PYJ Co.,Ltd.
Metrology system support
( KLA/Tenco, Veeco )
SEMICONDUCTOR LEADING SERVICES
PYJ Co.,Ltd.
Metrology system support
( KLA/Tenco, Veeco )
Business area
“Best Service” for Measurement & Inspection Systems Service Provide Audit, De-installation and Installation Refurbishment Spare parts & modules Part repair, retrofit & modification process
Machine Sales As Is & Working Condition
Guaranty Process Performance Service Contract Standard Wafers & Manuals
SEMICONDUCTOR LEADING SERVICES
Business area
“Best Service” for Measurement & Inspection Systems Service Provide Audit, De-installation and Installation Refurbishment Spare parts & modules Part repair, retrofit & modification process
Machine Sales As Is & Working Condition
Guaranty Process Performance Service Contract Standard Wafers & Manuals
Business area – Target business
• Installation & relocationEOS contractLabor service• Component & jig processingParts sourcing
• Used metrology Equipment :
SEMICONDUCTOR LEADING SERVICES
Parts sourcing
• Used metrology Equipment :
Support Tool List
Maker : KLA-Tencor- OP Series, TP Series
- AS200, AS500, ASIQ
- P1.2.10,11,12,15,16,20,22,240
- HPR-220,240
Maker : Veeco- DT3, DT6M, V200, V300
- D3000,5000,7000,9000
- Vx210,330,340
SEMICONDUCTOR LEADING SERVICES
Maker : KLA-Tencor- OP Series, TP Series
- AS200, AS500, ASIQ
- P1.2.10,11,12,15,16,20,22,240
- HPR-220,240
Maker : Veeco- DT3, DT6M, V200, V300
- D3000,5000,7000,9000
- Vx210,330,340
Capability – Service for KLA-Tencor
Bright Field Equipment
KLA 2138,2139 KLA 2350,2360,2365 KLA 2367
SEMICONDUCTOR LEADING SERVICES
KLA 2138,2139 KLA 2350,2360,2365
Dark Field Equipment
AIT 1 AIT 2 AIT XP AIT UV
KLA 2367
Capability – Service for KLA-Tencor
UV & F5x Series Equipment
UV1050 UV1250 & UV1280SE F5x,F5x100,F5x200,SFx200
SEMICONDUCTOR LEADING SERVICES
Resistivity Measurement Equipment
RS35 RS55 RS75TCA RS100
Capability – Service for KLA-Tencor
Surface of Metrology Equipment
AS500 & ASIQ P-10,P11,P12 P22 & HRP200,HRP220 HRP340,HRP350
SEMICONDUCTOR LEADING SERVICES
Stress measurement Equipment
FLX2320 FLX5400
Capability – Service for KLA-Tencor
Non Pattern Inspection Equipment
SP1 CLASSIC SP1 TBI
SEMICONDUCTOR LEADING SERVICES
SP1 CLASSIC SP1 TBI
Automated Optical Overlay metromogy
Archer 10
Capability – Service for Rudolph
Film Thickness Measurement Equipment(Non Metal)
FE-4 FE-7 S200
SEMICONDUCTOR LEADING SERVICES
Film Thickness Measurement Equipment(Metal)
MetaPulse200
Capability – Service for HITACHI
CD-Measurement SEM Equipment
SEMICONDUCTOR LEADING SERVICES
S4500 & S5000
S9200 & S9220Se
S8840
S9380 & S9380II
Capability – Service for AMAT
CD-Measurement SEM Equipment
S8840
SEMICONDUCTOR LEADING SERVICES
SEMVision Cx SEMVision G2
Capability – Service for AMAT
CD-Measurement SEM Equipment
S8840
OEM Application ToolFamily ToolDetails Remark
Pattern/NonPattern
ParticleInspection BrightField 21XXseries,23XXseries,&28XXseries Pattern
DarkField SFS7XXXseries,AITseries
FilmThickness FaST
PrometrixUVseries
RSseries(Resistivitymeasurement)
F5,F5x,SFx100,SFx200
SurfaceofMetrology SMD
AS500,ASIQ,Profilerseries
HRPseries
SP1Classic,SP1TBI,FLX2350,2908,5200,5400
Capability – service for KLA-Tencor,Rudolph
SEMICONDUCTOR LEADING SERVICES
KLA-Tencor Pattern/NonPattern
SurfaceofMetrology SMD SP1Classic,SP1TBI,FLX2350,2908,5200,5400
Overlay OMD Archerseries
Rudolph FilmThickness Non-metalFilm FEseries,S200 Pattern/NonPattern
MetalFilm MP200
OEM Application ToolFamily ToolDetails Remark
Pattern/NonPattern
KLA-Tencor
Overlay OMD 5XXX,5300XP
OutsourcingOnly
FilmThickness
TP OLD,5XX
500
OP 2XXX,3XXX,5XXX
Hitachi CDSEM SEM S8XXX&S9XXX
AMAT Review&CDSEM SEM VeritySEM,SEMVisionCx
Performance of 2011
