5607.0938392.17455606.7683293.228690.325510.32551
5707.150192.155055706.7116893.286380.438420.43842
5807.1965592.143715806.6576693.341360.538890.53889
5907.2345792.139245906.6041693.395790.630410.63041
6007.2634892.141626006.5516893.448330.71180.7118
6107.2865392.138816106.4984293.501580.788110.78811
6207.3028792.140526206.449293.549360.853670.85367
6307.3127492.147866306.3996693.597430.913080.91308
6407.3176892.160026406.3529693.643250.964720.96472
6507.3175992.176736506.3071793.688341.010421.01042
6607.3134492.192456606.261493.733441.052041.05204
6707.3046992.212326706.2157593.778431.088941.08894
6807.2930592.235166806.1725293.821481.120531.12053
6907.2786892.260736906.1312293.862961.147461.14746
7007.2605192.289767006.0891793.905251.171341.17134
7107.2465992.30997106.0469793.947721.19962
7207.2316592.331117206.0088393.986331.22282
7307.2161992.35297305.9742994.021531.2419
0.7837548387
4
A
B
C
3
A
B
C
2
A
B
1
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキInvisible、結晶化フィルムのサンプル作成 ケッショウカサクセイ
100114-1
KeywordAimCore、タッチパネル。
<ハード条件> ジョウケン
フィルム客先支給基材(東山、両面クリアHC、125μm) キャクサキシキュウキザイヒガシヤマリョウメン
張力150N、成膜MR温度:0℃(結晶化のため。成膜は全て0℃) チョウリョクセイマクオンドケッショウカセイマクスベ
脱ガス ダツMR
BMBDC BMB
Nb2O55inch*18inch Normal Mag, DC-Pulse
SiO2130*510mm DL AC
ITOSnO2:3wt%、強磁場、DC-Pulse キョウジバ
<プロセス条件> ジョウケン
到達圧力 トウタツアツリョク2.8×10-4Pa(巻取室) マキトシツ
4.5×10-4Pa(成膜室) セイマクシツ
脱ガス ダツ80℃×0.5m/min(結晶化は3Pass) ケッショウカ
BMBAr:500sccm, 1000V, 0.02A
Nb2O5Ar:300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ
SiO2Ar:300sccm、O2:76sccm、Power8kw、D.Rate:520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ
ITOAr:200sccm、O2:2.5sccm、Power:2.5kw、D.Rate:250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ
<条件表> ジョウケンヒョウ
SiO2Nb2O5SiO2ITO
No膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド
NG11005.2780.95301.3*22101.2Invisible Film(200Ω/□狙い) ネラ膜厚が計算間違いのためNG マクアツケイサンマチガ
2****2362.21661.5結晶化フィルム(250Ω/□狙い) ケッショウカネラ
単位:Å、m/min Pass数 タンイスウ
<結果> ケッカ
Rs%THazeB*
NoSiO2Nb2O5SiO2ITOABABABAB
NG110078530210********NG
2**236166254*87.688.80.60.72.672.09
単位:Å、Ω/□ タンイ
A:As-depo、B:150℃×1hr大気アニール タイキ
<サンプル巻姿> マスガタ
%T
<結果> ケッカABAB
80089.5289.848009.638.64
79989.5789.867999.68.64
79889.689.877989.558.63
79789.6189.937979.488.64
79689.7290.067969.428.63
79589.7690.117959.368.63
79489.7990.137949.318.63
79389.7890.227939.268.64
79289.8490.217929.228.67
79189.9490.247919.198.71
79089.8790.147909.158.73
78989.8590.17899.18.8
78889.8190.027889.068.88
78789.8390.047879.028.96
78689.8590.067869.019.05
78589.7790.047859.039.16
78489.6289.977849.079.27
78389.4889.97839.19.41
78289.5189.937829.159.56
78189.4589.887819.249.69
78089.3989.747809.339.81
77989.2589.677799.429.93
77889.1589.567789.5310.05
77789.0689.537779.6410.14
