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Short presentation of automation and logistic concept for PV thin and thick film solutions.
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Future trends and challenges in PV production automation
Hybrid cluster production concepts focusing on the requirements of the process equipments
Innovation forum 11. Nov 2009
productronica 2009 Munich
1 11 November 2009 © SCHILLER AUTOMATION 2009
Dr. Andreas Reischl
Product Manager Photovoltaics
SCHILLER AUTOMATION GmbH & Co. KG
Sonnenbühl
the requirements of the process equipments
INTRODUCTION INLINECONCEPT BATCH
Company profile
■ Founded in 1978 by Sieghard Schiller
■ 100% family-owned
■ 280 employees & 52 M€ turnover 2008
■ Certified quality management DIN ISO 9001
■ Management board
• Stefan Schiller
• Karl-Heinz Bahnmüller
11 November 2009 © SCHILLER AUTOMATION 20092
• Karl-Heinz Bahnmüller
• Martin Speidel
• Hans-Peter Hennig
• Herbert Höhn 39,7%
31,3%
17,8%
11,2%
Photovoltaics Cristalline
MicroelectronicsPhotovoltaics Thin Film
Services
INTRODUCTION INLINECONCEPT BATCH
SCHILLER Automation –
know how incorporated in our Thin Film PV solutions
Semiconductor Flat Panel Display Microelectronics
Handling of Glass Substrates
Introduction: our experience
© SCHILLER AUTOMATION 20093
TF Photovoltaics
Inline Concepts
TF Process Automation
Data Tracking
Logistic Concepts
Cleanroom
Stocker Management
15/12/09
upon these experience we have based our concept
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Outline
■ Introduction:
� Trends and challenges in PV production
� Our concept based on requirements
■ Inline logistics concept for FAB automation
Thin Film Solar FAB Automation
• Inline logistics schematic
• Logistics components
• Strength and weakness
■ Batch logistics concept
• Batch Logistics schematic
• Logistics components
• Strength and weakness
■ Summary & Outlook
11 November 2009 © SCHILLER AUTOMATION 20094
INTRODUCTION INLINECONCEPT BATCH
Introduction: challenges
What can be done by the industry:
■ Standardization
■ Process control
■ Scaling production
More concrete on the manufacturing side:
■ Higher yields
■ Higher throughput
Developments driven by costs to reach grid parity
Maximal utilization of the high CAPEX utilizationproductivity&higher
likeSEMI, VDMA, SECS/GEM
APC, MES
Go Big – dilute fixed costs
■ Higher throughput
■ Higher uptime
� and therefore cost effective
This means on the automation side:
■ Integrated automation and logistic
■ Flexibility for optimization
■ Fast ramping
� Collaboration between supplier and manufacturer
■ Integrated facilities
� Area space utilization: manufacturing & administrative
� Supply materials: materials, power, gas & liquids
© SCHILLER AUTOMATION 20095
Challenge: <1 $/Watt
Maximal utilization of the high CAPEX process equipments
�Decrease cycle times
utilizationproductivity&higher
means
Advance logistics and automation concepts
15 December 200911 November 2009
INTRODUCTION INLINECONCEPT BATCH
Introduction: trends
Output year concept example
20 - 40 MW 2006 - 2007 inlineSCHILLER BackEndStandard CR cell line
60 - 75 MW 2007 - 2008inline junction / batch cluster
SCHILLER FrontEndBatch cluster cell production
© SCHILLER AUTOMATION 20096
Reduce cost by clever scaling: higher utilization Trend: Go Big!
60 - 75 MW 2007 - 2008batch cluster Batch cluster cell production
120 - 150 MW 2008 - 2009 batch cluster SCHILLER FrontEnd
~ 500 MW > 2010 hybrid batch X-Lines SCHILLER
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Introduction: our concept
■ Focus on requirements of process equipments, can be
• Batch or inline processing
• Times: cycle time, maintenance time, MTBF, …
• Buffering: before and / or after process, I/O
• Environment: temperature, clean room, …
• Orientation: front in/out, sunny side up, short side leading
Automation a process between processes serving their requirements
• Orientation: front in/out, sunny side up, short side leading
■ Focus on production plans
• Fast projecting, fast ramp-up to mass production
• Flexibility of production: # products, engineering lots, dummies …
• Scalability: increase in production volume
■ Focus on cost of ownership
• Maximal utilization of costly process equipments
11 November 2009 © SCHILLER AUTOMATION 20097
Automation the key technology in mass production
INTRODUCTION INLINECONCEPT BATCH
Concepts
Thin Film Solar FAB automation
→ Inline concept
→Batch concept
© SCHILLER AUTOMATION 20098
→Batch concept
Process A Process B
Euklid: Any two points can be joined by a straight line.
