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IMPRINT LITHOGRAPHY (UV-SCIL) Stamp / Template …
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![Soft UV Nanoimprint Lithography and Its Applications · UV-NIL, etc. Verschuuren et al. [1, 14, 18-19] proposed substrate conformal imprint lithography (SCIL), which combines the](https://img.pdfslide.us/doc/110x75/603029c202318c49852effc8/soft-uv-nanoimprint-lithography-and-its-applications-uv-nil-etc-verschuuren-et.jpg)
