Embed Size (px)
Citation preview
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 1
21 rue la Noue Bras de Fer44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr
Bosch BME680Environmental SensorMEMS report by Audrey LAHRACHJuly 2017
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 2
Table of Contents
Overview / Introduction 3
o Executive Summary
o Reverse Costing Methodology
Company Profile 6
o Bosch Sensortec
o i-Blades SmartCase Teardown
o Supply Chain
Physical Analysis 15
o Synthesis of the Physical Analysis 16
o Package 18
View & Dimensions
Opening
Wire Bonding Process
Cross-Section
o ASIC Die 30
ASIC Die View & Dimensions
ASIC Delayering & Main Blocs
ASIC Die Process
ASIC Die Cross-Section
ASIC Die Process Characteristic
o MEMS Humidity & Pressure Die 45
MEMS Die View & Dimensions
MEMS Die Cross-Section
MEMS Pressure & Temperature Process
MEMS Pressure & Temperature Characteristics
MEMS Humidity Process
MEMS Humidity Characteristics
o MEMS Gas Sensor 69
MEMS Die View & Dimensions
MEMS Die Process
MEMS Die Cross-Section
MEMS Die Process Characteristic
o Physical Comparison 86
Bosch Environmental Sensor Evolution
Comparison with ams Gas Sensor
Sensor Manufacturing Process 95
o ASIC Die Front-End Process & Fabrication Unit
o MEMS Process & Fabrication Unit
o Final Test & Packaging Fabrication unit
Cost Analysis 116
o Synthesis of the cost analysis 117
o Yields Explanation & Hypotheses 119
o ASIC Component 121
Die Front-End Cost/Probe Test, Thinning & Dicing
ASIC Component Cost
o MEMS Humidity & Pressure Die 125
Die Front-End Cost/Probe Test, Thinning & Dicing
Sensor Die Cost
o MEMS Humidity & Pressure Die 131
Die Front-End Cost/Probe Test, Thinning & Dicing
Sensor Die Cost
o LGA Packaged Component 137
LGA Packaging Cost
Back End: Final Test
Component Cost
Selling Price 142
Company services 147
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 3
Overview / Introductiono Executive Summaryo Reverse Costing
Methodologyo Glossary
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Executive Summary
This full reverse costing study has been conducted to provide insight on technology data, manufacturing cost and selling priceof the Bosch BME680 Environmental Sensor.
Bosch’s BME680 environmental sensor is the evolution of its BME280 environmental sensor, adding gas sensor functionality.Assembled in an 8-pin, metal-lid 3.0mm x 3.0mm x 0.95mm land grid array package, this System-in-Package integrates a digitalhumidity, pressure, temperature sensor and a separate gas sensor. It is equipped with only two MEMS dies and anamplification application-specific integrated circuit, the same number of dies as the previous BME280 device, but with anadditional feature. Bosch has integrated humidity, pressure and temperature sensors on one single MEMS die, using a newtechnology for the humidity sensor. The BME680 can detect a broad range of gases, including volatile organic compounds,using a smaller gas sensor die compared to competitors like ams.
This ‘combo’ sensor shows Bosch's control of sensor integration, with technologies 100% internally developed andmanufactured. The MEMS pressure sensor is manufactured with Bosch’s Advanced Porous Silicon Membrane process,integrating the flexible pressure membrane and temperature diodes on a silicon substrate with the humidity sensor.
The device is a real System-in-Package, with a combination of four sensors in one small package, mixing wire bonding and flip-chip connections. An exhaustive package analysis is performed in the report.
The report includes deep technological and cost analyses of the BME680, and a technical comparison with Bosch’senvironmental sensors, the BMP280 and BME280 devices. Also, it features a comparison with the ams/Cambridge CMOSSensors gas sensor.