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: inline overview BE
■ Handling of substrates via
• logistics automation and
• Interface automation components
• Data handling with common data base
Logistic Automation
Interface Automation
Process Equipment
contacting Edge isolation
Foil lay-up
© SCHILLER AUTOMATION 20099
Data Tracking / Line Controller
marriagelaminationEdge trimming
QC sorterJunction box setting
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Contact-ing
Edge Isolation
FoilLay-up
MarriageLamination
Concept: inline BE
possible layout details of automation
logistics
Lamination
EdgeTrim-ming
TapingJunction
Box QC Sorter
Centering
Barcode
Buffer
I/O port
11 November 200910 © SCHILLER AUTOMATION 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: inline logistics
• Conveyor unit
• Corner turn unit
automation components
Logistic Automation
Interface Automation
Process Equipment
11 November 2009 © SCHILLER AUTOMATION 200911
• Corner turn unit
• Corner transfer unit
INTRODUCTION INLINECONCEPT BATCH
Concept: inline logistics
■ Buffer 100 substrates
■ Overhead logistics:
Logistics automation:
buffer
Logistic Automation
Interface Automation
Process Equipment
11 November 2009 © SCHILLER AUTOMATION 200912
■ Overhead logistics: possible to pass underneath
■ Optional cooling
■ Optional sensors
■ ….
INTRODUCTION INLINECONCEPT BATCH
Metallization Line
Screen
ScreenPrintingStation 3
Tester & Sorter
Laser forEdge Isolation
Typical inline example CR
© SCHILLER AUTOMATION 200913
ScreenPrintingStation 1
ScreenPrintingStation 2
Firing Furnace
Option:Accu / Buffer
Dryer forPrintingStations
Single line with multiple lanes
can reach up to 30 MW
Six connected equipments:
Uptime limited 0.98^6 = < 89%
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
SCHILLER Screen Printing
© SCHILLER AUTOMATION 200914
Typical inline process: now with multiple (x3) printing to increase throughput and utilization by diluting fixed costs!
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: inline
Strength
■ Simple logistics
-> resulting in high uptime
-> and cost advantages
■ Work in process minimized
Weakness
■ No flexibility due to fixed interconnections
■ Maintenance access difficult -> long ways
■ Difficult to add additional process tools -> expansion nearly impossible
■ Work in process minimized
-> short substrate processing time (dwell time within production)
■ ….
■ Difficult to add additional process tools -> expansion nearly impossible without interruption of production
■ Buffer sizes and locations fixed
■ Downtime of equipment will immediately have impact on FAB throughput
■ …
11 November 2009 © SCHILLER AUTOMATION 200915
INTRODUCTION INLINECONCEPT BATCH
Concepts
Thin Film Solar FAB automation
→ Inline concept
→ Batch concept
© SCHILLER AUTOMATION 200916
→ Batch concept
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: batch overview FE
Inc
om
ing
Gla
ss
C
lea
nin
g
Fro
nt
Co
nta
ct
De
po
sit
ion
Ab
so
rbe
r D
ep
os
itio
n
Pa
tte
rnin
g #
2
Ba
ck
Co
nta
ct
De
po
sit
ion
Pa
tte
rnin
g #
3
Pa
tte
rnin
g #
1
QC
Me
tro
log
y A
rea
Clu
ste
rs
Pro
ce
ss
es
Eq
uip
me
nt
Au
tom
ati
on
■ Equipments are connected by
• Common logistics automation and interface automation components
© SCHILLER AUTOMATION 200917
Inte
rfa
ce
Au
tom
ati
on
Pro Load TF
GEU+Pro Load TF
6-Axes Robot
Pro Load TF
6-Axes Robot
6-Axes Robot
Man. Interface
GEU+Pro Load TF
GEU+Pro Load TF
Lo
gis
tic
A
uto
ma
tio
n
Logistic System Single Substrates / Batch Transfer Concept
Data Tracking / Line Controller
Da
taB
as
e
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
DepositionPIN
CLEA Metrology
NEWProcess
CCH Central Cassette Handler
ProLoad
GEU6-axis robotcassette
I/O port
buffer
LASER
BC
BC
Concept: batch schematic
LASER
LASER
Additional Processes
PINAN
Metrology
FC
Process
QCDepositionPIN
CCH
LASER
LASER
R
BC
BC
R R
FC
FC
FC
18 11 November 2009 © SCHILLER AUTOMATION 2009
NEWProcess
CCH
BE
INTRODUCTION INLINECONCEPT BATCH
Logistics automation
→between clusters of process equipment
Concepts: logistics
© SCHILLER AUTOMATION 200919 11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: cluster / batch
■ Transport of cassettes with 20 substrates
■ Maximal length of 240 meter � 120 MW
■ Serve left/right side on two levels (buffer)
■ Line Controller together with the cluster control ensures that the individual equipments are optimally utilized
Logistic Automation
Interface Automation
Process Equipment
© SCHILLER AUTOMATION 200920
Cluster-Line production concept based on batch cassette logistic
Flexible
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Interface automation
