PowerPoint Presentation
High and Ultra High VacuumGroup Members:Md. Mohymenul Islam (PH
12004)Shaila Sharmin (PH 12006)
1Submitted To MD. Didarul Islam BhuyanAssistant ProfessorDept.
of PhysicsMBSTU
Content:IntroductionHigh Vacuum Ultra High VacuumPrinciple of
pumping systemTerminology used in vacuum technologyDiffusion
PumpRotary PumpTurbo PumpIon PumpPirani GaugePenning Gauge2
INTRODUCTION3
High Vacuum: High vacuum is vacuum where the mean free path of
residual gases is longer than the size of the chamber or of the
object under test. It usually requires multi-stage pumping and ion
gauge measurement.4High vacuum
FIGURE: High Vacuum
5Ultra High VacuumUltra High Vacuum : British and German
standards define ultra high vacuum as pressures below 10-7 Pa.
Ultra high vacuum requires backing the chamber to remove trace
gases and other special producers.
FIGURE: Ultra-High Vacuum
6
https://en.wikipedia.org/wiki/Vacuum_pump
7Pressure range (See note below)'Degree of
vacuum'Pascal(absolute mode)Pascal(absolute mode)1105 to 3103100
000 to 3 000low vacuum3103 to 110-13 000 to 0.1medium vacuum110-1
to 110-40.1 to 0.000 1high vacuum110-4 to 110-70.000 1 to 0.000 000
1very high vacuum110-7 to 110-100.000 000 1 to 0.000 000 000
1ultra-high vacuum (UHV)
