Alumina thickness measurement

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Aluminum oxide and ALON measurement

Aluminum oxide (alumina) is widely used as a protective coating in various applications. Optical properties of alumina depend on the deposition conditions. Both thickness and optical constants of the alumina can be measured accurately using MProbe system. Below are several examples of alumina & ALON measurement.

1. Example 1 Alumina on glass slide

MProbe Vis system (400-1000nm wavelength range) was used for this measurement.

Fig. 1 Results of the alumina on glass measurement. Fit of the model to measured data. Thickness and R.I. of alumina are determined. Thickness: 1202nm (R.I. see Fig. 2)



Fig. 2. Measured R.I. of alumina (yellow) compared to a standard library alumina (red)



2. Example 2. Yttrium oxide/alumina on quartz substrate MProbe Vis system (400-1000nm wavelength range) was used for this measurement.

Fig. 3. Results of the Y2O3/Alumina/Quartz measurement. Fit of the model to measured data. Thickness Y2O3: 2535nm , Alumina: 938 nm


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3. Example 3. ALON/alumina on quartz

MProbe VisHR system (700-1000nm wavelength range) was used for this measurement.

Fig. 4. Raw reflectance spectrum of the ALON/Alumina/quartz sample

Fig. 5. Results of the measurement: ALON thickness-32 μm, Alumina thickness - 5.4 μm (additional interface layer 2.3 μm is also visible). Peak positions indicate layer thicknesses.

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Alumina thickness measurement