e-kolawa documents

Amorphous Ta-Si-N diffusion barriers in Si/Al and Si/Cu metallizations
Documents Amorphous Ta-Si-N diffusion barriers in Si/Al and Si/Cu metallizations
Studies of Local Structure and Thermal Annealing Processes in Implanted Iron–Gadolinium Alloys by Conversion Electron Mossbauer Spectroscopy
Documents Studies of Local Structure and Thermal Annealing Processes in Implanted Iron–Gadolinium Alloys by Conversion Electron Mossbauer Spectroscopy
Microstructure of reactively sputtered oxide diffusion barriers
Documents Microstructure of reactively sputtered oxide diffusion barriers
Indium oxide diffusion barriers for Al/Si metallizations
Documents Indium oxide diffusion barriers for Al/Si metallizations
Reactive sputtering of RuO2 films
Documents Reactive sputtering of RuO2 films
Reactively sputtered indium oxide diffusion barrier
Documents Reactively sputtered indium oxide diffusion barrier