Automation A Reischl

Future trends and challenges in PV production automation

Hybrid cluster production concepts focusing on the requirements of the process equipments

Innovation forum 11. Nov 2009

productronica 2009 Munich

1 11 November 2009 © SCHILLER AUTOMATION 2009

Dr. Andreas Reischl

Product Manager Photovoltaics

SCHILLER AUTOMATION GmbH & Co. KG

Sonnenbühl

the requirements of the process equipments

INTRODUCTION INLINECONCEPT BATCH

Company profile

■ Founded in 1978 by Sieghard Schiller

■ 100% family-owned

■ 280 employees & 52 M€ turnover 2008

■ Certified quality management DIN ISO 9001

■ Management board

• Stefan Schiller

• Karl-Heinz Bahnmüller

11 November 2009 © SCHILLER AUTOMATION 20092

• Karl-Heinz Bahnmüller

• Martin Speidel

• Hans-Peter Hennig

• Herbert Höhn 39,7%

Photovoltaics Cristalline

MicroelectronicsPhotovoltaics Thin Film

Services

SCHILLER Automation –

know how incorporated in our Thin Film PV solutions

Semiconductor Flat Panel Display Microelectronics

Handling of Glass Substrates

Introduction: our experience

TF Photovoltaics

Inline Concepts

TF Process Automation

Data Tracking

Logistic Concepts

Cleanroom

Stocker Management

15/12/09

upon these experience we have based our concept

11 November 2009

Outline

■ Introduction:

� Trends and challenges in PV production

� Our concept based on requirements

■ Inline logistics concept for FAB automation

Thin Film Solar FAB Automation

• Inline logistics schematic

• Logistics components

• Strength and weakness

■ Batch logistics concept

• Batch Logistics schematic

• Logistics components

• Strength and weakness

■ Summary & Outlook

Introduction: challenges

What can be done by the industry:

■ Standardization

■ Process control

■ Scaling production

More concrete on the manufacturing side:

■ Higher yields

■ Higher throughput

Developments driven by costs to reach grid parity

Maximal utilization of the high CAPEX utilizationproductivity&higher

likeSEMI, VDMA, SECS/GEM

APC, MES

Go Big – dilute fixed costs

■ Higher throughput

■ Higher uptime

� and therefore cost effective

This means on the automation side:

■ Integrated automation and logistic

■ Flexibility for optimization

■ Fast ramping

� Collaboration between supplier and manufacturer

■ Integrated facilities

� Area space utilization: manufacturing & administrative

� Supply materials: materials, power, gas & liquids

Challenge: <1 $/Watt

Maximal utilization of the high CAPEX process equipments

�Decrease cycle times

utilizationproductivity&higher

Advance logistics and automation concepts

15 December 200911 November 2009

Introduction: trends

Output year concept example

20 - 40 MW 2006 - 2007 inlineSCHILLER BackEndStandard CR cell line

60 - 75 MW 2007 - 2008inline junction / batch cluster

SCHILLER FrontEndBatch cluster cell production

Reduce cost by clever scaling: higher utilization Trend: Go Big!

60 - 75 MW 2007 - 2008batch cluster Batch cluster cell production

120 - 150 MW 2008 - 2009 batch cluster SCHILLER FrontEnd

~ 500 MW > 2010 hybrid batch X-Lines SCHILLER

11 November 2009

Introduction: our concept

■ Focus on requirements of process equipments, can be

• Batch or inline processing

• Times: cycle time, maintenance time, MTBF, …

• Buffering: before and / or after process, I/O

• Environment: temperature, clean room, …

• Orientation: front in/out, sunny side up, short side leading

Automation a process between processes serving their requirements

• Orientation: front in/out, sunny side up, short side leading

■ Focus on production plans

• Fast projecting, fast ramp-up to mass production

• Flexibility of production: # products, engineering lots, dummies …

• Scalability: increase in production volume

■ Focus on cost of ownership

• Maximal utilization of costly process equipments

Automation the key technology in mass production

Concepts

Thin Film Solar FAB automation

→ Inline concept

→Batch concept

Process A Process B

Euklid: Any two points can be joined by a straight line.

11 November 2009

Concept: inline overview BE

■ Handling of substrates via

• logistics automation and

• Interface automation components

• Data handling with common data base

Logistic Automation

Interface Automation

Process Equipment

contacting Edge isolation

Foil lay-up

Data Tracking / Line Controller

marriagelaminationEdge trimming

QC sorterJunction box setting

11 November 2009

Contact-ing

Edge Isolation

FoilLay-up

MarriageLamination

Concept: inline BE

possible layout details of automation

logistics

Lamination

EdgeTrim-ming

TapingJunction

Box QC Sorter

Centering

Barcode

Buffer

I/O port

Concept: inline logistics

• Conveyor unit

• Corner turn unit

automation components

Logistic Automation

Process Equipment

• Corner turn unit

• Corner transfer unit

Concept: inline logistics

■ Buffer 100 substrates

■ Overhead logistics:

Logistics automation:

buffer

Logistic Automation

Process Equipment

■ Overhead logistics: possible to pass underneath

■ Optional cooling

■ Optional sensors

■ ….