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 4
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Package Views & Dimensions
Package:
o Type: Metal lid LGA 8-pads
o Dimensions: 3 x 3 x 0.95mm
o Pitch: 0.8mm3 mm
3 m
m0
.95
mm
o Marking: 68ECC
350 µm
Package Top View©2017 by System Plus Consulting
Package Side View©2017 by System Plus Consulting
Package Bottom View©2017 by System Plus Consulting
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 5
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Package Cross-Section - Overview
Cross-Section Plane
Package Cross-Section – Optical Overview©2017 by System Plus Consulting
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 6
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
ASIC View & Dimensions
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 7
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
ASIC Process – Technology Node
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 8
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
MEMS Humidity & Pressure View & Dimensions
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 9
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Humidity Sensor – Cross-Section
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 10
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
MEMS Gas View & Dimensions
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 11
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
MEMS Gas Sensor Cross-Section
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 12
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Bosch Environmental Sensor Evolution – Pressure Die
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 13
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
o Synthesiso Packageo Package Cross-Sectiono ASICo MEMS Pressure/
Temperature/ Humidityo MEMS Gaso Bosch Evolutiono Cambridge Comparison
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Plus
Comparison – Gas Sensor
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 14
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysiso Summaryo Supply Chaino Yieldso ASIC Die Costo MEMS Pressure/
Temperature/ Humidity Die Cost
o MEMS Gas Die Costo Packaging Costo Back-end Costo Component Cost
Selling Price Analysis
About System Plus
ASIC Front-End Cost
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 15
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysiso Summaryo Supply Chaino Yieldso ASIC Die Costo MEMS Pressure/
Temperature/ Humidity Die Cost
o MEMS Gas Die Costo Packaging Costo Back-end Costo Component Cost
Selling Price Analysis
About System Plus
Package Cost
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 16
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysiso Summaryo Supply Chaino Yieldso ASIC Die Costo MEMS Pressure/
Temperature/ Humidity Die Cost
o MEMS Gas Die Costo Packaging Costo Back-end Costo Component Cost
Selling Price Analysis
About System Plus
BME680 Component Cost
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 17
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysiso Definitions of Priceo Manufacturer Financial
Ratioso Manufacturer Price
About System Plus
BME680 Estimated Selling Price Evolution
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 18
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Pluso Company serviceso Related reportso Feedbackso Contacto Legal
MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT
MEMS & SENSORS• Status of the MEMS Industry 2017• Gas Sensor Technology and Market
PATENT ANALYSIS - KNOWMADE
MEMS• Miniaturized Gas Sensors Patent Landscape Analysis
REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING
Related Reports
MEMS & SENSORS• Relative Humidity Sensors Technology and Cost Review• Cambridge CMOS Sensor (ams) CCS801• Bosch Sensortec BME280• AMS AV-MLV-P2 – Gas Sensor• STMicroelectronics HTS221
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 19
COMPANYSERVICES
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 20
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Pluso Company serviceso Related reportso Feedbackso Contacto Legal
Business Models Fields of Expertise
Custom Analyses(>130 analyses per year)
Reports(>40 reports per year)
Costing Tools
Trainings
©2017 by System Plus Consulting | Bosch BME680 Environmental Sensor 21
Overview / Introduction
Company Profile & Supply Chain
Physical Analysis
Manufacturing Process Flow
Cost Analysis
Selling Price Analysis
About System Pluso Company serviceso Related reportso Feedbackso Contacto Legal
Contact
Headquarters21 rue La Noue Bras de Fer44200 NantesFRANCE+33 2 40 18 09 [email protected]
Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]
America Sales OfficeSteve [email protected]
www.systemplus.fr
Asia Sales OfficeTakashi [email protected]
Mavis WANGGREATER [email protected]
NANTESHeadquarter
FRANKFURT/MAINEuropa Sales Office
LYONYOLE HQ
TOKYOYOLE KK
GREATER CHINAYOLE
PHOENIXYOLE Inc.
KOREAYOLE
![FabriCatiOn OF pOrOuS al O -baSed CeramiCS uSing ...combustion technique in recent years [22-25]. however, fabrication of porous al2O3 al2O3-based ceramics from the combustion synthesized](https://img.pdfslide.us/doc/110x75/5fa15275a515cc735d31ea3f/fabrication-of-porous-al-o-based-ceramics-using-combustion-technique-in-recent.jpg)
