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Page 1: Thermal Analysis of an Icy IC

Thermal Analysis of anIcy IC

Shiree BurtCryogenic Electronics Group

San Francisco State UniversityPresented October 2, 2006Revised October 18, 2010

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Two processes for releasing the silicon nitride membrane:

Thin PolySiRemoved by XeF2

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Without Etch Stop With Etch Stop

Confinement of XeF2 etch by SiO2 etch stop “tub”

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Membrane Undercutting

Test Structure

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