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Bio Mems persentation by Prachi Gadge From VNIT (NIT) Nagpur under supervision of RM patrikar vnit Nagpur..Cordinator Madhuri Borkar
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BIOMEMS
MEMS for biomedical applications
Guided by: Presented by:Prof. R. M. Patrikar Prachi Gadge
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What is MEMS?? Micro-Electro-Mechanical Systems (MEMS) Also known as Micro Systems Technology (MST) MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm) Integration of mechanical elements, sensors,
actuators, and electronics on a common silicon substrate through microfabrication technology.
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Biomems
Biomedical or Biological Micro Electromechanical Systems.
These are MEMS for biomedical applications
Heavily researched area with a wide variety of important biomedical applications.
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Definition
‘‘Devices or systems, constructed using techniques inspired from micro/nano-scale fabrication, that are used for processing, delivery, manipulation, analysis, or construction of biological and chemical entities’’.
-Bashir, Purdue univ, 2004
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Challenges for using biomems
Biocompatibility : suitability with living system should be analysed.
Testing : real life testing can’t be done without permission of government authorities
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Biomems fabrication
Conventional IC processes and materials.
Additional processes and materials used in MEMS
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Conventional IC processes
Photolithography Thermal oxidation, dopant diffusion
ion implantation LPCVD, PECVD Evaporation, sputtering, wet etching, Plasma etching, reactive-ion etching, ion milling
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Conventional materials.
Silicon silicon dioxide silicon nitride aluminum
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Additional Fabrication Processes
Anisotropic wet etching of single-crystal silicon; deep reactive-ion etching or DRIE x-ray lithography Electroplating low-stress LPCVD films thick-film resist (SU-8) spin casting and micromolding batch microassembly
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Additional Materials
Piezoelectric films such as PZT; Magnetic films such as Ni, Fe, Co, and rare
earth alloys High temperature materials such as SiC and
ceramics; Mechanically robust aluminum alloys; stainless Steel; platinum; gold; sheet glass; Plastics such as PVC and PDMS
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MEMS Integration
The following methods are used to integrate multiple patterned materials together to fabricate a completed MEMS device:
1. Surface micromachining
2. Bulk micromachining
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Surface Micromachining
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Bulk Micromachining
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Biomedical Microsensors
The majority of MEMS used in biomedical
applications act as sensors:
– Microsensors for Biomechanics – Microsensors for Pneumatic Biosystems– Microsensors for Chemical Biosystems– Microsensors for Electrical Biosystems
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Biomedical Microactuators
Micromanipulators Surgical Microinstruments Micropumps Microneedles Microvalves Microfilters
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Micromanipulators
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Surgical Microinstruments
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Microneedles
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Microvalves
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Micropumps
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Microfilters
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Future Directions
Integrated device for analysis of single cells.
Building cell by cell/tissue engineering using micro and nano fabrication techniques
Integrated diagnostics and therapeutics (drug delivery)
Tools for genetic manipulation of microorganisms and viruses – synthetic biology
Thank you!!
Questions???
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