77688.9389.447769.7410.16
77588.7889.367759.8310.21
77488.7189.37749.9210.22
77388.6389.197739.9910.22
77288.6689.1577210.0410.21
77188.6189.0677110.1210.18
77088.5389.0377010.2210.15
76988.5389.0176910.2910.13
76888.5289.0576810.3410.09
76788.4589.1276710.399.99
76688.5189.276610.429.87
76588.5589.2776510.429.73
76488.689.2676410.419.59
76388.6589.3276310.389.45
76288.7289.4376210.349.29
76188.7789.5176110.299.14
<結論> ケツロン76088.9389.7276010.248.99
結晶化については特に問題なし。 ケッショウカトクモンダイ75989.0289.9175910.188.84
75889.1190.175810.068.67
75789.2290.257579.948.49
75689.3990.447569.88.32
H2分圧 ブンアツ75589.6790.597559.648.17
75489.8790.797549.478.03
75389.9890.937539.317.9
75290.1791.17529.157.78
75190.3391.297518.997.67
75090.4191.387508.827.58
74990.591.467498.667.52
74890.6191.597488.517.48
74790.791.667478.377.45
74690.8991.77468.247.46
7459191.767458.127.49
74491.0491.7474487.53
74391.0691.657437.917.58
74291.0791.577427.837.65
74191.1291.517417.87.74
74091.1291.477407.787.84
73991.0391.357397.797.96
73890.9391.197387.828.08
73790.8291.097377.878.21
73690.6590.927367.918.31
73590.5190.747357.978.41
73490.3690.587348.058.51
※詳細なQuleeデータは、別ファイル参照。 ショウサイベツサンショウ以上 イジョウ73390.2190.397338.148.6
73290.1790.247328.278.71
73190.1190.167318.398.81
73090.0790.117308.548.88
72989.95907298.678.94
72889.8289.897288.798.98
72789.6589.797278.919.01
72689.5289.7272699.01
72589.4389.687259.098.99
72489.4389.647249.188.97
72389.489.637239.268.94
72289.4189.657229.328.89
72189.4589.77219.378.81
72089.4689.777209.418.75
71989.4889.797199.448.67
71889.589.847189.458.6
71789.5289.887179.438.53
71689.5789.937169.418.46
71589.65907159.378.39
71489.7890.17149.338.34
71389.8490.177139.288.31
71289.8890.217129.218.28
71189.9190.267119.158.29
71089.9890.37109.18.32
70989.9690.327099.078.38
70889.9290.327089.038.46
70789.9190.277078.998.56
70689.8490.247068.978.68
70589.8290.27058.968.81
70489.7890.17048.988.95
70389.7489.997039.029.1
70289.6589.887029.079.26
70189.5889.777019.159.42
70089.4189.587009.259.59
69989.389.436999.369.76
69889.0789.196989.499.94
69788.8789.016979.6110.11
69688.788.836969.7610.25
69588.5388.766959.910.38
69488.3788.6769410.0610.49
69388.2788.5669310.2310.58
69288.1688.5269210.3910.63
69188.0988.569110.5510.67
69088.0388.4769010.710.68
68987.9488.4268910.8410.67
68887.8488.3968810.9410.61
68787.888.468711.0210.54
68687.7488.4168611.0910.46
68587.7888.5168511.1310.35
68487.7988.6168411.1310.22
68387.8588.7568311.1210.07
68287.9788.9768211.099.91
68188.1289.1768111.039.74
68088.2289.3268010.959.58
67988.3289.4267910.859.42
67888.4389.5367810.749.27
67788.5489.667710.69.13
67688.6889.7567610.459.02
67588.8389.9567510.38.92
67488.9890.1367410.138.82
67389.1190.36739.978.75
67289.2690.466729.818.72
