Bosch BME680 Environmental Sensor - System Plus Consulting · o MEMS Process & Fabrication Unit...

21 rue la Noue Bras de Fer44200 NANTES - FRANCE +33 2 40 18 09 16 info@systemplus.fr www.systemplus.fr

Bosch BME680Environmental SensorMEMS report by Audrey LAHRACHJuly 2017

Table of Contents

Overview / Introduction 3

o Executive Summary

o Reverse Costing Methodology

Company Profile 6

o Bosch Sensortec

o i-Blades SmartCase Teardown

o Supply Chain

Physical Analysis 15

o Synthesis of the Physical Analysis 16

o Package 18

View & Dimensions

Opening

Wire Bonding Process

Cross-Section

o ASIC Die 30

ASIC Die View & Dimensions

ASIC Delayering & Main Blocs

ASIC Die Process

ASIC Die Cross-Section

ASIC Die Process Characteristic

o MEMS Humidity & Pressure Die 45

MEMS Die View & Dimensions

MEMS Die Cross-Section

MEMS Pressure & Temperature Process

MEMS Pressure & Temperature Characteristics

MEMS Humidity Process

MEMS Humidity Characteristics

o MEMS Gas Sensor 69

MEMS Die View & Dimensions

MEMS Die Process

MEMS Die Cross-Section

MEMS Die Process Characteristic

o Physical Comparison 86

Bosch Environmental Sensor Evolution

Comparison with ams Gas Sensor

Sensor Manufacturing Process 95

o ASIC Die Front-End Process & Fabrication Unit

o MEMS Process & Fabrication Unit

o Final Test & Packaging Fabrication unit

Cost Analysis 116

o Synthesis of the cost analysis 117

o Yields Explanation & Hypotheses 119

o ASIC Component 121

Die Front-End Cost/Probe Test, Thinning & Dicing

ASIC Component Cost

Sensor Die Cost

o LGA Packaged Component 137

LGA Packaging Cost

Back End: Final Test

Component Cost

Selling Price 142

Company services 147

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile & Supply Chain

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

About System Plus

Executive Summary

This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and selling priceof the Bosch BME680 Environmental Sensor.

Bosch’s BME680 environmental sensor is the evolution of its BME280 environmental sensor, adding gas sensor functionality.Assembled in an 8-pin, metal-lid 3.0mm x 3.0mm x 0.95mm land grid array package, this System-in-Package integrates a digitalhumidity, pressure, temperature sensor and a separate gas sensor. It is equipped with only two MEMS dies and anamplification application-specific integrated circuit, the same number of dies as the previous BME280 device, but with anadditional feature. Bosch has integrated humidity, pressure and temperature sensors on one single MEMS die, using a newtechnology for the humidity sensor. The BME680 can detect a broad range of gases, including volatile organic compounds,using a smaller gas sensor die compared to competitors like ams.

This ‘combo’ sensor shows Bosch's control of sensor integration, with technologies 100% internally developed andmanufactured. The MEMS pressure sensor is manufactured with Bosch’s Advanced Porous Silicon Membrane process,integrating the flexible pressure membrane and temperature diodes on a silicon substrate with the humidity sensor.

The device is a real System-in-Package, with a combination of four sensors in one small package, mixing wire bonding and flip-chip connections. An exhaustive package analysis is performed in the report.

The report includes deep technological and cost analyses of the BME680, and a technical comparison with Bosch’senvironmental sensors, the BMP280 and BME280 devices. Also, it features a comparison with the ams/Cambridge CMOSSensors gas sensor.

Overview / Introduction

Physical Analysis

o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/

Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison

Cost Analysis

About System Plus

Package Views & Dimensions

Package:

o Type: Metal lid LGA 8-pads

o Dimensions: 3 x 3 x 0.95mm

o Pitch: 0.8mm3 mm

o Marking: 68ECC

350 µm

Physical Analysis

Cost Analysis

About System Plus

Package Cross-Section - Overview

Cross-Section Plane

Physical Analysis

Cost Analysis

About System Plus

ASIC View & Dimensions

Physical Analysis

Cost Analysis

About System Plus

ASIC Process – Technology Node

Physical Analysis

Cost Analysis

About System Plus

MEMS Humidity & Pressure View & Dimensions

Physical Analysis

Cost Analysis

About System Plus

Humidity Sensor – Cross-Section

Physical Analysis

Cost Analysis

About System Plus

MEMS Gas View & Dimensions

Physical Analysis

Cost Analysis

About System Plus

MEMS Gas Sensor Cross-Section

Physical Analysis

Cost Analysis

About System Plus

Bosch Environmental Sensor Evolution – Pressure Die

Physical Analysis

Cost Analysis

About System Plus

Comparison – Gas Sensor

Physical Analysis

Cost Analysiso Summaryo Supply Chaino Yieldso ASIC Die Costo MEMS Pressure/

Temperature/ Humidity Die Cost

o MEMS Gas Die Costo Packaging Costo Back-end Costo Component Cost

About System Plus

ASIC Front-End Cost

Physical Analysis

About System Plus

Package Cost

Physical Analysis

About System Plus

BME680 Component Cost

Physical Analysis

Cost Analysis

Selling Price Analysiso Definitions of Priceo Manufacturer Financial

Ratioso Manufacturer Price

About System Plus

BME680 Estimated Selling Price Evolution

Physical Analysis

Cost Analysis

About System Pluso Company serviceso Related reportso Feedbackso Contacto Legal

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

MEMS & SENSORS• Status of the MEMS Industry 2017• Gas Sensor Technology and Market

PATENT ANALYSIS - KNOWMADE

MEMS• Miniaturized Gas Sensors Patent Landscape Analysis

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

Related Reports

MEMS & SENSORS• Relative Humidity Sensors Technology and Cost Review• Cambridge CMOS Sensor (ams) CCS801• Bosch Sensortec BME280• AMS AV-MLV-P2 – Gas Sensor• STMicroelectronics HTS221

COMPANYSERVICES

Physical Analysis

Cost Analysis

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>40 reports per year)

Costing Tools

Trainings

Physical Analysis

Cost Analysis

Contact

Headquarters21 rue La Noue Bras de Fer44200 NantesFRANCE+33 2 40 18 09 16sales@systemplus.fr

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 82llevenez@systemplus.fr

America Sales OfficeSteve LAFERRIEREPhoenixUSAlaferriere@yole.fr

www.systemplus.fr

Asia Sales OfficeTakashi ONOZAWATokyoJAPANonozawa@yole.fr

Mavis WANGGREATER CHINAwang@yole.fr

NANTESHeadquarter

FRANKFURT/MAINEuropa Sales Office

LYONYOLE HQ

TOKYOYOLE KK

GREATER CHINAYOLE

PHOENIXYOLE Inc.

KOREAYOLE

Bosch BME680 Environmental Sensor - System Plus Consulting · o MEMS Process & Fabrication Unit...

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