Metallization Line

Screen

ScreenPrintingStation 3

Tester & Sorter

Laser forEdge Isolation

Typical inline example CR

Firing Furnace

Option:Accu / Buffer

Dryer forPrintingStations

Single line with multiple lanes

can reach up to 30 MW

Six connected equipments:

Uptime limited 0.98^6 = < 89%

11 November 2009

SCHILLER Screen Printing

Typical inline process: now with multiple (x3) printing to increase throughput and utilization by diluting fixed costs!

11 November 2009

Concept: inline

Strength

■ Simple logistics

-> resulting in high uptime

-> and cost advantages

■ Work in process minimized

Weakness

■ No flexibility due to fixed interconnections

■ Maintenance access difficult -> long ways

■ Difficult to add additional process tools -> expansion nearly impossible

■ Work in process minimized

-> short substrate processing time (dwell time within production)

■ ….

■ Difficult to add additional process tools -> expansion nearly impossible without interruption of production

■ Buffer sizes and locations fixed

■ Downtime of equipment will immediately have impact on FAB throughput

■ …

Concepts

Thin Film Solar FAB automation

→ Inline concept

→ Batch concept

11 November 2009

Concept: batch overview FE

■ Equipments are connected by

• Common logistics automation and interface automation components

Pro Load TF

GEU+Pro Load TF

6-Axes Robot

Pro Load TF

6-Axes Robot

Man. Interface

GEU+Pro Load TF

Logistic System Single Substrates / Batch Transfer Concept

Data Tracking / Line Controller

11 November 2009

DepositionPIN

CLEA Metrology

NEWProcess

CCH Central Cassette Handler

ProLoad

GEU6-axis robotcassette

I/O port

buffer

Concept: batch schematic

Additional Processes

Metrology

Process

QCDepositionPIN

18 11 November 2009 © SCHILLER AUTOMATION 2009

NEWProcess

Logistics automation

→between clusters of process equipment

Concepts: logistics

Concept: cluster / batch

■ Transport of cassettes with 20 substrates

■ Maximal length of 240 meter � 120 MW

■ Serve left/right side on two levels (buffer)

■ Line Controller together with the cluster control ensures that the individual equipments are optimally utilized

Logistic Automation

Process Equipment

Cluster-Line production concept based on batch cassette logistic

Flexible

11 November 2009

Interface automation

→between process equipment and logistics

Concept: interface automation

Situation automation suppliers facing

■ Technology is defining substrate size

■ Technology is defining process equipment

■ Process equipment is defining requirements for interface automation:

• Single substrate / batch-type processing

• horizontal / vertical glass transfer

• Inline same loading / un- position

• Chemical processes / high temp processes

• High throughput machines

■ Depending on requirements different solutions for interface automation will be necessary

6-axis robots used for specific loading applications for process equipment

11 November 2009

Logistic Automation

Process Equipment

Application Samples

■ Loading of several Process Machines

ProcessLogistic Interface

• ProLoad handles one (or more) substrates

• Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance

• GEU can exchange substrates in < 8 seconds

Linear handling system for standard Process Equipment

■ Buffer Concepts

■ Logistic interface

11 November 2009

Glass exchange unit (GEU)

■ Substrate exchange

■ Substrate centering

Logistic Automation

Process Equipment

■ Substrate centering

■ Substrate rotation

■ Option:

• Quality control

• ID tracking

■ …

Concept: batch logistic

Interface portsRobots based handling

Robot to HQ cleaner

Input cleaner

Central cassette handling

ProLoad to GEU

BackEnd

Centrotherm: typical hybrid

■ Sputter

■ Contacting

■ Flasher

■ CdS

■ Oven

■ Selene

Source:

www.centrotherm.de

■ Selene

■ Laser

■ Washer

■ Laminator

Features

■ I-V measuring

■ IR testing during flasher operation to

detect hot spots, shunts, non-isolating

■ Color detection

■ Measuring of the print in detail

Tester & Sorter for cluster concepts

■ Throughput 3600 Wafer/h

■ Up-time > 95 %

■ Yield > 99,7 %

■ Max. 2x 55 bins

■ Measuring of the print in detail

■ Detection of all occurred defects as

holes, stains, cracks, saw grooves and

other outbreaks

■ Measuring of dimensions, symmetry,

angularity, etc.

