https://www.kashiyama.com/
Japan (+81)267-67-9009(+81)[email protected]
Head Office
USA
Korea
China
Contact
Kashiyama Industries, Ltd.
(+82)31-678-1500
(+86)21-3895-4599
Taiwan (+886)4-2462-9599
e-catalog SDL_JP_EN 2019.09
7.5E-04 7.5E-03 7.5E-02 7.5E-01 7.5E+00 7.5E+01 7.5E+02
1.0E+00
1.0E+01
1.0E+02
1.0E+03
1.0E+04
1.0E+05
1.0E+06
1.0E-01 1.0E+00 1.0E+01 1.0E+02 1.0E+03 1.0E+04 1.0E+05
Inlet Pressure[Torr]
Pum
ping
Spe
ed[L
/min
]
Inlet Pressure[Pa]
SDL12E60 SDL20E60
SDL36E60
S-P Curve
Major products
*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
SDL12E50/60 SDL20E60
25,000 40,000
3Phase AC200-220V, 380-480V
645 800
1020×520×1050
0.8
Spec. / Products
Max. pumping speed[L/min] *1
Ultimate pressure [Pa] *1
Supply voltage (50/60Hz)
Mass [kg]
Dimensions[mm] L×W×H
SDL36E60
60,000
920
1370×850×1295
Pumps for solvent evacuation are also lined-up
01FEATURE
Available to large size wafer & FPD
Large capacity availableby combination.Larger than 150kL/minalso available on demand.
02FEATURE
Shorter cycle-time
Large capacity aroundatm. pressure canachieve high speedpumping best for largeL/L chamber.
SeriesSeriesSDLSDL