→between process equipment and logistics
Concept: interface automation
© SCHILLER AUTOMATION 200921 11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: interface automation
Situation automation suppliers facing
■ Technology is defining substrate size
■ Technology is defining process equipment
■ Process equipment is defining requirements for interface automation:
© SCHILLER AUTOMATION 200922
• Single substrate / batch-type processing
• horizontal / vertical glass transfer
• Inline same loading / un- position
• Chemical processes / high temp processes
• High throughput machines
■ Depending on requirements different solutions for interface automation will be necessary
6-axis robots used for specific loading applications for process equipment
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: interface automation
Logistic Automation
Interface Automation
Process Equipment
Application Samples
■ Loading of several Process Machines
ProcessLogistic Interface
• ProLoad handles one (or more) substrates
• Serves up to 4 processes from 6 cassettes over max. 12.5 meters distance
• GEU can exchange substrates in < 8 seconds
© SCHILLER AUTOMATION 200923
Linear handling system for standard Process Equipment
■ Buffer Concepts
■ Logistic interface
11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Concept: interface automation
Glass exchange unit (GEU)
■ Substrate exchange
■ Substrate centering
Logistic Automation
Interface Automation
Process Equipment
■ Substrate centering
■ Substrate rotation
■ Option:
• Quality control
• ID tracking
■ …
11 November 2009 © SCHILLER AUTOMATION 200924
INTRODUCTION INLINECONCEPT BATCH
Concept: batch logistic
Interface portsRobots based handling
Robot to HQ cleaner
Input cleaner
Central cassette handling
ProLoad to GEU
BackEnd
© SCHILLER AUTOMATION 200925 11 November 2009
INTRODUCTION INLINECONCEPT BATCH
Centrotherm: typical hybrid
■ Sputter
■ Contacting
■ Flasher
■ CdS
■ Oven
■ Selene
Source:
www.centrotherm.de
■ Selene
■ Laser
■ Washer
■ Laminator
11 November 2009 © SCHILLER AUTOMATION 200926
INTRODUCTION INLINECONCEPT BATCH
Features
■ I-V measuring
■ IR testing during flasher operation to
detect hot spots, shunts, non-isolating
cells
■ Color detection
■ Measuring of the print in detail
Tester & Sorter for cluster concepts
■ Throughput 3600 Wafer/h
■ Up-time > 95 %
■ Yield > 99,7 %
■ Max. 2x 55 bins
11 November 2009 © SCHILLER AUTOMATION 200927
■ Measuring of the print in detail
■ Detection of all occurred defects as
holes, stains, cracks, saw grooves and
other outbreaks
■ Measuring of dimensions, symmetry,
angularity, etc.
■ EL (Electro Luminescence) measuring
prepared and as a special request
available
■ Max. 2x 55 bins
■ MTBF > 1000 h
■ MTTR < 4 h
■ State-of-the-art inspections
■ Minimized contact forces while flashing
INTRODUCTION INLINECONCEPT BATCH
Tester
Layout TS 3600
Dual lane cluster with min. cycle time
11 November 2009 © SCHILLER AUTOMATION 200928
Sorter
HQE HQE HQE HQE
FlexpickerFlexpicker
Loader
INTRODUCTION INLINECONCEPT BATCH
Concept: batch
Strength
■ Expansion of production by additional or modified process tools possible
■ Easy service access to process tools
■ Flexibility of substrate routing
Weakness
■ More complex => higher costs compared to inline concept
■ WIP high => dwell time of substrates within production high
■ Flexibility of substrate routing
■ Buffer sizes and buffer locations flexible
■ Short downtimes have minimal impact on yield
■ Handling of Dummy Substrates possible
high
■ sophisticated logistic system
■ …
11 November 2009 © SCHILLER AUTOMATION 200929
With maximal equipment utilization
Now area and facility optimization
���� Scaling multiples lines
INTRODUCTION INLINECONCEPT BATCH
480 MW integrated FAB
Multiple lines in one FAB
�Scaling effects on
Area utilization
Facility utilization
11 November 2009 © SCHILLER AUTOMATION 200930
Source:
JPMorgan 2008
�G. Rauter Photovoltaics International 5th Edition
�Lower CAPEX / Capacity
�Higher utilization
�>20% improvements
INTRODUCTION INLINECONCEPT BATCH
Summary and outlook
Summary
■ Shown the Schiller FAB automation concept
■ Best concept consist of
• Maximal utilization of process equipment
• Most reliable during projecting phase, ramp-up and production
• Flexibility in production and engineering
• Scalability and maintainability• Scalability and maintainability
■ Best solution considering all costs
11 November 2009 © SCHILLER AUTOMATION 200931
Outlook
■ Big FAB concepts scalability and synergy effects
■ Fully automated back-ends with minimal # operators
■ New logistics and automation concepts also for crystalline PV
■ ...
