Handbook of Optical Constants of Solids II
Edited by
EDWARD D. PALIK
Institute of Physical Sciences and Technology University of Maryland College Park, Maryland
ACADEMIC PRESS, INC. Harcourt Brace Jovanovich, Publishers
Boston San Diego New York London Sydney Tokyo Toronto
Contents
List of Contributors Preface
xv xix
Part I DETERMINATION OF OPTICAL CONSTANTS
Chapter 1 Introductory Remarks
EDWARD D. PALIK
r. II.
m. IV. V.
VI. VII.
Introduction The Chapters The Critiques The Tables The Figures of the Tables General Remarks Errata References
3 3 5 6 7 7 8
11
Chapter 2 Convention Confusions
R. T. HOLM
I. Introduction II. Units
III. Wave Equation IV. Polarization V. Fresnel's Amplitude Reflection Coefficients
VI. Nomenclature VII. Concluding Remarks
Acknowledgments References
21
21 22 22 26 37 50 51 52 52
Chapter 3 Methods for Determining Optical Parameters of Thin Films
E. PELLETIER
I. Introduction II. An Example of Comparison between the Different
Techniques of Index Determination III. Principle Methods of Index Determination IV. Sensitivity and Accuracy of the Determination Methods V. Overlapping and Tests of Validity of the Model
VI. Results and Conclusion References
57
57
58 60 64 67 71 71
v
VI Contents
Chapter 4 The Attenuated Total Reflection Method
G. J. SPROKEL AND J. D. SWALEN
I. Introduction II. Surface-Plasmon Oscillations
III. Optical Analysis of ATR Structures IV. Guided Modes V. Applications of ATR
VI. Conclusion References
Chapter 5 Optical Properties of Superlattices P. APELLANDO. HUNDERI
I. Introduction II. The Classical Optical Response of a Multilayer System
III. Semiconductor Superlattices IV. Amorphous Superlattices V. Collective Excitations
VI. Lattice Disorder VII. The Effect of Nonlocal Dielectric Functions
VIII. Concluding Remarks References
Chapter 6 Caiculation of the Refractive Index of Compound Semiconductors below the Band Gap
B. JENSEN
75
75 77 81 84 87 94 94
97
97 98 101 109 112 118 120 122 122
125
I. II.
III. IV.
Introduction The Quantum-Density-Matrix Formulation of the Complex Dielectric Constant Comparison with Experimental Results Summary References
125
128 138 147 148
Chapter 7 Caiculation of Optical Constants, n and k, in the Interband Region
A. R. FOROUHI AND I. BLOOMER 151
I. II.
III. IV. V.
Introduction The Extinction Coefficient, k(E), and the Refractive Index, n(E) Discussion Examples Summary References
151
154 163 166 174 175
Chapter 8 Temperature Dependence of the Complex Index of Refraction 177
MICHAEL E. THOMAS
I. Introduction 177 II. Temperature Dependence of n and k 179
VII
III. Conclusions References
199 199
Chapter 9 Measurement of n and * in the XUV by the Angle-of-Incidence Total-External-Reflectance Method
MARION L. SCOTT
203
I. II.
III. IV. V.
Chapter 10
I. iL
m. IV. V.
Chapter 11
Introduction General Considerations Aluminum Reflectance versus Angle in UHV Determination of n and k Comparison with Other Results References
Spectroscopic Ellipsometry in the 6-35 eV Region J. BARTH, R. L. JOHNSON, AND M. CARDONA
Introduction The Bessy VUV Eilipsometer Theory Results and Comparison with Reflectance Spectra Summary Acknowledgment References
Methods Based on Multiple-Slit Fourier Transform
203 204 206 207 210 212
213
213 217 226 237 244 245 245
Interferometry for Oetermining Thin-Film Optical Constants in the VUV/Soft X-Ray Range 247
ROMAN TATCHYN
I. Introduction to MSFTI 247 II. Fundamental Dimensional Constraints and Inequalities 253
III. Relationship of MSFTI to Alternative Metrological Techniques 254
IV. General Experimental Equations and Sensitivity Analysis 258 V. A Characterization of the Optical Constants of Au Using
MSFTI in the 280-640 e V Range 265 VI. Problems and Prospects in Sample Preparation 270
VII. Prospects for MSFTI in Other Spectral Regimes 272 VIII. Summary 273
Acknowledgments 274 References 274
Chapter 12 Determination of Optical Constants from Angular-Dependent, Photoelectric-Yield Measurements 279
H.-G. BIRKEN, C. BLESSING, AND C. KUNZ
I. Introduction 279 II. Theoretical Background 280
III. Experimental Details 285
V I I I Contents
IV. Examples V. Conclusions and Future Prospects
References
Chapter 13 Determination of Optical Constants by High-Energy, Electron-Energy-Loss Spectroscopy (EELS)
J. PFLÜGER AND J. FINK