67189.3890.556719.688.7
67089.4790.596709.558.72
66989.5490.576699.438.75
66889.6190.586689.358.8
66789.6290.566679.288.87
66689.690.476669.228.95
66589.5790.416659.189.03
66489.5290.346649.179.12
66389.4990.256639.169.19
66289.4490.176629.189.28
66189.3790.086619.219.34
66089.3289.986609.289.39
65989.2589.886599.359.42
65889.1489.786589.429.44
65789.0589.676579.59.44
65688.9389.576569.589.43
65588.8989.526559.659.38
65488.8589.466549.719.32
65388.7989.476539.769.23
65288.7789.476529.799.12
65188.889.556519.819.01
65088.8189.586509.818.89
64988.989.696499.788.76
64888.9889.776489.738.65
64789.0589.876479.678.52
64689.1589.986469.68.43
64589.3590.126459.538.34
64489.4590.26449.448.27
64389.690.316439.348.22
64289.6390.46429.258.19
64189.7290.476419.168.2
64089.7690.476409.088.24
63989.7190.463998.33
63889.6890.276388.938.43
63789.6890.216378.98.58
63689.5990.036368.898.76
63589.5689.946358.98.95
63489.589.776348.959.13
63389.3289.586339.049.33
63289.1389.416329.149.53
63188.9589.216319.289.72
63088.7589.026309.449.91
62988.5988.826299.6210.08
62888.4488.676289.7910.22
62788.2788.516279.9910.34
62688.1288.3562610.1810.44
62587.9488.2462510.3710.5
62487.888.1462410.5610.52
62387.6488.1262310.7410.52
62287.4688.0662210.8910.49
62187.3488.0762110.9910.44
62087.3488.1562011.0810.37
61987.3588.2161911.1410.29
61887.4588.3461811.1610.19
61787.5688.4261711.1610.07
61687.6688.5861611.139.96
61587.7388.6961511.119.86
61487.8388.8561411.069.77
61387.8988.9661310.989.72
61287.9489.0461210.899.68
61188.0189.161110.799.68
61088.189.1561010.689.71
60988.1889.260910.579.74
60888.1989.2360810.499.78
60788.1989.2260710.419.84
60688.1989.2460610.379.91
60588.1289.1860510.3510.02
60488.0789.160410.3610.12
60388.0288.9960310.3810.22
60287.9688.9360210.410.3
60187.8888.8760110.4610.36
60087.8188.7960010.5210.4
59987.7488.7259910.6110.41
59887.6788.7159810.6910.38
59787.688.6859710.7710.33
59687.5588.6659610.8410.24
59587.5888.6759510.8810.14
59487.5488.6959410.910
59387.5488.7459310.899.84
59287.6288.8559210.859.67
59187.7688.9859110.789.5
59087.8889.1159010.79.33
58988.0489.2558910.619.18
58888.1889.3758810.499.05
58788.3389.5358710.358.92
58688.4989.6358610.198.84
58588.6389.7158510.048.81
58488.7289.735849.98.8
58388.8189.755839.778.84
58288.8489.735829.658.91
58188.8989.695819.599.01
58088.8589.615809.559.15
57988.7389.485799.559.31
57888.6289.365789.589.48
57788.5289.215779.659.66
57688.3989.035769.769.83
57588.2888.855759.889.98
57488.1288.6457410.0210.11
57387.9588.4757310.1710.2
57287.7888.3157210.3310.27
57187.6188.1957110.4910.32
57087.4488.0857010.6410.33
56987.3588.0356910.7910.32
56887.2687.9956810.9110.3
56787.2488.0356711.0210.26
56687.2688.0556611.0910.2
