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Eagle III — Micro-EDXRF System
Eagle System SchematicEagle System Schematic
XRF AdvantagesXRF Advantages
Non-destructive: No beam damage or coating of sample
Minimal Sample Preparation:• conductivity not required• sample shape can be irregular
Low Vacuum (~ 100 mTorr) or No Vacuum (Air)
Navigation by Optical Microscope
Detection limits improve: 10x or better (vs. SEM-EDS)
X-rays are penetrating (microns to millimeters)
Advantages to EDS (Matt’s addition)Advantages to EDS (Matt’s addition)
Cheaper to add EDS to a microscope than to buy an XRF system
Orders of magnitude better image quality• CCD camera in XRF has magnification of 150 – 200X• Resolution comparable to XRF: about 10 nm• SEM image quality can be orders of magnitude better
Smaller analytical volume• One order of magnitude always• Another order of magnitude if you can live with lower voltage
Non-Destructive TestingNon-Destructive Testing
10x Eagle Video (B/W)
100x Eagle Video (color)Small Fracture in Diamond Table
? Glass-Filled ?
Small Fracture in Diamond Table? Glass-Filled ?
* Rh Tube* Aperture/Rh filter
Conclusion: Yes!Conclusion: Yes!
“As Delivered” Sample Analysis“As Delivered” Sample Analysis
Chemical Residues from suspected drug lab
X-ray Excitation minimizes sample preparation
Qualitative answer in < 2 minutes
High SensitivityHigh Sensitivity
Reduced background
Eagle System SchematicEagle System Schematic
Standard features• Rh or Mo tube (40kV, 40W)• 300µm monocapillary• Video: 10× colour; 100× colour (plus 2× digital zoom)• Sapphire™ 80 mm2 Si(Li) detector• Genesis 2000 (Windows XP)• Vision32 version 4 software (patented FP and
Comb32)
Configuration — Standard Eagle IIIConfiguration — Standard Eagle III
Configuration — Eagle III - OPTIONSConfiguration — Eagle III - OPTIONS
Options• 100µm monocapillary in lieu of the 300µm• collimators (1 & 2mm)• manually interchangeable filters (for collimator only)• 40kV, 20W Cr-anode X-ray tube• 50 kV, 50W X-ray tube (Mo, Rh or W anodes)• 30 mm2 Si(Li) detector• rotation table OR sample backlighting• LineScan, Mapping & Image processing software
Sample Illumination: White LEDsSample Illumination: White LEDs
Directionally adjustable LED arrays
Individual arrays for both Low- & High-mag image views
Individual light output adjustment to both arrays at both magnification views
Low-mag
High-mag
$20 banknote (US)
Color Low-Magnification Image (single)Color Low-Magnification Image (single)
$20 banknote (US)
Color Low-Magnification Image (montage)Color Low-Magnification Image (montage)
Hi-Magnification Image - Montage 5×5Hi-Magnification Image - Montage 5×5
Hi-Magnification Image - Montage 3×3Hi-Magnification Image - Montage 3×3
Hi-Magnification Image (Single) + Digital ZoomHi-Magnification Image (Single) + Digital Zoom
Normal (100×) Digital Zoom (2× “normal”)
Blue security-fibre in banknote
Transmission Sample BacklightingTransmission Sample Backlighting
Reflective lighting Transmission lighting
Fine “Hi-Purity” Silica particles
Transmission Sample BacklightingTransmission Sample Backlighting
Transmission lighting (Low Mag View)
Transmission lighting (High Mag View)
Si(Li) Detector propertiesSi(Li) Detector properties
Active area(mm2)
Be(coated)
window
Processing TC(µsec)
Countrate(cps)
Resolution @MnKa (eV)
30nominal
8µm
35 5000 ≤145
10 15000 ≤165
80nominal
12µm
35 5000 ≤155
10 15000 ≤185
100,000cps processing capabilityAbsolute intensities: I30 ≈ I80× 55%
30mm2
80mm2
NaK MgK AlK SiK
500 700 900 1100 1300 1500 1700 1900 (eV)
Glass sample (srm620)Spectra normalised to CaK (3690eV)
Detector’s relative low energy performancesDetector’s relative low energy performances
Si(Li) CoolingSi(Li) Cooling
Standard: Liquid Nitrogen• 30 mm2 or 80 mm2
• 5 L dewar• ≥ 3 day hold time• Detector can be allowed to warm when not in
use. Detector High Voltage bias is switched off when detector warms.