■ EL (Electro Luminescence) measuring

prepared and as a special request

available

■ Max. 2x 55 bins

■ MTBF > 1000 h

■ MTTR < 4 h

■ State-of-the-art inspections

■ Minimized contact forces while flashing

Tester

Layout TS 3600

Dual lane cluster with min. cycle time

Sorter

HQE HQE HQE HQE

FlexpickerFlexpicker

Loader

Concept: batch

Strength

■ Expansion of production by additional or modified process tools possible

■ Easy service access to process tools

■ Flexibility of substrate routing

Weakness

■ More complex => higher costs compared to inline concept

■ WIP high => dwell time of substrates within production high

■ Flexibility of substrate routing

■ Buffer sizes and buffer locations flexible

■ Short downtimes have minimal impact on yield

■ Handling of Dummy Substrates possible

■ sophisticated logistic system

■ …

With maximal equipment utilization

Now area and facility optimization

�� Scaling multiples lines

480 MW integrated FAB

Multiple lines in one FAB

�Scaling effects on

Area utilization

Facility utilization

Source:

JPMorgan 2008

�G. Rauter Photovoltaics International 5th Edition

�Lower CAPEX / Capacity

�Higher utilization

�>20% improvements

Summary and outlook

Summary

■ Shown the Schiller FAB automation concept

■ Best concept consist of

• Maximal utilization of process equipment

• Most reliable during projecting phase, ramp-up and production

• Flexibility in production and engineering

• Scalability and maintainability• Scalability and maintainability

■ Best solution considering all costs

Outlook

■ Big FAB concepts scalability and synergy effects

■ Fully automated back-ends with minimal # operators

■ New logistics and automation concepts also for crystalline PV

■ ...

Thank you for your attention

Dr. Andreas Reischl

SCHILLER AUTOMATION GmbH & Co. KG

Pfullinger Strasse 58

72820 Sonnenbuehl-Genkingen

Germany

Tel +49 / 7128 / 386-5755

Fax +49 / 7128 / 386-299

info@schiller-automation.com

www.schiller-automation.com

Our profile

Company

■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business.

■ Our strength:

� Holistic consideration of all sorts of conceptual formulations

■ All from one source:

� Development

� Engineering

� Manufacturing

� Assembly

� Installation and start-up

� After sales support

■ SCHILLER is a 100% family-owned company.

Our company structure

Company

Company Management

Quality Management

Customer Center Engineering Production Internal Services

· Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS

· Project Management · Software Engineering / Document. · Manufacturing · Admin

· Customer Support · Research & Development · Assembly · Information Technology

Numbers & Facts

■ Foundation: 1978

■ Management:

� Stefan Schiller Managing Director

Company: facts & numbers

� Karl-Heinz Bahnmüller Customer Center

� Martin Speidel Engineering

� Hans-Peter Hennig Production/Internal Services

� Herbert Höhn Key Account Manager

■ Certification : DIN ISO 9001:2000

Our products

Company

SCHILLER is a leading supplier of production systems for manufacturing and handling of:

■ Microelectronics components, including power modules and controls & sensors for automotive applications

■ Photovoltaic products, including solar cell manufacturing and fab automation for thin-film solar cell manufacturing

film solar cell manufacturing

Moreover SCHILLER has know-how and experience in following fields:

■ Semiconductor products in all clean room classes

■ Flat panel displays

■ Data storage products

■ Smart card modules

Our references

Company

Our strengths –the people at SCHILLER

Company

■ ... with more than 2,500 man-years experience.

■ ... with analytical abilities/competency.

■ ... in interdisciplinary project teams.

■ ... with responsibility for costs, operations and target dates.

■ ... with passion for the common task.

■ ... create success!

Our core competences

Core Competences

Your benefit

■ Individual solutions

■ Proven modules

■ Automation solutions from one source

Core Competences

■ Lowest TCO

■ After Sales Service

■ Short start-up periode

■ Innovation

Our solutions –success story of our customers

■ Microelectronics, Automotive, Power Module

■ Photovoltaics

Solutions

■ Semiconductor

■ Flat Panel Display

■ Data Storage

■ Smart Cards

Photovoltaics

■ Customer specific automation systems for crystalline solar cell production

� Interlinking of process equipment

� Loading/Unloading of process equipment

� Customer specific QC lines

� Fully automatic stocker systems

Photovoltaics

■ Customer specific automation systems for thin film solar cell production

� Loading/Unloading of process equipment

� Modular Schiller 5 axes handling

� Modular Schiller 5 axes handling system for glass substrates

� Cassette station

� Cassettes for substrates

� Stocker systems for cassettes and single substrates

Automation A Reischl

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