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Slide 2
Waheed Ahmad• PhD in Computer Science• Software designer at unit High Tech• TNO-ESI/ASML
Who are these guys
Olaf Donk• MSc. Artificial Intelligence
• Sr. Software designer at unit High Tech• Cordis Automation
Slide 3
Dutch industrial technology solutions and services provider since 1978
Over 1000 highly educated professionals, 20+ nationalities
Active in High Tech, Healthcare, Infrastructure, Transport, Energy and more…
High Tech has strong focus on the development of LVHCHM systems:
▪ Low Volume: series of 1 – 1000 products
▪ High Complexity: e.g. groundbreaking precision or operating in extreme conditions
▪ High Mix: state of the art technologies, combining a diversity of disciplines
(e.g. Mechatronics, Optics, Electronics)
▪ For example: wafer scanners, electron microscopes, interventional X-ray systems
ICT at a glance
Slide 4
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 6
• Key partnerships:
• Customer segments:• Companies that use MDE technology
• Companies that are developing LVHCHM machines
• Main value propositions:• Trained professionals on Attitude, Skills and Knowledge
• Organizing in-house training
• Reference projects / best practices
• Training material on technology and tooling
Model Driven Engineering – Overview @ICT
Slide 8
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 9
About ASML
Cyber-Physical Systems project
• World’s leading lithography machines
manufacturer.
• Lithography creates the image of chip
patterns on a wafer.
• An average lithography machine costs
around 32 million euros1.
• Involves a variety of disciplines, e.g.,
mechatronics, optics, physics, laser etc.
1 https://www.asml.com/asml/show.do?lang=EN&ctx=5869&rid=44696
Slide 10
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 11
Problem Statement
Increased productivity and accuracy is required
• Optimal processing and handling of a wafer
• Timing & throughput requirements
• Safety requirements
• Accuracy requirements
Performance prediction is a challenge
• Scalability
• Complicated/multidisciplinary
• Expensive
Slide 12
Problem Statement - Analysis
Requirements,
Specificationmodel
Formal Specification
in DSL
Schedule, timing
Code
an
aly
ze
de
sig
n s
pa
ce
exp
lora
tion
Slide 13
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 14
LoadRobot
IN OUTCOND DRILL
UnloadRobotResources
PeripheralsAction
Action
Transfer
Wafer Logistics Specification and Analysis Tool (WLSAT)
Slide 15
Why Graphical Editors?
• Most of the stakeholders are “non-software”
• Preference for graphical or table representation
• Huge models require graphical visualization
Wafer Logistics Specification and Analysis Tool (WLSAT)
Why Sirius?
• Available diagrams (diagram, tree, table) offer an equivalent replacement of existing documentation
• Natural fit into already used MDE stack
Slide 16
Structure of WLSAT
Wafer Logistics Specification and Analysis Tool (WLSAT)
Peripherals
Resources
Actions
Transfers
Logistics L
T T
A A A
L
XY CL
U
A A
C
A A
L D
DL ZR
A A A
D
A
T
CL
Slide 19
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 20
Do you recognize the need for layout tools?
How did you solve it?
• Eclipse Layout Kernel (ELK)
Improvements on layout
Resources
Actions
Peripherals
Transfers
Logistics
ELK GraphLayout
Algorithm
Custom Layout
Connector
Slide 22
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 23
• Sirius diagrams are persisted together with Xtext
• Not everything is a picture (but a lot is)
• Text is better for details
The power of Sirius and Xtext integration
Slide 24
Graphical models preserve natural representation for
• Directed graphs
• Sequences of actions
The power of Sirius and Xtext integration
Slide 25
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 26
• Model-driven environment and demonstrator
• Formally model logistics
• Replacement of the current specification documents
• Compute system throughput
• Visualize behavior and timing in terms of Gantt charts
• Successful application both in design phase and in troubleshooting production issues
• Sirius-based editors supported by
• textual editors
• layout
• backend algorithms
• Significant acceptance from stakeholders
Project Results
Slide 27
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 28
• Displaying Maps (key-value pairs)
• Master-slave widgets in properties view
• Currently implemented as diagrams
Improvement Ideas
Slide 29
• To delete a referred element, all references must explicitly be removed
• “Some” support for serialization
• Consumes most of the time in building a Sirius-based editor
Improvement Ideas
Slide 30
• Need for MDE
• Cyber-Physical Systems project
• Problem Statement
• Wafer Logistics Specification and Analysis Tool (WLSAT)
• Improvements on layout
• The power of Sirius and Xtext integration
• Project Results
• Improvement Ideas
• Future Steps
Agenda
Slide 31
• Generating documentation from models
• M2Doc will come in handy
• Utilization of enhanced properties view in Sirius 5.0
• Creating widgets from domain classes
• Reusing and extending properties view
• Wizards and dialogs
Future Steps
Monopoly’s original design
documentation
Slide 32
• Successful project
• Sirius editors leveraged adoption by domain experts
• Thanks to TNO-ESI, ASML and TU/e
• Sirius a definite yes!!
Summary