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The top documents tagged [cd measurements]
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Metrology Roadmap 2000 Update EuropeAlec Reader (Philips) Wilfried Vandervorst (IMEC) Rudolf Laubmeier (Infineon) Rudolf Laubmeier (Infineon) JapanFumio
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Metrology Roadmap 2001 Update EuropeAlain Deleporte (ST) Ulrich Mantz (Infineon) Vincent Vachellerie (ST) Vincent Vachellerie (ST)JapanKorea Taiwan Henry
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International Technology Roadmap for Semiconductors Metrology Roadmap 2001 Update EuropeAlain Deleporte (ST)4/01 Alec Reader (Philips Analytical) Vincent
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