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nova-fabrica-ltd documents
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FloTron X HR, High Resolution, OES, PEM, 2015
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OptaTron™ Optical Monitoring Systems, 2014 Datasheet
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OptaTron™ Optical Monitoring Systems, 2015
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FloTron X, PEM, OES, Reactive Gas Control, 2015
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FloTron Configuration Guide, 2015
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Reactive Magnetron Sputtering Technology for Industrial Large Area Processing
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Advanced Process Monitoring and Control: Stable and Repeatable Plasma-based Deposition Processes
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Reactive Magnetron Sputtering: Hardware (and Software) Improvements and Cost Reduction Strategies for Large Area Processing