MEMS GyroscopeMEMS Gyroscope

ANKUSH WAWOO (33)ANKUSH WAWOO (33)

WHAT ARE MEMS GYROSCOPEWHAT ARE MEMS GYROSCOPE

• Your Description Goes Here

A gyroscope is

a device for

measuring or

maintaining

orientation.

FEW TERMSFEW TERMS

THE CORIOLIS EFFECTTHE CORIOLIS EFFECT

Vibrating structure gyroscopeVibrating structure gyroscope

• Piezoelectric gyroscopes• Wine-glass resonator• Cylindrical resonator

gyroscope (CRG)• Tuning fork gyroscope• Vibrating wheel gyroscope or

Disc resonator gyroscope (DRG)

TYPES

APPLICATIONSAPPLICATIONS

Disc Resonating Gyro Basics

Disc Resonating Gyro Basics

Operation Principle of the DRG

Operation Principle of the DRG

• Gyroscope is driven to resonate in-plane

• Electrodes sense deflection in outer ring sockets

• Electrodes actuate in inner ring sockets

• Circuits process the signal and feedback into the system

A vibrating object tends to continue vibrating in the same plane as its support rotates.

Coriolis Effect Coriolis Effect

• Coriolis acceleration (a) occurs if a resonating disc is perturbed

• Depends on velocities on the disc higher frequencies allow Coriolis acceleration to dominate centrifugal acceleration

• Coriolis acceleration is what the electrodes sense through change in capacitance

How Does the DRG Work?How Does the DRG Work?

• DC Source creates an electrostatic force that moves the disc

• Proper control of these electrodes can put the system into resonance

• Similarly, the sensing electrodes use gap changes to gauge system changes

Ideal GyroIdeal Gyro

• High-Q (energy dissipation)

• Large S/N ratio• Low-cost• Small (1 cm3)• Reliable• Requiring low power

AdvantagesAdvantages

• GRG has large sensing area compared to other gyros

• Easy to package• Multiple sensing and driving

electrodes can make it easier to operate and read

• MEMS gyroscopes desirable because they are lightweight and cheaper to produce

THANK YOU !!!