56587.2588.0556511.1310.14
56487.2888.1656411.1410.09
56387.388.2856311.1210.05
56287.3288.3456211.110.03
56187.388.3756111.0710.05
56087.2888.4156011.0410.09
55987.388.415591110.14
55887.3288.3855810.9810.25
55787.3188.3555710.9710.37
55687.2588.2955610.9810.48
55587.2188.2355511.0110.61
55487.1188.1655411.0410.75
55387.0188.0855311.1210.88
55286.9187.9955211.2110.97
55186.7287.8155111.3111.06
55086.6387.755011.4211.12
54986.5287.6254911.5311.13
54886.4587.5854811.6411.09
54786.3687.5454711.7311.03
54686.3487.5954611.810.93
54586.3787.6354511.8410.79
54486.487.7154411.8410.64
54386.4887.8654311.8110.48
54286.5787.9754211.7410.31
54186.6988.154111.6510.18
54086.888.2854011.5410.07
53986.9288.3853911.429.98
53887.0488.5353811.299.93
53787.1388.653711.169.91
53687.2588.6653611.049.93
53587.3588.6853510.939.96
53487.3888.6653410.8410.02
53387.3188.5753310.7810.11
53287.2588.4653210.7510.22
53187.288.2753110.7610.33
53087.0888.1153010.8110.44
52986.9387.9552910.8810.52
52886.8287.8152810.9710.58
52786.7187.6552711.0710.6
52686.6687.6252611.1810.59
52586.6487.5952511.2610.56
52486.5887.5952411.3410.52
52386.5587.6152311.3910.46
52286.5387.6452211.4210.41
52186.5387.6552111.4310.35
52086.5687.7352011.4310.31
51986.5687.7551911.4110.3
51886.5687.7851811.3910.3
51786.5787.7451711.3710.35
51686.687.7451611.3610.43
51586.687.7151511.3510.55
51486.5587.6551411.3610.69
51386.4587.5451311.410.83
51286.3487.451211.4710.98
51186.287.2351111.5611.11
51086.0287.0451011.6711.22
50985.8786.8950911.7911.32
50885.7286.7950811.9211.39
50785.5986.750712.0511.43
50685.586.6950612.1611.42
50585.4586.7150512.2511.39
50485.486.7950412.3111.32
50385.4186.8150312.3511.24
50285.4786.8850212.3511.14
50185.5386.9650112.3311.06
50085.687.0450012.2910.99
49985.6387.149912.2410.94
49885.787.1649812.1810.93
49785.7587.1849712.1210.93
49685.7687.249612.0810.96
49585.7387.1749512.0411.02
49485.6787.0949412.0211.08
49385.6386.9849312.0211.15
49285.6386.949212.0511.22
49185.5686.8149112.0711.26
49085.4786.7849012.1111.29
48985.3986.7148912.1711.3
48885.3186.6348812.2211.3
48785.2486.5748712.2711.28
48685.2586.5948612.311.23
48585.2186.5848512.3211.17
48485.2186.5748412.3311.12
48385.2686.6748312.3111.06
48285.386.7448212.2811.01
48185.3286.8148112.2610.99
48085.2686.8348012.2310.99
47985.2286.847912.2111.02
47885.1886.7147812.2111.09
47785.1186.5947712.2211.18
47685.0686.5247612.2511.27
47584.9986.4347512.311.35
47484.8986.3447412.3511.44
47384.7786.2347312.4211.51
47284.6886.1547212.511.55
47184.686.0447112.5911.57
47084.5285.8747012.6611.59
46984.4485.8246912.7211.58
46884.485.7946812.7611.57
46784.3685.7646712.7911.57
46684.3285.7846612.8311.56
46584.385.8446512.8411.55
46484.2885.8646412.8511.55
