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The top documents tagged [substrate currents]
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VLSI Circuits ABM H Rashid Fabrication Patterning - Photolithography 1.Oxidation 2.Photoresist (PR) coating 3.Stepper exposure 4.Photoresist development
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ECE 7366 Advanced Process Integration Beyond Planar CMOS Dr. Wanda Wosik Text Book: B. El-Karek, “Silicon Devices and Process Integration” 1
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