Overview of the SEMI International

Standards Program

July 2010v1

Venue, Location, Date

Outline

• SEMI - the Global Association

• Value of Standards

• SEMI International Standards Program

• How to participate

Venue, Location, Date

SEMI : The Global Association

SEMI products and services include:

• Expositions: SEMICON®, PV

• International Standards

• Market research & statistics

• Public policy/EHS

• Technical & Business Conferences

SEMI is the industry association serving the

manufacturing supply chains for the

microelectronic, display and photovoltaic

industries.

Hsinchu

Seoul Tokyo

Singapore

Beijing

San Jose

Austin

Brussels

Moscow

Washington DC

ShanghaiHsinchu

Berlin

Bangalore

Venue, Location, Date

High Profile SEMI Standards• Wafer Dimensions

• Metrics– Factory efficiency, equipment reliability, and availability

• Equipment Interface– SEMI Equipment Communication Standards (SECS)

– Generic Equipment Model (GEM)

• Environmental, Health and Safety– Safety for semiconductor (S2) and FPD (S26)

– Energy conservation (S23)

• 300 mm, 450 mm– Automated Material Handling Systems

• Photovoltaic– Materials, equipment communications

• Anti-counterfeiting / Product Authentication

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Why Standards?

• Cost reduction

• Improved supplier – customer

communication

• Allow focus on product differentiation

• Accelerate product development

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Economic Impact of Standards• US National Institute of Standards and Technology

(NIST) Study – Calibration, Standard Test Methods, and Software Standards

• $9.6 billion in benefits between 1996 and 2011

• Association Française de Normalisation (AFNOR) Study– Over 70% of companies participating in standardization reported

that it enabled them to anticipate future market requirements

• German Industry Study (DIN)– Standards contribute more to economic growth than patents and

licenses

• UK Department of Trade and Industry– Standards contribute £2.5 billion annually to economic growth in

the UK

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“The SEMI Standards Program provides an

ideal environment to share ideas, learn,

and develop interoperable solutions, so that

we can focus more of our resources on

innovation rather than integration."

Applied Materials

Venue, Location, Date

SEMI International Standards

Program History• Key Topics

– 1973• Silicon Wafers

– Late 1970’s• Chemicals and Gases

• Metrology

• Facilities

– Late 1980’s• Factory Automation

– Early 1990’s• Safety Guidelines

– 1994• 300mm

– 2007• Photovoltaics

– 2008• 450mm

• New Regions– 1973

• United States

– 1980’s• Japan

• Europe

– 1990’s• Taiwan

• Korea

– 2010• China

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The SEMI Standards Program Today

• All aspects of an automated fab are addressed

• Over 3,000 volunteer experts

– 20 global technical committees

– 200 task forces

• Committees active in major semiconductor, PV, and FPD

manufacturing regions

• Currently nearly 800 SEMI Standards and Safety

Guidelines available

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"The SEMI Standards Program provides

various opportunities to have open

discussions between device makers and

suppliers. Through these discussions,

industry experts can share their

experiences and information which leads

to increased production capacity and cost

savings."

Hynix

Venue, Location, Date

1980s – SEMI Equipment

Communications Standards (SECS)

• Prior to SECS, tools could not communicate with shop floor Manufacturing Execution Systems (MES)

• The Industry needed a standard as there were many different equipment and factory MES suppliers

• SECS standardized computer-to-computer communication between factory equipment and the shop floor MES

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1980s – SEMI Equipment

Communications Standards (SECS)

• SECS: huge reduction in cost of integrating equipment into the automated factory

• GEM further reduced cost of host-site software another 80% compared to pre-GEM SECS

• 300 mm standards with SECS are absolute requirements for all 300 mm IC fabs

• Given SEMI Factory Communications Standards, SEMATECH and SELETE developed "Compliance Testers"

• Impossible without SEMI standards

• Huge value to IC Fabs

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Environmental Health & Safety

• EHS Committee chartered in late 1980s

• First major success: SEMI S2-93

• Used by Intel as part of equipment pre-selection process for 200 mm Fab 10 in Ireland– Reduced start-up time for equipment by 2 weeks per

tool

– Intel estimates overall cost savings of approx. US$6 million for this fab

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Environmental Health & Safety -

Important Safety Guidelines• S23 (Energy Conservation)

