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The instrument shown on the left is a multipurpose 4-axis X-ray diffractometer system. This instrument was manufactured to observe on-the-spot proteins grown in a gravity-free state and a samples grown in an electric furnace. For X-rays generated by an X-ray generator, energy resolution can be increased by means of a double/quadruple crystal monochromator. Also the sample goniometer stage can be changed by removing the stage depending on the measurement mode: protein measurement or on-the-spot observation. Also the mode can be switched between one-time reflection and three-time reflection before the analyzer crystal.This instrument is now in service at the National Aeronautics and Space Administration (NASA).
Multipurpose X-Ray Diffractometer System For Laboratory Use
Inside of monochorometor
Multipurpose X-ray diffractometer
Detection analyzer unit
The instrument shown on the left is a κ goniometer type X-ray diffractometer. For the sample goniometer, a rotation stage like an χ circle is not used, and rotation stages tilted by 45° are combined and mounted. Since there is no object that cuts off the X-rays, such as an χφ circle, the degree of freedom for the angle of diffraction can be wide. For the θ-2θ axes, a direct-coupling rotary encoder is used. The rotation center displacement of the three axes can be reduced to 10μm. This instrument is now in service at the Production Engineering Laboratory of HITACHI CO., Ltd.
κ Goniometer Type X-Ray Diffractometer
This instrument is now in service at the 6G port of JRR-3M of the Japan Atomic Energy Agency and consists of a monochromator, goniometer for sample positioning, analyzer shield, and neutron detector inside a green shield. The overall instrument is controlled by an external computer. (Example of integration)
2.Neutron Diffraction Experiment InstrumentsNeutron scattering experiments are used for researching physical properties and structural analysis by using the characteristics of thermal neutrons extracted from an atomic reactor. We supply many diffractometers and positioning mechanisms to the Japan Atomic Energy Agency and High Energy Accelerator Research Organization.
Custom-Made Products / Scientific Research Instruments
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This instrument is a focusing type monochromator for polarized neutrons. For high-intensity and monochrome polarized neutrons, a Cu2MnAl Heusler crystal is placed in a strong magnetic field of a samarium-cobalt magnet (Co5Sm) and a worm shaft and worm wheel is used to tilt the crystal symmetrically at a ratio of 1:2:3 with respect to the center so that focusing can be obtained by deflecting the horizontal light in a cylindrical shape.
This instrument is a focusing type neutron analyzer. PG is used as the analyzer crystal. Like the neutron monochromator described above, the crystal is tilted symmetrically at a ratio of 1:2:3:4 with respect to the center so that focusing can be obtained by deflecting the overall light in a cylindrical shape.
2.1 Monochromator
A neutron monochromator extracts neutrons with the energy required for an experiment from a neutron source in a wide energy range emitted from an atomic reactor. Pyrolytic Graphite (PG) is frequently used for extracting unpolarized neutrons and a Cu2MnAl Heusler crystal is used for extracting polarized neutrons.
2.2 Analyzers
A neutron analyzer extracts neutrons to be examined from neutrons with energy that are emitted from a sample. The principle is the same as the neutron monochromator.
This instrument consists of an XY translation stage for positioning the sample at the rotation center, and Rx and Ry tilt stages for adjusting the diffraction plane to a horizontal plane.A cryostat for high-load specification designs can also be mounted.
This instrument is a goniometer for positioning a superconducting magnet that generates a strong magnetic field.For mounting a superconducting magnet, the stage is made of nonmagnetic material and the motors are covered with silicon steel plates. The instrument is designed to withstand loads of up to 300 kg.
2.3 Heavy-Duty Goniometer
Neutron diffraction experiments are performed under various extreme conditions. Since a sample is placed in a strong magnetic field, at an extremely low temperature, and under a high pressure, the sample goniometer itself must also withstand the load and conditions. We have developed and supplied many heavy-duty goniometers.
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Custom-Made Products / Industrial Automation Instruments VKM-12 / VKM-26
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Six-Axis Manipulator VKM-12This instrument is a six-axis manipulator for adjusting positions at submicron precision when joining to a prism three LCD or CCD devices that are essential for manufacturing three-color LCD projectors or three-color CCD cameras.Adjustment is performed to maintain the performance of each single axis as well as the optimum precision and rigidity in the assembled state of the six axes, Since displacement caused by curing when UV bonding or soldering is performed is minimum and reproducibility is very high, high reliability is obtained even in mass production conditions.