Deinstallation & Audit :Area : Yokkaichi, Japan. Customer : ToshibaItems : Support 8 inch FAB Closing.Equipment Model : P-8, Fe-7, NRM1000, P-2, RS35, Verity SEM, Opti5, Compass,
FLX2418, RIGAKU3630.OEM : KLA-Tencor,Rudolph,AMATArea : SAS, USAItems : DeinstallationEquipment Model : AXI 930OEM : Rudolph company
Relocation :
SEMICONDUCTOR LEADING SERVICES
Performance of 2011
Deinstallation & Audit :Area : Yokkaichi, Japan. Customer : ToshibaItems : Support 8 inch FAB Closing.Equipment Model : P-8, Fe-7, NRM1000, P-2, RS35, Verity SEM, Opti5, Compass,
FLX2418, RIGAKU3630.OEM : KLA-Tencor,Rudolph,AMATArea : SAS, USAItems : DeinstallationEquipment Model : AXI 930OEM : Rudolph company
Relocation :Area : Iwate, Japan. Customer : ToshibaItems : RelocationEquipment Model : SEMVision Cx , SEMVision G2OEM : AMAT
Performance of 2011
Refurbishment & Installation :Area : Buchon, Korea. Customer : Fairchild KoreaItems : 8 inch FAB Project.Equipment Model :
1. Fe-7, 3EA2. SP1 Classic, 1EA3. MetaPulse 200, 1EA4. AITXP, 2EA5. P-11, 1EA6. RS75, 2EA
OEM : KLA-Tencor,Rudolph.Total : 10EA
SEMICONDUCTOR LEADING SERVICES
Performance of 2011
Refurbishment & Installation :Area : Buchon, Korea. Customer : Fairchild KoreaItems : 8 inch FAB Project.Equipment Model :
1. Fe-7, 3EA2. SP1 Classic, 1EA3. MetaPulse 200, 1EA4. AITXP, 2EA5. P-11, 1EA6. RS75, 2EA
OEM : KLA-Tencor,Rudolph.Total : 10EA
Performance of 2011
Service History :Area : Japan, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,
RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,etc.
OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.
SEMICONDUCTOR LEADING SERVICES
Performance of 2011
Service History :Area : Japan, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,
RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,etc.
OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.
Project Location Customer Remarks
De-installation&Audit Japan(Yokkaichi) T社Support8"FABclosingMachinemodel:P-8,FE-VII,NRM1000,P-2,RS35,VERITYSEM,OPTI5,COMPASS,COMPLUS,SEM-VISIONCX,S-5XXX,SFS-6420,FLX-2418,SYSTEM-3630
De-installation&Audit America(SAS)
S社 AXI930de-installation
FC8"FABProject(Refurbishment&sales)
Korea(Bucheon)
FC社 FE-VII(3ea),SP1classic(1ea),MP200(1ea),AITXP(2ea),UV1280SE(3ea),P-11(1ea)
Refurbishment&Installation Japan(Odawara)
H社 Refurbished&installatedforArcher10150mmDualOpenHandlermachine
Performance summary– 2011
SEMICONDUCTOR LEADING SERVICES
Relocation Japan(Iwate)
T社 SEMVISIONCXandG2relocation
AITXP6"Retrofit SouthKorea(Bucheon)
FC社 Retorifited8"AITXPto6"
Servicehistory
Japan(Yasu)
O社 AIT1Laserreplacement,AODreplacement,andstageissue
Korea(Sangwoo)
D社 SP1Tbiaperturereplacement
Korea(Kumi)
J社 KLA2360TDIrepair&replacement
Japan(Tokyo)
T社 UV1250opticalignment&detectorreplacement
Korea(Yongin)
S社 HRP340,HRP240,RS75,RS55,P-22,P-2,AITXP,F5X,HITACHISeries
Performance of 2012
Deinstallation & Relocation :Area : Nagasaki, Japan. Customer : SONYItems : Relocation 8 inch FAB.Equipment Model :
1. KLA2360, 1EA2. AIT2, 1EA3. AITXP, 1EA4. MP200, 1EA5. SEMVision G2, 1EA6. F5x, 2EA7. UV1280SE, 1EA8. S9260, 3EA, S9220, 1EA10. FSM128, 1EA
OEM : KLA-Tencor,Rudolph,AMAT,HITACHITotal : 13EA
SEMICONDUCTOR LEADING SERVICES
Performance of 2012
Deinstallation & Relocation :Area : Nagasaki, Japan. Customer : SONYItems : Relocation 8 inch FAB.Equipment Model :
1. KLA2360, 1EA2. AIT2, 1EA3. AITXP, 1EA4. MP200, 1EA5. SEMVision G2, 1EA6. F5x, 2EA7. UV1280SE, 1EA8. S9260, 3EA, S9220, 1EA10. FSM128, 1EA
OEM : KLA-Tencor,Rudolph,AMAT,HITACHITotal : 13EA
Performance of 2012
Sale & Retrofit, Installation :Area : Ansung , Korea. Customer : KTCItems : Sale and Retrofit(200mm to 300mm), Installation for 300mm FAB.Equipment Model : AITXP with 300mm wafer.OEM : KLA-Tencor.