INTRODUCTION INLINECONCEPT BATCH
Thank you for your attention
Dr. Andreas Reischl
SCHILLER AUTOMATION GmbH & Co. KG
Pfullinger Strasse 58
11 November 2009 © SCHILLER AUTOMATION 200932
72820 Sonnenbuehl-Genkingen
Germany
Tel +49 / 7128 / 386-5755
Fax +49 / 7128 / 386-299
www.schiller-automation.com
INTRODUCTION INLINECONCEPT BATCH
Our profile
Company
■ In almost 30 years, SCHILLER evolved into one of the most competent automation companies in the microelectronics business.
■ Our strength:
� Holistic consideration of all sorts of conceptual formulations
11 November 2009 © SCHILLER AUTOMATION 200933
■ All from one source:
� Development
� Engineering
� Manufacturing
� Assembly
� Installation and start-up
� After sales support
■ SCHILLER is a 100% family-owned company.
INTRODUCTION INLINECONCEPT BATCH
Our company structure
Company
Company Management
Quality Management
11 November 2009 © SCHILLER AUTOMATION 200934
Customer Center Engineering Production Internal Services
· Sales / Marketing · Mech./Electr. Engineering · Materials Administration · Controlling / PPS
· Project Management · Software Engineering / Document. · Manufacturing · Admin
· Customer Support · Research & Development · Assembly · Information Technology
INTRODUCTION INLINECONCEPT BATCH
Numbers & Facts
■ Foundation: 1978
■ Management:
� Stefan Schiller Managing Director
Company: facts & numbers
11 November 2009 © SCHILLER AUTOMATION 200935
� Karl-Heinz Bahnmüller Customer Center
� Martin Speidel Engineering
� Hans-Peter Hennig Production/Internal Services
� Herbert Höhn Key Account Manager
■ Certification : DIN ISO 9001:2000
INTRODUCTION INLINECONCEPT BATCH
Our products
Company
SCHILLER is a leading supplier of production systems for manufacturing and handling of:
■ Microelectronics components, including power modules and controls & sensors for automotive applications
■ Photovoltaic products, including solar cell manufacturing and fab automation for thin-film solar cell manufacturing
11 November 2009 © SCHILLER AUTOMATION 200936
film solar cell manufacturing
Moreover SCHILLER has know-how and experience in following fields:
■ Semiconductor products in all clean room classes
■ Flat panel displays
■ Data storage products
■ Smart card modules
INTRODUCTION INLINECONCEPT BATCH
Our references
Company
11 November 2009 © SCHILLER AUTOMATION 200937
INTRODUCTION INLINECONCEPT BATCH
Our strengths –the people at SCHILLER
Company
■ ... with more than 2,500 man-years experience.
■ ... with analytical abilities/competency.
11 November 2009 © SCHILLER AUTOMATION 200938
■ ... in interdisciplinary project teams.
■ ... with responsibility for costs, operations and target dates.
■ ... with passion for the common task.
■ ... create success!
INTRODUCTION INLINECONCEPT BATCH
Our core competences
Core Competences
11 November 2009 © SCHILLER AUTOMATION 200939
INTRODUCTION INLINECONCEPT BATCH
Your benefit
■ Individual solutions
■ Proven modules
■ Automation solutions from one source
Core Competences
11 November 2009 © SCHILLER AUTOMATION 200940
■ Lowest TCO
■ After Sales Service
■ Short start-up periode
■ Innovation
INTRODUCTION INLINECONCEPT BATCH
Our solutions –success story of our customers
■ Microelectronics, Automotive, Power Module
■ Photovoltaics
Solutions
11 November 2009 © SCHILLER AUTOMATION 200941
And
■ Semiconductor
■ Flat Panel Display
■ Data Storage
■ Smart Cards
INTRODUCTION INLINECONCEPT BATCH
Photovoltaics
■ Customer specific automation systems for crystalline solar cell production
� Interlinking of process equipment
� Loading/Unloading of process equipment
� Customer specific QC lines
11 November 2009 © SCHILLER AUTOMATION 200942
� Fully automatic stocker systems
INTRODUCTION INLINECONCEPT BATCH
Photovoltaics
■ Customer specific automation systems for thin film solar cell production
� Loading/Unloading of process equipment
� Modular Schiller 5 axes handling
11 November 2009 © SCHILLER AUTOMATION 200943
� Modular Schiller 5 axes handling system for glass substrates
� Cassette station
� Cassettes for substrates
� Stocker systems for cassettes and single substrates