Axis
X
Y
Z
θx
θy
θz
Model Number
XA16A-R1
SA07A-RT
SA07A-RM
RA10-05-1D
Motion Range
±25mm
±10°
Maximum Speed
10mm / sec
7.65° / sec
6° / sec
2° / sec
Resolution
0.05μm
(Micro-step 40 division)
SA07A-RT
SA07A-RM
RA10-05-1D
θyAxis SA07A-RM
θxAxis SA07A-RT
Rotation Center
For M6 tap screw × 6
θzAxis RA10-05-1D
YAxis XA16A-R1XAxis XA16A-R1ZAxis XA16A-R1
10 10180200
377 290 240230
105 10510
70
10
210
450
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Three-Color LCD Panel Pasting Unit VKM-26This system attaches three channel RGB LCD panels to an optical block using three six-axis manipulators.A test pattern for adjustment that is projected on the screen is captured by five CCD color cameras (four near the perimeter, one at the center), and the image is loaded into the frame memory inside the image processing unit. Image processing calculations are performed by the CPU for each camera and the positions of the LCD panels are automatically adjusted. Then the LCD panels are adhered to the optical block by UV bonding by means of a UV irradiator.
Manipulator Mechanism Unit
■Specifications
Appearance of Instruments
Panel Size
Irradiation Method
Bonding Method
Detection Accuracy
Detection Method
Adjustment Time
Lens Method
Panel Chuck
other
From 0.55 inch (Actual Showing at March,2004)
Transmissive type or reflection type
UV bonding or soldered joint
Registration : 1/20~1/50 picture element degree
Focus : ≦10μm
Note : Depend on the User's condition, tact et al.
Image processing method (Five point in total : Four point in corner and one point in center)
About two minutes (exclusive of bonding time)
Note : Depend on the User's condition, accuracy et al.
Master lens method or product lens method
Manual or motorized
That is designed in optimal method by panel shape
Each parameters can be set freely by user which includes bonding time,
adjustment accuracy, field angle adjustment factor, offset adjustment factor et al.
Inspection of complete product and that of data processing. Data transfer function
to host-computer.
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Custom-Made Products / Industrial Automation Instruments PMA-3 / TKI
Custom-M
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Polygon Mirror Apex Angle Measurement StageThis positioning stage measures the apex angle of a polygon mirror. Although manual operation is required, this stage features a sensitive θ stage with rotation angle of 1 second or less.
●A two-axis oblique stage is used to compensate the plane tilt.●A rotation stage, including a high-precision 1-arcsec reading rotary encoder, allows precise measurement of the vertical angle.●Use of a coarse adjustment rotation mechanism and a fine adjustment mechanism (fine pitch positioner) enables smooth rotational movement in a narrow to a wide angle range.
Load Stiffness・Weight・A 1-arcsec reading counter is provided・Optional BCD output is possible
Model Number of Axis
ST07A-S3T
ST07A-S3M
RM16A-B1-1B
Coarse Motion Range
±3°
±3°
360°
Fine Motion Range
±0.1°
±0.08°
±0.1°
Minimum Readout
1.26″ (Scale)
0.97″ (Scale)
1.15″ (Scale)
1″ (Counter)
4-F4-E
A
4-D rotation center
□15
0
4-Z
70
240
ST07A-S3T
ST07A-S3M
Fine Pitch Positioner(FPP3-13)
Rotary encoder
RM16A-B1-1B
A φ 5H7Size Depth
□ 40 M3□ 60 M3
□ 30 M3DEFZ For M5 cap screw
7666
□16
0
□17
0
315CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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Heavy-Duty GoniometerThis goniometer allows alignment of a sample using the same rotation center. stainless steel is used as main material and our original fitting technology is used to achieve high rigidity. In the specifications shown in the photo, there are two operating axes: swivel (goniometer) and θ. The XY axes can be added as required.
Table Size
Actuator
Motion Range
Guide Mechanism
Reduction Ratio
Material
Load Capacity
Swivel Stage
130mm×130mm
Dove-tail slide
1° / One revolution of Handle Wheel
θStage
φ160mm
Bearing Guides
2° / One revolution of Handle Wheel
±5°
Worm shaft & Worm wheel
Brass, Stainless Steel
50kg
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Custom-Made Products / Industrial Automation Instruments KZ400 / 600, RSY-150 / 300
Custom-M
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XYθ Stage For Multipurpose Three-Dimensional Measurement KZ400 / KZ600 Series The KZ series is a multipurpose XYθ stage for shape measurement, image observation, and image processing. The system can be configured with an optional SC-200 motor controller, portal frame, and vibration isolation table.Also an XY stage can be selected from two types: stroke 200 mm (KZ-400) and 300 mm (KZ-600).