Area : Buchon, Korea. Customer : Dong Bu SemiconductorItems : Sale and Installation for 200mm FAB.Equipment Model : SL200 with dual SMIF Handler.OEM : Rudolph.
Area : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit , installation for 200mm FAB.Equipment Model : Retrofit AIT1 for 1.5T wafer
Retrofit AIT1 for 4 inch, 6 inch, 8 inch wafer
SEMICONDUCTOR LEADING SERVICES
Performance of 2012
Sale & Retrofit, Installation :Area : Ansung , Korea. Customer : KTCItems : Sale and Retrofit(200mm to 300mm), Installation for 300mm FAB.Equipment Model : AITXP with 300mm wafer.OEM : KLA-Tencor.
Area : Buchon, Korea. Customer : Dong Bu SemiconductorItems : Sale and Installation for 200mm FAB.Equipment Model : SL200 with dual SMIF Handler.OEM : Rudolph.
Area : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit , installation for 200mm FAB.Equipment Model : Retrofit AIT1 for 1.5T wafer
Retrofit AIT1 for 4 inch, 6 inch, 8 inch wafer
Performance of 2012
Service History :Area : Japan, India, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,
RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10, SP1 TBI,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,S9200,etc.
OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.
SEMICONDUCTOR LEADING SERVICES
Performance of 2012
Service History :Area : Japan, India, Korea.Customer : Magnachip, Dong bu, Fairchild Korea, SAMSUNG, Toshiba, and etc.Items : Replacement of Parts, Troubleshooting, Preventative Maintenance.Equipment Model : AIT1, AITXP, SP1 CLASSIC, UV1250SE, KLA2360,HRP340, P-240,
RS35, RS55, MetaPulse 200, P-22, P-2, F5x, RS75, Archer10, SP1 TBI,SEMVision Cx, SEMVision G2,P-11, S9200,S9220S, S8840,S9200,etc.
OEM : KLA-Tencor, Rudolph, AMAT, HITACHI.
Project Location Customer
Remarks
Relocation&de-installation Japan(Nagasaki)
S社 Relocation:KLA2360,AIT2,AITXP,SEMVisionG2,F5x,MP200,UV1280SE,S9260,FSM128De-installation:S9200,S9260
Audit&Installation India(Chandigarh)
S社 Archer10200mmDulaSmifHandlerauditandinstallation
Installation Korea(Bucheon)
D社 SL200Installaiton(200mmDualSmifHandler)
Retrofit&Sale Korea(Anseong))
K社 RetrofitedandinstallatedAITXPfor12"&8"wafers
Performance summary – 2012
SEMICONDUCTOR LEADING SERVICES
Retrofit&Sale Korea(Anseong))
K社 RetrofitedandinstallatedAITXPfor12"&8"wafers
Refurb,Retrofit&Installation Korea(Yongin)
S社 RetrofitedAIT1for1.5TwaferandinstallationRetrofitedAIT1for4",6"&8"wafersandinstallation
Servicehistory
Korea(Sangwoo)
D社 SP1TbilaserreplacementAITXPLaser&robotreplacement
Korea(Bucheon)
D社 MP200Laserreplacement
Korea(Yongin)
S社 MP200Laserreplacement
Korea(Yongin)
S社 HRP340,HRP240,RS75,RS55,P-22,P-2,AITXP,AIT1,F5X,HITACHISeries
Performance of 2013 ~ Currently
Sale & Retrofit, Installation :Area : Buchon , Korea. Customer : Fairchild KoreaItems : Sale and and installation for 200mm FAB.Equipment Model :
1. UV1280SE, 1EA2. Vx330, 1EA
OEM : KLA-Tencor. VEECOArea : Ansung, Korea. Customer : KCTItems : Sale and Installation for 200mm FAB.Equipment Model :
1. P-11, 1EAOEM : KLA-TencorArea : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit ,installation for 200mm FAB.Equipment Model : AITUV, 1EA
SEMICONDUCTOR LEADING SERVICES
Performance of 2013 ~ Currently
Sale & Retrofit, Installation :Area : Buchon , Korea. Customer : Fairchild KoreaItems : Sale and and installation for 200mm FAB.Equipment Model :
1. UV1280SE, 1EA2. Vx330, 1EA
OEM : KLA-Tencor. VEECOArea : Ansung, Korea. Customer : KCTItems : Sale and Installation for 200mm FAB.Equipment Model :
1. P-11, 1EAOEM : KLA-TencorArea : Yongin, Korea. Customer : SAMSUNGItems : Sale and retrofit ,installation for 200mm FAB.Equipment Model : AITUV, 1EA
Thankyou
PYJ Co.,Ltd.
SEMICONDUCTOR LEADING SERVICES
Thankyou
PYJ Co.,Ltd.