46384.2685.8746312.8711.58
46284.2285.8846212.911.63
46184.1985.8146112.9411.69
46084.0685.746012.9911.77
45983.9485.6245913.0211.83
45883.8485.5445813.0711.89
45783.8185.4945713.1311.95
45683.7885.4245613.1812.01
45583.7185.3545513.2312.04
45483.6885.3145413.2712.05
45383.6285.2745313.312.07
45283.5785.2345213.3412.07
45183.5285.1945113.3812.08
45083.4285.1845013.4112.08
44983.3485.1344913.4512.07
44883.2785.1344813.512.07
44783.2385.1344713.5412.1
44683.1185.0744613.612.12
44582.9985.0244513.6512.15
44482.9284.9844413.712.17
44382.8784.9344313.7412.21
44282.8484.9144213.7812.24
44182.884.8544113.812.26
44082.7684.8144013.8112.27
43982.7384.7843913.812.27
43882.784.7643813.812.27
43782.6484.743713.7912.24
43682.5284.6343613.812.23
43582.4684.5643513.8112.21
43482.3784.5243413.8512.18
43382.384.5143313.912.17
43282.284.4843213.9412.15
43182.1184.4343113.9812.13
43082.0784.4543014.0112.15
4298284.442914.0112.19
42881.9984.3842814.0112.27
42781.9384.2442714.0112.36
42681.8384.1342614.0412.48
42581.6883.9342514.0412.61
42481.5683.842414.0912.73
42381.3583.6342314.1712.83
42281.0783.4242214.3112.93
42180.8883.2542114.4713.01
42080.6783.1342014.6313.05
41980.448341914.8113.11
41880.2882.9741814.9813.15
41780.1382.9141715.1313.19
41679.9882.9141615.2313.25
41579.882.8641515.2813.29
41479.7482.8641415.313.36
41379.6282.8341315.3113.41
41279.5782.8741215.3313.44
41179.4282.841115.3713.46
41079.3282.7541015.4213.42
40979.1582.7140915.4713.33
40878.9582.6740815.5413.22
40778.7882.6140715.613.1
40678.6182.6140615.6312.96
40578.5182.5640515.6112.85
40478.5682.6240415.5112.76
40378.6182.6440315.4112.74
40278.6482.6140215.2712.78
40178.5882.4640115.1412.88
40078.5182.2240015.0813.02
39978.3181.8939915.0513.16
39878.0181.5439815.1413.28
39777.6481.239715.3113.38
39677.3380.9639615.5113.45
39576.9980.7739515.7713.5
39476.6880.6839416.0213.57
39376.480.5539316.2113.68
39276.0380.3739216.3613.87
39175.7180.239116.4814.14
39075.3879.9739016.5814.39
38975.0179.7138916.714.65
38874.6179.4638816.8614.84
38774.1779.2338717.0714.93
38673.8279.0938617.3214.91
38573.579.0638517.5314.78
38473.2879.1238417.7514.57
38373.0779.2638317.8514.34
3827379.4738217.7814.13
38172.9979.638117.5913.99
38073.0479.6438017.3113.89
37973.0779.5537916.9913.87
37872.9379.2937816.7313.85
37772.6678.9337716.5813.87
37672.2778.4937616.5513.81
37571.8578.0637516.6113.7
37471.3677.7137416.7513.62
37370.9877.4537316.8913.61
37270.5577.1537216.9713.76
37170.2176.7837117.0114.07
37069.8976.3937017.0514.49
36969.4575.8536917.1715.02
36868.7775.2736817.3415.53
36767.9774.5636717.6815.91
36667.1373.9736618.1216.09
36566.3573.536518.5916.16
36465.6373.2436419.0216.05
36365.0173.136319.3515.99
36264.6273.0536219.4815.88