System Components of Mechanical Unit
Motorized XY
Linear Stage
Manual θStage
Motion Range
Maximum Speed
Ideal Resolution
Repeatability
Motion Range
Weight of XYθ Stage
KZ-600
300mm
±3°
100kg
40mm / sec
4μm / step (Half-step)
±2μm
KZ-400
200mm
±5°
50kg
317CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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Layer Profiling System VertScan○R
The VertScan○R layer profiling system performs layer structural analysis by generating tomographic images of a specified cutting location from optical microscope images that are obtained by moving sequentially in the vertical direction.
■Specifications of Stage
Super depth measurementA Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays.
Very weak interference fringe patterns can be capturedSince our original VSI interference image creation software enables image creation from very weak interference fringe patterns that cannot be visually recognized, foreign particle locations in multilayer film can be identified.
100 magnification interference is achievedA Ryoka Linnik interference objective lens allows easy adjustment and observation for 100 magnification interference figures for which alignment and adjustment have been difficult.
NSIMAGIK compatible systemNSIMAGIK specifications common to various image creation systems and image processing systems are fully supported. The required NSIMAGIK software can be freely selected, and future expansion of functions is possible.
Features
Development and Distribution : Ryoka Systems Inc.
Item
Compressed Air
Power Saurce
Clean Room Response
Stage Unit Size
Stage Unit Weight
Control Rack Unit Size
Control Rack Unit Weight
X-Y Stage
X Valid Stroke
Y Valid Stroke
Maximum Speed
Actuator
Stage Resolution
Repeatability
Z axis
Valid Stroke
Actuator
Z Axis Resolution
Jog-Dial
Joy-Stick
RSY-300
1200 (W) ×800 (D) ×1500 (H)
About 300kg
5700 (W) ×750 (D) ×1850 (H)
±150mm
±150mm
RSY-150
600 (W) ×500 (D) ×1400 (H)
About 200kg
570 (W) ×750 (D) ×1850 (H)
±75mm
±75mm
≧ 0.5Mpa
Tube : Internal diameter 4mm, External diameter 6mm
Single-phase 100V 4KVA
Response to Class 1000
About 180kg
10mm / sec
Ball screw, Open-loop control
1μm / step
±1μm
±50mm
Grand screw, Open-loop control
1μm / step (Half-step)
100μm / Revolution
Hi-speed setting : 8000pps, Low-speed setting : 200pps
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Custom-Made Products / Industrial Automation Instruments Various Components
Custom-M
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Heavy-Duty Goniometer (MAX-G)The MAX-G series of heavy-duty goniometers comprises components with large X-ray diffractometers. Since the MAX-G series supports both horizontal and vertical orientation, various types of equipment can be easily configured. Also an optional encoder can be mounted, and our SC series controllers can be used together for feedback control.
RDM-10 large surface diffractometer (SPring-8 BL13XU)A prototype of the MAX-G series is used for the ω axis of this diffractometer.
Custom NASA Diffractometer NZD-1 Custom SPring-8 Diffractometer NZD-2
319CONTACT TEL:+81-44-981-2131 FAX:+81-44-981-2181 [E-mail] [email protected] [URL] www.kohzu.com
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■Specifications
■Electrical Specifications
MAX-G-800*
φ800mm (φ400) **
204mm**
15" / 360°, 1" / 1°**
0.002°**
2"**
5"**
5μm**
15μrad**
10° / sec**
5t**
MAX-G-400
φ400mm (φ230)
145mm
15" / 360°, 1" / 1°
0.002°
2" (1.4")
5" (1"***)
5μm (2μm)
30μrad (15μrad)
10° / sec
2t
MAX-G-600
φ600mm (φ350)
172mm
15" / 360°, 1" / 1°
0.002°
2" (1.4")
5" (1"***)
5μm (3μm)
20μrad (5μrad)
10° / sec
5t
Model Number
Diameter (Internal Diameter)
Height Size
Accuracy
Resolution (Full-Step)
Repeatability (Measurement Value)
Backlash (Measured Value)
Eccentricity (Measured Value)
wobble Out (Measured Value)
Maximum Speed (Full-Step)
Load Stiffness (Horizontally)
PK599-A
SS-5GL2
PM-U24
PM-R24
NJC24 24-RM
NJC20 10-RM
Motor
Limit Switch
Origin Sensor
Near Origin Sensor
Connector (For Motor)
Connector (For Encoder)
* The MAX-G-800 specifications are under review.** These are target values.*** The backlash value is obtained when an SC controller is used.
Note : Specifications and dimensions are subject to change without prior notice.
Note : Various inspection and measurement methods are used for the specifications of the MAX-G series. These
methods are different from those described in the inspection system (P. 293 - 301). Please contact us for details.