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The top documents tagged [diffusion furnace]
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1.Introduction and application. 2.Dopant solid solubility and sheet resistance. 3.Microscopic view point: diffusion equations. 4.Physical basis for diffusion
220 views
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CHAPTER 8: THERMAL PROCESS (continued). Diffusion Process The process of materials move from high concentration regions to low concentration regions,
233 views
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Introduction and application. Dopant solid solubility and sheet resistance. Microscopic view point: diffusion equations. Physical basis for diffusion
39 views