36164.472.9936119.4215.8
36064.2172.8436019.315.74
35964.172.6235919.115.65
35863.7872.2635818.9115.47
35763.4871.9435718.8315.16
35663.1271.6835618.7514.74
35562.8571.5535518.6714.33
35462.4271.2635418.4614.12
35362.0470.7735318.1514.11
35261.670.1335217.8314.32
35161.1269.1735117.5814.77
35060.4968.2235017.4715.27
34959.667.1134917.6215.82
34858.6366.134817.9816.27
34757.6565.334718.4916.6
34656.7164.7634619.116.82
34555.9564.3534519.5717.09
34455.3664.0234419.9417.41
34354.6963.5834320.2217.73
34254.0663.0234220.4217.94
34153.5762.6234120.6417.9
34052.962.1534020.8217.61
33952.3461.7533920.8917.14
33851.8961.4733820.816.55
33751.6161.1933720.5215.99
33651.3960.8333619.9615.54
33551.0160.133519.3215.35
33450.4959.1233418.7515.4
33349.757.9533318.3615.59
33248.6356.6533218.1415.86
33147.4455.2233118.1616.28
33046.1753.7633018.3916.83
32944.7552.1832918.7517.5
32843.2550.5332819.1518.23
32741.5848.6332719.5418.9
32639.5346.5132620.0219.37
32537.3344.1832520.4619.57
3243541.7932420.8519.47
32332.4739.1832321.1219.09
32229.643632221.1618.47
32126.4432.1632121.0217.79
32022.8327.6332020.7617.07
31918.7822.5331920.3416.46
31814.4617.1731819.7116
31710.2612.0231719.0915.86
3166.467.4831618.4615.98
3153.524.0231518.0716.42
3141.551.831417.8817.14
3130.450.5231317.7818.01
312-0.06-0.0631218.0519.01
311-0.15-0.1531118.5619.96
310-0.010.0131019.2820.73
3090.120.1530920.0221.3
3080.130.1630820.7821.54
3070.080.1130721.3121.37
3060.060.0830621.6520.69
3050.050.0730521.5919.8
3040.050.0630421.1118.87
3030.050.0630320.3418.17
3020.050.0530219.417.74
3010.050.0530118.5917.66
3000.050.0530018.0217.86
12
1
12
No.1
No.2
No.3
No.4
No.5
30mm
30mmm
150mm
測定ポイント(透過率・反射率)
Center
1
12
10m
Crystal(250Ω/□)
1
As-depo
After Anneal
λ(nm)
%T
Crystal Film
As-depo
After Anneal
λ(nm)
%R
Crystal Film
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキ高透過率(200、400Ω/□)のサンプル作成 コウトウカリツサクセイ
100113-1
KeywordAimCore、タッチパネル。
<ハード条件> ジョウケン
フィルム客先支給基材(東山、両面クリアHC、125μm) キャクサキシキュウキザイヒガシヤマリョウメン
張力150N、成膜MR温度:常温 チョウリョクセイマクオンドジョウオン
脱ガス ダツMR
BMBDC BMB
Nb2O55inch*18inch Normal Mag, DC-Pulse
SiO2130*510mm DL AC
ITOSnO2:3wt%、強磁場、DC-Pulse キョウジバ
<プロセス条件> ジョウケン
到達圧力 トウタツアツリョク9.8×10-4Pa(巻取室) マキトシツ
7.6×10-4Pa(成膜室) セイマクシツ
脱ガス ダツ80℃×1m/min
BMBAr:500sccm, 1000V, 0.02A
Nb2O5Ar:300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ
SiO2Ar:300sccm、O2:76sccm、Power8kw、D.Rate:520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ
ITOAr:200sccm、O2:2.5sccm、Power:2.5kw、D.Rate:250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ
<条件表> ジョウケンヒョウ
SiO2Nb2O5SiO2ITO
No膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド
11005.22500.351712101.2200Ω/□狙い ネラ
210052500.35740.91252400Ω/□狙い ネラ
単位:Å、m/min Pass数 タンイスウ
<結果> ケッカ
