Embed Size (px)
DESCRIPTION
Crystallography orientations of Silicon wafers ( and ) with different primary flats, the positions of planes, and the visualization of etching profiles in crystal level.
Citation preview
Crystallography Orientation
Omid Adljuy([email protected])
Faculty of Electrical and Computer EngineeringUniversity of Tabriz, Tabriz, Iran
Dec. 2011
2
ContentsBrief Review of Si Crystallographic PlanesPossible Types of Si Wafers
<100> Wafer ( Primary Flat : <110> )Different Views<111> PlanesMask Openings for Etching More Details in Crystal Level
<110> Wafer ( Primary Flat : <100> )Different Views<111> PlanesMask Openings for Etching More Details in Crystal Level
Dr Steve BeebyMEMS Course
3
Crystal Planes of Silicon
x
y
z
x
y
z
x
y
z
(100) (110) (111)
4
Possible Types of Si Wafers<100> Wafer
Primary Flat : <100>Primary Flat : <110>Primary Flat : <111>
<110> WaferPrimary Flat : <100>Primary Flat : <110>Primary Flat : <111>
<111> WaferPrimary Flat : <100>Primary Flat : <110>Primary Flat : <111>
dfgOKOK
dfgOKOKOK
dfg
OK
5
<100> Wafer ( Primary Flat : <110> )
6
<100> Wafer Top View
7
<100> Wafer Side View
8
<100> Wafer
9
<100> Wafer <111> Planes
10
<100> Wafer <111> Planes
11
<100> Wafer <111> Planes
12
<100> Wafer <111> Planes
13
<100> Wafer <111> Planes
14
<100> Wafer Etched Feature
15
<100> Wafer Etched Feature
16
<100> Wafer Detailed View
17
<100> Wafer Detailed View
18
<100> Wafer Detailed View
19
<100> Wafer Detailed View
20
<110> Wafer ( Primary Flat : <100> )
21
<110> Wafer Front View
22
<110> Wafer
23
<110> Wafer <111> Planes
24
<110> Wafer <111> Planes
25
<110> Wafer <111> Planes
26
<110> Wafer <111> Planes
27
<110> Wafer <111> Planes
28
<110> Wafer <111> Planes
29
<110> Wafer <111> Planes
30
<110> Wafer <111> Planes
31
<110> Wafer <111> Planes
32
<110> Wafer <111> Planes
33
<110> Wafer <111> Planes
34
<110> Wafer <111> Planes
35
<110> Wafer Etched Feature
36
<110> Wafer Etched Feature
37
<110> Wafer Etched Feature
38
<110> Wafer Etched Feature
39
<110> Wafer Detailed View
40
<110> Wafer Detailed View
41
<110> Wafer Detailed View
42
<110> Wafer Detailed View
43
<110> Wafer Detailed View
44
<110> Wafer Detailed View
45
ThanksFor Your Attention
46
Omid Adljuy([email protected])
Faculty of Electrical and Computer Engineering
University of Tabriz, Tabriz, Iran
Dec. 2011