– Formally requested through purchasing by at least 5 IDMs as of July 2008

– S23 programs being implemented by equipment suppliers

• S8 (Ergonomics)

• S22 (Safe Electrical Design)

• S26 (“S2 for FPD”)

• And of course, S2– The global equipment manufacturing safety guideline in the

industry

– A prime example of supplier/user collaboration to reduce risk and costs and foster an international mindset about equipment safety

– Very difficult to get a tool into a fab without S2 compliance

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SEMI Standards Program Today -

Organization• Program is guided by The Regulations

Governing SEMI Standards Committees, approved on an international basis

• Meetings for document development are conducted in North America, Japan, Europe, Korea, and Taiwan

• The frequency of teleconferencing and interactive web meetings is increasing, improving communication and reducing the need for travel

• Worldwide distribution of document drafts and ballots ensures global consensus

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Document Development Path

• Technology Trends

• Suppliers

• Users

• Other Stakeholders

INDUSTRY NEEDS

Use

Ballot

Submission

Ballot Distribution

Approval

Draft

(Task Force)

Idea to

Committee

Ballot

Voting /Tallying

Publishing

Ballot

Adjudication

Procedural

Review

Venue, Location, Date

SEMI Standards @ SEMICON West

2010

Task Force Meetings:Tuesday, 9am- 4pm and Wednesday, 9am–noon

(Marriott Marquis)

Highlights:Photovoltaic Transparent Conductive Oxide Workshop

Wednesday 9am- noon (Marriott Marquis)

Photovoltaic CommitteeWednesday, 1pm – 5pm (Marriott Marquis)P

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Exclusively Sponsored by:

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“SEMI has a long history of successful

standardization; this is why the SEMI Standards

Program is the preferred platform to develop the

standards needed to drive down PV cell

manufacturing cost.”

- Gerhard Rauter, COO, Q-Cells

Venue, Location, Date

GEM 300 Task Force

Monday, 1pm–6pm

(Marriott Marquis)

Data Quality Task Force

Monday, 3pm–6pm (Marriott Marquis)

Diagnostic Data Acquisition Task Force

Tuesday, 8am- noon (Marriott Marquis)

NA 450mm Shipping Box Task Force

Tuesday, 8am–noon (Marriott Marquis)

Int’l 450mm Physical Interfaces & Carriers Task

Force

Tuesday, 1pm–5pm (Marriott Marquis)

Fa

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mation SEMI Standards @ SEMICON West

2010

Venue, Location, Date

• 3D Interconnect Challenges and

Need for Standards

Tuesday 1pm–5pm (Marriott Marquis)

• Product Authentication Information Management (PAIM

III)

Wednesday 1pm – 5pm (Marriott Marquis)

• e-Manufacturing

Wednesday 1pm – 5pm (Marriott Marquis)

• Product and Equipment Time Metrics

Thursday 1pm – 5pm (Marriott Marquis)

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s Media Partner:

Exclusively Sponsored by:

SEMI Standards @ SEMICON West

2010

Venue, Location, Date

Anti-Counterfeiting TFThursday 9am–1pm(Marriott Marquis)

Securing Your Spares

Wednesday 10:30am-

11:30am

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g SEMI Standards @ SEMICON West

2010

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Get involved!Get your company’s support for Standards

participation, and register at

http://www.semi.org/standards

–Sign up for Standards Watch Newsletter

Establish ties with other region’s Technical

Committees and Task Forces

–Gather information on activities and trends

–Attend regional meetings

Use SEMI Standards

–Purchase a SEMIViews license

–Benefit from cost reduction

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SEMI Standards Regional

ContactsStandards HQ• James Amano

• Tonya Maudlin

Standards N. America• Paul Trio

• Susan Turner

• Ian McLeod

• Kevin Nguyen

Standards Korea• Eun-Jung Shim

Standards China• Tina Yu

Standards Europe• Carlos Lee

Standards Japan• Ken Okuda

• Akiko Yamamoto

• Hirofumi Kanno

• Chie Yanagisawa

Standards Taiwan• Leon Huang

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“The SEMI Standards Program continues to

be the best environment to sit down with

your industry technical peers, understand

common problems, and work towards

solutions that provide benefit to

everyone…while still allowing for individual

differentiation and competitive advantage."

Applied Materials

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Thank you!