ロールで提出のため未確認。 テイシュツミカクニン
<サンプル概要> ガイヨウ
<結論> ケツロン
特に問題なし。 トクモンダイ
1
12
No.1
No.2
No.3
No.4
No.5
30mm
30mmm
150mm
測定ポイント(透過率・反射率)
Center
1
12
No1(200Ω/□)
No2(400Ω/□)
10m
10m
AimCoreサンプリング
<今回の目的> コンカイモクテキ
目的 モクテキ予備テスト ヨビ
100112-1
KeywordAimCore、タッチパネル。
<ハード条件> ジョウケン
フィルムPET100μmに客先支給基材を貼り付け キャクサキシキュウキザイハツ
張力100N、成膜MR温度:常温 チョウリョクセイマクオンドジョウオン
脱ガス ダツMR
BMBDC BMB
Nb2O55inch*18inch Normal Mag, DC-Pulse
SiO2130*510mm DL AC
ITOSnO2:3wt%、強磁場、DC-Pulse キョウジバ
<プロセス条件> ジョウケン
到達圧力 トウタツアツリョク6×10-4Pa(巻取室) マキトシツ
7.5×10-4Pa(成膜室) セイマクシツ
脱ガス ダツ80℃×0.5m/min
BMBAr:500sccm, 1000V, 0.02A
Nb2O5Ar:300sccm、75sccm、Power4.0kw、D.Rate71Åm/min、酸化物モード0.45Pa サンカブツ
SiO2Ar:300sccm、O2:76sccm、Power8kw、D.Rate:520Åm/min、710V設定、遷移モード、0.45Pa セッテイセンイ
ITOAr:200sccm、O2:2.5sccm、Power:2.5kw、D.Rate:250Åm/min、バルブ全開、272V、13.03A、0.13Pa ゼンカイ
<条件表> ジョウケンヒョウ
SiO2Nb2O5SiO2ITO
No膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド膜厚 マクアツ速度 ソクド
71005.22500.351712101.2
62050.7*2L*L*L*L*L*L*L*L*L*L*L*L*L*L*L*
51500.496.572879514896.313933635396.613988042396.081062975796.477675519695.884910551896.311047714396.170059935696.373881587896.199811798696.374980034496.122837675496.335072287396.221352789296.41626332
42500.35740.91252a*a*a*a*a*a*a*a*a*a*a*a*a*a*a*
32050.7*2-0.1167124516-2.2567558914-2.2991041196-1.7428532495-1.5685947801-1.3158039758-1.1608365007-1.1224912533-1.2568622561-0.7988897512-1.0890985039-0.5639658795-0.731045105-0.8579575004-1.0665735054
21500.4b*b*b*b*b*b*b*b*b*b*b*b*b*b*b*
12050.7*25740.91321.90.46644885140.48914643360.15241817530.1564843484-0.49645336840.1016554096-0.7267350688-1.5818876128-1.484904385-1.519083889-1.2804733274-1.3799148687-1.3168042454-1.3701765105-1.2578424745
単位:Å、m/min Pass数 タンイスウ
No7No6No5No4No3No2No1
<結果> ケッカBaseABABABABABABAB
Rs%THazeB*80091.8285.8486.2685.9586.2486.6187.3385.5286.0786.4786.5387.187.1386.6486.98
NoSiO2Nb2O5SiO2ITOABABABAB79992.2586.1986.4986.3486.4886.9587.5585.7486.286.9386.9687.0187.2287.0587.06
Base************79891.7985.3986.2285.9285.9586.4787.1985.4585.8486.0386.4986.8787.0786.586.64
710025051721018618891.692.60.50.60.490.1579791.6685.986.0485.6986.2286.7387.2485.7986.0586.8186.8287.287.0586.8287.29
620519319291.192.30.50.70.16-0.5079692.2886.3386.5286.4786.7686.5687.6686.3886.6687.5687.3187.5287.4586.8387.15
515019319790.491.90.60.70.10-0.7379592.5186.6386.5385.9786.9587.288.0585.9786.5986.9287.3387.2287.6787.1387.75
42505741253793869192.20.50.7-1.58-1.4879492.3885.7286.3186.2986.4986.8287.7785.8986.1986.5186.7486.9687.2987.0687.34
320538541290.992.20.60.7-1.52-1.2879392.0886.6886.2686.1986.6787.2487.6686.0186.6787.1787.4387.5287.7187.0187.06
215038240290.7920.60.7-1.38-1.3279292.586.2886.9286.6687
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