I. Introduction II. Description of an EELS Experiment
III. Scattering Cross-Section IV. Exact Determination of the Loss Function V. Kramers-Kronig Analysis
VI. Brief Summary of the Evaluation Procedure VII. Comparison with Reflectivity Measurements
VIII. Optical Properties of TiC, VC, TiN, and VN References
Chapter 14 Optical Parameters for the Materials in HOC I and HOCH
EDWARD D. PALIK
I. Introduction II. The Parameters
References
286 289 292
293
293 295 297 298 299 300 300 303 310
313
313 313 334
Part II CRITIQUES
Subpart 1 Metals
An Introduction to the Data for Several Metals
DAVID W. LYNCH AND W. R. HUNTER
I. Introduction References
II. Alkali Metals References
III. Lithium (Li) References
IV. Sodium (Na) References
V. Potassium (K) References
VI. Chromium (Cr) References
VII. Iron (Fe) References
VIII. Niobium (Nb) References
IX. Tantalum (Ta) References
341
341 341 342 344 345 347 354 357 364 367 374 376 385 387 396 397 408 409
Contents IX
Beryllium (Be)
E. T . A R A K A W A , T. A. CALLCOTT, A N D Y U N - C H I N G C H A N G 421
References 425
Cobalt (Co) 435
L. W A R D
References 440
Graphite (C) 449
A. BORGHESI A N D G. GUIZZETTI
References 453
Liquid Mercury (Hg) 461
E. T. A R A K A W A A N D T. INAGAKI
References 465
Palladium (Pd) 469
A. BORGHESI A N D A. PIAGGI
References 472
Vanadium (V) 477
G. GUIZZETTI A N D A. PIAGGI
References 480
Subpart 2 Semiconductors
Aluminum Arsenide (AlAs) 489
E D W A R D D. PALIK, O. J . GLEMBOCKI , A N D KENICHI TAKARABE
Acknowledgments 492 References 492
Aluminum Antimonide (AlSb) 501
DAVID F. E D W A R D S A N D RICHARD H. W H I T E
References 505
Aluminum Gallium Arsenide (AüSa, ^As) 513
O. J . GLEMBOCKI A N D K. TAKARABE
Acknowledgments References
515 515
Contents
Cadmium Selenide (CdSe) 559
H. PILLER
References 563
Cadmium Sulphide (CdS) 579
L. WARD
References 586
Gallium Antimonide (GaSb) 597
DAVID F. EDWARDS AND RICHARD H. WHITE
References 601
Silicon-Germanium Alloys (SUGe,-*) 607
J. HUMLICEK, F. LUKES, AND E. SCHMIDT
References 611
Lead Tin Telluride (PbSnTe) 637
H. PILLER
References 639
Mercury Cadmium Telluride (Hg,_,CdJe) 655
P. M. AMIRTHARAJ
Acknowledgments 666 References 667
Selenium (Se) 691
EDWARD D. PALIK
Acknowledgments 693 References 694
Cubic Silicon Carbide (ß-SiC) 705
SAMUEL A. ALTEROVITZ AND JOHN A. WOOLLAM
References 706
Tellurium (Te) 709
EDWARD D. PALIK
Acknowledgments 713 References 713
Tin Telluride (SnTe) 725
H. PILLER
References 727
Contents
Zinc Selenide (ZnSe) Zinc Telluride (ZnTe) 737
L. WARD
References 747
Subpart 3 Insulators
Aluminum Oxide (Al203) 761 FRANQOIS GERVAIS
References 764
Aluminum Oxynitride (ALON) Spinel 777
WILLIAM J. TROPF AND MICHAEL E. THOMAS
References 780 Notes Added in Proof 781
Barium Titanate (BaTi03) 789
CHUEN WONG, YE YUNG TENG, J. ASHOK, AND P. L. H. VARAPRASAD
Acknowledgments 793 References 793
Beryllium Oxide (BeO) sos
DAVID F. EDWARDS AND RICHARD H. WHITE
References 807
Calcium Fluoride (CaF2) 815
D. F. BEZUIDENHOUT
References 825
Amorphous Hydrogenated "Diamondlike" Carbon Films and Arc-Evaporated Carbon Films 837
SAMUEL A. ALTEROVITZ, N. SAVVIDES, F. W. SMITH, AND JOHN A. WOOLLAM
References 840
Cesium lodide (Csl) 853
JOHN E. ELDRIDGE
References 857
Copper Oxides (CiijO, CuO) 875
CARL G. RIBBING AND ARNE ROOS
References 878
XII Contents
Magnesium Aluminium Spinel (MgAljOJ 883
WILLIAM J . TROPF AND MICHAEL E. THOMAS
References 887
Magnesium Fluoride (MgF2) 899
THOMAS M. COTTER, MICHAEL E. THOMAS, AND WILLIAM J . TROPF
References 903
Magnesium Oxide (MgO) 919
DAVID M. ROESSLER AND DONALD R. HUFFMAN
Acknowledgments 939 References 939
Polyethylene [CJUX 957
J. ASHOK, P. L H. VARAPRASAD, AND J . R. BIRCH
References 968
Potassium Bromide (KBr) 989
EDWARD D. PALIK
References 992
Potassium Dihydrogen Phosphate (KH2P0„ KDP) and Three of Its Isomorphs IOOS
DAVID F. EDWARDS AND RICHARD H. WHITE
References 1008
Sodium Fluoride (NaF) 1021
I. OHÜDAL AND K. NAVRÄTIL
References 1024
Strontium Titanate (SrTi03) 1035
FRANCOIS GERVAIS
References 1037
Thorium Fluoride (ThF,) 1049
I. OHLiDAL AND K. NAVRÄTIL
References 1054
Contents xiii
Water (H20) 1059
MARTIN R. QUERRY, DAVID M. WIELICZKA, AND DAVID J . SEGELSTEIN
References 1063
Yttrium Oxide (Y203) 1079
WILLIAM J . TROPF AND MICHAEL E. THOMAS
References 1084 Notes Added in Proof 1086
X