Capillary X-ray OpticsCapillary X-ray Optics
“Total” Reflection of X-rays inside glass capillary
c = f(1/E)
Incident X-Ray Spectral Distribution(Modified Excitation Spectrum)Incident X-Ray Spectral Distribution(Modified Excitation Spectrum)
Multilevel Sample AnalysisMultilevel Sample Analysis
Filter BenefitsFilter Benefits
Improve Limits of Detection
Make analysis possible
Remove Tube Characteristic Lines
Reduce Bremsstrahlung in limited region
Eliminate Bragg Diffraction Peaks in limited region
This is accomplished by …
Example: Ni FilterExample: Ni Filter
High Sensitivity Region
Useful Region
Ni Absorption Edge
Filter Band Pass
Example: Ni Filter – Improve Limits of Detection Example: Ni Filter – Improve Limits of Detection
“Vision” Software: Modes of Operation “Vision” Software: Modes of Operation
Manual point to point
Automated multiple point, lines or matrices
Analyze within an area and add spectra together
Line Scan (generates a plot)
Elemental Imaging and Spectral Mapping
“Vision” Software: Applications“Vision” Software: Applications
Qualitative Analysis (what elements and where)
Quantification:• Fundamental Parameter Modeling Quantification
without standards and with type standard(s) {Patented}• Semi-empirical quantification with type standards
“Vision” Software: Applications (cont’d)“Vision” Software: Applications (cont’d)
Coating thickness• FP modeling• FP modeling with standards correction
Spectral Match (Known alloys - ID unknown)
Line Scan
Elemental Imaging and Spectral Mapping
Image Manipulation and Overlay
Manual Control and AnalysisManual Control and Analysis
Automated Multiple Point AnalysesAutomated Multiple Point Analyses
Navigate to Feature
Save Coordinates in Stage Table
Automated Multi-Point Analysis: Automated Multi-Point Analysis:
Example: Foreign Particulates
Foreign Particulates in SilicaForeign Particulates in Silica
Transmission lighting (Low Mag View)
Transmission lighting (High Mag View)
FP “Standardless” Analysis: Particle 1FP “Standardless” Analysis: Particle 1
Particle 1
Element: Wt%
Cr (K) 18.88
Mn (K) 0.44
Fe (K) 69.47
Ni (K) 11.21
Particle 1 = Stainless Steel
FP “Standardless” Analysis: AccuracyFP “Standardless” Analysis: Accuracy
Bulk Compositional Standard: Stainless 310
Element: Measured Wt% Given Wt% % Error
Si(K) 0.53 0.51 3.9
Cr(K) 24.97 24.88 0.4
Mn(K) 1.44 1.39 3.6
Fe(K) 53.03 52.8 0.4
Ni(K) 19.7 19.6 0.5
Mo(K) 0.32 0.23 39.1
Total 100 99.41
Note: Measured with Poly-capillary lens
Foreign Particulates in SilicaForeign Particulates in Silica
Particle “2” Particles “3” and “4”
Foreign Particulates in SilicaForeign Particulates in Silica
Particle 2
Particle 1
“Stainless” Steels Same Alloy
Foreign Particulates in SilicaForeign Particulates in Silica
Particle 3
Particle 4
Silica particles with impurities
Multi-Point Analysis: Chemical DistributionMulti-Point Analysis: Chemical Distribution73
.24
72.7
72.1
7
71.6
3
71.0
9
70.5
6
70.0
2
45.82
45.28
44.75
44.21
43.67
43.14
42.6
Y Position (mm)X Position (mm)
86.1
85.69
85.28
84.86
84.45
84.04
83.63
83.22
82.81
46
.77
46
.36
45
.95
45
.53
45
.12
44
.71 44
.3
43
.89
43
.48
Y Position (mm)
X Position (mm)
• Automated Matrix Point CollectionAutomated Matrix Point Collection• Data ported into ExcelData ported into Excel
Spectral Mapping DefinitionSpectral Mapping Definition
Collect and save XRF spectrum at each map pixel
Database correlating each spectrum to position
(X, Y)
Spectral Mapping: Search and Use of DataSpectral Mapping: Search and Use of Data
Spectral Display:• Point by point• Summation of selected region or total map• Display of Linear Distributions
Return to Sample using Map for collection of spectrum with improved statistical significance
Quantitative mapping
Spectral Mapping: Spectral Mapping:
Mapping Examples
Elemental Spatial Distribution Maps: PaperElemental Spatial Distribution Maps: Paper
Mg Map Al Map Fe Map
• Generation of BMP Elemental Maps
Fe X-rays penetrate paper
Spatial Distribution Maps: Facial TissueSpatial Distribution Maps: Facial Tissue
• Tissue masked with carbon tape for Si-free zone• Mapping region 15.6 mm x 11.3 mm
Spatial Distribution Maps: Facial TissueSpatial Distribution Maps: Facial Tissue
• Recall spectra from mapped pixels
• Hot Si spots hide low-level Silicone coverage
Spatial Distribution Maps: Facial TissueSpatial Distribution Maps: Facial Tissue
• 3 individual color logarithmic scales (NIST)
• Low level Silicone distribution exposed in Green
Quantitative Mapping: Geological SampleQuantitative Mapping: Geological Sample
• Sedimentary rock
• Epoxy-embedded “puck” used to make thin sections
• Map area defined by 5x5 Hi-Mag montage
Map Image: Total XRF counts in each map pixel
Quantitative Mapping: Geological SampleQuantitative Mapping: Geological Sample
FeK Intensity Fe2O3 Wt%
Quantitative Mapping: Geological SampleQuantitative Mapping: Geological Sample
SiK Intensity SiO2 Wt%
Multi-Field Mapping: Geological SampleMulti-Field Mapping: Geological Sample
• 7 adjacent High Mag Camera FOV
• Map more layers in shorter time
• Maps are stitched together in SW utility while adjusting map intensities
Spectral Mapping - Bone Fossilization Spectral Mapping - Bone Fossilization
Fe
Na
K
Si
P
Map Image Overlays: Bone Fossilization Map Image Overlays: Bone Fossilization
Fe – Red
K – Blue
Si – Yellow
P – Gray
Na - Green
Metal Analysis: Coins (Non-Destructive)Metal Analysis: Coins (Non-Destructive)
* Rare Coin (2 Reichsmark - 1927?)
* Pixels: 64 x 50 Map* Dwell time: 0.3 s/pixel* Total time ~ 20 minutes
Conclusion:
Counterfeit Coin
Conclusion:
Counterfeit Coin
Eagle ApplicationsEagle Applications
Glass, Ceramics (inhomogeneity, inclusions, particles)
Metal alloys (inhomogeneity, particles, wire filament)
Inorganic contaminants, residues, deposits (ex. Corrosion)
Inorganic additives polymers, paints, inks
Inclusions in plastics, “light element” materials
Coating thickness and distribution of coating thickness
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