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ELECTON BEAM MACHENING
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Content• Introduction• Equipment/Setup• Process• Mechanism of material removal• How vacuum is created?• Process capabilities• Advantages• Disadvantages• Application
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Introduction - EBM• Electron beam machining (EBM) is a thermal material removal
process that utilizes a focused beam of high-velocity electrons to perform high-speed drilling and cutting.
• Used with high power density to machine materials.• The mechanism of material removal is primarily by melting
and rapid vaporization due to intense heating by the electrons • Also known as “Electro-optical-thermal process”.• Very high drilling rates are achievable.• Can machine almost any material.
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Equipment/Setup
High voltage supply to cathode
Cathode Cartridge
Bias grid
Anode
Port for vacuum gauge
Diffusion pump
Magnetic Lens
Illuminating system
Aperture
Telescope
Electromagnetic coils
Deflector coilsSlotted Disc
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Equipment/Setup
• Cathode Cartridge• Tungsten/Tantalum• High voltage is
applied• 2500’C• Thermo-ionic
emission of electrons (Vacuum)- thermally induced flow of electrons from surface.
• Negatively biased – repel the electrons
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Equipment/Setup
• Bias Grid• Highly negatively
biased• Controls the flow of
electrons.• To avoid the
divergence of the electrons and send them as a beam to the next step (anode)
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Equipment/Setup
• Anode• Positively biased
terminal• Due to the potential
difference b/w cathode and anode the electrons accelerates.
• Velocity is approx. half the velocity of light – passing through anode.
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Equipment/Setup
• Magnetic Lens• Same function as
that of any lens.• Concentrates the
beam of electrons.• Shape the beam.• Reduce the
divergence of the beam.
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Equipment/Setup
• Aperture• Capture the stray
electrons present near the frame.
• (Diverged low energy electrons.)
• Captured electrons are then set for obtaining a concentrated beam of electrons.
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Equipment/Setup
• Electromagnetic Lens
• Focuses the electron beam onto the workpiece.
• On a particular spot.
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Equipment/Setup
• Deflector coils• Deflect the electron
beam by small amount.
• Correct the beam in case of not getting proper hold-ship.
• Improve the shape of the machined holes.
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Equipment/Setup
• Illuminating system & Telescope
• Both are used simultaneously to align the electron beam with the workpiece.
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Equipment/Setup
• Slotted Disc• To avoid obstruction
of vapor of metal into the optical window of EBM.
• Allow Electron beam to pass but not the vapors/metal fumes to pass through it.
• Synchronized with the pulsed beam.
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How vacuum is created ?
DIFFUSION PUMP
Heater
Backing Pump
Boiler
Nozzle
Cooling Coils
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How vacuum is created ? Main element for creating the vacuum is DIFFUSION PUMP.
The oil diffusion pump is operated with an oil of low vapor pressure. Its purpose is to achieve higher vacuum.
Diffusion pump is essentially an oil heater. As the oil is heated the oil vapour rushes upward where gradually converging structure.
The nozzles change the direction of motion of the oil vapour and the oil vapour starts moving downward at a high velocity as jet.
Such high velocity jets of oil vapour entrain any air molecules present within the gun. (Due to the high momentum of oil jet air is removed)
This oil is evacuated by a rotary pump via the backing line.
Level of vacuum – 10-4 to 10-6 Torr
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Mechanism of material removal• As high voltage is applied across the Cathode filament ,
thermo-ionic emission of electrons takes place.• These Thermo-ionic electrons are replied by the cathode and
attracted by anode through the bias grid, electrons are accelerated to the half of the velocity of the light.
• These electron/beam of electron is shaped and focused with the help of series of magnetic and electromagnetic lenses.
• Finally the electron beam impinges the workpiece.• Upon impingement the kinetic energy of the electron is
absorbed by the workpiece which will result into heating, melting and vaporization – drilling.
• Spot size – 10 to 100 microns – high energy density
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Mechanism of material removal
Localized heating by focused electron beam
Gradual formation of hole
Auxiliary workpiece
Auxiliary workpiece
W/P W/P .
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Mechanism of material removal
Penetration till the auxiliary support
Removal due to high vapour pressure
Auxiliary workpiece
W/P
Auxiliary workpiece
W/P
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Advantages EBM provides very high drilling rates when small holes
with large aspect ratio are to be drilled.
Moreover it can machine almost any material irrespective of their mechanical properties. As it applies no mechanical cutting force, work holding and fixturing cost is very less.
Further for the same reason fragile and brittle materials can also be processed. The heat affected zone in EBM is rather less due to shorter pulses.
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Disadvantages
The primary limitations are the high capital cost of the equipment and necessary regular maintenance applicable for any equipment using vacuum system.
Moreover in EBM there is significant amount of non-productive pump down period for attaining desired vacuum.
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Application
1. Drilling
2. Perforating of sheet
3. Pattern generation (associated with integrated circuit fabrication)
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